CN2862136Y - Hydraulic-driving ultra-micro displacement control device - Google Patents
Hydraulic-driving ultra-micro displacement control device Download PDFInfo
- Publication number
- CN2862136Y CN2862136Y CNU2005200681752U CN200520068175U CN2862136Y CN 2862136 Y CN2862136 Y CN 2862136Y CN U2005200681752 U CNU2005200681752 U CN U2005200681752U CN 200520068175 U CN200520068175 U CN 200520068175U CN 2862136 Y CN2862136 Y CN 2862136Y
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- CN
- China
- Prior art keywords
- liquid
- control device
- displacement
- micro
- chamber
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/20—Hydro energy
Abstract
The utility model discloses a liquid-driven ultra-small displacement control device, which consists of elastic micro-displacement mechanism and liquid-driven control mechanism that are connected to each other with connecting chains. One ends of a spring and an elastic micro-displacement beam of said elastic micro-displacement mechanism are respectively fixed in an engine body. The other ends of the spring and elastic micro-displacement beam are interconnected. A bench and its clamper are installed at the left side of the elastic micro-displacement beam. Said liquid-driven control mechanism comprises a floating chamber, a liquid contained in the floating chamber, a liquid meter and control device mounted above the floating chamber and used for adjusting the liquid volume by injection or extraction operations. Said liquid-driven control mechanism further comprises a scaling chamber disposed inside the floating chamber and allowed to suspend in the liquid. A liquid is contained in the scaling chamber and its volume is adjusted by the liquid meter and control device by injection or extraction operation. The utility model realizes micro-operation and micro-control by convenient adjustment of macroscopic displacement or load.
Description
Technical field
The utility model relates to a kind of liquid driven ultra-micro-displacement control device.
Background technology
The driving of load, displacement and control are the means of each field widespread use of engineering.Along with the development of science and technology and related industry, small driving and control technology to nanoscale becomes the field that presses for, is subjected to people extremely to pay close attention to.The driving of small load or displacement, control, one of its task are operation, the adjustings by macroscopic view, realize microphysics amount or physical process are controlled; On method that general requirement is adopted and the know-why corresponding accuracy, stability and reliability are arranged; In addition, require range of control big as far as possible, easy to operate, reduce requirement as far as possible to working environment and condition.One class mechanical transfer and control modes such as bar linkage, screw mandrel-nut body, gear, tooth bar, worm-and-wheel gear, oblique mechanism, cam mechanism, can constitute little driving control device on the principle, but this class mechanism relates to mechanical motion and friction, hysteresis phenomenon is difficult to thorough solution, trace and be controlled to accurately and be difficult point; Strain, magnetostriction, electrostriction, piezoelectric crystal, piezoelectric ceramics, magnetic field, electric field, flexible hinge, spring, button spring, ferroelectric, inductance, electric capacity or the like and they jointly control mechanism, may realize small driving and control, and be widely used in each technical field, but these technology usually are subjected to some conditionality, scope as material, environment, driving is less than normal, perhaps processing and fabricating technical requirement height, operation debugging difficulty height, perhaps device complicated, difficult in maintenance, need consideration cost factor or the like.
The development of micro-nano technology has promoted the progress of little Drive Control Technique.For example, scanning probe microscopy (Scanning probe microscopy) extensively adopts piezoelectric ceramic tube, by applying the flexural deformation size and Orientation of Control of Voltage scanatron, carries out the mechanical scan motion.But the motion control scope of piezoelectric crystal, piezoelectric ceramics is generally less, in most cases the action need auxiliary controls from the macroscopic view to the microcosmic.
Summary of the invention
At the problems referred to above, the utility model designs a kind of liquid driven ultra-micro-displacement control device, and one of purpose is to make this device can reach abundant micro displacement amount or load capacity control, realizes the driving of microscopic fields.
Another purpose of the present utility model is to reach effective microtechnique and control requirement easily by the adjustment of macroscopical displacement or magnitude of load.
The utility model also has a purpose to be, makes device in implementing little driving and control procedure, reduces or avoids mechanical disturbance and influence to the residing microphysics process of operand.
The structural representation of the utility model liquid driven ultra-micro-displacement control device, as shown in Figure 1; Device is connected by connection chain 7 with liquid driven control gear 2 by elasticity micro-displacement mechanism 1 and forms, above-mentioned elasticity micro-displacement mechanism 1 comprises little driving worktable and anchor clamps 3 thereof, elasticity micrometric displacement beam 5, spring 6, one end of spring 6 and elasticity micrometric displacement beam 5 is individually fixed on the body 4, spring 6 other ends are connected with the other end of elasticity micrometric displacement beam 5, worktable and anchor clamps 3 thereof are installed in the left end of elasticity micrometric displacement beam 5, make worktable 3 produce corresponding micrometric displacement or apply tiny load by elasticity micrometric displacement beam 5 and spring 6 synergy; Aforesaid liquid drive controlling mechanism 2 includes that to contain proportion in floating chamber 12, the floating chamber be ρ
ALiquid 14, amount of liquid increase or reduce by being fixed on first liquid meter in the floating chamber 12 and control device 8 and inject or extract; The mark chamber 10 of aforesaid liquid drive controlling mechanism 2 places floating chamber 12 and is suspended among the liquid 14, and containing proportion in the mark chamber is ρ
BLiquid 13, the increase of amount of liquid or reduce by being fixed on second liquid meter in the floating chamber 12 and control device 15 and inject or extract.
The hole of the turnover liquid on 15 pairs of fiducial mark chambers 10 of above-mentioned second liquid meter and control device.
There are cover plate 11, the first liquid meters and control device 8 to be fixed on the cover plate 11 in the above-mentioned floating chamber 12 by fixed mount 9.
There are cover plate 11, the second liquid meters and control device 15 to be fixed on the cover plate 11 in the above-mentioned floating chamber 12 by fixed mount 16.
Above-mentioned proportion is ρ
BLiquid 13, proportion be ρ
ALiquid 14, its proportion is 0.8～1.2g/cm
3
The utility model device is work like this:
(1) according to driving, location and the control requirement of displacement, select the elasticity micrometric displacement beam 5, the spring 6 that are fit to, and corresponding floating chamber 10, mark chamber 12;
(2) increase or reduce the amount of liquid 14 in the floating chamber 12, the amount of liquid 13 in the mark chamber 10, floating chamber 12 is suspended on the liquid of marking in the chamber 10, reach the rough balance of elasticity micro-displacement mechanism 1 and liquid driven control gear 2, elasticity micro-displacement mechanism 1 is in prestress (stretching or compression) state at this moment;
(3) by second liquid meter and control device 15, injection density is ρ
BLiquid 13 in mark chamber 10, this moment, worktable and anchor clamps thereof 3 produced micrometric displacements downwards; From mark chamber 10, extract liquid, then produce upwards micrometric displacement;
(4) by first liquid meter and control device 8, injection density is ρ
ALiquid 14 in floating chamber 12, this moment, worktable and anchor clamps 3 thereof upwards produced micrometric displacement; From floating chamber 12, extract liquid, then produce downward micrometric displacement.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Wherein:
1-elasticity micro-displacement mechanism; 2-liquid driven control gear; Little driving worktable of 3-and anchor clamps thereof; The 4-body; 5-elasticity micrometric displacement beam; The 6-spring; The 7-connection chain; 8-first liquid meter and control device; The 9-fixed mount; 10-marks the chamber; The 11-cover plate; The 12-floating chamber; 13-proportion is ρ
BLiquid; 14-proportion is ρ
ALiquid; 15-second liquid meter and control device; The 16-fixed mount.
Embodiment
The structural representation of the utility model liquid driven ultra-micro-displacement control device, as shown in Figure 1; Device is connected by connection chain 7 with liquid driven control gear 2 by elasticity micro-displacement mechanism 1 and forms, above-mentioned elasticity micro-displacement mechanism 1 comprises little driving worktable and anchor clamps 3 thereof, elasticity micrometric displacement beam 5, spring 6, one end of spring 6 and elasticity micrometric displacement beam 5 is individually fixed on the body 4, spring 6 other ends are connected with the other end of elasticity micrometric displacement beam 5, worktable and anchor clamps 3 thereof are installed in the left end of elasticity micrometric displacement beam 5, make worktable 3 produce corresponding micrometric displacement or apply tiny load by elasticity micrometric displacement beam 5 and spring 6 synergy; Aforesaid liquid drive controlling mechanism 2 includes that to contain proportion in floating chamber 12, the floating chamber be ρ
ALiquid 14, amount of liquid increase or reduce by being fixed on first liquid meter in the floating chamber 12 and control device 8 and inject or extract; The mark chamber 10 of aforesaid liquid drive controlling mechanism 2 places floating chamber 12 and is suspended among the liquid 14, and containing proportion in the mark chamber is ρ
BLiquid 13, the increase of amount of liquid or reduce by being fixed on second liquid meter in the floating chamber 12 and control device 15 and inject or extract.
The hole of the turnover liquid on 15 pairs of fiducial mark chambers 10 of above-mentioned second liquid meter and control device.
There are cover plate 11, the first liquid meters and control device 8 to be fixed on the cover plate 11 in the above-mentioned floating chamber 12 by fixed mount 9.
There are cover plate 11, the second liquid meters and control device 15 to be fixed on the cover plate 11 in the above-mentioned floating chamber 12 by fixed mount 16.
Above-mentioned proportion is ρ
BLiquid 13, proportion be ρ
ALiquid 14, its proportion is 0.8～1.2g/cm
3
The utility model device is work like this:
(1) according to driving, location and the control requirement of displacement, select the elasticity micrometric displacement beam 5, the spring 6 that are fit to, and corresponding floating chamber 10, mark chamber 12;
(5) increase or reduce the amount of liquid 14 in the floating chamber 12, the amount of liquid 13 in the mark chamber 10, floating chamber 12 is suspended on the liquid of marking in the chamber 10, reach the rough balance of elasticity micro-displacement mechanism 1 and liquid driven control gear 2, elasticity micro-displacement mechanism 1 is in prestress (stretching or compression) state at this moment;
(6) by second liquid meter and control device 15, injection density is ρ
BLiquid 13 in mark chamber 10, this moment, worktable and anchor clamps thereof 3 produced micrometric displacements downwards; From mark chamber 10, extract liquid, then produce upwards micrometric displacement;
(7) by first liquid meter and control device 8, injection density is ρ
ALiquid 14 in floating chamber 12, this moment, worktable and anchor clamps 3 thereof upwards produced micrometric displacement; From floating chamber 12, extract liquid, then produce downward micrometric displacement.
Claims (6)
1. liquid driven ultra-micro-displacement control device, it is characterized in that: elasticity micro-displacement mechanism (1) and liquid driven control gear (2) are by connection chain (7) composition that is connected, above-mentioned elasticity micro-displacement mechanism (1) comprises little driving worktable and anchor clamps (3) thereof, elasticity micrometric displacement beam (5), spring (6), one end of spring (6) and elasticity micrometric displacement beam (5) is individually fixed on the body (4), spring (6) other end is connected with the other end of elasticity micrometric displacement beam (5), worktable and anchor clamps thereof (3) are installed in the left end of elasticity micrometric displacement beam (5), make worktable (3) the corresponding micrometric displacement of generation or apply tiny load by elasticity micrometric displacement beam (5) and spring (6) synergy; Aforesaid liquid drive controlling mechanism (2) includes the increase that contains the liquid that proportion is ρ A (14), amount of liquid in floating chamber (12), the floating chamber or reduces by being fixed on first liquid meter in the floating chamber (12) and control device (8) and inject or extract; The mark chamber (10) of aforesaid liquid drive controlling mechanism (2) places floating chamber (12) and is suspended among the liquid (14), and containing proportion in the mark chamber is ρ
BLiquid (13), the increase of amount of liquid or reduce by being fixed on second liquid meter in the floating chamber (12) and control device (15) and inject or extract.
2. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that above-mentioned second liquid meter and control device (15) hole to the turnover liquid on fiducial mark chamber (10).
3. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that cover plate (11) is arranged in the above-mentioned floating chamber (12), and first liquid meter and control device (8) are fixed on the cover plate (11) by fixed mount (9).
4. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that cover plate (11) is arranged in the above-mentioned floating chamber (12), and second liquid meter and control device (15) are fixed on the cover plate (11) by fixed mount (16).
5. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that above-mentioned proportion is ρ
BLiquid (13), proportion be ρ
ALiquid (14), its proportion is 0.8～1.2g/cm
3
6. liquid driven ultra-micro-displacement control device according to claim 1 is characterized in that above-mentioned connection chain (7) upper end connects on the elasticity micrometric displacement beam (5), and the hole that the lower end is passed on the cover plate (11) is connected on the mark chamber (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005200681752U CN2862136Y (en) | 2005-11-25 | 2005-11-25 | Hydraulic-driving ultra-micro displacement control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005200681752U CN2862136Y (en) | 2005-11-25 | 2005-11-25 | Hydraulic-driving ultra-micro displacement control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2862136Y true CN2862136Y (en) | 2007-01-24 |
Family
ID=37659765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2005200681752U Expired - Lifetime CN2862136Y (en) | 2005-11-25 | 2005-11-25 | Hydraulic-driving ultra-micro displacement control device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2862136Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100474199C (en) * | 2005-11-25 | 2009-04-01 | 广东工业大学 | Liquid driven ultra-micro-displacement control device and control method |
-
2005
- 2005-11-25 CN CNU2005200681752U patent/CN2862136Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100474199C (en) * | 2005-11-25 | 2009-04-01 | 广东工业大学 | Liquid driven ultra-micro-displacement control device and control method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20090401 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |