CN1822341A - Suspension arm probe - Google Patents
Suspension arm probe Download PDFInfo
- Publication number
- CN1822341A CN1822341A CN 200510008086 CN200510008086A CN1822341A CN 1822341 A CN1822341 A CN 1822341A CN 200510008086 CN200510008086 CN 200510008086 CN 200510008086 A CN200510008086 A CN 200510008086A CN 1822341 A CN1822341 A CN 1822341A
- Authority
- CN
- China
- Prior art keywords
- fixed part
- probe
- rod member
- elasticity
- described probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Measuring Leads Or Probes (AREA)
Abstract
A cantilever type probe contains a fixed portion and bar connected to fixed portion, wherein the bar and fixed portion having different elastic coefficient. Present invention can increase probe constructional elasticity and reduce probe fatigue damage.
Description
Technical field
System of the present invention is relevant with probe, is meant a kind of cantalever type probe especially.
Background technology
In semi-conductor industry, when integrated circuit (IC) wafer is finished but before not carrying out encapsulation procedure as yet, must be earlier through the circuit function of a trace routine testing wafer; Trace routine is to utilize a probe to be located between tester table and the wafer, probe has some cantilever types (Cantilever Type) probe, be connected to the weld pad of wafer respectively by each probe, the test signal of test machine can be transmitted between wafer and the test machine back and forth.
Cantilever type (Cantilever Type) probe 90 of general probe as shown in figure 14, includes a fixed part 91 and a rod member 92, and fixed part 91 is to stand on a body 93, and rod member 92 1 ends are located at fixed part 91 tops, and the other end has a tip 94; Rod member 92 is from the unsettled extension of fixed part 91 along continuous straight runs; As shown in figure 15, when the tip 94 of probe 90 was connected to a determinand (DUT) 95 in the mode that applies predetermined external force, external force promptly can cause rod member 92 distortion, and the stress that is produced by distortion, probe 90 can be connected to determinand 95 really.
Yet; when being subjected to external force, the structure of above-mentioned cantalever type probe 90 does the time spent; be easy to generate the stress concentration phenomenon in rod member 92 and the position that fixed part 91 links mutually, when carrying out the test of determinand 95 for a long time, regular meeting causes rod member 92 structures from this position fatigue rupture to take place.
Summary of the invention
Therefore, main purpose of the present invention is to be to provide a kind of cantalever type probe, can increase the elasticity of probe structure, reduces the situation of probe generation fatigue rupture.
Take off purpose for before reaching, cantalever type probe of the present invention includes a fixed part, and a rod member that is linked to this fixed part, and the coefficient of elasticity of this rod member is different with the coefficient of elasticity of this fixed part; Whereby, the present invention can increase the elasticity of probe structure, reduces the situation of probe generation fatigue rupture.
In a preferred embodiment of the present invention, the fixed part of this probe is located at a body, and this body has a support portion in addition, and this rod member is to be butted on this support portion; This rod member utilizes this support portion as fulcrum, when the free end of this rod member is subjected to external force, whole rod member forms and is subjected to lever principle (LeverPrincicle) effect and corresponding distortion, can utilize the intensity of the elasticity increase probe of this fixed part, and when the flatness of the abutment of determinand is not good, this probe also can comparatively successfully be in contact with one another with this determinand, and this rod member can be evenly distributed in the presumptive area in the stress that test process produces, avoid producing the stress concentration phenomenon, reduce the situation that probe structure takes place by destruction.
Description of drawings
Fig. 1 is the stereogram of the present invention's first preferred embodiment;
Fig. 2 is the method for making schematic diagram of the present invention's first preferred embodiment;
Fig. 3 is the method for making schematic diagram of the present invention's first preferred embodiment;
Fig. 4 is the stereogram of the present invention's second preferred embodiment;
Fig. 5 is the stereogram of the present invention's the 3rd preferred embodiment;
Fig. 6 is the stereogram of the present invention's the 4th preferred embodiment;
Fig. 7 is the front view of the present invention's the 5th preferred embodiment;
Fig. 8 is the partial perspective view of the present invention's the 5th preferred embodiment;
Fig. 9 is the front view of the present invention's the 6th preferred embodiment;
Figure 10 is the front view of the present invention's the 7th preferred embodiment;
Figure 11 is the front view of the present invention's the 8th preferred embodiment;
Figure 12 is the front view of the present invention's the 9th preferred embodiment;
Figure 13 is the front view of the present invention's the tenth preferred embodiment;
Figure 14 is the front view of probe commonly used; And
Figure 15 is the schematic diagram of probe commonly used.
