CN1755503A - Method and device for electrically programmable display - Google Patents

Abstract

One embodiment of the present invention includes a display of interferometric modulators having a configurable resolution characteristic. Selected rows and/or columns are interconnected via a switch. The switch can include a fuse, antifuse, transistor, and the like. Depending on a desired resolution for a display, the switches can be placed in an ''open'' or ''closed'' state. Advantageously, using the switches, a display can readily be configured for differing modes of resolution. Furthermore, using the switches, a display can be configured to electrically connect certain rows or columns in the display such that the connected rows or columns can be driven simultaneously by a common voltage source.

Description

The method and the device that are used for electrically programmable display

Technical field

The present invention relates to MEMS (micro electro mechanical system) (MEMS) by and large.

Background technology

MEMS (micro electro mechanical system) (MEMS) comprises micromechanical component, driver and electronic component.Micromechanical component can adopt deposition, etching or other several portions that can etch away substrate and/or institute's deposited material layer maybe can add several layers and make with the micromachined technology that forms electricity and electromechanical assembly.These MEMS devices can be used for for example being used in optical application and the circuit application in the various application.

One type MEM device is called as interferometric modulation.Interferometric modulator can comprise the pair of conductive plate, one of them or the two all can be transparent whole or in part and/or be reflectivity, and can relative motion when applying a suitable electric signal.One of them plate can comprise a quiescent layer that is deposited on the substrate, and another plate can comprise a metal partion (metp) that separates by a clearance and this quiescent layer.Said apparatus is with a wide range of applications, and in this technology, utilizes and/or revises the characteristic of these types of devices so that its performance can be used for improving existing product and makes still undeveloped at present new product will be rather useful.

The MEMS device of another kind of type is as a multimode capacitor.For example, described capacitor can comprise the pair of conductive plate, and wherein when applying a suitable electric control signal, at least one plate can relative motion.The relative motion meeting changes the electric capacity of capacitor, thereby described capacitor be can be used in the various application, for example is used for filtering circuit, tuned circuit, phase-shift circuit, attenuator circuit and similar application.

Summary of the invention

System of the present invention, method and device all have many aspects, and arbitrary single aspect all can not determine its desired characteristic separately.Now, its main characteristic is carried out brief discussion, this not delimit the scope of the invention.Checking this argumentation, especially reading title for after the part of " embodiment ", how people provides the advantage that is better than other display device if can understanding feature of the present invention.

An embodiment comprises a kind of display.Described display can comprise that one has the array of the capable and row of a plurality of interferometric modulators.Described array also can comprise a plurality of electric conductors.Each electric conductor all is connected to one of described a plurality of row or column in the described electric conductor.In the described conductor at least two are configured to the resolution character with at least one zone of revising described array of electrical interconnection optionally.

Another embodiment comprises a kind of method.Described method comprises by a switch and at least two of described display adjacent row is electrically connected mutually and/or at least two of described display adjacent row are electrically connected mutually, to revise described exploration on display resolution ratio characteristic.

Another embodiment comprises a kind of system.Described system comprises the member that is used to show an image, and it comprises the capable and row of a plurality of interferometric modulators; A plurality of electric conductors, it is connected to described a plurality of row and row; And at least one pair of member that is used for the described electric conductor of electrical interconnection optionally with a resolution character at least one zone of revising described array.

An embodiment comprises a kind of method of manufacturing one display system again.Described method comprises: make a plurality of electric conductors, each electric conductor in the described electric conductor is connected to one of described a plurality of row or column, in the described conductor at least two are configured to revise at least one regional resolution character of a display thus by switch electrical interconnection optionally; Reach with described a plurality of electric conductors of making and switch and side by side make described display.

Description of drawings

These accompanying drawings (not drawn on scale) herein and relevant explanation are intended to each embodiment of illustration but not are intended to limit the present invention.

Fig. 1 is first-class axle figure, it shows the part of an embodiment of an interferometric modulator display, wherein one of one first interferometric modulator removable reflection horizon is in an off-position, and a removable reflection horizon of one second interferometric modulator is in an excited target position.

Fig. 2 is a system block diagram, and it shows that one comprises an embodiment of the electronic installation of one 3 * 3 interferometric modulator displays.

Fig. 3 is the removable mirror position of an exemplary embodiment of interferometric modulator shown in Figure 1 and the graph of a relation of the voltage that applies.

Fig. 4 is one group of synoptic diagram that can be used for driving the row and column voltage of interferometric modulator display.

