CN1790209A - Liquid driven ultra-micro-displacement control device and control method - Google Patents
Liquid driven ultra-micro-displacement control device and control method Download PDFInfo
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- CN1790209A CN1790209A CN 200510101701 CN200510101701A CN1790209A CN 1790209 A CN1790209 A CN 1790209A CN 200510101701 CN200510101701 CN 200510101701 CN 200510101701 A CN200510101701 A CN 200510101701A CN 1790209 A CN1790209 A CN 1790209A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/20—Hydro energy
Abstract
The invention discloses a liquid driving type super mini shift control device and method, which is composed of elastic mini shift structure and liquid driving control structure through connecting hinge, wherein the spring of elastic mini shift structure and one end of elastic mini shift bridge are fixed on the machine body; the other end of spring connects the other end of elastic mini shift bridge; the working bench and chuck are set on the left end of elastic mini shift bridge; the liquid driving control structure contains floating chamber within liquid, liquid meter and control device; the marking chamber of liquid driving control structure is set in the floating chamber and suspends in the liquid; the marking chamber contains liquid, whose quantity is controlled by liquid meter and control device. The method is convenient to adjust the shift or load macroscopically, which reaches the request of microscopic operation and control.
Description
Technical field
The present invention relates to a kind of liquid driven ultra-micro-displacement control device and control method.
Background technology
The driving of load, displacement and control are the means of each field widespread use of engineering.Along with the development of science and technology and related industry, small driving and control technology to nanoscale becomes the field that presses for, is subjected to people extremely to pay close attention to.The driving of small load or displacement, control, one of its task are operation, the adjustings by macroscopic view, realize microphysics amount or physical process are controlled; On method that general requirement is adopted and the know-why corresponding accuracy, stability and reliability are arranged; In addition, require range of control big as far as possible, easy to operate, reduce requirement as far as possible to working environment and condition.One class mechanical transfer and control modes such as bar linkage, screw mandrel-nut body, gear, tooth bar, worm-and-wheel gear, oblique mechanism, cam mechanism, can constitute little driving control device on the principle, but this class mechanism relates to mechanical motion and friction, hysteresis phenomenon is difficult to thorough solution, trace and be controlled to accurately and be difficult point; Strain, magnetostriction, electrostriction, piezoelectric crystal, piezoelectric ceramics, magnetic field, electric field, flexible hinge, spring, button spring, ferroelectric, inductance, electric capacity or the like and they jointly control mechanism, may realize small driving and control, and be widely used in each technical field, but these technology usually are subjected to some conditionality, scope as material, environment, driving is less than normal, perhaps processing and fabricating technical requirement height, operation debugging difficulty height, perhaps device complicated, difficult in maintenance, need consideration cost factor or the like.
The development of micro-nano technology has promoted the progress of little Drive Control Technique.For example, scanning probe microscopy (Scanning probe microscopy) extensively adopts piezoelectric ceramic tube, by applying the flexural deformation size and Orientation of Control of Voltage scanatron, carries out the mechanical scan motion.But the motion control scope of piezoelectric crystal, piezoelectric ceramics is generally less, in most cases the action need auxiliary controls from the macroscopic view to the microcosmic.
Summary of the invention
At the problems referred to above, the invention provides a kind of liquid driven ultra-micro-displacement control device and control method, one of purpose is to make this device can reach abundant micro displacement amount or load capacity control, realizes the driving of microscopic fields.
Another object of the present invention is to reach effective microtechnique and control requirement easily by the adjustment of macroscopical displacement or magnitude of load.
A further object of the invention is, makes device in implementing little driving and control procedure, reduces or avoids mechanical disturbance and influence to the residing microphysics process of operand.
The structural representation of liquid driven ultra-micro-displacement control device of the present invention, as shown in Figure 1; Device is connected by connection chain 7 with liquid driven control gear 2 by elasticity micro-displacement mechanism 1 and forms, above-mentioned elasticity micro-displacement mechanism 1 comprises little driving worktable and anchor clamps 3 thereof, elasticity micrometric displacement beam 5, spring 6, one end of spring 6 and elasticity micrometric displacement beam 5 is individually fixed on the body 4, spring 6 other ends are connected with the other end of elasticity micrometric displacement beam 5, worktable and anchor clamps 3 thereof are installed in the left end of elasticity micrometric displacement beam 5, make worktable 3 produce corresponding micrometric displacement or apply tiny load by elasticity micrometric displacement beam 5 and spring 6 synergy; Aforesaid liquid drive controlling mechanism 2 includes that to contain proportion in floating chamber 12, the floating chamber be ρ
A Liquid 14, amount of liquid increase or reduce by being fixed on first liquid meter in the floating chamber 12 and control device 8 and inject or extract; The mark chamber 10 of aforesaid liquid drive controlling mechanism 2 places floating chamber 12 and is suspended among the liquid 14, and containing proportion in the mark chamber is ρ
B Liquid 13, the increase of amount of liquid or reduce by being fixed on second liquid meter in the floating chamber 12 and control device 15 and inject or extract.
The hole of the turnover liquid on 15 pairs of fiducial mark chambers 10 of above-mentioned second liquid meter and control device.
There are cover plate 11, the first liquid meters and control device 8 to be fixed on the cover plate 11 in the above-mentioned floating chamber 12 by fixed mount 9.
There are cover plate 11, the second liquid meters and control device 15 to be fixed on the cover plate 11 in the above-mentioned floating chamber 12 by fixed mount 16.
Above-mentioned proportion is ρ
BLiquid 13, proportion be ρ
ALiquid 14, its proportion is 0.8～1.2g/cm
3
The little displacement control method of ultra micro of the present invention comprises the steps:
(1) according to driving, location and the control requirement of displacement, select the elasticity micrometric displacement beam 5, the spring 6 that are fit to, and corresponding floating chamber 10, mark chamber 12;
(2) increase or reduce the amount of liquid 14 in the floating chamber 12, the amount of liquid 13 in the mark chamber 10, floating chamber 12 is suspended on the liquid of marking in the chamber 10, reach the rough balance of elasticity micro-displacement mechanism 1 and liquid driven control gear 2, elasticity micro-displacement mechanism 1 is in prestress (stretching or compression) state at this moment;
(3) by second liquid meter and control device 15, injection density is ρ
BLiquid 13 in mark chamber 10, this moment, worktable and anchor clamps thereof 3 produced micrometric displacements downwards; From mark chamber 10, extract liquid, then produce upwards micrometric displacement;
(4) by first liquid meter and control device 8, injection density is ρ
ALiquid 14 in floating chamber 12, this moment, worktable and anchor clamps 3 thereof upwards produced micrometric displacement; From floating chamber 12, extract liquid, then produce downward micrometric displacement.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Wherein:
1-elasticity micro-displacement mechanism; 2-liquid driven control gear; Little driving worktable of 3-and anchor clamps thereof; The 4-body; 5-elasticity micrometric displacement beam; The 6-spring; The 7-connection chain; 8-first liquid meter and control device; The 9-fixed mount; 10-marks the chamber; The 11-cover plate; The 12-floating chamber; 13-proportion is ρ
BLiquid; 14-proportion is ρ
ALiquid; 15-second liquid meter and control device; The 16-fixed mount.
Embodiment
The structural representation of liquid driven ultra-micro-displacement control device of the present invention, as shown in Figure 1; Device is connected by connection chain 7 with liquid driven control gear 2 by elasticity micro-displacement mechanism 1 and forms, above-mentioned elasticity micro-displacement mechanism 1 comprises little driving worktable and anchor clamps 3 thereof, elasticity micrometric displacement beam 5, spring 6, one end of spring 6 and elasticity micrometric displacement beam 5 is individually fixed on the body 4, spring 6 other ends are connected with the other end of elasticity micrometric displacement beam 5, worktable and anchor clamps 3 thereof are installed in the left end of elasticity micrometric displacement beam 5, make worktable 3 produce corresponding micrometric displacement or apply tiny load by elasticity micrometric displacement beam 5 and spring 6 synergy; Aforesaid liquid drive controlling mechanism 2 includes that to contain proportion in floating chamber 12, the floating chamber be ρ
A Liquid 14, amount of liquid increase or reduce by being fixed on first liquid meter in the floating chamber 12 and control device 8 and inject or extract; The mark chamber 10 of aforesaid liquid drive controlling mechanism 2 places floating chamber 12 and is suspended among the liquid 14, and containing proportion in the mark chamber is ρ
B Liquid 13, the increase of amount of liquid or reduce by being fixed on second liquid meter in the floating chamber 12 and control device 15 and inject or extract.
The hole of the turnover liquid on 15 pairs of fiducial mark chambers 10 of above-mentioned second liquid meter and control device.
There are cover plate 11, the first liquid meters and control device 8 to be fixed on the cover plate 11 in the above-mentioned floating chamber 12 by fixed mount 9.
There are cover plate 11, the second liquid meters and control device 15 to be fixed on the cover plate 11 in the above-mentioned floating chamber 12 by fixed mount 16.
Above-mentioned proportion is ρ
BLiquid 13, proportion be ρ
ALiquid 14, its proportion is 0.8～1.2g/cm
3
The little displacement control method of ultra micro of the present invention comprises the steps:
(1) according to driving, location and the control requirement of displacement, select the elasticity micrometric displacement beam 5, the spring 6 that are fit to, and corresponding floating chamber 10, mark chamber 12;
(5) increase or reduce the amount of liquid 14 in the floating chamber 12, the amount of liquid 13 in the mark chamber 10, floating chamber 12 is suspended on the liquid of marking in the chamber 10, reach the rough balance of elasticity micro-displacement mechanism 1 and liquid driven control gear 2, elasticity micro-displacement mechanism 1 is in prestress (stretching or compression) state at this moment;
(6) by second liquid meter and control device 15, injection density is ρ
BLiquid 13 in mark chamber 10, this moment, worktable and anchor clamps thereof 3 produced micrometric displacements downwards; From mark chamber 10, extract liquid, then produce upwards micrometric displacement;
(7) by first liquid meter and control device 8, injection density is ρ
ALiquid 14 in floating chamber 12, this moment, worktable and anchor clamps 3 thereof upwards produced micrometric displacement; From floating chamber 12, extract liquid, then produce downward micrometric displacement.
Claims (7)
1. liquid driven ultra-micro-displacement control device, it is characterized in that: elasticity micro-displacement mechanism (1) and liquid driven control gear (2) are by connection chain (7) composition that is connected, above-mentioned elasticity micro-displacement mechanism (1) comprises little driving worktable and anchor clamps (3) thereof, elasticity micrometric displacement beam (5), spring (6), one end of spring (6) and elasticity micrometric displacement beam (5) is individually fixed on the body (4), spring (6) other end is connected with the other end of elasticity micrometric displacement beam (5), worktable and anchor clamps thereof (3) are installed in the left end of elasticity micrometric displacement beam (5), make worktable (3) the corresponding micrometric displacement of generation or apply tiny load by elasticity micrometric displacement beam (5) and spring (6) synergy; Aforesaid liquid drive controlling mechanism (2) includes that to contain proportion in floating chamber (12), the floating chamber be ρ
ALiquid (14), amount of liquid increase or reduce by being fixed on first liquid meter in the floating chamber (12) and control device (8) and inject or extract; The mark chamber (10) of aforesaid liquid drive controlling mechanism (2) places floating chamber (12) and is suspended among the liquid (14), and containing proportion in the mark chamber is ρ
BLiquid (13), the increase of amount of liquid or reduce by being fixed on second liquid meter in the floating chamber (12) and control device (15) and inject or extract.
2. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that above-mentioned second liquid meter and control device (15) hole to the turnover liquid on fiducial mark chamber (10).
3. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that cover plate (11) is arranged in the above-mentioned floating chamber (12), and first liquid meter and control device (8) are fixed on the cover plate (11) by fixed mount (9).
4. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that cover plate (11) is arranged in the above-mentioned floating chamber (12), and second liquid meter and control device (15) are fixed on the cover plate (11) by fixed mount (16).
5. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that above-mentioned proportion is ρ
BLiquid (13), proportion be ρ
ALiquid (14), its proportion is 0.8～1.2g/cm
3
6. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that: above-mentioned connection chain (7) upper end connects on the elasticity micrometric displacement beam (5), and the hole that the lower end is passed on the cover plate (11) is connected on the mark chamber (10).
7. the little displacement control method of the ultra micro of a liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that comprising the steps:
(1) according to driving, location and the control requirement of displacement, select the elasticity micrometric displacement beam (5), the spring (6) that are fit to, and corresponding floating chamber (10), mark chamber (12);
(2) increase or reduce the amount of liquid (14) in the floating chamber (12), the amount of liquid (13) in the mark chamber (10), floating chamber (12) is suspended on the interior liquid in mark chamber (10), reach the rough balance of elasticity micro-displacement mechanism (1) and liquid driven control gear (2), elasticity micro-displacement mechanism this moment (1) is in prestress (stretching or compression) state;
(3) by second liquid meter and control device (15), injection density is ρ
BLiquid (13) in mark chamber (10), this moment, worktable and anchor clamps (3) thereof produced micrometric displacement downwards; From mark chamber (10), extract liquid, then produce upwards micrometric displacement;
(4) by first liquid meter and control device (8), injection density is ρ
ALiquid (14) in floating chamber (12), this moment, worktable and anchor clamps (3) thereof upwards produced micrometric displacement; From floating chamber (12), extract liquid, then produce downward micrometric displacement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101017015A CN100474199C (en) | 2005-11-25 | 2005-11-25 | Liquid driven ultra-micro-displacement control device and control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101017015A CN100474199C (en) | 2005-11-25 | 2005-11-25 | Liquid driven ultra-micro-displacement control device and control method |
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| Publication Number | Publication Date |
|---|---|
| CN1790209A true CN1790209A (en) | 2006-06-21 |
| CN100474199C CN100474199C (en) | 2009-04-01 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102667464A (en) * | 2009-12-22 | 2012-09-12 | 西门子公司 | Liquid-metering device for a gas analyzer |
| CN106908313A (en) * | 2017-04-13 | 2017-06-30 | 西安交通大学 | The small load control system of big load testing machine and control method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87206843U (en) * | 1987-04-25 | 1988-04-06 | 张克俭 | Micro flow and folw-steady faucet unit |
| CN2276151Y (en) * | 1996-04-24 | 1998-03-11 | 刘学平 | Liquid level sensor device |
| CN2450660Y (en) * | 2000-11-20 | 2001-09-26 | 中国科学院青海盐湖研究所 | Sinker type density sensor |
| CN2862136Y (en) * | 2005-11-25 | 2007-01-24 | 广东工业大学 | Hydraulic-driving ultra-micro displacement control device |
-
2005
- 2005-11-25 CN CNB2005101017015A patent/CN100474199C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102667464A (en) * | 2009-12-22 | 2012-09-12 | 西门子公司 | Liquid-metering device for a gas analyzer |
| CN102667464B (en) * | 2009-12-22 | 2014-02-12 | 西门子公司 | Liquid-metering device for gas analyzer |
| US9027421B2 (en) | 2009-12-22 | 2015-05-12 | Siemens Aktiengesellschaft | Liquid-metering device for a gas analyzer |
| CN106908313A (en) * | 2017-04-13 | 2017-06-30 | 西安交通大学 | The small load control system of big load testing machine and control method |
| CN106908313B (en) * | 2017-04-13 | 2019-06-04 | 西安交通大学 | The small load control system of big load testing machine and control method |
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| Publication number | Publication date |
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| CN100474199C (en) | 2009-04-01 |
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Granted publication date: 20090401 Termination date: 20111125 |