Embodiment
Below, conjunction with figs. is enumerated some preferred embodiments now, in order to structure of the present invention and effect are elaborated.
See also shown in Figure 1, the cantalever type probe 10 that is provided for the present invention's first preferred embodiment, probe 10 includes a fixed part 11 and a rod member 13, fixed part 11 is formed by the plate body that is rugosity, makes fixed part 11 be elastomer, and rod member 13 1 ends have a tip 15, the other end then is located at the top of fixed part 11, rod member 13 is vertical mutually with fixed part 11, and the bottom of fixed part 11 is to be located at a body 19, makes rod member 13 from fixed part 11 horizontal unsettled extensions; Probe 10 can be located at the circuit board 18 of a probe, in order to testing integrated circuits.
The manufacture method of the cantalever type probe 10 of the present invention's first preferred embodiment, as shown in Figure 2, at first be to prepare a pedestal 20 and a body 19 respectively, the manufacture of body 19 can be the little processing procedure in silicon wafer garden (Silicon micromachining) mode, ceramic processing mode, or electrochemistry processing procedure (Electrochemical Fabrication, Efab), and the manufacture of pedestal 20 can be plating make (Plating) mode or electrochemistry processing procedure (Electrochemical Fabrication, Efab); Pedestal 20 has a fixed part 11 and a rod member 13 that is rugosity, and rod member 13 1 ends have a tip 15, and the other end then is located at fixed part 11; Then as shown in Figure 3, in conjunction with pedestal 20 and body 19, make the fixed part 11 of pedestal 20 be engaged in body 19, remove pedestal 20 at last and can form as shown in Figure 1 probe 10 structures with welding manner (can also conducting resinl or other bonding modes).
The probe structure of finishing via above-mentioned method for making, because fixed part 11 is to be rugosity, make the overall structure of fixed part 11 have preferable elasticity, and it is different by the elasticity that material own had with rod member 13, when the tip 15 of rod member 13 is connected to a determinand (not shown), the external force that rod member 13 bore is loaded by rod member 13 and fixed part 11 respectively, fixed part 11 can absorb and store external force simultaneously, reduce the stress that probe 10 structures are produced in stressed back, and reduce the stress concentration phenomenon, when using probe 10 to carry out long test job, can avoid probe 10 structures to be subjected to fatigue rupture.
Whereby, the present invention can reach and reduce the purpose that stress is concentrated and avoided fatigue rupture by the rubber-like probe structure.
The present invention also can reach goal of the invention of the present invention equally with rubber-like structural design other positions at probe.
As shown in Figure 4, the cantalever type probe 30 that is provided for the present invention's second preferred embodiment, include a fixed part 31 and a rod member 32 equally, characteristics are: fixed part 31 is cylinder, and rod member 32 has the elastic portion 33 that an one is shaped and is rugosity, the elastic portion 33 of rod member 32 is to be located at the top of fixed part 31, when the tip 34 of rod member 32 is butted on determinand, can utilize elastic portion 33 to absorb the external force of being born, reach the effect identical with first preferred embodiment: and as shown in Figure 5, the cantalever type probe 40 that is provided for the present invention's the 3rd preferred embodiment, it has a fixed part 41 and a rod member 42 equally, and characteristics are that then rod member 42 has one first one 43 and 2 second ones 44 that are tabular; First one 43 material with second one 44 is different, 2 second ones 44 is to be located at first one 43 two ends respectively, utilize first one 43 material and structure neither identical with second one 44, first one 43 coefficient of elasticity and second one's 44 coefficient of elasticity characteristic also inequality makes rod member 42 can have different elasticity according to first one 43 and second ones 44 of force-bearing situation adjustment collocation; And for example shown in Figure 6, the cantalever type probe 45 that is provided for the present invention's the 4th preferred embodiment, characteristics are that then it is to be located between 2 first ones 47 that rod member 46 has 2 first ones 47 and 2 second ones 48, two second ones 48 interruption-likely, also can above-mentionedly reach the purpose that changes coefficient of elasticity.
