CN1836106A - 自动低温泵安全清洗集成 - Google Patents
自动低温泵安全清洗集成 Download PDFInfo
- Publication number
- CN1836106A CN1836106A CNA2004800236004A CN200480023600A CN1836106A CN 1836106 A CN1836106 A CN 1836106A CN A2004800236004 A CNA2004800236004 A CN A2004800236004A CN 200480023600 A CN200480023600 A CN 200480023600A CN 1836106 A CN1836106 A CN 1836106A
- Authority
- CN
- China
- Prior art keywords
- cryopump
- valve
- cleaning valve
- controller
- situation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 title claims abstract description 139
- 230000010354 integration Effects 0.000 title 1
- 239000003990 capacitor Substances 0.000 claims abstract description 42
- 238000004140 cleaning Methods 0.000 claims description 210
- 238000000034 method Methods 0.000 claims description 95
- 238000011084 recovery Methods 0.000 claims description 48
- 230000004044 response Effects 0.000 claims description 37
- 230000008569 process Effects 0.000 claims description 23
- 230000009183 running Effects 0.000 claims description 9
- GOLXNESZZPUPJE-UHFFFAOYSA-N spiromesifen Chemical compound CC1=CC(C)=CC(C)=C1C(C(O1)=O)=C(OC(=O)CC(C)(C)C)C11CCCC1 GOLXNESZZPUPJE-UHFFFAOYSA-N 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 238000003860 storage Methods 0.000 claims description 5
- 230000002159 abnormal effect Effects 0.000 claims 1
- 238000012163 sequencing technique Methods 0.000 claims 1
- 230000003111 delayed effect Effects 0.000 abstract description 3
- 230000007246 mechanism Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 54
- 239000001257 hydrogen Substances 0.000 description 15
- 229910052739 hydrogen Inorganic materials 0.000 description 15
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 14
- 238000007600 charging Methods 0.000 description 11
- 230000036413 temperature sense Effects 0.000 description 10
- 238000012545 processing Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000004891 communication Methods 0.000 description 6
- 239000002699 waste material Substances 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000009835 boiling Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 239000008246 gaseous mixture Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000001934 delay Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 240000004859 Gamochaeta purpurea Species 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000009272 plasma gasification Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Claims (160)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/608,770 | 2003-06-27 | ||
US10/608,770 US20040261424A1 (en) | 2003-06-27 | 2003-06-27 | Integration of automated cryopump safety purge with set point |
US10/608,851 US6920763B2 (en) | 2003-06-27 | 2003-06-27 | Integration of automated cryopump safety purge |
US10/608,779 | 2003-06-27 | ||
US10/608,779 US6895766B2 (en) | 2003-06-27 | 2003-06-27 | Fail-safe cryopump safety purge delay |
US10/608,851 | 2003-06-27 | ||
PCT/US2004/018269 WO2005005833A2 (en) | 2003-06-27 | 2004-06-09 | Integration of automated cryopump safety purge |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1836106A true CN1836106A (zh) | 2006-09-20 |
CN1836106B CN1836106B (zh) | 2011-06-15 |
Family
ID=33540678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2004800236004A Expired - Lifetime CN1836106B (zh) | 2003-06-27 | 2004-06-09 | 自动低温泵安全清洗集成 |
Country Status (2)
Country | Link |
---|---|
US (1) | US6895766B2 (zh) |
CN (1) | CN1836106B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102588247A (zh) * | 2011-01-17 | 2012-07-18 | 住友重机械工业株式会社 | 低温泵及真空阀装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1780414B1 (en) * | 2003-06-27 | 2008-08-13 | Helix Technology Corporation | Integration of automated cryopump safety purge |
US7320224B2 (en) * | 2004-01-21 | 2008-01-22 | Brooks Automation, Inc. | Method and apparatus for detecting and measuring state of fullness in cryopumps |
US7819981B2 (en) * | 2004-10-26 | 2010-10-26 | Advanced Technology Materials, Inc. | Methods for cleaning ion implanter components |
CN101952703A (zh) * | 2007-12-19 | 2011-01-19 | 布鲁克机械公司 | 具有电子倍增器冷发射源的离子计 |
KR101508110B1 (ko) | 2008-01-22 | 2015-04-06 | 브룩스 오토메이션, 인크. | 크라이오 펌프 네트워크 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3254871A (en) * | 1963-10-31 | 1966-06-07 | Auto Tronic Control Co Inc | Time delay system |
CA1089054A (en) * | 1976-08-20 | 1980-11-04 | William F. Helwig, Jr. | Delay circuit |
US4718240A (en) * | 1985-03-01 | 1988-01-12 | Helix Technology Corporation | Cryopump regeneration method and apparatus |
US4735084A (en) * | 1985-10-01 | 1988-04-05 | Varian Associates, Inc. | Method and apparatus for gross leak detection |
DE3680335D1 (de) * | 1986-06-23 | 1991-08-22 | Leybold Ag | Kryopumpe und verfahren zum betrieb dieser kryopumpe. |
EP0336992A1 (de) * | 1988-04-13 | 1989-10-18 | Leybold Aktiengesellschaft | Verfahren und Vorrichtung zur Überprüfung der Funktion einer refrigeratorbetriebenen Kryopumpe |
US6318093B2 (en) * | 1988-09-13 | 2001-11-20 | Helix Technology Corporation | Electronically controlled cryopump |
US4918930A (en) * | 1988-09-13 | 1990-04-24 | Helix Technology Corporation | Electronically controlled cryopump |
US5443368A (en) * | 1993-07-16 | 1995-08-22 | Helix Technology Corporation | Turbomolecular pump with valves and integrated electronic controls |
JP2538796B2 (ja) * | 1989-05-09 | 1996-10-02 | 株式会社東芝 | 真空排気装置および真空排気方法 |
US5123277A (en) * | 1990-06-04 | 1992-06-23 | Westinghouse Electric Corp. | Apparatus and method for analyzing gas dryer performance |
CA2096419A1 (en) * | 1990-11-19 | 1992-05-20 | Gerd Flick | Process for regenerating a cryopump and suitable cryopump for implementing this process |
US5305612A (en) * | 1992-07-06 | 1994-04-26 | Ebara Technologies Incorporated | Cryopump method and apparatus |
US5513499A (en) * | 1994-04-08 | 1996-05-07 | Ebara Technologies Incorporated | Method and apparatus for cryopump regeneration using turbomolecular pump |
EP0684382B1 (en) | 1994-04-28 | 2000-03-22 | Ebara Corporation | Cryopump |
US5684463A (en) * | 1994-05-23 | 1997-11-04 | Diercks; Richard Lee Roi | Electronic refrigeration and air conditioner monitor and alarm |
US5517823A (en) * | 1995-01-18 | 1996-05-21 | Helix Technology Corporation | Pressure controlled cryopump regeneration method and system |
US5673514A (en) * | 1995-09-29 | 1997-10-07 | Mckeon Rolling Steel Door Company, Inc. | Time delay release mechanism for a fire barrier |
US5906102A (en) * | 1996-04-12 | 1999-05-25 | Helix Technology Corporation | Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve |
US6272400B1 (en) | 1998-07-13 | 2001-08-07 | Helix Technology Corporation | Vacuum network controller |
US6216467B1 (en) * | 1998-11-06 | 2001-04-17 | Helix Technology Corporation | Cryogenic refrigerator with a gaseous contaminant removal system |
JP4274648B2 (ja) * | 1999-09-29 | 2009-06-10 | 住友重機械工業株式会社 | クライオポンプの制御装置 |
US6327863B1 (en) * | 2000-05-05 | 2001-12-11 | Helix Technology Corporation | Cryopump with gate valve control |
US6427969B1 (en) * | 2001-04-27 | 2002-08-06 | Helix Technology Inc. | Adjustable gate valve assembly for vacuum chamber |
US6510697B2 (en) * | 2001-06-07 | 2003-01-28 | Helix Technology Corporation | System and method for recovering from a power failure in a cryopump |
-
2003
- 2003-06-27 US US10/608,779 patent/US6895766B2/en not_active Expired - Lifetime
-
2004
- 2004-06-09 CN CN2004800236004A patent/CN1836106B/zh not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102588247A (zh) * | 2011-01-17 | 2012-07-18 | 住友重机械工业株式会社 | 低温泵及真空阀装置 |
CN102588247B (zh) * | 2011-01-17 | 2015-05-13 | 住友重机械工业株式会社 | 低温泵及真空阀装置 |
Also Published As
Publication number | Publication date |
---|---|
US6895766B2 (en) | 2005-05-24 |
CN1836106B (zh) | 2011-06-15 |
US20040261425A1 (en) | 2004-12-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7415831B2 (en) | Integration of automated cryopump safety purge | |
CN1305160C (zh) | 燃料电池控制系统和方法 | |
CN1836106A (zh) | 自动低温泵安全清洗集成 | |
CN111710888B (zh) | 车载燃料电池系统的启动控制方法 | |
JP2006278174A (ja) | 非常用燃料電池発電装置及びその運転方法 | |
US8459957B2 (en) | Water-injected compressor | |
US6920763B2 (en) | Integration of automated cryopump safety purge | |
EP3662530B1 (en) | Method for operating a fuel cell and controller therefore | |
JP3883382B2 (ja) | 給水装置 | |
CN205349783U (zh) | 热水锅炉循环泵安全保护装置 | |
JP2011113831A (ja) | 燃料電池装置 | |
JP4823502B2 (ja) | 燃料電池の停止方法及び燃料電池システム | |
JPWO2016157737A1 (ja) | 燃料電池システムおよびその運転方法 | |
JP3949113B2 (ja) | 薬液供給装置 | |
KR101610405B1 (ko) | 연료전지 차량의 비상 운전 제어 방법 | |
CN102410190A (zh) | 一种医用空气压缩机启停控制方法 | |
JPH04110505A (ja) | ボイラの防食システム | |
JP2009224091A (ja) | 燃料電池発電システム | |
US20040261424A1 (en) | Integration of automated cryopump safety purge with set point | |
CN117867589A (zh) | 一种次氯酸钠发生器及控制方法 | |
CN115755667A (zh) | 碳捕集系统的控制方法和装置 | |
CN2167223Y (zh) | 泵浦保护装置 | |
CN1453397A (zh) | 一种安全控制系统及使用该系统的氢氧燃料产生装置 | |
JP2004190566A (ja) | 太陽電池を電源とする給水装置の制御方法及び制御装置 | |
JPH0278826A (ja) | 温水暖房装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: BROOKS AUTOMATION CO., LTD. Free format text: FORMER OWNER: HELIX TECH CORP. Effective date: 20070914 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20070914 Address after: Massachusetts, USA Applicant after: BROOKS AUTOMATION, Inc. Address before: Massachusetts, USA Applicant before: HELISWIRL TECHNOLOGIES LTD. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200211 Address after: New York State, USA Patentee after: Edwards Vacuum LLC Address before: Massachusetts, USA Patentee before: BROOKS AUTOMATION, Inc. |
|
CX01 | Expiry of patent term |
Granted publication date: 20110615 |