Fig. 5 A and Fig. 5 B show an exemplary sequential chart that can be used for writing to 3 * 3 interferometric modulator displays shown in Figure 2 the row and column signal of a frame of display data.

Fig. 6 A is the sectional view of a device shown in Figure 1.

Fig. 6 B is a sectional view of an alternate embodiment of an interferometric modulator.

Fig. 6 C is a sectional view of another alternate embodiment of an interferometric modulator.

Fig. 7 is the calcspar of an example display.

Fig. 8 is the calcspar of another example display.

Fig. 9 A-9F is the sectional elevation drawing of the plurality of layers that deposits in interferometric modulator process shown in the construction drawing 6A.

Figure 10 one shows that one is used to dispose the process flow diagram of the example process of a display.

Figure 11 A and 11B are the system block diagrams of an exemplary embodiment of demonstration one display device.

Embodiment

Below describe in detail and relate to some embodiments of the invention.But, the present invention can implement by being permitted different ways.In this explanation, can be with reference to accompanying drawing, in the accompanying drawings, identical parts use identical number-mark from start to finish.Find out easily that according to following explanation the present invention can implement in arbitrary configuration is used for the device of display image (no matter no matter is dynamic image (for example video) or still image (for example rest image), be character image or picture also).More specifically, the present invention can implement in inferior numerous kinds of electronic installations or is associated with these electronic installations for example (but being not limited to): mobile phone, wireless device, personal digital assistant (PDA), handheld computer or portable computer, gps receiver/omniselector, camera, the MP3 player, video camera, game machine, wrist-watch, clock, counter, TV monitor, flat-panel monitor, computer monitor, automotive displays (for example mileometer display etc.), driving cabin control device and/or display, video camera scenery display (for example backsight video camera display of vehicle), electronic photo, electronics billboard or label, projector, building structure, packing and aesthetic structures (for example image display of a jewelry).The MEMS device that has similar structures with MESE device described herein also can be used for non-display application, for example is used for electronic switching device.

The value that needs the resolution that display has in response to and totally different.By providing its resolution to be enough to cover the display of all application, can reduce the cost of display by scale economics.Yet the resolution that this kind is high brings meaningless driver cost can for the user with low resolution needs.An embodiment provides a modulator array, wherein is excitation sub-pixel element group, and the lead-in wire of each modulator is optionally coupled.This is that cost has reduced number of leads with unnecessary monitor resolution.

Show an interferometric modulator display embodiment who contains an interfere type MEMS display element among Fig. 1.In these devices, pixel is in bright state or dark state.Bright opening (on) or open under (open) state, display element reflexes to the user with most of incident visible light.Be in dark (close (off) or close (closed)) state following time, display element reflects the incident visible light to the user hardly.Decide on different embodiment, can put upside down the light reflectance properties of "on" and "off" state.The MEMS pixel can be configured to mainly reflect under selected color, also can realize colored the demonstration except that black and white.

Fig. 1 is first-class axle figure, and it shows two adjacent pixels in a series of pixels of a visual displays, and wherein each pixel comprises a MEMS interferometric modulator.In certain embodiments, an interferometric modulator display comprises a row/column array that is made of these interferometric modulators.Each interferometric modulator comprises a pair of reflection horizon, and this is positioned to each other to have a variable-sized optical resonance cavity at a distance of a variable and controlled distance at least to form one to the reflection horizon.In one embodiment, one of them reflection horizon can be moved between the two positions.Be referred to herein as on the primary importance of relaxed state, the local reflex layer that the position of this displaceable layers distance one is fixed is far away relatively.On the second place, the position of this displaceable layers is more closely near this local reflex layer.Decide position according to removable reflection horizon, from the incident light of this two layers reflection can with mutually long or mutually the mode of disappearing interfere, thereby form the mass reflex or the non-reflective state of each pixel.

The pixel array portion that shows in Fig. 1 comprises two adjacent interferometric modulator 12a and 12b.In the interferometric modulator 12a in left side, demonstration one movably high reflection layer 14a is in an off-position, and this off-position is apart from fixing local reflex layer 16a one preset distance.In the interferometric modulator 12b on right side, demonstration one movably high reflection layer 14b is in an excited target position, and this excited target position is near fixing local reflex layer 16b.

Fixed bed 16a, 16b conduct electricity, the part is transparent and local is reflectivity, and can the layer of one or more respectively do for oneself chromium and tin indium oxides be made by for example depositing on a transparent substrates 20.Described each layer is patterned into parallel band, and can form the column electrode in the display device, as further specifying hereinafter. Displaceable layers 14a, 14b can form that (and column electrode 16a, 16b quadrature and are deposited on the series of parallel band that the middle expendable material between the pillar 18 constitutes by one or more depositing metal layers that is deposited on pillar 18 tops.After expendable material was etched, these deformable metal level 14a, 14b and the metal level of fixing separated by an air gap 19 of stipulating.These deformable layer can use one to have high conductivity and reflexive material (for example aluminium), and those bands can form the row electrode in the display device.

When not applying voltage, cavity 19 remains between a layer 14a, the 16a, and deformable layer is in the mechanical relaxed state shown in pixel 12a among Fig. 1.Yet after a selected row and column applies potential difference (PD), the capacitor that forms at the respective pixel place of described row and column electrode intersection is recharged, and electrostatic force pulls to these electrodes together.If voltage is enough high, then displaceable layers generation deformation, and be forced on the fixed bed (can on fixed bed, deposit a dielectric material (not shown in this Figure), preventing short circuit, and the control separation distance), shown in the pixel 12b on right side among Fig. 1.Regardless of the potential difference (PD) polarity that is applied, the behavior is all identical.This shows, may command reflection and row/row of non-reflective pixel state encourage to traditional LCD and other display techniques in used row/row encourage similar in many aspects.

Fig. 2 to Fig. 5 shows the example process and the system that use an interferometric modulator array in a display application.

Fig. 2 is a system block diagram, and this figure shows that one can embody an embodiment of the electronic installation of each side of the present invention.In this exemplary embodiment, described electronic installation comprises a processor 21, it can be any general purpose single-chip or multicore sheet microprocessor, for example ARM, Pentium , Pentium II , Pentium III , Pentium IV , Pentium  Pro, 8051, MIPS , Power PC , ALPHA , or any special microprocessor, for example digital signal processor, microcontroller or programmable gate array.According to convention in the industry, processor 21 can be configured to carry out one or more software modules.Except that carrying out an operating system, also this processor can be configured to carry out one or more software applications, comprise web browser, telephony application, e-mail program or any other software application.

In one embodiment, processor 21 also is configured to communicate with an array controller 22.In one embodiment, array control unit 22 comprises a horizontal drive circuit 24 and the column drive circuit 26 that signal is provided to an array of display or panel 30.Array sectional view shown in Fig. 1 illustrates with line 1-1 in Fig. 2.For the MEMS interferometric modulator, OK/the row excitation protocol can utilize the hysteresis property of these devices shown in Figure 3.It may need the potential difference (PD) of (for example) 10 volts to make a displaceable layers be deformed into actuated state from relaxed state.Yet, when described voltage when this value reduces, reduce when being back to below 10 volts at described voltage, described displaceable layers will keep its state.In the exemplary embodiment of Fig. 3, before voltage drop was low to moderate below 2 volts, displaceable layers is relaxation fully not.Therefore, in example shown in Figure 3, exist one to be approximately the voltage range that 3-7 lies prostrate, exist one to apply voltage window in this voltage range, described device is stabilized in relaxation or actuated state in this window.Be referred to as " lag windwo " or " stability window " in this article.For an array of display with hysteresis characteristic shown in Figure 3, OK/the row excitation protocol can be designed to be expert at during the gating, the pixel that is energized is applied about 10 a volts voltage difference to selected in current, and to d/d pixel being applied one near 0 volt voltage difference.After gating, it is poor to apply about 5 a volts steady state voltage to pixel, and gating makes its residing state so that its maintenance is expert at.After writing, in this example, each pixel is all born one and is in " stability window " interior potential difference (PD) that 3-7 lies prostrate.This characteristic makes pixel design shown in Figure 1 be stabilized in an existing actuated state or a relaxed state under the voltage conditions in identical applying.Because each pixel (no matter being in actuated state or relaxed state) of interferometric modulator in fact all is one by described fixed reflector and capacitor that mobile reflection horizon constituted, so this steady state (SS) can be kept under the voltage in the lag windwo and consumed power hardly.If the current potential that is applied is fixed, then there is not electric current to flow into pixel basically.

In the typical case uses, can be by determining that according to one group of desired actuated pixels in first row one group of row electrode forms a display frame.After this, horizontal pulse is put on the electrode of the 1st row, thereby encourage the pixel corresponding with determined alignment.After this, determined one group of row electrode is become corresponding with desired one group of actuated pixels in second row.After this, with pulse put on the 2nd the row electrode, thereby according to determined row electrode encourage the 2nd the row in respective pixel.The pixel of the 1st row is not subjected to the influence of the pulse of the 2nd row, thereby remains on the state that it sets at the impulse duration of the 1st row.The property mode repeats above-mentioned steps to the row of whole series in order, to form described frame.Usually, repeating this process continuously by the speed with a certain desired frame number/second to refresh and/or upgrade these frames with new video data.Also have a variety of row and the row electrodes that are used to drive pel array also to be known, and can use with the present invention by people with the agreement that forms display frame.

Fig. 4 and Fig. 5 show a kind of possible excitation protocol that is used for forming a display frame on 3 * 3 arrays shown in Figure 2.Fig. 4 shows one group of possible row and column voltage level of can be used for those pixels that show hysteresis curve shown in Figure 3.In the embodiment of Fig. 4, encourage a pixel to comprise and be set to-V being listed as accordingly _Bias, and will go accordingly and be set to+Δ V, it can correspond respectively to-5 volts and+5 volts.Discharging pixel then is to be set to+V by being listed as accordingly _BiasAnd will go accordingly and be set to identical+Δ V and realize so that form 0 volt potential difference (PD) at described pixel two ends.In the row of 0 volt of those wherein capable voltages maintenance, pixel is stable at its original residing state, and is in+V with these row _BiasStill-V _BiasIrrelevant.Equally as shown in Figure 4, should be appreciated that, can use polarity and above-mentioned opposite polarity voltage, for example encourage a pixel to comprise and be set to+V being listed as accordingly _Bias, and will go accordingly and be set to-Δ V.In this embodiment, discharging pixel is to be set to-V by being listed as accordingly _BiasAnd will go accordingly and be set to identical-Δ V and realize so that form 0 volt potential difference (PD) at described pixel two ends.

Fig. 5 B is the sequential chart of a series of row of demonstration and column signal, and those signals put on 3 * 3 arrays shown in Figure 2, and it will form the demonstration shown in Fig. 5 A and arrange that wherein actuated pixels is non-reflectivity.Before writing the frame shown in Fig. 5 A, pixel can be in any state, and in this example, all row all are in 0 volt, and all row all be in+5 volts.Under these institute's voltages that apply, all pixels are stable at its existing actuated state or relaxed state.

In the frame shown in Fig. 5 A, pixel (1,1), (1,2), (2,2), (3,2) and (3,3) are encouraged.For realizing this effect, in the line time of the 1st row the 1st row and the 2nd row are set at-5 volts, the 3rd row are set at+5 volts.This can not change the state of any pixel, because all pixels all remain in the stability window of 3-7 volt.After this, rise to 5 volts of pulses that are back to 0 volt that descend again then by one from 0 volt and come gating the 1st row.Actuate pixel (1,1) and (1,2) and make pixel (1,3) relaxation thus.Other pixel in the array is all unaffected.For the 2nd row is set at desired state, the 2nd row are set at-5 volts, the 1st row and the 3rd row are set to+5 volts.After this, apply identical strobe pulse with actuate pixel (2,2) and make pixel (2,1) and (2,3) relaxation to the 2nd row.Equally, other pixel in the array is all unaffected.Similarly, by the 2nd row and the 3rd row are set at-5 volts, and be listed as the 1st be set at+5 volts to the 3rd capable the setting.The strobe pulse of the 3rd row is set at the state shown in Fig. 5 A with the 3rd row pixel.After writing incoming frame, the row current potential is 0, and the row current potential can remain on+5 or-5 volts, and after this demonstration will be stable at the layout shown in Fig. 5 A.Should be appreciated that, can use identical programs the array that constitutes by tens of or hundreds of row and columns.The timing, order and the level that should also be clear that the voltage that is used to implement the row and column excitation can alter a great deal in above-described General Principle, and above-mentioned example only is exemplary, and any actuation voltage method all can be used with system and method as herein described.

Figure 11 A and 11B are the system block diagrams of an embodiment of demonstration one display device 40.Display device 40 for example can be cellular phone or mobile phone.Yet the discrepant slightly assembly of the same components of display device 40 or its also can illustrate dissimilar display device, for example TV or portable electronic device.

Display device 40 comprises a shell 41, a display 30, an antenna 43, a loudspeaker 44, an input media 48, reaches a microphone 46.Shell 41 comprises injection moulding and vacuum forming usually by any the making in the known many kinds of manufacturing process of those skilled in the art.In addition, shell 41 can include but not limited to plastics, metal, glass, rubber and pottery by any the making in the many kinds of materials, or the one combination.In one embodiment, shell 41 comprises the moveable part (not shown) that can have different colours with other or comprise the moveable part exchange of unlike signal, picture or symbol.

The display 30 of exemplary display device 40 can be any in the numerous kinds of displays, comprises bi-stable display as herein described.In other embodiments, display 30 comprises flat-panel monitors such as plasma scope for example mentioned above, EL, OLED, STN LCD or TFT LCD or non-tablet display such as CRT or other tubular device for example, and these displays are known by the those skilled in the art.Yet for ease of the explanation present embodiment, display 30 comprises just like interferometric modulator display as herein described.

Figure 11 B schematically shows the assembly among the embodiment of exemplary display device 40.Example illustrated demonstration client computer 40 comprises a shell 41 and can comprise that other are at least partially enclosed within the assembly in the shell 41.For example, in one embodiment, exemplary display device 40 comprises a network interface 27, and this network interface 27 comprises that one is coupled to the antenna 43 of a transceiver 47.Transceiver 47 is connected to processor 21, and processor 21 is connected to again regulates hardware 52.Regulating hardware 52 can be configured to a signal is regulated (for example a signal being carried out filtering).Regulate hardware 52 and be connected to a loudspeaker 44 and a microphone 46.Processor 21 also is connected to an input media 48 and a driving governor 29.Driving governor 29 is coupled to one frame buffer 28 and is coupled to array driver 22, and array driver 22 is coupled to an array of display 30 again.One power supply 50 provides power according to the designing requirement of this particular exemplary display device 40 to all component.

Network interface 27 comprises antenna 43 and transceiver 47, so that exemplary display device 40 can communicate by network and one or more device.In one embodiment, network interface 27 also can have some processing capacity, to reduce the requirement to processor 21.Antenna 43 is used to transmit and receive the antenna of signal for those skilled in the art known any.In one embodiment, this antenna is launched according to IEEE 802.11 standards (comprising IEEE802.11 (a), (b), or (g)) and is received the RF signal.In another embodiment, this antenna is launched according to bluetooth (BLUETOOTH) standard and is received the RF signal.If be cellular phone, then this antenna is designed to receive CDMA, GSM, AMPS or other and is used for the known signal that communicates at the mobile phone network.47 pairs of signals that receive from antenna 43 of transceiver carry out pre-service, so that it can be received and further be handled by processor 21.Transceiver 47 is also handled the signal that self processor 21 receives, so that they can be by antenna 43 from 40 emissions of exemplary client computer.

In an alternate embodiment, transceiver 47 can be substituted by a receiver.In another alternate embodiment, can replace network interface 27 by an image source, this image source can store or produce and send out the view data of delivering to processor 21.For example, this image source can be one and contains the software module that the digital video disk (DVD) of view data or hard disk drive or produce view data.

The overall operation of processor 21 common control examples display device 40.Processor 21 automatic network interfaces 27 or an image source receive data (for example Ya Suo view data), and this data processing is become raw image data or is processed into a kind of form that is easy to be processed into raw image data.Then, the data after processor 21 will be handled are sent to driving governor 29 or are sent to frame buffer 28 and store.Raw data typically refers to the information that can discern the picture characteristics of each position in the image.For example, described picture characteristics can comprise color, saturation degree and gray level.

In one embodiment, processor 21 comprises a microcontroller, CPU or is used for the logical block of the operation of control examples display device 40.Regulating hardware 52 generally includes and is used for sending signals and from the amplifier and the wave filter of microphone 46 received signals to loudspeaker 44.Adjusting hardware 52 can be the discrete component in the exemplary display device 40, perhaps can incorporate in processor 21 or other assemblies.

Driving governor 29 direct self processors 21 or obtain the raw image data that produces by processor 21 from frame buffer 28, and suitably with the raw image data reformatting so as high-speed transfer to array driver 22.Particularly, driving governor 29 is reformated into a data stream with raster-like format with raw image data, so that it has a chronological order that is suitable for scanning array of display 30.After this, the information after driving governor 29 will format is sent to array driver 22.Although a driving governor 29 (a for example lcd controller) usually as one independently integrated circuit (IC) be associated with system processor 21, these controllers can make up by many kinds of modes.It can be used as hardware and is embedded in the processor 21, is embedded in the processor 21 or fully-integrated with example, in hardware and array driver 22 as software.

The self-driven controllers 29 of array driver 22 receive the information after the format and video data are reformated into one group of parallel waveform, and the parallel waveform per second of this group many times is applied to from hundreds of of the x-y pel array of display, thousands of lead-in wires sometimes.

In one embodiment, driving governor 29, array driver 22, and array of display 30 be applicable to the display of arbitrary type as herein described.For example, in one embodiment, driving governor 29 is a traditional display controller or bistable display controllers (a for example interferometric modulator controller).In another embodiment, array driver 22 is a legacy drive or a bistable display driver (a for example interferometric modulator display).In one embodiment, a driving governor 29 integrates with array driver 22.This embodiment is very common in the integrated system of for example cellular phone, wrist-watch and other small-area display equal altitudes.In another embodiment, array of display 30 is a typical array of display or a bistable array of display (a for example display that comprises an interferometric modulator array).

Input media 48 makes the operation that the user can control examples display device 40.In one embodiment, input media 48 comprises a keypad (for example a qwerty keyboard or a telephone keypad), a button, a switch, a touch sensitive screen, a pressure-sensitive or thermosensitive film.In one embodiment, microphone 46 is an input media of exemplary display device 40.When using microphone 46, can provide voice command to come the operation of control examples display device 40 by the user to these device input data.

Power supply 50 can comprise many kinds of energy storing devices, and this is well-known in affiliated field.For example, in one embodiment, power supply 50 is a rechargeable accumulator, for example nickel-cadmium accumulator or lithium-ions battery.In another embodiment, power supply 50 is a regenerative resource, capacitor or solar cell, comprises plastic solar cell and solar cell coating.In another embodiment, power supply 50 is configured to receive electric power from wall plug.

In certain embodiments, programmability is as indicated above resides in the driving governor in control, and this driving governor can be arranged on several positions of electronic display system.In some cases, the control programmability resides in the array driver 22.The those skilled in the art will know, hardware and/or component software that can any amount and implement above-mentioned optimization with different configurations.

Detailed structure according to the interferometric modulator of above-mentioned principle operation can be ever-changing.For example, Fig. 6 A-6C shows three kinds of different embodiment of moving lens structure.Fig. 6 A is a sectional view embodiment illustrated in fig. 1, wherein deposition one strip of metal material 14 on the support member 18 that quadrature extends.In Fig. 6 B, movably reflecting material 14 only is on the tethers 32 at corner and is attached to support member.In Fig. 6 C, movably reflecting material 14 is suspended on the deformable layer 34.Because the structural design and the material therefor of reflecting material 14 can be optimized aspect optical characteristics, and the structural design of deformable layer 34 and material therefor can be optimized aspect the desired mechanical property, so this embodiment has some advantages.In many open files, comprise in the open application case of (for example) No. 2004/0051929 U.S., the manufacturing of various dissimilar interferometric device has been described.Can use the known technology of a variety of people to make said structure, this comprises a series of material depositions, patterning and etching step.

The value that needs the resolution that display has in response to and totally different.Cover the display of all application by providing a resolution to be enough to, and can reduce the cost of display by scale economics.Yet the resolution that this kind is high brings meaningless driver cost can for the user with low resolution needs.An embodiment provides a modulator array, wherein is excitation sub-pixel element group, and the lead-in wire of each modulator is optionally coupled.This is that cost has reduced number of leads with unnecessary monitor resolution.

Fig. 7 shows an exemplary embodiment of a display 700.Display 700 comprises 1,000 and relates to formula modulator 702 arrays.Described modulator can comprise any interferometric modulator shown in Fig. 6 A, 6B, the 6C, perhaps can be other goods.Provide M line lead (R1-R4) to select the modulator that to be written into capable, and provide N row lead-in wires (C1-C4) to come the selected modulator that lists 502 is write.Should be appreciated that, can make the display of the row or column that comprises any amount.

In one embodiment, adjacent row and row lead-in wire can be electrically connected by switch 704.Described switch can comprise the switchgear of fuse, anti-fuse, cross-over connection pin, transistor or other types.One example of anti-fuse is set forth in " to the comparative research (A ComparatiVe Study of the On-Off Switching Behavior ofMetal-Insulator-Metal Antifuses) of the on-off switch behavior of the anti-fuse of metal-insulator-metal type " (IEEE ELECTRON DEVICE LETTERS that the people showed by Li etc., the 21st volume, No.6, in June, 2000) in.In one embodiment, described switch is in " closure " state, and can be placed on " opening " state by applying electric signal (for example big electric current).For example, if described switch comprises a fuse, then big electric current can make the fuse short circuit, thereby causes open circuit.In another embodiment, described switch is in " opening " state, and can be placed on " closure " state by applying electric signal (for example big electric current).For example, if switch 704 comprises an anti-fuse, then described electric signal can make switch fade to " closure " position from " opening ".In addition, in one embodiment, can control with programming mode the operation of switch 704.In this embodiment, each switch 704 all can be connected to a control circuit that operates on it control.

By revising the state of described switch, can be configured the exploration on display resolution ratio characteristic.Can use single manufacturing process of planting to form the display that the different resolution characteristic can be provided.The state of switch is promptly opened or closed, can be after making, selected before being sold to retailer or client.In one embodiment, if described switch can be controlled by programming mode, then can revise the exploration on display resolution ratio characteristic by the controller of display.

For the illustration purpose, two clients can all buy display shown in Figure 7.Yet first client may need his application is used the full resolution of display, 600dpi for example, and second client only wishes 1/4th of available resolution is used in his application, is 150dpi in this example.In this kind situation, first client can buy the display that all switches 704 are wherein all opened a way.Can be second client one wherein half switch 704 " closure " (for example each all is electrically connected to adjacent column or row) and second half display of " opening " is provided, this display can provide addressable pixel element of 1/4th quantity, and wherein each pixel element is four times of pixel element size in the ultimate resolution display.In the same way, can support to use the combination in any of the switch of any array sizes.In addition, the size of pixel or shape need be not consistent in whole array.

In one embodiment, described switch connects non-conterminous column or row.For example, as shown in Figure 8, some switch 704 connects that some row or column-it can be 1,2,3 of space ..., N row or column.Decide on embodiment, a selected row or column can be connected to one or more (comprising all) other row or column in the display.In addition, in one embodiment, some row or column is not connected to other column or row by one of them switch 704.For example, referring to Fig. 8, as seen by visual, two row at top are not connected to two row of bottom by switch.

Fig. 9 A-9F shows that one is used for making the various aspects of the technological process of fuse in the technological process of making the display interferometric modulator.Hereinafter described example only is intended to easy to understand embodiment as herein described.The MEMS structure of any use air gap and electrostatic attraction all can be used method as herein described and structure.In addition, any MEMS structure that one displaceable element and its active layer is separated by a dielectric material, have a movable element and an activity active layer/element the MEMS structure or have the MEMS structure that a movable element contacts one dielectric layer/element and all can use method as herein described and structure.

In Fig. 9 A, on a transparent substrates 908, form a layer 904.In one embodiment, layer 904 can be a metal level.In one embodiment, layer 904 can comprise a Cr layer 912 and an ITO layer 914.Referring now to Fig. 9 B,, deposition one dielectric stack 916 is also carried out etching to it subsequently on layer 904 then.Fig. 9 B shows: piles up after 916 in deposit dielectric, and deposition one sacrifice layer 920 on this dielectric stack, this sacrifice layer 920 of etching is to form the hole 922 shown in Fig. 9 C then.Fig. 9 D shows deposition one complanation layer 924 in the hole 922 of sacrifice layer.Shown in Fig. 9 E, on sacrifice layer 920 and complanation layer 924, form a mechanical layer 928 then.In one embodiment, mechanical layer 928 can have a reflective surface will.In one embodiment, also use mechanical layer 928 to come patterning one fuse (switch) 934.Fuse 934 connects selected each row or each row in the display.It should be noted that the layer below the fuse 934 can comprise arbitrary suitable material, for example can use above or other local described deposition materials are made one or more layers.By Fig. 9 F as seen, use a selective etch agent to remove sacrifice layer 920, thereby form a gap 930 below 928, on the dielectric stack 916 at mechanical layer.

Figure 10 is a process flow diagram, and its demonstration one becomes to have the example process of selected resolution character with a display device configurations.Decide on embodiment, can increase extra step, delete other steps and rearrange the order of each step.Process flow diagram shown in Figure 10 generally is used to dispose the display that on-off element wherein comprises fuse.Should be appreciated that this technological process can be used for the display that switch wherein comprises anti-fuse, transistor or other elements after revising.

At first in step 1000, determine which pixel of display should be independent, determine that promptly which fuse should keep not short circuit.Proceed to step 1004 then, identification will be by the fuse of fusing (promptly being placed in " opening " state).Next, in step 1008, a current source is connected to row suitable in the display.Then proceed to step 1012, activate described current source, with corresponding fuse failure.Proceed to a steps in decision-making 1016 then, determine whether that all needed fuses all activate.If all needed fuses of un-activation still, then this process is back to state 1004.Yet if all needed fuses all are activated, this process finishes.

Various embodiment above have been described.Although be to be illustrated,, this explanation is intended to as limited explanation yet being intended to as the explanation of separating property of example with reference to these specific embodiments.The person of ordinary skill in the field can find out various modifications and application, and this does not deviate from practicalness of the present invention and the scope that is defined in the claims of enclosing.

Claims (26)

1, a kind of display system, it comprises:

One comprises the array of the capable and row of a plurality of interferometric modulators; And

A plurality of electric conductors, each electric conductor all is connected to the row or column in described a plurality of row or column in the described electric conductor, and at least two conductor arrangement in the described conductor become the resolution character with at least one zone of revising described array of electrical interconnection optionally.

2, display system as claimed in claim 1, wherein said at least two conductors are connected to row or column close each other on entity respectively.

3, display system as claimed in claim 1, wherein said at least two conductors are connected to the row or column that keeps clear of each other respectively on entity.

4, display system as claimed in claim 1, wherein said at least two conductors link to each other by an anti-fuse at least in part.

5, display system as claimed in claim 4, wherein said anti-fuse are to make during a manufacture craft of described interferometric modulator array.

6, display system as claimed in claim 1, wherein said at least two conductors link to each other by a transistor at least in part.

7, display system as claimed in claim 1, it further comprises:

One with the processor of described array electric connection, described processor is configured to image data processing; And

One with the memory storage of described processor electric connection.

8, display system as claimed in claim 7, it further comprises:

One first controller, it is configured to send at least one signal to described array; And

One second controller, it is configured to send to described first controller at least a portion of described view data.

9, display system as claimed in claim 7, it comprises that further one is configured to send to described processor the image source module of described view data.

10, display system as claimed in claim 9, wherein said image source module comprise a receiver, transceiver, reach at least one in the transmitter.

11, display system as claimed in claim 7, it further comprises an input media that is configured to receive the input data and transmits described input data to described processor.

12, the method for a kind of modification one exploration on display resolution ratio characteristic, it comprises by a switch and at least two of described display adjacent row is electrically connected mutually and/or at least two of described display adjacent row are electrically connected mutually.

13, method as claimed in claim 12, wherein said switch comprise an anti-fuse.

14, method as claimed in claim 12, wherein said switch comprises a fuse.

15, method as claimed in claim 12, wherein said switch comprises a transistor.

16, method as claimed in claim 12, it makes described switch during being included in a manufacture craft of described display in addition.

17, a kind of display system, it comprises:

Be used to show the member of an image, it comprises the capable and row of a plurality of interferometric modulators;

A plurality of electric conductors, it is connected to described a plurality of row and row; And

At least one pair of electric conductor that is used for the described electric conductor of electrical interconnection optionally is with the member of the resolution character at least one zone of revising described array.

18, display system as claimed in claim 17, wherein said electrical interconnection member comprise by a switch and at least two of one display adjacent row are electrically connected mutually and at least two of described display adjacent row are electrically connected mutually.

19, display system as claimed in claim 18, wherein said switch comprises a fuse.

20, display system as claimed in claim 19, wherein said switch comprises a transistor.

21, as claim 17 or 18 described display systems, wherein said display member comprises the capable and row of described a plurality of MEMS interferometric modulators.

22, a kind of method of manufacturing one display system, described method comprises:

Make a plurality of electric conductors, each electric conductor in the described electric conductor is connected to the row or column in described a plurality of row or column, at least two conductor arrangement in the described conductor become to pass through optionally electrical interconnection of a switch, revise the resolution character at least one zone of a display thus; And

When making described a plurality of electric conductors and switch, make described display.

23, a kind of display system of making by method as claimed in claim 22.

24, display system as claimed in claim 23, wherein said switch comprise an anti-fuse.

25, display system as claimed in claim 23, wherein said switch comprises a fuse.

26, display system as claimed in claim 23, wherein said switch comprises a transistor.

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