CN1794407A - Pland display having umbrella-shaped grid array structure and its manufacturing technology - Google Patents

Abstract

This invention relates to a panel display with an umbrella grating array structure and its process technology, in which, the display includes a sealed vacuum cavity composed of a cathode panel, an anode panel and surrounding glasses, a photoetched anode conduction layer and a fluorescence powder layer on the conduction layer, a wall supporting structure and getter elements, in which, an umbrella grating array structure is prepared on the cathode panel and the control to electronic emission of the cathode is strengthened on the basis of fine field emission property of the cathode to reduce the working voltage of the device and increase its emission efficiency.

Description

The flat-panel monitor and the manufacture craft thereof of umbrella shape grid array structure

Technical field

The invention belongs to the mutual crossing domain in Display Technique field, plane, microelectronics science and technology field, vacuum science and technical field and nanoscale science and technology field, relate to the element manufacturing of panel field emission display, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, specially refer to the manufacture craft that has umbrella shape grid array field emission flat panel display device structure, carbon nanotube cathod.

Background technology

Carbon nano-tube is a kind of coaxial tubulose material, alive outside effect can be launched a large amount of electronics down, it has little tip curvature radius, high aspect rate, good field emission characteristics and good physical and chemical stability, be a kind of quite outstanding cold cathode emissive material, caused showing great attention to of numerous researchers.Utilizing carbon nano-tube is a kind of emerging field emission types of display part as the flat-panel monitor of cathode material, has advantages such as high brightness, complanation and high definition, and it is used more and more widely, has sizable development space future.

In order to effectively reduce the total device cost, reduce the operating voltage of device, so that can combine with the integrated drive electronics of routine, the field emission display device of making three-stage structure has become a kind of inevitable choice.In the middle of the carbon nanotube cathod field emission flat-panel display of three-stage structure, the control gate electrode structure is one of element of comparison key, and it plays very necessary control effect to the electronics emission of carbon nanotube cathod.No matter be the material of making the control grid, manufacture craft is still controlled the version of grid etc., all is the aspect of researchers' significant.At present, the version that grid is positioned at the carbon nanotube cathod top, i.e. high grid structure have all been selected to control in most of flat-panel monitors.The strong control action of this grid structure is obvious, and manufacture craft is fairly simple, but formed grid current is bigger, and the control gate pole tension is than higher, and this is its disadvantage.So, should how this structure be improved, make it to make full use of the strong control action of this grid structure, increasing is to the control of carbon nanotube cathod electronics emission, also to effectively reduce grid current simultaneously, reduce the grid operating voltage, this is the realistic problem that desired value must be thought deeply and study.How making full use of on the basis that the direct growth legal system is equipped with the good field emission characteristics that carbon nanotube cathod has, control gate electrode structure and carbon nanotube cathod structure are organically combined, thereby promote the Highgrade integration development of integral device, and how to select the grid structure form that is fit to, how to select the gate fabrication process that is fit to, or the like, these all are the realistic problems that needs emphasis to consider.

In addition, in the middle of the panel field emission display spare of three-stage structure, guaranteeing that grid structure has carbon nanotube cathod under the prerequisite of good control action, also need to reduce as much as possible the total device cost, carry out reliable and stable, with low cost, function admirable, high quality devices is made.

Summary of the invention

The objective of the invention is to overcome the shortcoming that exists in the above-mentioned flat-panel display device and provide a kind of with low cost, manufacturing process is reliable and stable, be made into the power height, the flat-panel display device and the manufacture craft thereof that have umbrella shape grid array structure simple in structure.

The object of the present invention is achieved like this:

A kind of flat-panel monitor that has umbrella shape grid array structure, comprise by negative electrode panel, anode plate and all around glass enclose the sealed vacuum chamber that frame constitutes; The phosphor powder layer on anode conductive layer at anode conductive layer that photoetching is arranged on the anode plate and preparation; Supporting wall structure and getter subsidiary component are manufactured with umbrella shape grid array structure on the negative electrode panel.

Described umbrella shape grid structure comprises the negative electrode panel, be arranged on the grid conducting layer on the negative electrode panel, be arranged on the doped polysilicon layer above the grid conducting layer, wherein doped polysilicon layer is shaped as a beveled structure, dielectric isolation layer after the etching covers whole doped polysilicon layers, dielectric isolation layer is kept apart grid conducting layer and cathode conductive layer mutually, cathode conductive layer is present in adjacent umbrella shape doped polysilicon layer position intermediate, and be present on the plane that parallels with the negative electrode panel, have catalyst metal layer above the cathode conductive layer, preparation has carbon nanotube cathod on catalyst metal layer.

Grid conducting layer is one of tin indium oxide rete, metal level, and the top doped polysilicon layer of grid conducting layer is the n type or is the p type.Described dielectric isolation layer is a silicon dioxide layer, dielectric isolation layer after the etching covers whole doped polysilicon layers and grid conducting layer, cathode conductive layer is one of metal gold, silver, copper, aluminium, tin, indium, molybdenum, and the trend of cathode conductive layer and grid conducting layer is orthogonal.Described catalyst metal layer is one of metallic iron, cobalt, nickel.

A kind of manufacture craft that has the flat-panel monitor of umbrella shape grid array structure, its manufacture craft is as follows:

1), negative electrode and the making of plate: whole plate glass is carried out scribing, produce the negative electrode panel;

2), the making of grid conducting layer: evaporation layer of metal chromium on the negative electrode panel, in conjunction with conventional photoetching process, metallic chromium layer is carried out etching then, form grid conducting layer;

3), the making of doped polysilicon layer: on grid conducting layer, prepare doped polysilicon layer, in conjunction with conventional photoetching process, doped polysilicon layer is carried out etching then; Polysilicon layer after the etching be shaped as a beveled structure,

4), the making of dielectric isolation layer: on the negative electrode panel, prepare the layer of silicon dioxide layer, in conjunction with conventional photoetching process, silicon dioxide layer is carried out etching then, form dielectric isolation layer; Dielectric isolation layer after the etching will cover whole doped polysilicon layers and grid conducting layer, and this dielectric isolation layer is kept apart grid conducting layer and cathode conductive layer mutually;

5), the making of cathode conductive layer: metal level on the evaporation on dielectric isolation layer, in conjunction with conventional photoetching process, the metal molybdenum layer is carried out etching then, form cathode conductive layer; Cathode conductive layer after the etching only exists only in adjacent umbrella shape doped polycrystalline silicon structure position intermediate, and only exists only on the plane that parallels with the negative electrode panel, and the cathode conductive layer of all the other positions need be got rid of; The trend of cathode conductive layer and grid conducting layer is orthogonal;

6), the making of catalyst metal layer: evaporation layer of metal on cathode conductive layer, in conjunction with conventional photoetching process, metal level is carried out etching then, form catalyst metal layer;

7), the growth of carbon nanotube cathod: the catalyst that utilizes catalyst metal layer to use as carbon nano-tube in conjunction with low temperature direct growth method, goes out carbon nanotube cathod in the superficial growth of cathode conductive layer;

8), the making of anode glass panel: whole plate glass is carried out cutting, produce the anode glass panel;

9), the making of anode electrode layer: evaporation one deck tin indium oxide rete on the anode glass panel; In conjunction with conventional photoetching process, tin indium oxide rete is carried out etching, form anode electrode layer;

10), the making of insulation paste layer: in conjunction with silk-screen printing technique, the non-display area printing insulation paste layer at anode electrode layer is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: 5 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes;

11), the making of phosphor powder layer: in conjunction with silk-screen printing technique, phosphor powder layer is printed in the viewing area on anode electrode layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes;

12), device assembling: cathode glass faceplate, anode glass panel, supporting wall structure glass are enclosed frame be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip,

13), finished product is made: the device that has assembled is carried out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out high temperature sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.

The present invention has following good effect:

Main characteristics among the present invention are to have made umbrella shape grid array structure, and have made and have umbrella shape grid array field emission flat light-emitting display device structure, carbon nanotube cathod.

At first, in the umbrella shape grid array structure in the present invention, the umbrella shape grid of making plays strong control action to the electronics emission of carbon nanotube cathod.When after applying appropriate voltage on the umbrella shape grid, will form powerful electric field strength on top, carbon nanotube cathod surface, force carbon nanotube cathod to launch a large amount of electronics, anode high-speed motion under the high-tension effect of anode, impact fluorescence bisque and send visible light.The umbrella shape grid of making can all apply powerful electric field strength in the top and the side direction of carbon nanotube cathod, help further to increase the electric field strength of carbon nano-tube top end surface, help further improving the electronic transmitting efficiency of carbon nanotube cathod, increase the display brightness of display device, improve the power that is made into of integral device, significantly improved the luminous efficiency of device.In addition, in the umbrella shape grid array structure in the present invention, be all to make under the situation about finishing at whole grid structures, just carry out at last the growth of carbon nanotube cathod, that is to say that the making of carbon nanotube cathod is not subjected to the influence of other display device technology, also just greatly reduced the damage of carbon nanotube cathod;

Secondly, in umbrella shape grid array structure of the present invention, keep apart mutually with dielectric isolation layer between umbrella shape grid structure and the carbon nanotube cathod, can not cause the appearance of short circuit phenomenon between the two.Like this, by the thickness of effective control dielectric isolation layer, just the distance between control cathode and the grid effectively also can further be reduced the coverage between the two, thereby reduces the operating voltage of integral display spare; Owing to keep apart fully with dielectric isolation layer between negative electrode and the grid, therefore needn't worry the generation of short circuit spark phenomenon between the two, greatly improved the power that is made into of integral device; Made cathode conductive layer, on the basis of cathode conductive layer, made catalyst metal layer, utilize low temperature direct growth method to prepare carbon nanotube cathod, so just made full use of the good field emission characteristics that the direct growth legal system is equipped with carbon nanotube cathod, help further to increase the electron emission current of integral device, increase the emission current uniformity of carbon nanotube cathod, improve the emission of carbon nanotube cathod;

The 3rd, in the umbrella shape grid array structure in the present invention, on cathode conductive layer, made catalyst metal layer, this has just done sufficient preparation for the growth of the carbon nanotube cathod in the subsequent technique, so just can be at the surperficial direct growth carbon nanotube cathod of cathode conductive layer, also just make grid structure and carbon nanotube cathod structure height be integrated together, both simplified the manufacture craft of integral device, also help further improving simultaneously the display resolution of integral device.

In addition, in the umbrella shape grid array structure in the present invention, do not adopt special structure fabrication material, do not adopt special device making technics yet, this has just further reduced the cost of manufacture of whole flat-panel display device to a great extent, simplify the manufacturing process of device, can carry out large-area element manufacturing, helped carrying out business-like large-scale production.

Description of drawings

Fig. 1 has provided the vertical structure schematic diagram of umbrella shape grid array structure;

Fig. 2 has provided the transversary schematic diagram of umbrella shape grid array structure;

Fig. 3 has provided and has had structural representation umbrella shape grid array structure, the carbon nanotube field emission flat-panel screens.

Embodiment

Below in conjunction with drawings and Examples the present invention is further specified, but the present invention is not limited to these embodiment.

The present invention includes by negative electrode panel 1, anode plate 11 and all around glass enclose the sealed vacuum chamber that frame 8 is constituted; Anode conductive layer 12 and the phosphor powder layer 14 of preparation on anode conductive layer 12 that photoetching is arranged on the plate 11 at anode; Supporting wall structure 9 and getter subsidiary component 10 are manufactured with umbrella shape grid array structure on negative electrode panel 1.

Described umbrella shape grid structure comprises negative electrode panel 1, be arranged on the grid conducting layer 2 on the negative electrode panel 1, be arranged on the doped polysilicon layer 3 above the grid conducting layer 2, wherein doped polysilicon layer 3 is shaped as a beveled structure, dielectric isolation layer 4 after the etching covers whole doped polysilicon layers 3, dielectric isolation layer 4 is kept apart grid conducting layer 2 and cathode conductive layer 5 mutually, cathode conductive layer 5 is present in adjacent umbrella shape doped polysilicon layer 3 position intermediate, and be present on the plane that parallels with the negative electrode panel, have catalyst metal layer 6 above the cathode conductive layer 5, preparation has carbon nanotube cathod 7 on catalyst metal layer 6.

Grid conducting layer 2 is one of tin indium oxide rete, metal level, and the top doped polysilicon layer of grid conducting layer 2 is the n type or is the p type.

Described dielectric isolation layer 4 is a silicon dioxide layer, dielectric isolation layer after the etching covers whole doped polysilicon layers 3 and grid conducting layer 2, cathode conductive layer is one of metal gold, silver, copper, aluminium, tin, indium, molybdenum, and the trend of cathode conductive layer and grid conducting layer is orthogonal.Described catalyst metal layer 6 is one of metallic iron, cobalt, nickel.

Umbrella shape grid structure among the present invention comprises cathode glass faceplate, grid conducting layer, doped polysilicon layer, dielectric isolation layer, cathode conductive layer, catalyst metal layer, carbon nanotube cathod part, and adopts following technology to make:

1, the making of cathode glass faceplate

The dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;

2, the making of grid conducting layer

Evaporation layer of metal chromium on the negative electrode panel in conjunction with conventional photoetching process, carries out etching to metallic chromium layer then, forms grid conducting layer;

3, the making of doped polysilicon layer

On grid conducting layer, prepare n type doped polysilicon layer, in conjunction with conventional photoetching process, doped polysilicon layer is carried out etching then; Polysilicon layer after the etching should have following shape, that is: its basic configuration is a beveled structure, promptly by doped polysilicon layer is carried out etching, removes redundance;

4, the making of dielectric isolation layer

On the negative electrode panel, prepare the layer of silicon dioxide layer, in conjunction with conventional photoetching process, silicon dioxide layer is carried out etching then, form dielectric isolation layer; Dielectric isolation layer after the etching will cover whole doped polysilicon layers and grid conducting layer, and this dielectric isolation layer is kept apart grid and negative electrode mutually;

5, the making of cathode conductive layer

Metal molybdenum layer on the evaporation on dielectric isolation layer in conjunction with conventional photoetching process, carries out etching to the metal molybdenum layer then, forms cathode conductive layer; Cathode conductive layer after the etching should have following shape, that is: cathode conductive layer only exists only in adjacent umbrella shape doped polycrystalline silicon structure position intermediate, and only exist only on the plane that parallels with the negative electrode panel, the cathode conductive layer of all the other positions need be got rid of; The trend of cathode conductive layer and grid conducting layer is orthogonal;

6, the making of catalyst metal layer

Evaporation layer of metal cobalt on cathode conductive layer in conjunction with conventional photoetching process, carries out etching to layer of metal cobalt then, forms catalyst metal layer;

7, the cleaning surfaces of umbrella shape grid array structure is handled

Clean is carried out on surface to umbrella shape grid array structure, removes dust and impurity;

8, the growth of carbon nanotube cathod

The catalyst that utilizes catalyst metal layer to use as carbon nano-tube in conjunction with low temperature direct growth method, goes out carbon nanotube cathod in the superficial growth of cathode conductive layer;

9, the reprocessing of carbon nanotube cathod

Carbon nanotube cathod is carried out reprocessing, further improve the field emission characteristics of carbon nanotube cathod.

The manufacture craft of carbon nanotube field emission flat-panel monitor that has umbrella shape grid array structure among the present invention is as follows:

1, the making of cathode glass faceplate

The dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;

2, the making of grid conducting layer

Evaporation layer of metal chromium on the negative electrode panel in conjunction with conventional photoetching process, carries out etching to metallic chromium layer then, forms grid conducting layer;

3, the making of doped polysilicon layer

On grid conducting layer, prepare n type doped polysilicon layer, in conjunction with conventional photoetching process, doped polysilicon layer is carried out etching then; Polysilicon layer after the etching should have following shape, that is: its basic configuration is a beveled structure, promptly by doped polysilicon layer is carried out etching, removes redundance;

4, the making of dielectric isolation layer

On the negative electrode panel, prepare the layer of silicon dioxide layer, in conjunction with conventional photoetching process, silicon dioxide layer is carried out etching then, form dielectric isolation layer; Dielectric isolation layer after the etching will cover whole doped polysilicon layers and grid conducting layer, and this dielectric isolation layer is kept apart grid and negative electrode mutually;

5, the making of cathode conductive layer

Metal molybdenum layer on the evaporation on dielectric isolation layer in conjunction with conventional photoetching process, carries out etching to the metal molybdenum layer then, forms cathode conductive layer; Cathode conductive layer after the etching should have following shape, that is: cathode conductive layer only exists only in adjacent umbrella shape doped polycrystalline silicon structure position intermediate, and only exist only on the plane that parallels with the negative electrode panel, the cathode conductive layer of all the other positions need be got rid of; The trend of cathode conductive layer and grid conducting layer is orthogonal;

6, the making of catalyst metal layer

Evaporation layer of metal cobalt on cathode conductive layer in conjunction with conventional photoetching process, carries out etching to layer of metal cobalt then, forms catalyst metal layer;

7, the cleaning surfaces of umbrella shape grid array structure is handled

Clean is carried out on surface to umbrella shape grid array structure, removes dust and impurity;

8, the growth of carbon nanotube cathod

The catalyst that utilizes catalyst metal layer to use as carbon nano-tube in conjunction with low temperature direct growth method, goes out carbon nanotube cathod in the superficial growth of cathode conductive layer;

9, the reprocessing of carbon nanotube cathod

Carbon nanotube cathod is carried out reprocessing, further improve the field emission characteristics of carbon nanotube cathod.

10, the making of anode glass panel

Whole sodium calcium plate glass is carried out cutting, produce the anode glass panel;

11, the making of anode electrode layer

Evaporation one deck tin indium oxide rete on the anode glass panel; In conjunction with conventional photoetching process, tin indium oxide rete is carried out etching, form anode electrode layer;

12, the making of insulation paste layer

In conjunction with silk-screen printing technique, the non-display area printing insulation paste layer at anode electrode layer is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace;

13, the making of phosphor powder layer

In conjunction with silk-screen printing technique, the viewing area printing phosphor powder layer on anode electrode layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes);

14, device assembling

Cathode glass faceplate, anode glass panel, supporting wall structure glass are enclosed frame be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip.

15, finished product is made

The device that has assembled is carried out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out high temperature sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.

The flat-plate luminous display that has umbrella shape grid array structure among the present invention has been made umbrella shape grid array structure, on the basis of the good field emission characteristics that carbon nanotube cathod had that makes full use of the preparation of direct growth method, further strengthened control to the emission of carbon nanotube cathod electronics; Reduce the operating voltage of device, improved the electronic transmitting efficiency of carbon nanotube cathod.

The fixed position of the umbrella shape grid array structure among the present invention is for being fixed on the negative electrode panel; Grid structure and cathode construction in the umbrella shape grid array structure among the present invention highly are integrated together; Grid in the umbrella shape grid array structure among the present invention is positioned at the top of carbon nanotube cathod, is controlling the electronics emission of carbon nanotube cathod; Backing material in the umbrella shape grid array structure among the present invention be large-scale, have quite good thermal endurance and operability, a High Performance Insulation material with low cost; Backing material in the umbrella shape grid array structure among the present invention is a glass, as soda-lime glass, and Pyrex, just the negative electrode panel of display device; There is grid conducting layer on the negative electrode panel in the umbrella shape grid array structure among the present invention, can carries out etching in conjunction with the photoetching process of routine; Grid conducting layer in the umbrella shape grid array structure among the present invention can be tin indium oxide rete, also can be metal level, as metal gold, silver, molybdenum, chromium, aluminium, tungsten, tin; Doped polysilicon layer of top existence of grid conducting layer in the umbrella shape grid array structure among the present invention can carry out etching in conjunction with the photoetching process of routine; Doped polysilicon layer in the umbrella shape grid array structure among the present invention can be the n type, also can be the p type; Doped polysilicon layer in the umbrella shape grid array structure among the present invention can be one deck, also can be multilayer; Polysilicon layer after the etching in the umbrella shape grid array structure among the present invention should have following shape, that is: its basic configuration is a beveled structure, promptly by doped polysilicon layer is carried out etching, removes redundance; There is a dielectric isolation layer on the negative electrode panel in the umbrella shape grid array structure among the present invention, is silicon dioxide layer, can carry out etching in conjunction with the photoetching process of routine; Dielectric isolation layer after the etching in the umbrella shape grid array structure among the present invention will cover whole doped polysilicon layers and grid conducting layer, and this dielectric isolation layer is kept apart grid and negative electrode mutually; Cathode conductive layer of top existence of dielectric isolation layer in the umbrella shape grid array structure among the present invention can carry out etching in conjunction with the photoetching process of routine; Cathode conductive layer after the etching in the umbrella shape grid array structure among the present invention should have following shape, that is: cathode conductive layer only exists only in adjacent umbrella shape doped polycrystalline silicon structure position intermediate, and only exist only on the plane that parallels with the negative electrode panel, the cathode conductive layer of all the other positions need be got rid of; Cathode conductive layer in the umbrella shape grid array structure among the present invention is a metal level, can be metallic gold, silver, copper, aluminium, tin, indium, molybdenum; The cathode conductive layer in the umbrella shape grid array structure among the present invention and the trend of grid conducting layer are orthogonal; Catalyst metal layer of top existence of cathode conductive layer in the umbrella shape grid array structure among the present invention can carry out etching in conjunction with the photoetching process of routine; Catalyst metal layer in the umbrella shape grid array structure among the present invention can be metallic iron, cobalt, nickel; Can utilize catalyst metals to prepare carbon nanotube cathod in the umbrella shape grid array structure among the present invention as catalyst.

Claims (6)

1, a kind of flat-panel monitor that has umbrella shape grid array structure, comprise by negative electrode panel [1], anode plate [11] and all around glass enclose the sealed vacuum chamber that frame [8] is constituted; The phosphor powder layer [14] on anode conductive layer [12] at anode conductive layer [12] that photoetching is arranged on the anode plate [11] and preparation; Supporting wall structure [9] and getter subsidiary component [10] is characterized in that: be manufactured with umbrella shape grid array structure on negative electrode panel [1].

2, a kind of flat-panel monitor that has umbrella shape grid array structure according to claim 1, it is characterized in that: described umbrella shape grid structure comprises negative electrode panel [1], be arranged on the grid conducting layer [2] on the negative electrode panel [1], be arranged on the doped polysilicon layer [3] above the grid conducting layer [2], wherein doped polysilicon layer [3] is shaped as a beveled structure, dielectric isolation layer after the etching [4] covers whole doped polysilicon layers [3], dielectric isolation layer [4] is kept apart grid conducting layer [2] and cathode conductive layer [5] mutually, cathode conductive layer [5] is present in adjacent umbrella shape doped polysilicon layer [3] position intermediate, and be present on the plane that parallels with the negative electrode panel, have catalyst metal layer [6] above the cathode conductive layer [5], going up preparation at catalyst metal layer [6] has carbon nanotube cathod [7].

3, a kind of flat-panel monitor that has umbrella shape grid array structure according to claim 2, it is characterized in that: grid conducting layer [2] is one of tin indium oxide rete, metal level, and the top doped polysilicon layer of grid conducting layer [2] is the n type or is the p type.

4, a kind of flat-panel monitor that has umbrella shape grid array structure according to claim 2, it is characterized in that: described dielectric isolation layer [4] is a silicon dioxide layer, dielectric isolation layer after the etching covers whole doped polysilicon layers [3] and grid conducting layer [2], cathode conductive layer is one of metal gold, silver, copper, aluminium, tin, indium, molybdenum, and the trend of cathode conductive layer and grid conducting layer is orthogonal.

5, a kind of flat-panel monitor that has umbrella shape grid array structure according to claim 2 is characterized in that: described catalyst metal layer [6] is one of metallic iron, cobalt, nickel.

6, a kind of manufacture craft that has the flat-panel monitor of umbrella shape grid array structure, it is characterized in that: its manufacture craft is as follows:

1), the making of negative electrode panel: whole plate glass is carried out scribing, produce negative electrode panel [1];

2), the making of grid conducting layer: evaporation layer of metal chromium on the negative electrode panel, in conjunction with conventional photoetching process, metallic chromium layer is carried out etching then, form grid conducting layer [2];

3), the making of doped polysilicon layer: on grid conducting layer [2], prepare doped polysilicon layer [3], in conjunction with conventional photoetching process, doped polysilicon layer is carried out etching then; Polysilicon layer after the etching be shaped as a beveled structure,

4), the making of dielectric isolation layer: on the negative electrode panel, prepare the layer of silicon dioxide layer, in conjunction with conventional photoetching process, silicon dioxide layer is carried out etching then, form dielectric isolation layer [4]; Dielectric isolation layer after the etching will cover whole doped polysilicon layers [3] and grid conducting layer [2], and this dielectric isolation layer is kept apart grid conducting layer [2] and cathode conductive layer [5] mutually;

5), the making of cathode conductive layer: metal level on the evaporation on dielectric isolation layer [4], in conjunction with conventional photoetching process, the metal molybdenum layer is carried out etching then, form cathode conductive layer [5]; Cathode conductive layer after the etching only exists only in adjacent umbrella shape doped polycrystalline silicon structure position intermediate, and only exists only on the plane that parallels with the negative electrode panel, and the cathode conductive layer of all the other positions need be got rid of; The trend of cathode conductive layer and grid conducting layer is orthogonal;

6), the making of catalyst metal layer: go up the evaporation layer of metal at cathode conductive layer [5], in conjunction with conventional photoetching process, metal level is carried out etching then, form catalyst metal layer [6];

7), the growth of carbon nanotube cathod: the catalyst that utilizes catalyst metal layer to use as carbon nano-tube in conjunction with low temperature direct growth method, goes out carbon nanotube cathod [7] in the superficial growth of cathode conductive layer;

8), the making of anode glass panel: whole plate glass is carried out cutting, produce the anode glass panel;

9), the making of anode electrode layer: evaporation one deck tin indium oxide rete on the anode glass panel; In conjunction with conventional photoetching process, tin indium oxide rete is carried out etching, form anode electrode layer;

10), the making of insulation paste layer: in conjunction with silk-screen printing technique, the non-display area printing insulation paste layer at anode electrode layer is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: 5 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes;

11), the making of phosphor powder layer: in conjunction with silk-screen printing technique, phosphor powder layer is printed in the viewing area on anode electrode layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes;

12), device assembling: cathode glass faceplate, anode glass panel, supporting wall structure glass are enclosed frame be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip,

13), finished product is made: the device that has assembled is carried out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out high temperature sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.