CN1904648A - Method of making lens array using ice mould plate - Google Patents
Method of making lens array using ice mould plate Download PDFInfo
- Publication number
- CN1904648A CN1904648A CN 200610017093 CN200610017093A CN1904648A CN 1904648 A CN1904648 A CN 1904648A CN 200610017093 CN200610017093 CN 200610017093 CN 200610017093 A CN200610017093 A CN 200610017093A CN 1904648 A CN1904648 A CN 1904648A
- Authority
- CN
- China
- Prior art keywords
- target substrate
- pattern
- dimethyl silicone
- silicone polymer
- ice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention relates to a process method for microlens made from ice template. It includes the following steps: taking de-watering action to the flexible module surface carrying square flute image by water, restricting water drop in the flute, realizing the water on module surface transferring to base and formation of sphere appearance of water drop in polymer film by the reversible transformation between water and ice, transferring the image on polymer film surface to other polymer surface to gain the microlens structure of same appearance as drop. The invention does not need high temperature condition and is simple technology. The film with image would be copied several times, and the cost is low.
Description
Technical field
The present invention relates to a kind of lenticule job operation, particularly a kind of ice template is made the job operation of microlens array.
Background technology
Microlens array is the important component part of contemporary optics system, all has very widely at a lot of optical fields and uses.As optical communication, optical information stores, and optics becomes phase system and display etc.Compare with traditional lens, lenticule not only takes advantage aspect volume, and can become phase more clearly, controls laser beam more accurately, and detects or the like more accurately.Aspect microlens array processing, low cost, high-level efficiency, easy job operation become the focus of people's common concern.
Prior art mainly adopts photoetching method to make the pattern of photoresist, is heated to more than the glass temperature of photoresist, realizes the fusion of photoresist, utilizes the surface tension of fluid to obtain having the microlens array of spherical structure.But this method has certain limitation aspect material, and exists lithographic equipment costliness, process complexity in the photoetching process, requires to control environment temperature and shortcomings such as cleanliness factor, procedure of processing complexity.
In addition, people such as U.S. Xia Younan has delivered the article (the 34th page of " advanced material " the 13rd volume of being published by Wiley publishing house January 5 calendar year 2001) of " self-assembling method is processed with the two-dimensional array of micro-lenses of the patterning of organic polymer " by name.The circular opening structural limitations polystyrene sphere of the photoresist that the employing photoetching obtains in this article is heated to the above fusion that realizes polystyrene sphere of glass temperature of polystyrene in the arrangement of substrate, obtains having the microlens array of spherical structure.Though this method has overcome in the lithography process method restriction to material, and can control lenticular arrangement and size, but the photoresist template of arranging in substrate as the restriction polystyrene sphere can not reuse in process, therefore still is subjected to the restriction of photoetching process.
Summary of the invention
In order to overcome the shortcoming of prior art, the invention provides the job operation that ice template is made microlens array.By regulation and control, can realize the adjusting of lenticule curvature to substrate surface character.
At first utilize the wetting removal behavior of water on the elastomeric stamp surface that has the square indentations pattern, water droplet is limited in the groove on elastomeric stamp surface, utilize the reversible transition between water and the ice to realize that the water on elastomeric stamp surface is to the transfer of substrate and the formation of sphere pattern in thin polymer film of water droplet then, at last, utilize duplicating molded that the design transfer on thin polymer film surface is arrived other polymer surfaces, obtain microlens structure with the drop consistent appearance.By regulation and control, can regulate prepared lenticular curvature to the substrate wetting state.
The concrete steps and the condition of the inventive method are as follows:
1. as shown in Figure 1, option table is worn the elastomeric stamp 1 of square indentations pattern, the elastomeric stamp 1 that the surface is had the square indentations pattern upwards vertically lifts in aqueous solution 2, aqueous solution 2 can since wetting removal be filled in the groove on surface of elastomeric stamp 1 that the surface has the square indentations pattern.
The elastomeric stamp 1 that the surface that is loaded with aqueous solution 2 is had the square indentations pattern places on the target substrate 4.The elastomeric stamp 1 and the target substrate 4 that the surface are had the square indentations pattern place-25 ℃～-15 ℃ refrigerators, make aqueous solution 2 be transformed into ice.Remove the elastomeric stamp 1 that the surface has the square indentations pattern, on target substrate 4, obtain ice template 3.Target substrate 4 is a substrate of glass, and its water contact angle is 5 °-110 °.
Described surface has the elastomeric stamp 1 of square indentations pattern, can select the dimethyl silicone polymer Elastic forming board.
2. the polymethylmethacrylate chloroformic solution is placed-25 ℃～-15 ℃ refrigerators to lower the temperature, cast in then on the target substrate 4 that has ice template 3.4 taking-ups of target substrate after the casting are placed under the room temperature condition.Ice-out forms drop template 6, after the solvent evaporates in the polymethylmethacrylate chloroformic solution, obtains the polymethyl methacrylate film 5 that the pattern according to drop is fixed up.Place aqueous solution to realize separating of polymethyl methacrylate film 5 and target substrate 4 polymethyl methacrylate film 5 and target substrate 4.
3. dimethyl silicone polymer is mixed with crosslinking chemical and stir evenly after cast on the polymethyl methacrylate film 5, be placed on then dimethyl silicone polymer solidified.The dimethyl silicone polymer film that solidifies from polymethyl methacrylate film 5 sur-face peelings, is obtained having the microlens array of targeted graphical on dimethyl silicone polymer film 7 surfaces.
Beneficial effect of the present invention is clearly: compare with photoetching technique, the device just that method of the present invention is used is wanted simply equipment such as refrigerator and drying box, and does not need hot conditions in the process, so processing technology is simpler.Compare in the lenticular technology of substrate arrangement preparation with utilizing photoresist pattern restriction polystyrene sphere, the described surface in the method for the present invention has the elastomeric stamp 1 of square indentations pattern, or selects dimethyl silicone polymer Elastic forming board 1.This template 1 can reuse, and the polymethyl methacrylate film that has pattern 5 that processing obtains also can repeatedly duplicate, to the not influence of quality of targeted graphical.Therefore cost is lower.And the regulation and control by to substrate surface character can realize the processing of the microlens array of different curvature.
Description of drawings
Fig. 1 microlens structure manufacturing process synoptic diagram.
The A of Fig. 1 is that aqueous solution 2 is at dimethyl silicone polymer Elastic forming board 1 surperficial wetting removal process synoptic diagram.
The B of Fig. 1 is that the dimethyl silicone polymer Elastic forming board 1 that is loaded with aqueous solution 2 contacts with target substrate 4, and aqueous solution 2 is frozen into ice template 3 process synoptic diagram.
The C of Fig. 1 is in ice template 3 top casting polymethyl methacrylate solution and ice template 3 is melted into the process synoptic diagram of water template 6.
The D of Fig. 1 is the synoptic diagram of the dimethyl silicone polymer film 7 that obtains having object construction in polymethyl methacrylate film 5 top casting dimethyl silicone polymers and crosslinking chemical and curing.
The E of Fig. 1 is the synoptic diagram of the microlens structure that finally obtains.
Among Fig. 1,1-has the dimethyl silicone polymer elastomeric stamp of pattern, 2-aqueous solution, 3-ice template, 4-substrate, 5-polymethyl methacrylate film, the water template that the 6-ice-out obtains, 7-dimethyl silicone polymer film.
The electron scanning micrograph of the microlens structure of Fig. 2 preparation.
Embodiment
1) option table is worn the dimethyl silicone polymer Elastic forming board 1 of square indentations pattern, dimethyl silicone polymer Elastic forming board 1 is upwards vertically lifted in aqueous solution 2, and aqueous solution 2 can be filled in the groove on dimethyl silicone polymer Elastic forming board 1 surface owing to wetting removal.The dimethyl silicone polymer Elastic forming board 1 that is loaded with aqueous solution 2 is placed on the target substrate 4.Target substrate 4 is 5 ° substrate of glass for water contact angle.Dimethyl silicone polymer Elastic forming board 1 and target substrate 4 are placed-15 ℃ of refrigerators, make aqueous solution be transformed into ice.Remove dimethyl silicone polymer Elastic forming board 1, on target substrate 4, obtain ice template 3.
2) the polymethylmethacrylate chloroformic solution is placed-15 ℃ of refrigerators lower the temperature, cast in then on the target substrate 4 that has ice template 3.4 taking-ups of target substrate after the casting are placed under the room temperature condition.Ice-out forms drop template 6, after the solvent evaporates in the polymethylmethacrylate chloroformic solution, obtains the polymethyl methacrylate film 5 that the pattern according to drop is fixed up.Place aqueous solution to realize separating of polymethyl methacrylate film 5 and target substrate 4 polymethyl methacrylate film 5 and target substrate 4.
3) dimethyl silicone polymer mixed with crosslinking chemical and stir evenly after, cast on the polymethyl methacrylate film 5, be placed on then dimethyl silicone polymer solidified.The dimethyl silicone polymer film that solidifies from polymethyl methacrylate film 5 sur-face peelings, is obtained having the microlens array of targeted graphical on dimethyl silicone polymer film 7 surfaces.
1) option table is worn the dimethyl silicone polymer Elastic forming board 1 of square indentations pattern, dimethyl silicone polymer Elastic forming board 1 is upwards vertically lifted in aqueous solution 2, and aqueous solution 2 can be filled in the groove on dimethyl silicone polymer Elastic forming board 1 surface owing to wetting removal.The dimethyl silicone polymer Elastic forming board 1 that is loaded with aqueous solution 2 is placed on the target substrate 4.Target substrate 4 is 60 ° substrate of glass for water contact angle.Dimethyl silicone polymer Elastic forming board 1 and target substrate 4 are placed-20 ℃ of refrigerators, make aqueous solution be transformed into ice.Remove dimethyl silicone polymer Elastic forming board 1, on target substrate 4, obtain ice template 3.
2) the polymethylmethacrylate chloroformic solution is placed-20 ℃ of refrigerators lower the temperature, cast in then on the target substrate 4 that has ice template 3.4 taking-ups of target substrate after the casting are placed under the room temperature condition.Ice-out forms drop template 6, after the solvent evaporates in the polymethylmethacrylate chloroformic solution, obtains the polymethyl methacrylate film 5 that the pattern according to drop is fixed up.Place aqueous solution to realize separating of polymethyl methacrylate film 5 and target substrate 4 polymethyl methacrylate film 5 and target substrate 4.
3) dimethyl silicone polymer mixed with crosslinking chemical and stir evenly after, cast on the polymethyl methacrylate film 5, be placed on then dimethyl silicone polymer solidified.The dimethyl silicone polymer film that solidifies from polymethyl methacrylate film 5 sur-face peelings, is obtained having the microlens array of targeted graphical on dimethyl silicone polymer film 7 surfaces.
1) option table is worn the dimethyl silicone polymer Elastic forming board 1 of square indentations pattern, dimethyl silicone polymer Elastic forming board 1 is upwards vertically lifted in aqueous solution 2, and aqueous solution 2 can be filled in the groove on dimethyl silicone polymer Elastic forming board 1 surface owing to wetting removal.The dimethyl silicone polymer Elastic forming board 1 that is loaded with aqueous solution 2 is placed on the target substrate 4, and target substrate 4 is 110 ° substrate of glass for water contact angle.Dimethyl silicone polymer Elastic forming board 1 and target substrate 4 are placed-25 ℃ of refrigerators, make aqueous solution be transformed into ice.Remove dimethyl silicone polymer Elastic forming board 1, on target substrate 4, obtain ice template 3.
2) the polymethylmethacrylate chloroformic solution is placed-25 ℃ of refrigerators lower the temperature, cast in then on the target substrate 4 that has ice template 3.4 taking-ups of target substrate after the casting are placed under the room temperature condition.Ice-out forms drop template 6, after the solvent evaporates in the polymethylmethacrylate chloroformic solution, obtains the polymethyl methacrylate film 5 that the pattern according to drop is fixed up.Place aqueous solution to realize separating of polymethyl methacrylate film 5 and target substrate 4 polymethyl methacrylate film 5 and target substrate 4.
3) dimethyl silicone polymer mixed with crosslinking chemical and stir evenly after, cast on the polymethyl methacrylate film 5, be placed on then dimethyl silicone polymer solidified.The dimethyl silicone polymer film that solidifies from polymethyl methacrylate film 5 sur-face peelings, is obtained having the microlens array of targeted graphical on dimethyl silicone polymer film 7 surfaces.
Claims (2)
1, a kind of ice template is made the job operation of microlens array, it is characterized in that step and condition are as follows:
1. option table is worn the elastomeric stamp (1) of square indentations pattern, the elastomeric stamp (1) that the surface is had the square indentations pattern upwards vertically lifts in aqueous solution (2), aqueous solution (2) can since wetting removal be filled in the groove on surface of the elastomeric stamp (1) that the surface has the square indentations pattern;
The elastomeric stamp (1) that the surface that will be loaded with aqueous solution (2) has the square indentations pattern places on the target substrate (4), the elastomeric stamp (1) and the target substrate (4) that the surface are had the square indentations pattern place-25 ℃～-15 ℃ refrigerators, make aqueous solution (2) be transformed into ice, remove the elastomeric stamp (1) that the surface has the square indentations pattern, on target substrate (4), obtain ice template (3), target substrate (4) is a substrate of glass, and its water contact angle is 5 °-110 °;
2. the polymethylmethacrylate chloroformic solution is placed-25 ℃～-15 ℃ refrigerators to lower the temperature, cast in then on the target substrate (4) that has ice template (3), the taking-up of target substrate (4) after the casting is placed under the room temperature condition, ice-out forms drop template (6), after the solvent evaporates in the polymethylmethacrylate chloroformic solution, obtain the polymethyl methacrylate film (5) that the pattern according to drop is fixed up, place aqueous solution to realize separating of polymethyl methacrylate film (5) and target substrate (4) polymethyl methacrylate film (5) and target substrate (4);
3. dimethyl silicone polymer is mixed with crosslinking chemical and stir evenly after cast on the polymethyl methacrylate film (5), be placed on then dimethyl silicone polymer is solidified, the dimethyl silicone polymer film that solidifies from polymethyl methacrylate film (5) sur-face peeling, is obtained having the microlens array of targeted graphical on dimethyl silicone polymer film (7) surface.
2, a kind of ice template as claimed in claim 1 is made the job operation of microlens array, it is characterized in that, the surface of step described in 1. has the elastomeric stamp (1) of square indentations pattern, can select the dimethyl silicone polymer Elastic forming board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100170934A CN100401111C (en) | 2006-08-11 | 2006-08-11 | Method of making lens array using ice mould plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100170934A CN100401111C (en) | 2006-08-11 | 2006-08-11 | Method of making lens array using ice mould plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1904648A true CN1904648A (en) | 2007-01-31 |
| CN100401111C CN100401111C (en) | 2008-07-09 |
Family
ID=37673946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100170934A Expired - Fee Related CN100401111C (en) | 2006-08-11 | 2006-08-11 | Method of making lens array using ice mould plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100401111C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101200550B (en) * | 2007-11-14 | 2010-08-11 | 大连水产学院 | Method for preparing template imitating micro-nano structure surface |
| CN103395739A (en) * | 2013-07-22 | 2013-11-20 | 江苏物联网研究发展中心 | Preparation method of micro-concave mirror |
| CN103995305A (en) * | 2014-05-27 | 2014-08-20 | 天津大学 | Micro lens manufacturing method |
| CN104943433A (en) * | 2015-07-05 | 2015-09-30 | 林志苹 | Pattern transferring template and preparing method thereof |
| CN108584867A (en) * | 2018-06-05 | 2018-09-28 | 中国科学技术大学 | A kind of processing method of microlens array |
| CN112225172A (en) * | 2020-09-29 | 2021-01-15 | 江苏大学 | Method for preparing surface of near-cylindrical-surface micro-groove array based on air mold method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101572666B1 (en) | 2014-03-26 | 2015-11-30 | 한국광기술원 | fly-eye lens manufacturing method and lens mold manufacturing apparatus applying the same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02251902A (en) * | 1989-03-27 | 1990-10-09 | Seiko Epson Corp | Lens array and liquid crystal display element formed by using lens array |
| JPH04147101A (en) * | 1990-10-09 | 1992-05-20 | Brother Ind Ltd | Microlens array and its production |
| JPH05164904A (en) * | 1991-12-19 | 1993-06-29 | Fujitsu Ltd | Production of microlens array |
| US6531266B1 (en) * | 2001-03-16 | 2003-03-11 | Taiwan Semiconductor Manufacturing Company | Rework procedure for the microlens element of a CMOS image sensor |
| JP4214713B2 (en) * | 2002-05-20 | 2009-01-28 | ソニー株式会社 | Microlens array, liquid crystal display element and projection device |
-
2006
- 2006-08-11 CN CNB2006100170934A patent/CN100401111C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101200550B (en) * | 2007-11-14 | 2010-08-11 | 大连水产学院 | Method for preparing template imitating micro-nano structure surface |
| CN103395739A (en) * | 2013-07-22 | 2013-11-20 | 江苏物联网研究发展中心 | Preparation method of micro-concave mirror |
| CN103395739B (en) * | 2013-07-22 | 2016-01-06 | 江苏物联网研究发展中心 | A kind of preparation method of micro-concave mirror |
| CN103995305A (en) * | 2014-05-27 | 2014-08-20 | 天津大学 | Micro lens manufacturing method |
| CN104943433A (en) * | 2015-07-05 | 2015-09-30 | 林志苹 | Pattern transferring template and preparing method thereof |
| CN104943433B (en) * | 2015-07-05 | 2017-07-21 | 林志苹 | A kind of pattern transfer template and preparation method thereof |
| CN108584867A (en) * | 2018-06-05 | 2018-09-28 | 中国科学技术大学 | A kind of processing method of microlens array |
| CN112225172A (en) * | 2020-09-29 | 2021-01-15 | 江苏大学 | Method for preparing surface of near-cylindrical-surface micro-groove array based on air mold method |
| CN112225172B (en) * | 2020-09-29 | 2024-03-19 | 江苏大学 | Method for preparing near cylindrical surface micro-groove array surface based on air model method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100401111C (en) | 2008-07-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1904648A (en) | Method of making lens array using ice mould plate | |
| US8178011B2 (en) | Self-assembled nano-lithographic imprint masks | |
| US20090266415A1 (en) | Nanostructures and materials for photovoltaic devices | |
| CN100493894C (en) | Preparation of submicron/micron micro lens array on polymer surface | |
| KR100951915B1 (en) | Fabricating method of micro-nano pattern using plasma etching | |
| JP2009113311A (en) | Manufacturing process of micro-lens array | |
| Wei et al. | The influence of a microlens array on planar organic light-emitting devices | |
| CN1286711C (en) | Method for constructing non-close packing colloid balls ordered arrangement using soft-graving technology | |
| CN110828375A (en) | Method for rapidly and non-etching transferring two-dimensional material and preparing heterojunction | |
| TWI289683B (en) | Method for fabricating microlens arrays | |
| US20080166505A1 (en) | Method of fabricating plastic part having three-dimensional image and visual effect and structure thereof | |
| KR101291727B1 (en) | Method for manufacturing implint resin and implinting method | |
| CN1877453A (en) | Method for making reverse ladder structure by using architecture-complementary micro-patterning technique | |
| US20090308525A1 (en) | Method of manufacturing microlens | |
| KR101449633B1 (en) | High Brightness and Moire Free Mirco Lens Film and Method of Manufacturing the Mirco Lens Film and Backlight Unit Containing the Mirco Lens Film and Mirco lens Array Apparatus | |
| Lin et al. | Concave microlens array mold fabrication in photoresist using UV proximity printing | |
| CN1314544C (en) | Thermal moulding method for making pattern on high-molecular film | |
| KR101385070B1 (en) | A method for preparing pattern in large scale using laser interference lithography, a method for transferring the pattern onto non-uniform surface and an article transferred pattern using the same | |
| Lin et al. | New high fill-factor triangular micro-lens array fabrication method using UV proximity printing | |
| CN109979876B (en) | Method for preparing organic semiconductor material annular array integrated photoelectric device by using soft lithography technology | |
| US8053177B2 (en) | Light blocking plate, lens module having same and method for making same | |
| Zhu et al. | Spherical micro-lens array of PMMA produced by micro-molding | |
| CN1791813A (en) | Microstructure and method for producing microstructures | |
| US10663856B2 (en) | Optical mask for use in a photolithography process, a method for fabricating the optical mask and a method for fabricating an array of patterns on a substrate using the optical mask | |
| Zhang et al. | Fabrication of heteromorphic microlens arrays built in the TiO 2/ormosils composite films for organic light-emitting diode applications |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU INSTITUTE OF ENERGY STORAGE MATERIALS + Free format text: FORMER OWNER: CHANGCHUN INSTITUTE OF APPLIED CHEMISTRY HINESE ACADEMY OF SCIENCES Effective date: 20121231 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 130022 CHANGCHUN, JILIN PROVINCE TO: 213000 CHANGZHOU, JIANGSU PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20121231 Address after: Changzhou City, Jiangsu province Hehai road 213000 No. 9 Patentee after: Changzhou Institute of Energy Storage Materials & Devices Address before: 130022 Changchun people's street, Jilin, No. 5625 Patentee before: Changchun Institue of Applied Chemistry, Chinese Academy of Sciences |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080709 Termination date: 20170811 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |