CN106292201A - The three-D elements manufacture method of a kind of anti-mould adhesion and three-D elements reverse mould - Google Patents
The three-D elements manufacture method of a kind of anti-mould adhesion and three-D elements reverse mould Download PDFInfo
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- CN106292201A CN106292201A CN201610866886.7A CN201610866886A CN106292201A CN 106292201 A CN106292201 A CN 106292201A CN 201610866886 A CN201610866886 A CN 201610866886A CN 106292201 A CN106292201 A CN 106292201A
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- elements
- mould
- reverse mould
- pdms material
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
Abstract
The three-D elements manufacture method of a kind of anti-mould adhesion and three-D elements reverse mould, the method includes: A, based on soft lithographic technique use PDMS material replicate three-D elements mother matrix, obtain the three-D elements reverse mould of PDMS material；B, the surface of three-D elements reverse mould of the PDMS material obtained in step A, form one layer of 1H, 1H, 2H, 2H perfluoro decyl trichlorosilane molecular coatings；C, with the three-D elements reverse mould of PDMS material that processes through step B as mould, use PDMS material to carry out secondary duplication, after the solidification demoulding, obtain three-D elements copy.Due to 1H, 1H, 2H, 2H perfluoro decyl trichlorosilane molecular coatings is different from PDMS material contact angle, and secondary replicates the demoulding and becomes easy, serves the effect of tissue adhesion.
Description
Technical field
The present invention relates to three-D elements manufacture method and the three-D elements reverse mould of a kind of anti-mould adhesion.
Background technology
Micro structure is widely used in increasing field, such as: sensor, optical system and cell engineering
Deng, people are the most surging to the demand of the manufacture method of new micro structure.Late nineteen nineties, a kind of new micrographics replicated skill
Art is shown one's talent, and is commonly referred to as soft lithography (soft lithography).Soft lithography is relative to traditional photoetching skill
For art, compared to traditional photoetching technique, it can be broken through 100nm size and make fine mechanism, can manufacture complexity
Three dimensional structure and applying on curved surface, can on different chemical character surface the advantage such as use.
Soft lithography is exactly the reproduction technology of a kind of micrographics in fact, it is clear that during duplication process, and even-times replicates
Just can obtain the surface appearance feature identical with being replicated element, the general method using twice duplication.In soft lithography
Conventional material is PDMS (polydimethylsiloxane, polydimethylsiloxane).PDMS-DC(PDMS double
Casting, twice duplication based on PDMS) technology is the duplication process of a kind of low cost, but but can obtain high-fidelity simultaneously
The copy of degree.PDMS-DC technology includes two steps: (1) uses one surface of PDMS duplication to have the mother of fine structure
Mould, obtains the reverse mould that material is PDMS；(2) with the PDMS reverse mould in (1) as master mold, use PDMS to carry out second time and replicate
Obtain the copy as original master tool surface structure.But, owing to PDMS material glues the most each other
Characteristic even makes the demoulding easily failure in above-mentioned steps (2) after second time duplication, so must be to the surface of reverse mould
Learn or being processed so that of physics replicates demoulding success for the second time.
Summary of the invention
In order to overcome characteristic inter-adhesive between PDMS and PDMS material in soft lithographic technique, the invention provides one
The three-D elements manufacture method of anti-mould adhesion and three-D elements reverse mould.
The three-D elements manufacture method of a kind of anti-mould adhesion, comprises the steps:
A, based on soft lithographic technique use PDMS material replicate three-D elements mother matrix, obtain PDMS material three-D elements fall
Mould；
B, the surface of three-D elements reverse mould of the PDMS material obtained in step A, form one layer of 1H, 1H, 2H, 2H-perfluor
Decyltrichlorosilane molecular coatings；
C, with the three-D elements reverse mould of PDMS material that processes through step B as mould, use PDMS material to carry out secondary
Replicate, after the solidification demoulding, obtain three-D elements copy.
Further:
In step A, will be used for being formed the two-component materials liquid mixing stirring of PDMS material, and in vacuum drying oven
Bubble, is poured over three-D elements master surfaces afterwards, the demoulding after being heating and curing, and obtains the three-D elements reverse mould of PDMS material.
In step A, heating-up temperature is 50-80 DEG C, preferably 65 DEG C.
In step B, the three-D elements reverse mould of PDMS material is placed in exsiccator, and with dropper by 1H, 1H, 2H, 2H-are complete
Fluorine decyltrichlorosilane drips the bottom in exsiccator, is heated by exsiccator, make 1H after hermetically drying device, 1H, 2H, 2H-perfluor last of the ten Heavenly stems
Base trichlorosilane gasifies in hot environment, forms one by molecular self-assembling principle on pending three-D elements reverse mould surface
Layer molecular coatings.
In step B, heating-up temperature is 90-110 DEG C, preferably 100 DEG C.
In step B, the 1H of formation, the thickness of 1H, 2H, 2H-perfluoro decyl trichlorosilane molecular coatings is at about 10nm.
Described three-D elements is Fresnel Lenses.
The surface appearance and size of described Fresnel Lenses is more than 10 μm.
The three-D elements reverse mould of a kind of tissue adhesion, described three-D elements reverse mould includes reverse mould main body and the formation of PDMS material
1H on the surface of described reverse mould main body, 1H, 2H, 2H-perfluoro decyl trichlorosilane molecular coatings.
Described three-D elements can be Fresnel Lenses.
Present invention have the advantage that
The three-D elements manufacture method of the anti-mould adhesion that the present invention provides and three-D elements reverse mould, can be widely applied
In bis-duplication process of PDMS based on soft lithography.Such as, PDMS is being used to make Fresnel based on soft lithography
In lens process, due on the reverse mould surface of PDMS material by formed one layer of 1H, 1H, 2H, 2H-perfluoro decyl trichlorosilane divides
Sub-coating, 1H, 1H, 2H, 2H-perfluoro decyl trichlorosilane molecular layer is different from PDMS material contact angle, and secondary replicates and (uses
PDMS replicates) demoulding becomes easy, serves the effect of tissue adhesion.The present invention utilizes molecular self-assembling former on PDMS reverse mould surface
Reason forms one layer of 1H, and 1H, 2H, 2H-perfluoro decyl trichlorosilane molecular layer, owing to this molecular coatings has contact angle big and surface energy
Low feature so that it has natural tissue adhesion function, after secondary replicates, the demoulding easily success, it is effectively increased making three
The dimension quality of element, yield and efficiency.
Accompanying drawing explanation
Fig. 1 is to use PDMS material once to replicate based on soft lithography in the specific embodiment of the invention to obtain Fei Nie
The schematic diagram of your lens reverse mould；
Fig. 2 is to use the Fresnel Lenses reverse mould duplication Fresnel processed through tissue adhesion saturating in the specific embodiment of the invention
The schematic diagram of mirror；
Fig. 3 is the principle schematic diagram carrying out secondary duplication in the embodiment of the present invention with treated reverse mould.
Detailed description of the invention
Hereinafter embodiments of the present invention are elaborated.It is emphasized that what the description below was merely exemplary,
Rather than in order to limit the scope of the present invention and application thereof.
Refering to Fig. 1 to Fig. 3, in one embodiment, the three-D elements manufacture method of a kind of anti-mould adhesion, including as follows
Step:
Step A, based on soft lithographic technique use PDMS material replicate three-D elements mother matrix 2, obtain the three-dimensional of PDMS material
Element reverse mould 3；
Step B, the surface of three-D elements reverse mould 3 of the PDMS material obtained in step A, form one layer of 1H, 1H, 2H, 2H-
Perfluoro decyl trichlorosilane molecular coatings 4；
Step C, with the three-D elements reverse mould of PDMS material that processes through step B as mould, use PDMS material to carry out
Secondary replicates, and obtains three-D elements copy after the solidification demoulding.
Refering to Fig. 1, in a preferred embodiment, in step A, will be used for being formed the two-component materials liquid of PDMS material
(two-component materials can be the prepolymer known of those skilled in the art and cross-linking agent) mix and blend, and in vacuum drying oven
Remove bubble, be poured over three-D elements mother matrix 2 surface being positioned in mold groove 5, the demoulding after being heating and curing afterwards, obtain PDMS material
Three-D elements reverse mould.
In a further preferred embodiment, in step A, heating-up temperature is 50-80 DEG C, and preferred heating-up temperature is 65
℃。
In a preferred embodiment, in step B, the three-D elements reverse mould 3 of PDMS material is placed in exsiccator, and with dripping
Pipe is by 1H, and 1H, 2H, 2H-perfluoro decyl trichlorosilane drips the bottom in exsiccator, is heated by exsiccator, make after hermetically drying device
1H, 1H, 2H, 2H-perfluoro decyl trichlorosilane gasifies in hot environment, by molecular self-assembling principle in pending three-dimensional
Element reverse mould 3 surface forms one layer of molecular coatings 4.
In a further preferred embodiment, in step B, heating-up temperature is 90-110 DEG C, and preferred heating-up temperature is
100℃。
In a preferred embodiment, in step B, the 1H of formation, 1H, 2H, 2H-perfluoro decyl trichlorosilane molecular coatings exists
About 10nm.
As depicted in figs. 1 and 2, in a kind of specific embodiment, described three-D elements is Fresnel Lenses.
It is preferred that the surface appearance and size of described Fresnel Lenses is more than 10 μm, and the 1H formed, 1H, 2H, 2H-are complete
The thickness of fluorine decyltrichlorosilane molecular coatings is at about 10nm.
Refering to Fig. 2 to Fig. 3, in another kind of embodiment, the three-D elements reverse mould of a kind of tissue adhesion, described three-D elements falls
Mould includes reverse mould main body 1 and the 1H being formed on the surface of described reverse mould main body 1,1H, 2H, the 2H-perfluoro decyl of PDMS material
Trichlorosilane molecular coatings 4.
As shown in Figures 2 and 3, described three-D elements can be Fresnel Lenses.Described three-D elements can also be to pass through
Soft lithographic technique manufactures other complicated various three dimensional structures.
Below with three-D elements for Fresnel Lenses as an example, further describe the specific embodiment of the invention feature and
Advantage.
Fresnel Lenses is the optical element that a kind of surface has graph structure, and its physical dimension is in micron level.Obviously,
PDMS-DC (PDMS double casting, twice duplication based on PDMS) technology may be used for replicating Fresnel Lenses.Ginseng
Read Fig. 1, first, once replicate the reverse mould forming Fresnel Lenses.Specific implementation process is: by PDMS two-component materials (liquid)
Abundant according to weight ratio 1:1 mix and blend, vacuum drying oven goes bubble, is then poured over the Fresnel being positioned in mold groove
The surface of lens, heats 65 DEG C of solidification demouldings and has just obtained the reverse mould of Fresnel Lenses, i.e. the Fresnel Lenses of PDMS material falls
Mould.
The Fresnel reverse mould of PDMS material pending in above-mentioned steps is placed in glass desicator, and drips one with dropper
Dripping 1H, 1H, 2H, 2H-perfluoro decyl trichlorosilane, at the bottom of the bottle of glass desicator, closes the lid and is put by whole glass desicator
Reacting in the drying baker of 100 DEG C, 1H, 1H, 2H, 2H-perfluoro decyl trichlorosilane gasifies in hot environment, then locates waiting
The Fresnel reverse mould surface of reason forms one layer of molecular layer by molecular self-assembling principle.
Refering to Fig. 2 to Fig. 3, it is that mould carries out secondary duplication by the reverse mould of PDMS material treated in above-mentioned steps,
Reproduction process still uses PDMS material.Due to one layer of 1H of coating, 1H, 2H, 2H-perfluoro decyl trichlorine on PDMS base material
Silane molecule layer, its bigger contact angle (contact angle), and relatively low surface can make itself and secondary reproduction process shape
Copy 6 adhesion of the PDMS material become, the demoulding is easy, and obtains Fresnel Lenses copy.
Error analysis:
In this experiment, Fresnel lens surface appearance and size is more than 10 μm, and forms 1H, 1H by molecular self-assembling,
The thickness of 2H, 2H-perfluoro decyl trichlorosilane molecular layer is at about 10nm, compared with Fresnel Lenses surface appearance feature almost
It is negligible.
This tissue adhesion processes technique and is not limited to make the technical process of Fresnel Lenses, in the most any soft lithographic technique
When using PDMS-DC (PDMS double casting, twice duplication based on PDMS) reprography, science and engineering at this tissue adhesion
Skill is all applicable.
Above content is to combine concrete/further description the most made for the present invention, it is impossible to recognize
Determine the present invention be embodied as be confined to these explanations.For general technical staff of the technical field of the invention,
Without departing from the inventive concept of the premise, these embodiments having described that can also be made some replacements or modification by it,
And these substitute or variant all should be considered as belonging to protection scope of the present invention.
Claims (10)
1. the three-D elements manufacture method of an anti-mould adhesion, it is characterised in that comprise the steps:
A, based on soft lithographic technique use PDMS material replicate three-D elements mother matrix, obtain the three-D elements reverse mould of PDMS material；
B, the surface of three-D elements reverse mould of the PDMS material obtained in step A, form one layer of 1H, 1H, 2H, 2H-perfluoro decyl
Trichlorosilane molecular coatings；
C, with the three-D elements reverse mould of PDMS material that processes through step B as mould, use PDMS material to carry out secondary duplication,
Three-D elements copy is obtained after the solidification demoulding.
2. the method for claim 1, it is characterised in that in step A, will be used for being formed the two-component materials of PDMS material
Liquid mixing stirs, and removes bubble in vacuum drying oven, is poured over three-D elements master surfaces afterwards, de-after being heating and curing
Mould, obtains the three-D elements reverse mould of PDMS material.
3. method as claimed in claim 2, it is characterised in that in step A, heating-up temperature is 50-80 DEG C, preferably 65 DEG C.
4. the method for claim 1, it is characterised in that in step B, is placed in dry by the three-D elements reverse mould of PDMS material
In dry device, and with dropper by 1H, 1H, 2H, 2H-perfluoro decyl trichlorosilane drips the bottom in exsiccator, will after hermetically drying device
Exsiccator heats, and makes 1H, 1H, 2H, 2H-perfluoro decyl trichlorosilane gasify in hot environment, by molecular self-assembling principle
One layer of molecular coatings is formed on pending three-D elements reverse mould surface.
5. method as claimed in claim 4, it is characterised in that in step B, heating-up temperature is 90-110 DEG C, preferably 100 DEG C.
6. the method as described in any one of claim 1 to 5, it is characterised in that in step B, the 1H of formation, 1H, 2H, 2H-are complete
The thickness of fluorine decyltrichlorosilane molecular coatings is at about 10nm.
7. the method as described in any one of claim 1 to 6, it is characterised in that described three-D elements is Fresnel Lenses.
8. method as claimed in claim 7, it is characterised in that the surface appearance and size of described Fresnel Lenses 10 μm with
On.
9. the three-D elements reverse mould of a tissue adhesion, it is characterised in that described three-D elements reverse mould includes the reverse mould of PDMS material
Main body and the 1H being formed on the surface of described reverse mould main body, 1H, 2H, 2H-perfluoro decyl trichlorosilane molecular coatings.
10. three-D elements reverse mould as claimed in claim 9, it is characterised in that described three-D elements is Fresnel Lenses.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610866886.7A CN106292201A (en) | 2016-09-28 | 2016-09-28 | The three-D elements manufacture method of a kind of anti-mould adhesion and three-D elements reverse mould |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610866886.7A CN106292201A (en) | 2016-09-28 | 2016-09-28 | The three-D elements manufacture method of a kind of anti-mould adhesion and three-D elements reverse mould |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111965738A (en) * | 2020-07-17 | 2020-11-20 | 上海交通大学 | Artificial bionic compound eye preparation method based on atmospheric pressure cold plasma micromachining |
| WO2021109196A1 (en) * | 2019-12-04 | 2021-06-10 | 诚瑞光学(常州)股份有限公司 | Fresnel mold manufacturing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1583413A (en) * | 2004-06-03 | 2005-02-23 | 上海交通大学 | Polydimethyl siloxane seal batching preparing method based on hot press |
| CN102515091A (en) * | 2011-12-22 | 2012-06-27 | 哈尔滨工业大学 | Plastic functional micro-structured surface soft-lithography duplicating method used in plastic functional micro-structured surface batch production |
| CN103995305A (en) * | 2014-05-27 | 2014-08-20 | 天津大学 | Micro lens manufacturing method |
| CN206057800U (en) * | 2016-09-28 | 2017-03-29 | 清华大学深圳研究生院 | A kind of three-D elements reverse mould of tissue adhesion |
-
2016
- 2016-09-28 CN CN201610866886.7A patent/CN106292201A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1583413A (en) * | 2004-06-03 | 2005-02-23 | 上海交通大学 | Polydimethyl siloxane seal batching preparing method based on hot press |
| CN102515091A (en) * | 2011-12-22 | 2012-06-27 | 哈尔滨工业大学 | Plastic functional micro-structured surface soft-lithography duplicating method used in plastic functional micro-structured surface batch production |
| CN103995305A (en) * | 2014-05-27 | 2014-08-20 | 天津大学 | Micro lens manufacturing method |
| CN206057800U (en) * | 2016-09-28 | 2017-03-29 | 清华大学深圳研究生院 | A kind of three-D elements reverse mould of tissue adhesion |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021109196A1 (en) * | 2019-12-04 | 2021-06-10 | 诚瑞光学(常州)股份有限公司 | Fresnel mold manufacturing method |
| CN111965738A (en) * | 2020-07-17 | 2020-11-20 | 上海交通大学 | Artificial bionic compound eye preparation method based on atmospheric pressure cold plasma micromachining |
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