CN1936571A - Double-sound-channel surface acoustic wave device for gas sensor - Google Patents
Double-sound-channel surface acoustic wave device for gas sensor Download PDFInfo
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- CN1936571A CN1936571A CN 200610104726 CN200610104726A CN1936571A CN 1936571 A CN1936571 A CN 1936571A CN 200610104726 CN200610104726 CN 200610104726 CN 200610104726 A CN200610104726 A CN 200610104726A CN 1936571 A CN1936571 A CN 1936571A
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Abstract
This invention discloses the dual-path surface wave device for gas sensors, including two entire-transfer multi-coupler and two output transducers placed on each side of the input transducer symmetrically. The width between the multi-coupler and output transducers is 1 micron to 5 centimeters. The length of multi-coupler is the sum of the greatest acoustic diameter of output transducer and input transducer, and the top of entire transfer coupler and the top of the greatest acoustic transducer input aperture are alignment, so are the bottom. The invention can be used to eliminate the effect to the acoustic surface wave signal resulted from the crystal substrate because of the variation of temperature and humidity condition in measuring course.
Description
Technical field
The present invention relates to a kind of SAW (Surface Acoustic Wave) device that is used for gas sensor, particularly a kind of double-sound-channel surface acoustic wave device that is used for gas sensor.
Background technology
Outstanding feature of SAW (Surface Acoustic Wave) device is that surface acoustic wave is when plane of crystal is propagated, energy mainly concentrates in wavelength coverage of plane of crystal, so be easy to be subjected to the influence of external condition, cause the variation of the surface acoustic wave of propagating at plane of crystal, and then cause the frequency of SAW (Surface Acoustic Wave) device own, loss and the isoparametric change of phase place.So, can pass through usually, thereby realization is to the indirect measurement of some physics, chemical characteristic to the frequency of device own, loss and the isoparametric measurement of phase place.In addition; since have characteristics such as volume is little, in light weight make SAW (Surface Acoustic Wave) device sensor field have other sensor incomparable advantage; particularly it also provides good technical condition and development prospect for surface acoustic wave sensor towards low-cost, large-scale production based on the continuous development of photoetching and microelectronic technique manufacturing technology.When using as gas sensor with SAW (Surface Acoustic Wave) device, because the interdigital transducer in the device is when exciting surface acoustic wave, also can excite a kind of bulk acoustic wave signal that surface acoustic wave characteristics of signals in measuring is disturbed, in addition, the substrate material itself of making device also can directly have influence on the accuracy of surface acoustic wave signal in the measurement to the change of conditions such as temperature, humidity in the measurement environment on every side, so, how to eliminate or weaken of the influence of these factors, just become problem of being concerned about very much of numerous scientific and technical personnel thereby improve the accuracy of measuring to measuring.
In order to solve the substrate material of making device since the change of conditions such as temperature, humidity to the influence of measuring-signal, the acoustic current surface wave sensor adopts two delay-line structures (to see A.Bryant, D.L.Leeand J.F.Vetelino.A surface acoustic wave gas detector.ULTRASONICSSYMPOSIUM, 1981,171-174).Its principle of work is to make two SAW (Surface Acoustic Wave) delay line on same substrate, and coating has the optional membrane to the specific gas sensitivity on a lag line, and another lag line as a reference, do not apply any material, like this by measuring the difference between the output signal on two lag lines, eliminate substrate material since the change of conditions such as temperature, humidity to the influence of surface acoustic wave signal in measuring.Though this device to substrate material because the change of conditions such as temperature, humidity has certain elimination to the influence that surface acoustic wave signal in measuring causes, to bulk acoustic wave without any inhibiting effect, so bulk acoustic wave still has interference effect to measuring-signal.
Summary of the invention
The purpose of this invention is to provide a kind of double-sound-channel surface acoustic wave device that is used for gas sensor, this device can suppress the interference of bulk acoustic wave signal to the surface acoustic wave signal, and can eliminate substrate material since the change of conditions such as temperature, humidity to the influence of surface acoustic wave signal in measuring, thereby improved the accuracy of measurement of gas sensor.
Technical scheme of the present invention is achieved in that
Present invention resides in and make an input transducer, two total transfer multistrip couplers, two output transducers on the same substrate material, two total transfer multistrip couplers and two output transducers are symmetricly set on the left and right sides of importing transducer respectively, be the zone between total transfer multistrip coupler and the output transducer, distance is 1 micron to 5 centimetres between total transfer multistrip coupler and the output transducer.
The length of described total transfer multistrip coupler equals to import the maximum sound aperture length sum of the maximum sound aperture and the output transducer of transducer, and aliging with the maximum sound aperture upper end of input transducer in the upper end of total transfer multistrip coupler, aligns with the maximum sound aperture lower end of output transducer in the lower end of total transfer multistrip coupler.
A described zone is therein gone up and is made the selective gas sensitive membrane, and the place sound travel is as the measurement sound travel of sensor; Do not make sensitive membrane on another zone, the place sound travel is as the reference sound travel of sensor.
Described substrate material is a piezoelectric crystal.
Described input transducer and output transducer be etc. interdigital, etc. cycle transducer or apodization transducer.
The double-sound-channel surface acoustic wave device that is used for gas sensor among the present invention, because will have the total transfer multistrip coupler of bulk acoustic wave separation function is applied in the SAW (Surface Acoustic Wave) device, and to the input transducer simultaneously to the left and right the surface acoustic wave signal that excites of both direction receive respectively, so compare with the double-sound-channel surface acoustic wave device that is used for gas sensor in the background technology, the present invention not only can suppress the interference of bulk acoustic wave signal to the surface acoustic wave signal, and can eliminate substrate material because temperature, the change of conditions such as humidity is to the influence of surface acoustic wave signal in measuring, thereby effectively improved the accuracy of measurement of gas sensor.
Description of drawings
Fig. 1 is the block scheme that is used for the double-sound-channel surface acoustic wave device structure of gas sensor among the present invention.
Fig. 2 is that the double-sound-channel surface acoustic wave device among the present invention is used for SO
2The specific embodiment of gas sensor.
Fig. 3 is that the double-sound-channel surface acoustic wave device among the present invention is used for H
2The specific embodiment of S gas sensor.
Below in conjunction with accompanying drawing content of the present invention is described in further detail.
Embodiment
With reference to shown in Figure 1, same substrate material 5 is provided with input transducer 1, the left and right sides of input transducer 1 is symmetrical arranged total transfer multistrip coupler 2, output transducer 4 respectively, be zone 3 between total transfer multistrip coupler 2 and the output transducer 4, distance is 1 micron to 5 centimetres between total transfer multistrip coupler 2 and the output transducer 4.
Described input transducer 1 and output transducer 4 be etc. interdigital, etc. cycle transducer or apodization transducer.
The double-sound-channel surface acoustic wave device that is used for gas sensor among the figure is the surface acoustic wave both direction output to the left and right simultaneously that utilizes the input transducer to excite, reach the total transfer multistrip coupler and the surface acoustic wave signal of going up in the sound travel can be transferred to down sound travel output fully, but do not change the principle of the bulk acoustic wave direction of propagation in the former sound travel.On same substrate 5, the total transfer multistrip coupler 2 of two design parameter unanimities is placed on the input transducer 1 output sound travel about input transducer 1 left and right symmetrically, bulk acoustic wave signal in the sound travel on the total transfer multistrip coupler 2 is separated with the surface acoustic wave signal, and the surface acoustic wave signal is transferred to down sound travel export, the length of total transfer multistrip coupler 2 equals to import the maximum sound aperture length sum of the maximum sound aperture and the output transducer 4 of transducer 1, and aliging with the maximum sound aperture upper end of input transducer 1 in the upper end of total transfer multistrip coupler 2, aligns with the maximum sound aperture lower end of output transducer 4 in the lower end of total transfer multistrip coupler 2.Two output transducers 4 with same design parameter are placed in the following output sound travel of two total transfer multistrip couplers 2 about input transducer 1 left and right symmetrically, be used for receiving respectively the output surface acoustic wave signal of two total transfer multistrip couplers 2, distance between total transfer multistrip coupler 2 and the output transducer 4 is selected between the 5cm at 1um, and concrete distance size is by requiring the size in zone 3 to decide in the design.This is used for the SAW (Surface Acoustic Wave) device of sensor like this, just form two sound travels in the left and right sides of input transducer, the measurement sound travel that wherein any sound travel can both be used for gas sensor uses, if one the measurement sound travel as sensor uses, another then can use as the reference sound travel.Therefore, the SAW (Surface Acoustic Wave) device that is used for gas sensor in this device and the background technology is compared and not only can be used for eliminating the crystal substrates material because the change of conditions such as temperature, humidity to measuring the influence of surface acoustic wave signal, but also can suppress the influence of bulk acoustic wave to measuring-signal.
With reference to shown in Figure 2, it is at same LiNbO
3Make on the substrate 5 and comprise an input transducer that becomes mark 1, two total transfer multistrip couplers 2, two etc. interdigital, etc. the output transducer 4 in cycle, the length of total transfer multistrip coupler 2 equals to import the maximum sound aperture length sum of the maximum sound aperture and the output transducer 4 of transducer 1, and aliging with the maximum sound aperture upper end of input transducer 1 in the upper end of total transfer multistrip coupler 2, aligns with the maximum sound aperture lower end of output transducer 4 in the lower end of total transfer multistrip coupler 2.Two identical output transducer 4 left and right symmetricallies of parameter are placed on respectively on the output sound travel of two total transfer multistrip couplers 2, and and distance is 5.2 millimeters between the total transfer multistrip coupler 2, is used to receive the surface acoustic wave signal that total transfer multistrip coupler 2 shifts.Make width on the zone 3 between output transducer 4 and the total transfer multistrip coupler 2 therein and equate that with output transducer 7 sound apertures length is 5 millimeters triethanolamine sensitive membrane; Like this, the SAW (Surface Acoustic Wave) device among Fig. 2 just forms the measurement sound travel of sensor in a side of input transducer 1, forms the reference sound travel of sensor at the opposite side of input transducer 1.Simultaneously, since second area 3 in the triethanolamine sensitive membrane to SO
2Gas has absorption and sensitization, so thereby this double-sound-channel surface acoustic wave device can be used in---in order to suppress bulk acoustic wave and to solve the SO that influences surface acoustic wave measuring-signal purpose owing to the change of conditions such as temperature, humidity in the measurement environment
2In the gas sensor.
With reference to shown in Figure 3, be that the double-sound-channel surface acoustic wave device among the present invention is used for H
2A specific embodiment of S gas sensor.It is at same LiNbO
3Make on the substrate 5 comprise one etc. interdigital, etc. the cycle input transducer 1, two total transfer multistrip couplers 2, two become mark output transducer 4.The length of total transfer multistrip coupler 2 equals to import the maximum sound aperture length sum of the maximum sound aperture and the output transducer 4 of transducer 1, and aliging with the maximum sound aperture upper end of input transducer 1 in the upper end of total transfer multistrip coupler 2, aligns with the maximum sound aperture lower end of output transducer 4 in the lower end of total transfer multistrip coupler 2.Two identical output transducer 4 left and right symmetricallies of parameter are placed on respectively on the output sound travel of two total transfer multistrip couplers 2, and and distance is 6.2 millimeters between the total transfer multistrip coupler 2, is used to receive the surface acoustic wave signal that total transfer multistrip coupler 2 shifts.Make width on the zone 3 between output transducer 4 and the total transfer multistrip coupler 2 therein and equate that with output transducer 4 maximum sound apertures length is 6 millimeters tungstic acid sensitive membrane; SAW (Surface Acoustic Wave) device just forms the measurement sound travel of sensor in a side of input transducer 1, form the reference sound travel of sensor at the opposite side of input transducer 1.Simultaneously, since the tungstic acid sensitive membrane of zone in 3 to H
2S gas has absorption and sensitization, so thereby this double-sound-channel surface acoustic wave device can be used in---in order to suppress bulk acoustic wave and to solve the H that influences surface acoustic wave measuring-signal purpose owing to the change of conditions such as temperature, humidity in the measurement environment
2In the S gas sensor.
