Summary of the invention:
The objective of the invention is to overcome above-mentioned deficiency, provide that Ji Dao is lower than electronic component plane button ultra-thin packed substrate of pin height and preparation method thereof on a kind of substrate.
The object of the present invention is achieved like this: a kind of electronic component plane button ultra-thin packed substrate, comprise Ji Dao and pin, it is characterized in that pin is convex dot shape and is distributed in substrate front side, have thin metal layer to link between salient point and the salient point, Ji Dao is lower than the pin plane distribution of convex dot shape in substrate front side; In the single electronic devices and components packaging body that forms in follow-up when encapsulation, the quantity of Ji Dao has one or more, and pin arrangements is in the side of Ji Dao, or is arranged in both sides or three sides of Ji Dao, or be trapped among Ji Dao around form the structure of a circle or multi-turn pin.
Electronic component plane button ultra-thin packed substrate of the present invention, the front of described pin is provided with metal level.
Electronic component plane button ultra-thin packed substrate of the present invention, the two front of described pin and Ji Dao is or/and the back side is provided with metal level.Metal level on the Ji Dao is arranged on the part salient point or all salient points of unit Ji Dao.
Electronic component plane button ultra-thin packed substrate of the present invention, described pin just, the back side of the back of the body two sides and Ji Dao is provided with metal level.
Electronic component plane button ultra-thin packed substrate of the present invention, the front of described pin is provided with the activating substance layer, is provided with metal level on the activating substance layer.
Electronic component plane button ultra-thin packed substrate of the present invention, the two front of described pin and Ji Dao is provided with metal level or/and the back side is provided with activating substance on activating substance.
Electronic component plane button ultra-thin packed substrate of the present invention, described pin just, the back side of the back of the body two sides and Ji Dao is provided with the activating substance layer, is provided with metal level on the activating substance layer.
Manufacture method of the present invention comprises following steps:
Step 1, get a slice metal substrate,
Step 2, metal substrate just, the back of the body two sides be covered with mask layer separately,
Step 3, the part mask in metal substrate front is got rid of, is exposed the zone that preparation etches partially on metal substrate,
Step 4, the zone of removing mask layer in the last process is etched partially, on metal substrate, forms the Ji Dao and the partially etching area of depression, form the pin of convex dot shape simultaneously relatively,
Remaining mask layer on step 5, the removal metal substrate is made plane button type ultra-thin packed substrate.
Manufacture method of the present invention can also comprise following steps:
Step 6, once more make metal substrate just, the surface of the back side and salient point all is covered with mask layer,
Step 7, remove the metal substrate front or/and the part mask layer at the back side, carry out the zone of metal cladding in order to expose follow-up need,
Step 8, the zone of removing mask layer in the last process is plated metal level,
Remaining mask layer on step 9, the removal metal substrate.
Manufacture method of the present invention plated the activating substance layer earlier before plating metal level.
Technology such as that the present invention has is ultra-thin, rapid heat dissipation a bit.Be specially:
1, Ji Dao is lower than the pin height on the substrate, so the bottom surface of chip can be lower than the pin end face after load on the Ji Dao: striven for bigger space for chip thickness on the one hand, make this encapsulation can break through original area requirement to chip thickness, the thicker chip of encapsulation has also reduced the pressure to chip thinning technology on original basis; On the other hand, under the certain prerequisite of chip thickness, it is thinner to use this ultra-thin packed substrate that packaging body is accomplished, meets frivolous, the portable requirement of packaging body more.
2, Ji Dao is lower than pin, compares with prior art, be equivalent to basis that original basic island floor space equates on reduced the height of Ji Dao, thereby reduced dead resistance, electric capacity and inductance, the electrical property of product is better, it is faster to dispel the heat.
Embodiment:
Embodiment 1:
Embodiment 1 structure is shown in Fig. 8 (a), electronic component plane button ultra-thin packed substrate of the present invention, comprise basic island 1 and pin 2, pin 2 is convex dot shape and is distributed in substrate front side, have thin metal layer 3 to link between salient point and the salient point, basic island 1 is lower than pin 2 plane distribution of convex dot shape in substrate front side; In the single electronic devices and components packaging body that when follow-up encapsulation, forms, the quantity of Ji Dao can have one or more, pin can be arranged in the side of Ji Dao, also can be arranged in both sides or three sides of Ji Dao, or is trapped among the structure that forms a circle or multi-turn pin on every side of Ji Dao.
Its manufacture method comprises following steps:
Step 1, get a slice metal substrate 6, as Fig. 1,
Step 2, metal substrate 6 just, the back of the body two sides be covered with mask layer 7 separately, as Fig. 2,
Step 3, the part mask in metal substrate 6 fronts is got rid of, exposed the zone that preparation etches partially on metal substrate 6, as Fig. 3,
Step 4, the zone of removing mask layer in the last process is etched partially, on metal substrate 6, form the basic island 1 and the partially etching area 61 of depression, form the pin 2 of convex dot shape simultaneously relatively, as Fig. 4,
Remaining mask layer on step 5, the removal metal substrate 6 is made plane button type ultra-thin packed substrate, as Fig. 8 (a).Can do further modification processing to the plane button type ultra-thin packed substrate of making as required.
Embodiment 2:
Embodiment 2 structures are shown in Fig. 8 (b), and it is on the basis of embodiment 1, is provided with metal level 4 in the front of pin 2.
Its manufacture method also comprises following steps on the basis of embodiment 1 method:
Step 6, once more make metal substrate 6 just, the surface of the back side and salient point all is covered with mask layer 7, as Fig. 5,
Step 7, remove the mask layer in pin 2 fronts, carry out the zone of metal cladding in order to expose follow-up need, as Fig. 6 (a),
Step 8, the zone of removing mask layer in the last process is plated metal level 4, as Fig. 7 (a),
Remaining mask layer on step 9, the removal metal substrate 6 is made plane button type ultra-thin packed substrate, as Fig. 8 (b).
Embodiment 3:
Embodiment 3 structures are shown in Fig. 8 (c), and it is on the basis of embodiment 1, and 1 the two front is provided with metal level 4 on pin 2 and basic island.
Its manufacture method also comprises following steps on the basis of embodiment 1 method:
Step 6, once more make metal substrate 6 just, the surface of the back side and salient point all is covered with mask layer 7, as Fig. 5,
Step 7, remove pin 2 and basic island 1 the two positive mask layer, carry out the zone of metal cladding in order to expose follow-up need, as Fig. 6 (b),
Step 8, the zone of removing mask layer in the last process is plated metal level 4,, step 9, remove mask layer remaining on the metal substrate 6, make plane button type ultra-thin packed substrate, as Fig. 8 (c) as Fig. 7 (b).
Embodiment 4:
Embodiment 4 structures are shown in Fig. 8 (d), and it is on the basis of embodiment 1, and 1 the two the back side is provided with metal level 4 on pin 2 and basic island.
Its manufacture method also comprises following steps on the basis of embodiment 1 method:
Step 6, once more make metal substrate 6 just, the surface of the back side and salient point all is covered with mask layer 7, as Fig. 5,
Step 7, remove the mask layer at the pin 2 and 1 the two back side, basic island, carry out the zone of metal cladding in order to expose follow-up need, as Fig. 6 (c),
Step 8, the zone of removing mask layer in the last process is plated metal level 4, as Fig. 7 (c),
Remaining mask layer on step 9, the removal metal substrate 6 is made plane button type ultra-thin packed substrate, as Fig. 8 (d).
Embodiment 5:
Embodiment 5 structures are shown in Fig. 8 (e), and it is on the basis of embodiment 1, pin 2 just, the back side on the back of the body two sides and basic island 1 is provided with metal level 4.
Its manufacture method also comprises following steps on the basis of embodiment 1 method:
Step 6, once more make metal substrate 6 just, the surface of the back side and salient point all is covered with mask layer 7, as Fig. 5,
Step 7, remove pin 2 just, the backside mask layer on back of the body two sides and basic island 1, carry out the zone of metal cladding in order to expose follow-up need, as Fig. 6 (d),
Step 8, the zone of removing mask layer in the last process is plated metal level 4, as Fig. 7 (d),
Remaining mask layer on step 9, the removal metal substrate 6 is made plane button type ultra-thin packed substrate, as Fig. 8 (e).
Embodiment 6:
Embodiment 6 structures are shown in Fig. 8 (f), and it is on the basis of embodiment 1, and 1 the two front and back is provided with metal level 4 on pin 2 and basic island.
Its manufacture method also comprises following steps on the basis of embodiment 1 method:
Step 6, once more make metal substrate 6 just, the surface of the back side and salient point all is covered with mask layer 7, as Fig. 5,
Step 7, remove the two front and back mask layer of pin 2 and basic island 1, carry out the zone of metal cladding in order to expose follow-up need, as Fig. 6 (e),
Step 8, the zone of removing mask layer in the last process is plated metal level 4, as Fig. 7 (e),
Remaining mask layer on step 9, the removal metal substrate 6 is made plane button type ultra-thin packed substrate, as Fig. 8 (f).
Embodiment 7:
Embodiment 7 structures are shown in Fig. 8 (g), and it is on the basis of embodiment 2, is provided with activating substance layer 5 in the front of pin 2, is provided with metal level 4 on activating substance layer 5.
Its manufacture method before the zone of removal mask layer plates metal level 4 in to last process, plates activating substance layer 5 earlier, as Fig. 7 (f), Fig. 7 (k) in the step 8 of embodiment 2 methods.
Embodiment 8:
Embodiment 8 structures are shown in Fig. 8 (h), and it is on the basis of embodiment 3, and 1 the two front is provided with activating substance layer 5 on pin 2 and basic island, is provided with metal level 4 on activating substance layer 5.
Its manufacture method before the zone of removal mask layer plates metal level 4 in to last process, plates activating substance layer 5 earlier, as Fig. 7 (g), Fig. 7 (1) in the step 8 of embodiment 3 methods.
Embodiment 9:
Embodiment 9 structures are shown in Fig. 8 (i), and it is on the basis of embodiment 4, and 1 the two the back side is provided with activating substance layer 5 on pin 2 and basic island, is provided with metal level 4 on activating substance layer 5.
Its manufacture method before the zone of removal mask layer plates metal level 4 in to last process, plates activating substance layer 5 earlier, as Fig. 7 (h), Fig. 7 (m) in the step 8 of embodiment 4 methods.
Embodiment 10:
Embodiment 10 structures are shown in Fig. 8 (j), and it is on the basis of embodiment 5, pin 2 just, the back side on the back of the body two sides and basic island 1 is provided with activating substance layer 5, is provided with metal level 4 on activating substance layer 5.
Its manufacture method before the zone of removal mask layer plates metal level 4 in to last process, plates activating substance layer 5 earlier, as Fig. 7 (i), Fig. 7 (n) in the step 8 of embodiment 5 methods.
Embodiment 11:
Embodiment 11 structures are shown in Fig. 8 (k), and it is on the basis of embodiment 6, in that 1 the two front and back is provided with activating substance layer 5 on pin 2 and basic island, are provided with metal level 4 on activating substance layer 5.
Its manufacture method before the zone of removal mask layer plates metal level 4 in to last process, plates activating substance layer 5 earlier, as Fig. 7 (j), Fig. 7 (o) in the step 8 of embodiment 6 methods.
The above-mentioned metal level 4 that covers on the basic island 1 can be part and covers or all cover.Metal level 4 is gold or silver or copper or tin or nickel or nickel palladium, and metal level can be single or multiple lift, or regional area distributes.
Above-mentioned activating substance layer 3 is nickel or palladium or nickel palladium layer.