CN1822341A - cantilever probe - Google Patents

Abstract

A cantilever probe includes a fixing part and a rod connected to the fixing part. The elastic coefficient of the rod is different from that of the fixing part. Thus, the present invention can increase the elasticity of the probe structure and reduce the fatigue damage of the probe.

Description

cantilever probe

technical field

The present invention relates to probes, in particular to a cantilever probe.

Background technique

In the semiconductor industry, when the integrated circuit chip is completed but before the packaging process, the circuit function of the chip must be tested through a testing program; the testing program is to use a probe card between the test machine and the chip, the probe card There are a number of cantilever type probes, each of which touches the bonding pads of the chip, so that the test signal of the tester can be transmitted back and forth between the chip and the tester.

A cantilever type (Cantilever Type) probe 90 of a general probe card, as shown in FIG. 91, and the other end has a tip 94; the rod 92 extends from the fixed part 91 in the horizontal direction; as shown in Figure 15, when the tip 94 of the probe 90 is abutted against a When the object under test (DUT) is 95 , the external force will cause the rod 92 to deform, and the probe 90 can abut against the object under test 95 through the stress generated by the deformation.

However, when the structure of the above-mentioned cantilever probe 90 is subjected to an external force, stress concentration is likely to occur at the position where the rod 92 and the fixed part 91 are connected to each other. When the test object 95 is tested for a long time, the rod will often 92 structures have suffered fatigue failure from this location.

Contents of the invention

Therefore, the main purpose of the present invention is to provide a cantilever probe, which can increase the elasticity of the probe structure and reduce the fatigue failure of the probe.

In order to achieve the purpose disclosed above, the cantilever probe of the present invention includes a fixed part and a rod connected to the fixed part, and the elastic coefficient of the rod is different from that of the fixed part; thus, the present invention can Increase the elasticity of the probe structure and reduce the fatigue damage of the probe.

In a preferred embodiment of the present invention, the fixing part of the probe is arranged on a body, and the body has a supporting part, and the rod is against the supporting part; the rod uses the supporting part as a fulcrum , when an external force is applied to the free end of the rod, the whole rod is deformed correspondingly by the Lever Principle (LeverPrincicle), that is, the elasticity of the fixing part can be used to increase the strength of the probe, and when the resistance of the object to be measured When the flatness of the contact point is not good, the probe can also contact the object to be tested smoothly, and the stress generated by the rod during the test can be evenly distributed in a predetermined area to avoid stress concentration. Reduce the occurrence of damage to the probe structure.

Description of drawings

Fig. 1 is the perspective view of the first preferred embodiment of the present invention;

Fig. 2 is the method schematic diagram of the first preferred embodiment of the present invention;

Fig. 3 is the method schematic diagram of the first preferred embodiment of the present invention;

Fig. 4 is the perspective view of the second preferred embodiment of the present invention;

5 is a perspective view of a third preferred embodiment of the present invention;

Figure 6 is a perspective view of a fourth preferred embodiment of the present invention;

Fig. 7 is the front view of the fifth preferred embodiment of the present invention;

Fig. 8 is a partial perspective view of a fifth preferred embodiment of the present invention;

Fig. 9 is a front view of a sixth preferred embodiment of the present invention;

Fig. 10 is the front view of the seventh preferred embodiment of the present invention;

Fig. 11 is the front view of the eighth preferred embodiment of the present invention;

Fig. 12 is the front view of the ninth preferred embodiment of the present invention;

Fig. 13 is a front view of the tenth preferred embodiment of the present invention;

Figure 14 is a front view of a conventional probe; and

Figure 15 is a schematic diagram of a commonly used probe.

Detailed ways

Hereinafter, some preferred embodiments are listed in conjunction with the accompanying drawings to describe the structure and effect of the present invention in detail.

Please refer to Fig. 1, which is the cantilever probe 10 provided by the first preferred embodiment of the present invention. The probe 10 includes a fixed part 11 and a rod 13. The fixed part 11 is made of a folded plate Formed so that the fixed part 11 is an elastic body, one end of the rod part 13 has a tip 15, and the other end is arranged on the top of the fixed part 11, the rod part 13 and the fixed part 11 are perpendicular to each other, and the bottom end of the fixed part 11 is provided On a body 19 , the rod 13 extends horizontally from the fixing portion 11 ; the probe 10 can be set on a circuit board 18 of a probe card for testing integrated circuits.

The manufacturing method of the cantilever probe 10 of the first preferred embodiment of the present invention, as shown in FIG. Silicon micromachining) method, ceramic processing method, or electrochemical process (Electrochemical Fabrication, Efab), and the manufacturing method of base 20 can be Plating (Platating) mode or electrochemical process (Electrochemical Fabrication, Efab); Base 20 has a folded fixed part 11 and a rod 13, one end of the rod 13 has a pointed part 15, and the other end is arranged on the fixed part 11; or other bonding methods) to combine the base 20 and the body 19, so that the fixing portion 11 of the base 20 is bonded to the body 19, and finally remove the base 20 to form the structure of the probe 10 as shown in FIG. 1 .

The probe structure completed by the above manufacturing method, because the fixed part 11 is folded, makes the overall structure of the fixed part 11 have better elasticity, and is different from the elasticity of the rod 13 due to its own material. When the tip 15 of 13 abuts against an object under test (not shown in the figure), the external force borne by the rod 13 is respectively loaded by the rod 13 and the fixed part 11, and the fixed part 11 can absorb and store the external force, The stress generated by the structure of the probe 10 is reduced and the stress concentration phenomenon is reduced, so that the structure of the probe 10 can be prevented from being damaged by fatigue when the probe 10 is used for a long-time test.

In this way, the present invention can achieve the purpose of reducing stress concentration and avoiding fatigue damage by virtue of the elastic probe structure.

In the present invention, elastic structures can also be designed on other parts of the probe, which can also achieve the purpose of the present invention.

As shown in Figure 4, the cantilever probe 30 provided by the second preferred embodiment of the present invention also includes a fixed part 31 and a rod 32, and the characteristics are that the fixed part 31 is a cylinder, and the rod 32 It has an integrally formed and folded elastic portion 33. The elastic portion 33 of the rod 32 is located at the top of the fixed portion 31. When the tip 34 of the rod 32 touches the object to be tested, the elastic portion can be used 33 absorbs the external force it bears to achieve the same effect as the first preferred embodiment: as shown in Figure 5, the cantilever probe 40 provided by the third preferred embodiment of the present invention also has a fixed part 41 and a bar 42, the feature is that the bar 42 has a first part 43 and two second parts 44 in the shape of a plate; the materials of the first part 43 and the second part 44 are different, and the two second parts 44 are respectively It is located at the two ends of the first part 43, and the material and structure of the first part 43 and the second part 44 are different, and the coefficient of elasticity of the first part 43 and the coefficient of elasticity of the second part 44 are also different. The rod 42 can be adjusted and matched with the first part 43 and the second part 44 according to the stress condition to have different elasticity; as shown in Figure 6, it is the cantilever probe 45 provided by the fourth preferred embodiment of the present invention , the feature is that the rod 46 has two first parts 47 and two second parts 48, and the two second parts 48 are arranged between the two first parts 47 at intervals, which can also achieve the purpose of changing the elastic coefficient.

As shown in Figures 7 and 8, the cantilever probe 50 provided by the fifth preferred embodiment of the present invention includes a fixed portion 51 and a rod extending horizontally from the fixed portion 51. 52, the fixed part 51 has two volute springs 53, the two springs 53 are located in the chamber 55 of the body 54, and the bottom end of the fixed part 51 is set in the center of each spring 53; when the free end of the rod 52 is received When there is an external force, the external force can be transmitted to each spring 53 through the rod 52 and the fixing part 51 to increase the elasticity of the probe 50; The probe 56 and the fixing part 57 are two cylinders, and both have two volute springs 58, so that the probe 56 has better elasticity, and the probe 56 can be applied to the test work that requires a large external force.

As shown in Fig. 10, the cantilever type probe 60 provided by the seventh preferred embodiment of the present invention has substantially the same components as the first preferred embodiment, and the feature is that the body 61 has a support portion 62, and the rod The member 63 is against the support portion 62, so that the stress generated by the rod member 63 due to the testing process is evenly distributed in a predetermined area, avoiding stress concentration and reducing the damage of the probe structure; or as shown in Figure 11 As shown, the cantilever probe 65 provided by the eighth preferred embodiment of the present invention is characterized in that when the rod 66 is against the support part 67, the free end of the rod 66 is in a raised shape, so that the rod 66 itself has a load in advance to increase the strength of the probe 65 .

As shown in FIG. 12 , the cantilever probe 70 provided by the ninth preferred embodiment of the present invention is characterized in that the folded fixing portion 71 extends in a direction parallel to the body 72 , and the rod 73 It is further arranged at the other end of the fixed part 71, and is located above the fixed part 71, so that when the rod 73 abuts against the object to be tested, it can abut against the fixed part 71 to achieve elasticity and reduce stress concentration The advantages of the phenomenon; as shown in Figure 13, the cantilever probe 75 provided by the tenth preferred embodiment of the present invention is characterized in that a support portion 77 is integrally extended from the bottom side of the rod 76, which can also achieve the above-mentioned Advantages of reducing stress concentrations.