Claims (5)
1, a kind of double-sound-channel surface acoustic wave device that is used for gas sensor, be included in same substrate material (5) and go up a making input transducer (1), two total transfer multistrip couplers (2), two output transducers (4), it is characterized in that, two total transfer multistrip couplers (2) and two output transducers (4) are symmetricly set on the left and right sides of input transducer (1) respectively, be zone (3) between total transfer multistrip coupler (2) and the output transducer (4), distance is 1 micron to 5 centimetres between total transfer multistrip coupler (2) and the output transducer (4).
2, the double-sound-channel surface acoustic wave device that is used for gas sensor according to claim 1, the length that it is characterized in that total transfer multistrip coupler (2) equals to import the maximum sound aperture length sum of the maximum sound aperture and the output transducer (4) of transducer (1), and aliging with the maximum sound aperture upper end of input transducer (1) in the upper end of total transfer multistrip coupler (2), aligns with the maximum sound aperture lower end of output transducer (4) in the lower end of total transfer multistrip coupler (2).
3, the double-sound-channel surface acoustic wave device that is used for gas sensor according to claim 1 is characterized in that, a zone (3) are gone up and made the selective gas sensitive membrane therein, and the place sound travel is as the measurement sound travel of sensor; Another zone does not make sensitive membrane on (3), and the place sound travel is as the reference sound travel of sensor.
4, the double-sound-channel surface acoustic wave device that is used for gas sensor according to claim 1 is characterized in that, substrate material (5) is a piezoelectric crystal.
5, the double-sound-channel surface acoustic wave device that is used for gas sensor according to claim 1 is characterized in that, input transducer (1) and output transducer (4) be etc. interdigital, etc. cycle transducer or apodization transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200610104726A CN100582769C (en) | 2006-10-13 | 2006-10-13 | Double-sound-channel surface acoustic wave device for gas sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN200610104726A CN100582769C (en) | 2006-10-13 | 2006-10-13 | Double-sound-channel surface acoustic wave device for gas sensor |
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| Publication Number | Publication Date |
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| CN1936571A true CN1936571A (en) | 2007-03-28 |
| CN100582769C CN100582769C (en) | 2010-01-20 |
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| CN200610104726A Expired - Fee Related CN100582769C (en) | 2006-10-13 | 2006-10-13 | Double-sound-channel surface acoustic wave device for gas sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102393271A (en) * | 2011-11-09 | 2012-03-28 | 东华大学 | Surface acoustic wave pressure sensor based on multiple couplers |
| CN105445366A (en) * | 2015-10-30 | 2016-03-30 | 中国人民解放军理工大学气象海洋学院 | Duplex surface acoustic wave device-based compensation dew-point sensor |
| CN106248786A (en) * | 2016-07-08 | 2016-12-21 | 中国电力科学研究院 | Gases Dissolved in Transformer Oil based on surface acoustic wave techniques detection device and method |
-
2006
- 2006-10-13 CN CN200610104726A patent/CN100582769C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102393271A (en) * | 2011-11-09 | 2012-03-28 | 东华大学 | Surface acoustic wave pressure sensor based on multiple couplers |
| CN105445366A (en) * | 2015-10-30 | 2016-03-30 | 中国人民解放军理工大学气象海洋学院 | Duplex surface acoustic wave device-based compensation dew-point sensor |
| CN105445366B (en) * | 2015-10-30 | 2018-08-17 | 中国人民解放军理工大学气象海洋学院 | Dew point transducer based on two-way SAW device offset-type |
| CN106248786A (en) * | 2016-07-08 | 2016-12-21 | 中国电力科学研究院 | Gases Dissolved in Transformer Oil based on surface acoustic wave techniques detection device and method |
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| Publication number | Publication date |
|---|---|
| CN100582769C (en) | 2010-01-20 |
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