CN1845811A - 用于操作气体激光器系统的方法 - Google Patents

用于操作气体激光器系统的方法 Download PDF

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Publication number
CN1845811A
CN1845811A CNA2004800246788A CN200480024678A CN1845811A CN 1845811 A CN1845811 A CN 1845811A CN A2004800246788 A CNA2004800246788 A CN A2004800246788A CN 200480024678 A CN200480024678 A CN 200480024678A CN 1845811 A CN1845811 A CN 1845811A
Authority
CN
China
Prior art keywords
pulse
laser
high frequency
resonator
interval
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2004800246788A
Other languages
English (en)
Chinese (zh)
Inventor
亚历山大·希尔托
汉斯·J·梅尔
彼得拉·米青内克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Via Mechanics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Via Mechanics Ltd filed Critical Hitachi Via Mechanics Ltd
Publication of CN1845811A publication Critical patent/CN1845811A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
CNA2004800246788A 2003-09-30 2004-04-16 用于操作气体激光器系统的方法 Pending CN1845811A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10345543.4 2003-09-30
DE10345543 2003-09-30

Publications (1)

Publication Number Publication Date
CN1845811A true CN1845811A (zh) 2006-10-11

Family

ID=34399125

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2004800246788A Pending CN1845811A (zh) 2003-09-30 2004-04-16 用于操作气体激光器系统的方法

Country Status (4)

Country Link
JP (1) JP2007507870A (ko)
KR (1) KR20060060672A (ko)
CN (1) CN1845811A (ko)
WO (1) WO2005032758A1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101578155B (zh) * 2007-01-05 2013-05-01 杰斯集团公司 用于多脉冲激光加工的系统和方法
CN108515278A (zh) * 2013-04-26 2018-09-11 维亚机械株式会社 激光加工方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5396357B2 (ja) 2010-09-14 2014-01-22 株式会社アマダ レーザ加工装置及びその制御方法
JP7153682B2 (ja) * 2020-03-11 2022-10-14 パナソニックホールディングス株式会社 切断装置および切断方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6784399B2 (en) * 2001-05-09 2004-08-31 Electro Scientific Industries, Inc. Micromachining with high-energy, intra-cavity Q-switched CO2 laser pulses
DE10145184B4 (de) * 2001-09-13 2005-03-10 Siemens Ag Verfahren zum Laserbohren, insbesondere unter Verwendung einer Lochmaske

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101578155B (zh) * 2007-01-05 2013-05-01 杰斯集团公司 用于多脉冲激光加工的系统和方法
CN108515278A (zh) * 2013-04-26 2018-09-11 维亚机械株式会社 激光加工方法

Also Published As

Publication number Publication date
JP2007507870A (ja) 2007-03-29
KR20060060672A (ko) 2006-06-05
WO2005032758A1 (de) 2005-04-14

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