CN1772463A - Prepn of submicron/micron micro lens array on polymer surface - Google Patents
Prepn of submicron/micron micro lens array on polymer surface Download PDFInfo
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- CN1772463A CN1772463A CN 200510094916 CN200510094916A CN1772463A CN 1772463 A CN1772463 A CN 1772463A CN 200510094916 CN200510094916 CN 200510094916 CN 200510094916 A CN200510094916 A CN 200510094916A CN 1772463 A CN1772463 A CN 1772463A
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Abstract
The present invention discloses the preparation of micron/submicron micro lens array on polymer surface and belongs to the field of nanometer/micron micro structure material and preparing technology. The preparation process is combination of self-assembling process and pressure molding process, and includes the first preparation of micron/submicron print die plate via combination of colloid crystal template and hot treatment technology, and the subsequent hot press demolding to prepare micron/submicron micro lens array. The present invention has the advantages of low cost, simple technological process and apparatus, capacity of mass production, high micro lens performance, etc.
Description
One, technical field
The present invention relates to the preparation method of a kind of polymer surfaces micron/sub-micron microlens array.
Two, background technology
The preparation of sub-micron/micron micro lens array is a technology with important application background.Because microlens array can be corrected light beam, light connects and imaging, therefore obtained using widely in fields such as digital camera, liquid crystal display, light emitting diode, micro-lithography, confocal microscope, photoconverter and couplings.Present lenticule technology of preparing adopts expensive little manufacturing process and methods such as polymer dissolves, wet etching, die, photoetching usually, wherein impression method can be produced in enormous quantities, but its mould adopts the micro-processing technology of cost height, equipment complexity usually, fabrication cycle is long, has limited the reduction of its cost.
Three, summary of the invention
1, goal of the invention: the preparation method who the purpose of this invention is to provide polymer surfaces micron/sub-micron microlens array that a kind of technology is simple, cost is low.
2, technical scheme: the preparation method of polymer surfaces micron of the present invention/sub-micron microlens array may further comprise the steps:
(1) arranges sub-micron/micron silica (SiO by self-assembling technique on the surface of polymer
2) microballoon, the two-dimension single layer micro-sphere array of acquisition polymer surfaces large tracts of land high-sequential; Wherein self-assembling technique is a known technology, and this patent can adopt the applicant's portion disclosed technology of patent formerly, and the patent No. is ZL03131989.0.
(2) polymer that above-mentioned surface is had micro-sphere array is put into insulating box heat treatment, and heat treated temperature is 140~180 ℃, and the time is 1min~24h, removes SiO with the corrosion of HF acid solution then
2Microballoon can be at the two-dimentional concavees lens array of the surface of polymer acquisition large tracts of land high-sequential;
(3) above-mentioned polymer concavees lens array is pressed in the surface of another polymer as template, puts into the demoulding behind 80~130 ℃ of heat treatment 5min~1h of insulating box, can get the convex lens array of another polymer.
3, beneficial effect: the present invention compared with prior art has following outstanding advantage:
(1) can be according to self assembly SiO
2The granular size of the size regulation and control gained surface Bravias lattice of microballoon, adjustable continuously from hundreds of nanometer to tens micron.
(2) self assembly in conjunction with heat treatment technics prepare die not light requirement quarter etc. complex technology, greatly reduced cost.
(3) but parameters such as the cycle of conveniently regulating and controlling microlens array, focal length, thickness.
(4) the suitable material scope is wide.
(5) technology is simple, and is less demanding to equipment, and expense is cheap.
Four, description of drawings
Fig. 1 is the schematic diagram of preparation process, wherein (A) SiO
2The microballoon self assembly; (B) heat treatment; (C) HF acid corrosion; (D) pressing mold; (E) demoulding.
Fig. 2 is the sem photograph of the nick lens arra of preparation.
Fig. 3 is the sem photograph of the dimpling lens arra of preparation.
Five, the specific embodiment
The present invention includes: self assembly prepares the design of die technology with definite in conjunction with heat treatment technics; The preparation method of micron/submicron polymer surface microlens array.
Embodiment 1: arrange sub-micron/micron SiO by self-assembling technique on the carbonate polymer surface with high softening-point low elasticity
2Microballoon, the two-dimension single layer micro-sphere array of acquisition large tracts of land high-sequential; Put it into then in the insulating box in 140 ℃ of heat treatment 1min; Remove SiO with the corrosion of HF acid solution
2Can obtain large tracts of land high-sequential two dimension concavees lens array behind the microballoon at polymer surfaces such as Merlon; Above-mentioned concavees lens array is pressed in the poly methyl methacrylate polymer surface with high transmission rate as template, put into insulating box demoulding behind 80 ℃ of following heat treatment 5min, get final product the convex lens array of polymer surfaces such as polymethyl methacrylate or polystyrene;
Embodiment 2: utilize self-assembling technique with SiO
2Microballoon is arranged in polycarbonate surface, then at 180 ℃ of following heat treatment 24h, utilizes HF acid with SiO after the cooling naturally
2Template is removed and is promptly obtained Merlon nick lens arra, sees Fig. 2.
Above-mentioned nick lens are placed the polymethyl methacrylate film surface as die, handled 1 hour down, can get polymethyl methacrylate dimpling lens arra after the demoulding, see Fig. 3 at 130 ℃.
Embodiment 3: preparation process is identical with embodiment, and different is that high softening-point low elasticity polymer is selected polyamide (or polyformaldehyde) for use, and another has the high transmission rate polymeric material is polystyrene, and heat treatment temperature is 150 ℃ for the first time, and the time is 10h; Heat treatment temperature is 100 ℃ for the second time, and the time is 30min.It comes to the same thing.
Claims (7)
1, the preparation method of a kind of micron of polymer surfaces/sub-micron microlens array is characterized in that this method may further comprise the steps:
(1) arranges sub-micron/micron silica microballoon by self-assembling technique on the surface of polymer, obtain the two-dimension single layer micro-sphere array of polymer surfaces large tracts of land high-sequential;
(2) polymer that above-mentioned surface is had a micro-sphere array is put into insulating box and is heat-treated; Remove silicon dioxide microsphere with the corrosion of HF acid solution then, can obtain the two-dimentional concavees lens array of large tracts of land high-sequential on the surface of polymer;
(3) above-mentioned polymer concavees lens array is pressed in another polymer surfaces as template, puts into insulating box and heat-treat the back demoulding, can get the convex lens array of another polymer.
2, the preparation method of the micron of polymer surfaces according to claim 1/sub-micron microlens array is characterized in that in step (1) said polymeric material is a high softening-point low elasticity polymer.
3, the preparation method of the micron of polymer surfaces according to claim 2/sub-micron microlens array is characterized in that said polymeric material is Merlon, polyamide, polyformaldehyde.
4, the preparation method of the micron of polymer surfaces according to claim 1/sub-micron microlens array is characterized in that in step (3), said another polymeric material is the high transmission rate polymer.
5, the preparation method of the micron of polymer surfaces according to claim 4/sub-micron microlens array is characterized in that said another polymeric material is polymethyl methacrylate or polystyrene.
6, the preparation method of the micron of polymer surfaces according to claim 1/sub-micron microlens array is characterized in that in step (2), said heat treatment temperature is 140~180 ℃; Time is 1min~24h.
7, the preparation method of the micron of polymer surfaces according to claim 1/sub-micron microlens array is characterized in that in step (3), said heat treatment temperature is 80~130 ℃; Time is 5min~1h.
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Cited By (9)
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CN100494045C (en) * | 2007-03-19 | 2009-06-03 | 南京大学 | Method for preparing micron/submicron metal ring and open-mouth metal ring |
CN101481079B (en) * | 2009-02-11 | 2011-01-12 | 江苏大学 | Preparation of micro-nano lens array |
CN102352050A (en) * | 2011-10-11 | 2012-02-15 | 沈阳建筑大学 | Method for manufacturing polymethyl methacrylate micro-lens array |
CN102501524A (en) * | 2011-11-03 | 2012-06-20 | 南京大学 | Diaphragm with uniform pore size-adjustable composite structure and preparation method thereof |
CN103569952A (en) * | 2013-11-12 | 2014-02-12 | 无锡英普林纳米科技有限公司 | Method for preparing one-dimensional polymer periodical microstructure |
CN103809226A (en) * | 2014-02-27 | 2014-05-21 | 四川云盾光电科技有限公司 | Method for shaping micro lens by means of infiltration etching |
CN107356993A (en) * | 2017-08-28 | 2017-11-17 | 河南理工大学 | A kind of preparation method of microlens array |
CN108775979A (en) * | 2018-05-10 | 2018-11-09 | 西安建筑科技大学 | A kind of high sensitivity pliable pressure sensor and preparation method thereof |
CN110515143A (en) * | 2019-09-11 | 2019-11-29 | 北京理工大学 | Curved surface bionic compound eyes processing method based on microballoon self assembly |
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CN101943765B (en) * | 2010-08-27 | 2011-11-16 | 成都钟顺科技发展有限公司 | Condenser lens, multocular lens condenser and multocular condenser solar cell assembly |
Family Cites Families (4)
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CN1125352C (en) * | 2000-09-25 | 2003-10-22 | 中国科学院光电技术研究所 | Method for making microlens array |
JP2003029418A (en) * | 2001-07-10 | 2003-01-29 | Pohang Eng College | Manufacturing method for structure using high energy light source |
KR100539090B1 (en) * | 2003-04-18 | 2005-12-26 | 포스트마이크로 주식회사 | Method for manufacturing micro-lens |
CN1584743A (en) * | 2003-07-24 | 2005-02-23 | 三星电子株式会社 | Method of manufacturing micro-lens |
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2005
- 2005-10-20 CN CNB2005100949169A patent/CN100493894C/en not_active Expired - Fee Related
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100494045C (en) * | 2007-03-19 | 2009-06-03 | 南京大学 | Method for preparing micron/submicron metal ring and open-mouth metal ring |
CN101481079B (en) * | 2009-02-11 | 2011-01-12 | 江苏大学 | Preparation of micro-nano lens array |
CN102352050A (en) * | 2011-10-11 | 2012-02-15 | 沈阳建筑大学 | Method for manufacturing polymethyl methacrylate micro-lens array |
CN102352050B (en) * | 2011-10-11 | 2012-11-28 | 沈阳建筑大学 | Method for manufacturing polymethyl methacrylate micro-lens array |
CN102501524A (en) * | 2011-11-03 | 2012-06-20 | 南京大学 | Diaphragm with uniform pore size-adjustable composite structure and preparation method thereof |
CN103569952A (en) * | 2013-11-12 | 2014-02-12 | 无锡英普林纳米科技有限公司 | Method for preparing one-dimensional polymer periodical microstructure |
CN103569952B (en) * | 2013-11-12 | 2016-01-20 | 无锡英普林纳米科技有限公司 | The preparation method of one-dimensional Polymers periodic micro structure |
CN103809226A (en) * | 2014-02-27 | 2014-05-21 | 四川云盾光电科技有限公司 | Method for shaping micro lens by means of infiltration etching |
CN107356993A (en) * | 2017-08-28 | 2017-11-17 | 河南理工大学 | A kind of preparation method of microlens array |
CN107356993B (en) * | 2017-08-28 | 2019-03-26 | 河南理工大学 | A kind of production method of microlens array |
CN108775979A (en) * | 2018-05-10 | 2018-11-09 | 西安建筑科技大学 | A kind of high sensitivity pliable pressure sensor and preparation method thereof |
CN110515143A (en) * | 2019-09-11 | 2019-11-29 | 北京理工大学 | Curved surface bionic compound eyes processing method based on microballoon self assembly |
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