It is worth mentioning that, in the fifth, sixth, seventh, eighth, ninth, and tenth preferred embodiments provided by the present invention, each rod can use the support part or the fixed part as a fulcrum, when the rod When an external force is applied to the free end, the whole bar is deformed by the Lever Principle, and the probe uses an elastic fixed part to increase the strength, and when the flatness of the abutting point of the object to be measured is not good , the probe can also be in contact with the analyte more smoothly. At the same time, when the elastic coefficient of the fixed part is greater than that of the rod, most of the stress formed by the pressure on the free end will be evenly distributed on the rod, so the stress per unit length of the rod can be reduced, and the Avoid single point stress concentration effects.

Claims (29)

1. A cantilever probe, characterized in that it comprises a fixed part, and a rod connected to the fixed part, and the elastic coefficient of the rod is different from that of the fixed part. 2. The cantilever probe according to claim 1, wherein the fixing part is an elastic body. 3. The cantilever probe according to claim 1, wherein the fixing portion is a folded board. 4. The cantilever probe according to claim 1, wherein the fixed portion is a cylinder, and the rod has an integrally formed and folded elastic portion, the elastic portion is arranged on the fixed department. 5 . The cantilever probe according to claim 1 , wherein the rod has a plate-shaped first portion and a second portion; the first portion and the second portion are made of different materials. 6 . The cantilever probe according to claim 1 , wherein the fixing part has at least one scroll spring, and the bottom end of the fixing part passes through the center of each spring. 7. A probe card, comprising a circuit board and some cantilever probes; it is characterized in that each of the cantilever probes includes a fixed part, and a rod connected to the fixed part, the elasticity of the rod The coefficient is different from the elastic coefficient of the fixed part. 8. The probe card according to claim 7, wherein the fixing part is an elastic body. 9. The probe card according to claim 7, wherein the fixing portion is a folded board. 10. The probe card according to claim 7, wherein the fixing part is a cylinder, the rod has an integrally formed and folded elastic part, and the elastic part is arranged on the fixing part . 11. The probe card according to claim 7, wherein the rod has a first part and a second part in the shape of a plate; the first part and the second part are made of different materials. 12. The probe card according to claim 7, wherein the fixing part has at least one scroll spring, and the bottom end of the fixing part passes through the center of each spring. 13. A method for making a probe, characterized in that it comprises: a. preparing a base, the base has a folded fixing portion and a rod extending from the fixing portion; b. preparing a body; and c. Combining the base and the body so that the fixing portion is disposed on the body. 14 . The method for manufacturing the probe according to claim 13 , wherein the body is made by silicon wafer microfabrication. 15. The method of manufacturing the probe according to claim 13, wherein the body is made by ceramic processing. 16. The method for manufacturing the probe according to claim 13, wherein the body is made by electrochemical process. 17. The method of manufacturing the probe according to claim 13, wherein the base is made by plating. 18. The method of manufacturing the probe according to claim 13, wherein the base is made by electrochemical process. 19. The manufacturing method of the probe according to claim 13, wherein in the step c, the base and the body are combined with each other by adhesive. 20. The manufacturing method of the probe according to claim 13, wherein in the step c, the base and the body are combined with each other by welding. 21. The method of manufacturing the probe according to claim 13, wherein in the step c, the base and the body are bonded to each other with conductive glue. 22. A probe, characterized in that it is produced by the method of claim 13. 23 . The probe according to claim 22 , wherein the probe comprises a fixing part, and a rod connected to the fixing part, and the elastic coefficient of the rod is different from that of the fixing part. 24. A probe, characterized in that it comprises: a body, the body has a support portion and a fixing portion; and A rod, the elastic coefficient of the rod is different from that of the fixing part, one end of the rod is arranged on the fixing part, and the other end extends toward the supporting part, so that the rod is against the supporting part. 25. The cantilever probe according to claim 24, wherein the fixing part is an elastic body. 26. The probe according to claim 24, wherein the fixing part is a folded board. 27 . The probe according to claim 24 , wherein the fixing part is a cylinder, and the rod has an integrally formed and folded elastic part, and the elastic part is disposed on the fixing part. 28 . The probe according to claim 24 , wherein the rod has a first portion and a second portion in a plate shape; the first portion and the second portion are made of different materials. 29. The probe according to claim 24, wherein the fixing part has at least one scroll spring, and the bottom end of the fixing part passes through the center of each spring.

Images