Again as shown in Figures 7 and 8, the cantalever type probe 50 that is provided for the present invention's the 5th preferred embodiment, probe 50 includes a fixed part 51, and the rod member 52 from fixed part 51 horizontal extensions, fixed part 51 has two spiral springs 53, this two spring 53 is to be located in the room 55 of body 54, and the bottom of fixed part 51 then is arranged in each spring 53 central authorities; When the free end of rod member 52 was subjected to external force, external force can be passed to each spring 53 via rod member 52 and fixed part 51, in order to increase the elasticity of probe 50; And as shown in Figure 9, be the cantalever type probe 56 that the present invention's the 6th preferred embodiment is provided, fixed part 57 is two cylinders, and all has two spiral springs 58, so as to making probe 56 have better elasticity, probe 56 promptly can be applicable to must the load test job of external force greatly.
As shown in figure 10, the cantalever type probe 60 that is provided for the present invention's the 7th preferred embodiment, its composition member and first preferred embodiment are roughly the same, characteristics are that then body 61 has a support portion 62, and rod member 63 is to be butted on support portion 62, so as to rod member 63 is evenly distributed in the presumptive area because of the stress that test process produced, avoid producing the stress concentration phenomenon, reduce the situation that probe structure takes place by destruction; Or as shown in figure 11, be the cantalever type probe 65 that the present invention's the 8th preferred embodiment is provided, when its characteristics were that then rod member 66 is butted on support portion 67, the free end of rod member 66 was to be the shape of steeving, and made rod member 66 itself have loading in advance, increased the intensity of probe 65.
And as shown in figure 12, the cantalever type probe 70 that is provided for the present invention's the 9th preferred embodiment, characteristics are that the fixed part 71 that is to be rugosity is with after extending towards the direction parallel with body 72, rod member 73 is located at the other end of fixed part 71 again, and then be positioned at the top of fixed part 71, whereby, when rod member 73 is connected to determinand, can replace mutually with fixed part 71, reach and have the advantage that elasticity also can reduce the stress concentration phenomenon; Again as shown in figure 13, be the cantalever type probe 75 that the present invention's the tenth preferred embodiment is provided, characteristics are that then the bottom side one of rod member 76 extends a support portion 77, can reach the advantage of above-mentioned minimizing stress concentration phenomenon equally.
What deserves to be mentioned is, provided by the present invention the 5th, six, seven, eight, nine, and the tenth in the preferred embodiment, each rod member all can utilize support portion or fixed part as fulcrum, when the free end of rod member was subjected to external force, whole rod member was to form to be subjected to lever principle (Lever Princicle) effect and corresponding distortion, and probe utilizes the rubber-like fixed part to gain in strength, and when the flatness of the abutment of determinand was not good, probe also can comparatively successfully be in contact with one another with determinand.Simultaneously when the coefficient of elasticity of fixed part during greater than the coefficient of elasticity of rod member, the free end formed most of stress that is stressed will be distributed on the rod member fifty-fifty, therefore can reach and reduce the suffered stress of rod member unit length, also can avoid the single-point stress concentration effect.
Claims (29)
1. a cantalever type probe is characterized in that, includes a fixed part, and a rod member that is linked to this fixed part, and the coefficient of elasticity of this rod member is different with the coefficient of elasticity of this fixed part.
2. according to the described cantalever type probe of claim 1, it is characterized in that wherein this fixed part is an elastomer.
3. according to the described cantalever type probe of claim 1, it is characterized in that wherein this fixed part is the plate body that is rugosity.
4. according to the described cantalever type probe of claim 1, it is characterized in that wherein this fixed part is a cylinder, this rod member has the elastic portion that an one is shaped and is rugosity, and this elastic portion is to be located at this fixed part.
5. according to the described cantalever type probe of claim 1, it is characterized in that wherein this rod member has one first one and one second one that is tabular; This first one different with this material of second one.
6. according to the described cantalever type probe of claim 1, it is characterized in that wherein this fixed part has at least one spiral spring, the bottom of this fixed part is to be arranged in respectively these spring central authorities.
7. a probe includes a circuit board and some cantalever type probes; It is characterized in that respectively this cantalever type probe includes a fixed part, and a rod member that is linked to this fixed part, the coefficient of elasticity of this rod member is different with the coefficient of elasticity of this fixed part.
8. according to the described probe of claim 7, it is characterized in that wherein this fixed part is an elastomer.
9. according to the described probe of claim 7, it is characterized in that wherein this fixed part is the plate body that is rugosity.
10. according to the described probe of claim 7, it is characterized in that wherein this fixed part is a cylinder, this rod member has the elastic portion that an one is shaped and is rugosity, and this elastic portion is to be located at this fixed part.
11,, it is characterized in that wherein this rod member has one first one and one second one that is tabular according to the described probe of claim 7; This first one different with this material of second one.
12., it is characterized in that wherein this fixed part has at least one spiral spring according to the described probe of claim 7, the bottom of this fixed part is to be arranged in respectively these spring central authorities.
13. the method for making of a probe is characterized in that, includes:
A. prepare a pedestal, this pedestal has the rod member that a fixed part and that is rugosity extends from this fixed part;
B. prepare a body; And
C. in conjunction with this pedestal and this body, make this fixed part be located at this body.
14. the method for making according to the described probe of claim 13 is characterized in that, wherein this body is to make in the little processing procedure mode of Silicon Wafer.
15. the method for making according to the described probe of claim 13 is characterized in that, wherein this body is to make with ceramic processing mode.
16. the method for making according to the described probe of claim 13 is characterized in that, wherein this body is to make in electrochemistry processing procedure mode.
17. the method for making according to the described probe of claim 13 is characterized in that, wherein this pedestal is to make mode with plating to make.
18. the method for making according to the described probe of claim 13 is characterized in that, wherein this pedestal is to make in electrochemistry processing procedure mode.
19. the method for making according to the described probe of claim 13 is characterized in that, wherein among this step c, this pedestal and this body are to mutually combine with bonding way.
20. the method for making according to the described probe of claim 13 is characterized in that, wherein among this step c, this pedestal and this body are to mutually combine with welding manner.
21. the method for making according to the described probe of claim 13 is characterized in that, wherein among this step c, this pedestal and this body are to mutually combine with conducting resinl.
22. a probe is characterized in that, is to make with the described method for making of claim 13.
23., it is characterized in that this probe includes a fixed part according to the described probe of claim 22, and a rod member that is linked to this fixed part, the coefficient of elasticity of this rod member is different with the coefficient of elasticity of this fixed part.
24. a probe is characterized in that, includes:
One body, this body have a support portion and a fixed part; And
One rod member, the coefficient of elasticity of this rod member is different with the coefficient of elasticity of this fixed part, and this rod member one end is located at this fixed part, and the other end then extends towards this support portion direction, makes this rod member be butted on this support portion.
25., it is characterized in that wherein this fixed part is an elastomer according to the described cantalever type probe of claim 24.
26., it is characterized in that wherein this fixed part is the plate body that is rugosity according to the described probe of claim 24.
27., it is characterized in that wherein this fixed part is a cylinder according to the described probe of claim 24, this rod member has the elastic portion that an one is shaped and is rugosity, this elastic portion is to be located at this fixed part.
28., it is characterized in that wherein this rod member has one first one and one second one that is tabular according to the described probe of claim 24; This first one different with this material of second one.
29., it is characterized in that wherein this fixed part has at least one spiral spring according to the described probe of claim 24, the bottom of this fixed part is to be arranged in respectively these spring central authorities.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510008086 CN1822341A (en) | 2005-02-16 | 2005-02-16 | Suspension arm probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510008086 CN1822341A (en) | 2005-02-16 | 2005-02-16 | Suspension arm probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1822341A true CN1822341A (en) | 2006-08-23 |
Family
ID=36923533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510008086 Pending CN1822341A (en) | 2005-02-16 | 2005-02-16 | Suspension arm probe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1822341A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102981022A (en) * | 2011-09-06 | 2013-03-20 | 精工电子纳米科技有限公司 | Method of determining a spring constant of a cantilever and scanning probe microscope using the method |
| CN101726636B (en) * | 2008-10-23 | 2014-08-13 | 旺矽科技股份有限公司 | Multi-finger probe |
| CN108344887A (en) * | 2017-01-25 | 2018-07-31 | 松翰有限公司 | probe head structure of cantilever type probe card |
| WO2024062559A1 (en) * | 2022-09-21 | 2024-03-28 | 日本電子材料株式会社 | Cantilever-type probe for probe card |
-
2005
- 2005-02-16 CN CN 200510008086 patent/CN1822341A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101726636B (en) * | 2008-10-23 | 2014-08-13 | 旺矽科技股份有限公司 | Multi-finger probe |
| CN102981022A (en) * | 2011-09-06 | 2013-03-20 | 精工电子纳米科技有限公司 | Method of determining a spring constant of a cantilever and scanning probe microscope using the method |
| CN102981022B (en) * | 2011-09-06 | 2016-08-03 | 日本株式会社日立高新技术科学 | The spring constant of cantilever determines method and uses the scanning type probe microscope of the method |
| CN108344887A (en) * | 2017-01-25 | 2018-07-31 | 松翰有限公司 | probe head structure of cantilever type probe card |
| WO2024062559A1 (en) * | 2022-09-21 | 2024-03-28 | 日本電子材料株式会社 | Cantilever-type probe for probe card |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1822341A (en) | Suspension arm probe | |
| KR20110084978A (en) | Probe card | |
| KR20210018087A (en) | Electrical Contactor and Electrical Connecting Apparatus | |
| EP1566642A1 (en) | Probe card | |
| CN109115523B (en) | Transverse stabilizer bar calibration test and fatigue endurance test bench and test method | |
| CN109416386A (en) | Mobyneb base board checking device and Mobyneb substrate inspecting method | |
| CN105841908A (en) | Excitation test stand for fatigue resistance performance of overturning locking device of cab | |
| CN101878431B (en) | Probe | |
| US20080252310A1 (en) | Hybrid probe for testing semiconductor devices | |
| US8723545B2 (en) | Probe card | |
| CN1808130A (en) | Probe board for semiconductor chip detecting and its producing method | |
| KR100794639B1 (en) | Probe card | |
| JP2019203765A (en) | Stress strain characteristic measurement device under large deformation region or multi-axial stress, and stress strain characteristic analysis device under large deformation region or multi-axial stress | |
| KR101382537B1 (en) | Jig for vibration test and method for vibration test using the same | |
| Darveaux et al. | Ductile-to-brittle transition strain rate | |
| CN114166510B (en) | Transverse rigidity measuring device of force measuring assembly | |
| CN200965500Y (en) | Spring supporting lower fixture for direct tensile test | |
| JP5208787B2 (en) | Circuit board inspection apparatus and circuit board inspection method | |
| CN114923617B (en) | Engine lift force measuring device | |
| JPH03231438A (en) | Probe card and probe device using the same | |
| KR100882512B1 (en) | Probe card | |
| KR20090108433A (en) | Cantilever type micro contact probe | |
| CN1822342A (en) | Detecting probe | |
| CN211121853U (en) | A compact structure that is used for quiet rigidity test press of elastic cushion | |
| Engel et al. | Stiffness and fatigue study for surface mounted module/lead/card systems |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |