CN103995305A - Micro lens manufacturing method - Google Patents
Micro lens manufacturing method Download PDFInfo
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- CN103995305A CN103995305A CN201410228134.9A CN201410228134A CN103995305A CN 103995305 A CN103995305 A CN 103995305A CN 201410228134 A CN201410228134 A CN 201410228134A CN 103995305 A CN103995305 A CN 103995305A
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Abstract
The invention discloses a micro lens manufacturing method. A template of a micro lens array is manufactured through a water drop template method, then, the micro lens array is manufactured through an ice-water conversion method, and finally, the micro lens is manufactured with a polymer film as a template. The technical scheme of the method is simple and easy to perform, cost is low, the technological process is simplified, experimental facilities are simple and convenient to use, and the micro lens arrays can be produced on a large scale.
Description
Technical field
The invention belongs to optical engineering material technology field, more particularly, relate to a kind of optical device, a kind of microlens array and preparation method thereof.
Background technology
Microlens array is a series of bores at several microns to the microminiature lens of hundreds of millimeter by the array necessarily rearranging.Lenticule and array thereof are one of important devices in micro-optical systems, are widely used in the fields such as optical information processing, beam shaping, optical device interconnection, three-dimensional imaging.In recent years, by the production technology that there is plasticity, lightweight optical material and prepare micro optical element, caused people's extensive concern.Particularly organic polymer, because it is easily processed, can simplify manufacture craft greatly, and the lenticule obtaining and array thereof have high-performance and be more noticeable.Lenticule has many advantages, such as laminar; Lightweight; Reproducible; Cheap; Diffraction efficiency is high cause make full use of luminous energy; With computing machine, can design and can produce the lenticule on any corrugated; Can microminiaturization and array, and can be integrated together with microelectronic component, the integrated device of micro-photoelectric integral is provided, at optical sensing, optical communication, photometry, calculate, the field such as light interconnection and optical neural network, utilize the functions such as microlens array can be realized the transmitting of light beam, focusing, deviation, cuts apart, compound, switch, coupling, reception.
At present, the preparation method of micro polymer lens and array thereof has a lot, as: melting photoresist method, ion beam etching, laser write direct, micro-seal, gray scale mask lithography method, anisotropic etching method and soft mode or die stamped method etc. of spraying.In these methods, it is low that hot melt is considered to a kind of cost, the method that can produce in batches, but photoresist has certain color, and technological process need to spend the longer time and be difficult to accurately control lenticular shape and height.In anisotropic etching method, because the etch rate of photoresist and glass is different, the lenticule of photoresist is difficult to accurately transfer on glass, and laser direct-writing technology is difficult to the precision and the batch production that provide high, and the temperature and pressure that hot moulding Technology Need is high causes image transfer precision not high.Other method, complex process, high to experimental facilities requirement, gained lenticule cost is high.Therefore the method for making of, developing a kind of new polymers microlens array has important using value.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, be to seek a kind of simple, cost is lower, and technological process is simplified, the method for making of easy and the microlens array that can large-scale production of experimental facilities.Propose to utilize water droplet template to make template, then by the method that ice-water transforms, prepared the PDMS microlens array of different size.The features such as it is controlled that the lenticule making and array thereof have size, and pattern is regular.
Technical purpose of the present invention is achieved by following technical proposals:
A lenticular preparation method, carries out according to following step:
Step 1, as template, is used polymethyl siloxane to cast in template, to obtain polymethyl siloxane seal in order to the honeycomb-patterned ordered perforated membrane making by water droplet template;
Step 2, is used oxygen plasma to modify polymethyl siloxane seal, to obtain hydrophilic surface, polymethyl siloxane seal surface group is become to hydrophilic Si-OH from hydrophobic Si-CH;
Step 3, polymethyl siloxane seal after hydrophilic surface is modified carries out perfluorinate processing, utilize perfluor decyltrichlorosilane to react with polymethyl siloxane seal, and make to form and stablize chemical bonding between perfluor decyltrichlorosilane and polymethyl siloxane seal, again polymethyl siloxane is cast on the polymethyl siloxane seal of processing through perfluorinate, to obtain reverse polymethyl siloxane seal, prepare as template with the honeycomb-patterned ordered perforated membrane that utilizes before water droplet template to make protruding to polymethyl siloxane seal compare, the second layer polymethyl siloxane seal of casting on the polymethyl siloxane seal of processing in perfluorinate become recessed to,
Step 4, the reverse polymethyl siloxane seal of preparation is taken out from water, because reverse polymethyl siloxane seal surface has the pit of depression, in pit, there is water, the quartzy substrate of glass of the one side that is provided with pit on reverse polymethyl siloxane seal and water wettability is contacted, carry out cooling so that water is converted into ice in pit, take off reverse polymethyl siloxane seal, can in the quartzy substrate of glass of water wettability, obtain ice array;
Step 5 at the solution of the chloroform of the ice array top casting polymethylmethacrylate of the quartzy substrate of glass of water wettability, is placed under 20-25 degrees Celsius of room temperatures, and when ice array melts, solvent chloroform volatilization, obtains polymethyl methacrylate film;
Step 6, usings the polymethyl methacrylate film prepared as template construct, and polymethyl siloxane is cast on polymethyl methacrylate film, obtains the microlens array of polymethylmethacrylate.
In technical scheme of the present invention, utilize water droplet template to make the template of microlens array, water droplet template, is also Breath Figure method, be a kind of self assembly behavior that utilizes the polymer molecule under template guiding, and realize straightforward procedure prepared by regular pore structure membrane material.Specific experiment process is referring to document: Ge Wenjia, the water droplet template synthesis of the polymer film of senior porous microstructure and applied research [D]. Tianjin: University Of Tianjin, 2011, in the invention process process, the condition of preparation PS/PVP (polystyrene/poly-methyl pyrrole alkane ketone) honeycomb-patterned ordered perforated membrane is: (1) temperature: 15 ℃～20 ℃; (2) humidity: 55%～65%; (3) concentration: 20mg/ml; (4) PS:PVP (mass ratio)=8:1.
In technical scheme of the present invention, in order to strengthen the water wettability of quartz glass substrate, it is carried out to pre-treatment, be exactly specifically, first at 98% concentrated sulphuric acid (H
2sO
4) and 30% superoxol (H
2o
2) under 85 ℃ of conditions, soak 2 hours in mixed solution (volume ratio is about 7:3), then with deionized water, rinse well rapidly, dry.Then again substrate is about in the perfluorinate reagent (perfluor decyltrichlorosilane) of 1:1000 and the solution of normal hexane and soaks 30s in volume ratio; Then with deionized water rinsing (fast), dry.
In technical scheme of the present invention, described polymethyl siloxane WeiDow Corning company produces
184, by PDMS performed polymer and crosslinking chemical, formed, crosslinked condition is crosslinked 3-4h under 60-70 ℃ of conditions.
In the step 2 of technical solution of the present invention, PDMS is put into oxygen plasma washer vacuum outgas 30min, high-grade (18W) processes 1min.After OP processes, PDMS surface group becomes hydrophilic Si-OH from hydrophobic Si-CH.
In the step 3 of technical solution of the present invention, the PDMS seal that OP was processed is placed with on the small beaker wall of 10ml, in the bottom of small beaker, pours a small amount of 1H into, 1H, 2H, 2H-perfluorwclyltrichlorosilane, small beaker is coated with preservative film, reacts 12 hours.Because perfluor decyltrichlorosilane highly volatile and with-Cl, it just can react with Si-OH like this, takes off HCl molecule, forms stable chemical bond.Then by the potpourri of PDMS performed polymer and crosslinking chemical, (Dow Corning company produces
184) cast on the PDMS seal after processing, because the PDMS handling through perfluorinate has stable chemical bond, so just can make two PDMS separate easily, obtain reverse PDMS seal.
In the step 4 of technical solution of the present invention, select semiconductor cooler to carry out cooling can the realization of 30-40s and make water in pit be converted into ice, be chosen in cooling procedure, reverse polymethyl siloxane seal is applied to load, for example 300-500N.
In the step 5 of technical solution of the present invention, the mass percentage concentration that polymethylmethacrylate is dissolved in chloroform is 10-15wt%.
The invention provides a kind of simple, cost is lower, and technological process is simplified, the method for making of easy and the microlens array that can large-scale production of experimental facilities, utilize water droplet template to make template, then by the method that ice-water transforms, prepare the PDMS microlens array of different size.The features such as it is controlled that the lenticule making and array thereof have size, and pattern is regular.Technical scheme of the present invention is simple, and cost is lower, and technological process is simplified, and experimental facilities is easy, and microlens array can be mass-produced.
Accompanying drawing explanation
Fig. 1 is the optical microscope figure of the template that makes of the water-bed template of application.
The seal optical microscope figure that Fig. 2 is the water droplet template that copies with PDMS.
Fig. 3 is the optical microscope figure of PDMS after OP processes.
Fig. 4 is the optical microscope figure of figure on the polymeric membrane forming after the mixed solution casting of PMMA and chloroform.
Fig. 5 is lenticular optical microscope figure prepared by the present invention.
Fig. 6 is that ice of the present invention-water transforms the experiment flow figure (1) that makes microlens array.
Fig. 7 is that ice of the present invention-water transforms the experiment flow figure (2) that makes microlens array.
Embodiment
Below in conjunction with specific embodiment, further illustrate technical scheme of the present invention.
First utilize water droplet template to make the template of microlens array, water droplet template, is also Breath Figure method, is a kind of self assembly behavior that utilizes the polymer molecule under template guiding, and realizes straightforward procedure prepared by regular pore structure membrane material.Specific experiment process is referring to document: Ge Wenjia, the water droplet template synthesis of the polymer film of senior porous microstructure and applied research [D]. Tianjin: University Of Tianjin, 2011, in the invention process process, the condition of preparation PS/PVP (polystyrene/poly-methyl pyrrole alkane ketone) honeycomb-patterned ordered perforated membrane is: (1) temperature: 15 ℃～20 ℃; (2) humidity: 55%～65%; (3) concentration: 20mg/ml; (4) PS:PVP (mass ratio)=8:1, as shown in Figure 1, enlargement factor is 400 to the optical microscope figure of preparation template, adopts the optical microscope of Zeiss Germany company to take.
Secondly, in order to the honeycomb-patterned ordered perforated membrane making with water droplet template, as template, use polymethyl siloxane to cast in template, to obtain polymethyl siloxane seal, specifically, the production of described polymethyl siloxane WeiDow Corning company
184, by PDMS performed polymer and crosslinking chemical, formed, by the potpourri direct pouring of PDMS performed polymer and crosslinking chemical on perforated membrane, then make its crosslinked (crosslinked 3h under 70 ℃ of conditions), obtain PDMS seal, as shown in Figure 2, enlargement factor is 400 to the optical microscope figure of the PDMS seal of preparation, adopts the optical microscope of Zeiss Germany company to take.
The 3rd, use oxygen plasma (OP) to modify polymethyl siloxane seal, to obtain hydrophilic surface; PDMS is put into oxygen plasma washer vacuum outgas 30min, and high-grade (18W) processes 1min.After OP processes, PDMS surface group becomes hydrophilic Si-OH from hydrophobic Si-CH, and after OP processes, as shown in Figure 3, enlargement factor is 400 to the optical microscope figure of PDMS, adopts the optical microscope of Zeiss Germany company to take.
The 4th, polymethyl siloxane seal after hydrophilic surface is modified carries out perfluorinate processing, utilize perfluor decyltrichlorosilane to react with polymethyl siloxane seal, and make to form and stablize chemical bonding between perfluor decyltrichlorosilane and polymethyl siloxane seal, again polymethyl siloxane is cast on the polymethyl siloxane seal of processing through perfluorinate, to obtain reverse polymethyl siloxane seal, prepare as template with the honeycomb-patterned ordered perforated membrane that utilizes before water droplet template to make protruding to polymethyl siloxane seal compare, the second layer polymethyl siloxane seal of casting on the polymethyl siloxane seal of processing in perfluorinate become recessed to:
The PDMS seal that OP was processed is placed with on the small beaker wall of 10ml, in the bottom of small beaker, pour a small amount of 1H into, 1H, 2H, 2H-perfluorwclyltrichlorosilane (perfluor decyltrichlorosilane, purchased from Aladdin reagent (Shanghai) Co., Ltd.), small beaker is coated with preservative film, reacts 12 hours.Because perfluor decyltrichlorosilane highly volatile and with-Cl, it just can react with Si-OH like this, takes off HCl molecule, forms stable chemical bond.Then by the potpourri of PDMS performed polymer and crosslinking chemical, (Dow Corning company produces
184) cast on the PDMS seal after processing, because the PDMS handling through perfluorinate has stable chemical bond, so just can make two PDMS separate easily, obtain reverse PDMS seal.
In order to strengthen the water wettability of quartz glass substrate, it is carried out to pre-treatment, be exactly specifically, first at 98% concentrated sulphuric acid (H
2sO
4) and 30% superoxol (H
2o
2) under 85 ℃ of conditions, soak 2 hours in mixed solution (volume ratio is about 7:3), then with deionized water, rinse well rapidly, dry.Then again substrate is about in the perfluorinate reagent (perfluor decyltrichlorosilane) of 1:1000 and the solution of normal hexane and soaks 30s in volume ratio; Then with deionized water rinsing (fast), dry, specifically referring to document (Mao Qiangqiang etc., the sulfuric acid that silicon substrate surface changes without pattern/hydrogen peroxide oxidation cleans, Wuhan Engineering Univ's journal, the 31st the 5th phase of volume of May in 2009).
The 5th, the reverse polymethyl siloxane seal of preparation is taken out from water, because reverse polymethyl siloxane seal surface has the pit of depression, in pit, there is water, the quartzy substrate of glass of the one side that is provided with pit on reverse polymethyl siloxane seal and water wettability is contacted, carry out cooling so that water is converted into ice in pit, take off reverse polymethyl siloxane seal, can in the quartzy substrate of glass of water wettability, obtain ice array.
Select semiconductor cooler to carry out cooling can the realization of 30-40s and make water in pit be converted into ice, be chosen in cooling procedure, reverse polymethyl siloxane seal is applied to load, for example 300-500N.
The 6th, ice array top casting polymethylmethacrylate (PMMA in the quartzy substrate of glass of water wettability, be commonly called as organic glass) the solution of chloroform, under 20-25 degrees Celsius of room temperatures, place, when ice array melts, solvent chloroform volatilization, obtain polymethyl methacrylate film, as shown in Figure 4, enlargement factor is 400, adopts the optical microscope of Zeiss Germany company to take.
The mass percentage concentration that polymethylmethacrylate is dissolved in chloroform is 10-15wt%.
Finally, using preparation polymethyl methacrylate film as template construct, polymethyl siloxane is cast on polymethyl methacrylate film, obtain the microlens array of polymethylmethacrylate, as shown in Figure 5, enlargement factor is 400, adopts the optical microscope of Zeiss Germany company to take.
Described polymethyl siloxane WeiDow Corning company produces
184, by PDMS performed polymer and crosslinking chemical, formed, the potpourri direct pouring of PDMS performed polymer and crosslinking chemical, on polymethyl methacrylate film, is then made to its crosslinked 4h under 60 ℃ of conditions.
Above the present invention has been done to exemplary description; should be noted that; in the situation that not departing from core of the present invention, the replacement that is equal to that any simple distortion, modification or other those skilled in the art can not spend creative work all falls into protection scope of the present invention.
Claims (5)
1. a lenticular preparation method, is characterized in that, according to following step, carries out:
Step 1, as template, is used polymethyl siloxane to cast in template, to obtain polymethyl siloxane seal in order to the honeycomb-patterned ordered perforated membrane making by water droplet template;
Step 2, is used oxygen plasma to modify polymethyl siloxane seal, to obtain hydrophilic surface, polymethyl siloxane seal surface group is become to hydrophilic Si-OH from hydrophobic Si-CH;
Step 3, polymethyl siloxane seal after hydrophilic surface is modified carries out perfluorinate processing, utilize perfluor decyltrichlorosilane to react with polymethyl siloxane seal, and make to form and stablize chemical bonding between perfluor decyltrichlorosilane and polymethyl siloxane seal, again polymethyl siloxane is cast on the polymethyl siloxane seal of processing through perfluorinate, to obtain reverse polymethyl siloxane seal, prepare as template with the honeycomb-patterned ordered perforated membrane that utilizes before water droplet template to make protruding to polymethyl siloxane seal compare, the second layer polymethyl siloxane seal of casting on the polymethyl siloxane seal of processing in perfluorinate become recessed to,
Step 4, the reverse polymethyl siloxane seal of preparation is taken out from water, because reverse polymethyl siloxane seal surface has the pit of depression, in pit, there is water, the quartzy substrate of glass of the one side that is provided with pit on reverse polymethyl siloxane seal and water wettability is contacted, carry out cooling so that water is converted into ice in pit, take off reverse polymethyl siloxane seal, can in the quartzy substrate of glass of water wettability, obtain ice array;
Step 5 at the solution of the chloroform of the ice array top casting polymethylmethacrylate of the quartzy substrate of glass of water wettability, is placed under 20-25 degrees Celsius of room temperatures, and when ice array melts, solvent chloroform volatilization, obtains polymethyl methacrylate film;
Step 6, usings the polymethyl methacrylate film prepared as template construct, and polymethyl siloxane is cast on polymethyl methacrylate film, obtains the microlens array of polymethylmethacrylate.
2. a kind of lenticular preparation method according to claim 1, is characterized in that, described polymethyl siloxane WeiDow Corning company produces
184, by PDMS performed polymer and crosslinking chemical, formed, crosslinked condition is crosslinked 3-4h under 60-70 ℃ of conditions.
3. a kind of lenticular preparation method according to claim 1, is characterized in that, in step 2, PDMS is put into oxygen plasma washer vacuum outgas 30min, and high-grade 18W processes 1min.
4. a kind of lenticular preparation method according to claim 1, it is characterized in that, in step 4, selecting semiconductor cooler to carry out cooling can the realization of 30-40s makes water in pit be converted into ice, be chosen in cooling procedure, reverse polymethyl siloxane seal is applied to load 300-500N.
5. a kind of lenticular preparation method according to claim 1, is characterized in that, in step 5, the mass percentage concentration that polymethylmethacrylate is dissolved in chloroform is 10-15wt%.
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| CN201410228134.9A CN103995305A (en) | 2014-05-27 | 2014-05-27 | Micro lens manufacturing method |
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| CN201410228134.9A CN103995305A (en) | 2014-05-27 | 2014-05-27 | Micro lens manufacturing method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104698514A (en) * | 2014-12-31 | 2015-06-10 | 中国科学院物理研究所 | Method for large-area preparation of micro-nano convex ball lens array |
| CN106292201A (en) * | 2016-09-28 | 2017-01-04 | 清华大学深圳研究生院 | The three-D elements manufacture method of a kind of anti-mould adhesion and three-D elements reverse mould |
| CN112051631A (en) * | 2020-09-14 | 2020-12-08 | 哈尔滨工程大学 | Preparation method of micro-lens array film |
| CN113848600A (en) * | 2021-09-22 | 2021-12-28 | 河南大学 | Microlens array template and preparation method thereof, scattering type microlens, substrate and preparation method and application thereof, and quantum dot light-emitting diode |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104698514A (en) * | 2014-12-31 | 2015-06-10 | 中国科学院物理研究所 | Method for large-area preparation of micro-nano convex ball lens array |
| CN104698514B (en) * | 2014-12-31 | 2016-06-01 | 中国科学院物理研究所 | A kind of big area prepares the method for micro-nanometer convex globe lens array |
| CN106292201A (en) * | 2016-09-28 | 2017-01-04 | 清华大学深圳研究生院 | The three-D elements manufacture method of a kind of anti-mould adhesion and three-D elements reverse mould |
| CN112051631A (en) * | 2020-09-14 | 2020-12-08 | 哈尔滨工程大学 | Preparation method of micro-lens array film |
| CN113848600A (en) * | 2021-09-22 | 2021-12-28 | 河南大学 | Microlens array template and preparation method thereof, scattering type microlens, substrate and preparation method and application thereof, and quantum dot light-emitting diode |
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Application publication date: 20140820 |