CN101694767B

CN101694767B - System and method for addressing mems display

Info

Publication number: CN101694767B
Application number: CN200910129348XA
Authority: CN
Inventors: 克拉伦斯·徐; 米特兰·C·马修; 马克·米格纳德
Original assignee: Qualcomm MEMS Technologies Inc
Current assignee: Qualcomm MEMS Technologies Inc
Priority date: 2004-08-27
Filing date: 2005-08-26
Publication date: 2012-07-18
Anticipated expiration: 2025-08-26
Also published as: JP5043812B2; JP2009175710A; JP5069208B2; JP2009163230A; CN101694767A

Abstract

A system and method for addressing an array of MEMS display elements, such as interferometric modulators, from a drive control. A display includes groups of display elements that are addressed with a commonly applied drive signal. In one embodiment, the groups of display elements are configured to have different response times and are driven by pulses of varying length indicative of those response times. In another embodiment, the groups of display elements are configured to have different actuation voltages and are driven by pulses of varying voltage indicative of those actuation voltages.

Description

The system and method that is used for addressing MEMS display

Technical field

Technical field of the present invention relates to MEMS (MEMS).

Background technology

MEMS (MEMS) comprises micromechanical component, driver and electronic equipment.Micromechanical component can adopt deposition, etching or other several portions that can etch away substrate and/or institute's deposited material layer maybe can add several layers and process with the micromachined technology that forms electric and electromechanical assembly.One type MEMS device is called as interferometric modulator.Interferometric modulator can comprise the pair of conductive plate, one of them or the two can be partly transparently, and can when applying a suitable electric signal, make relative motion.One of them plate can comprise the quiescent layer that is deposited on the substrate, and another plate can comprise the metal film that is suspended from this quiescent layer.Said apparatus is with a wide range of applications, and in this technology, utilizes and/or revises the characteristic of device of these types so that its characteristic can be used for improving existing product and makes still undeveloped at present new product will be rather useful.

Summary of the invention

System of the present invention, method and device respectively have many aspects, and arbitrary single aspect all can not determine its desired attribute separately.To make brief description to its more outstanding characteristic, this not delimit the scope of the invention at present.Considering this argumentation, especially after having read the part that is entitled as " embodiment ", how people provides the advantage that is superior to other display device if can understanding characteristic of the present invention.

In one embodiment, a display is provided.Said display comprises a plurality of optical modulation elements, has at least some optical modulation elements to have different and addressing pulse width and addressing pulse voltage level one or both of relative tilt value in these optical modulation elements.Addressing circuit also is provided; Said addressing circuit is configured to a plurality of elements the addressing pulse with different in width and/or voltage level is provided; So that different elements combination switches with an optional mode according to the width and/or the voltage level of addressing pulse, and wherein said addressing circuit is configured to whole elements of providing in the said a plurality of elements all at least one second pulse to its response of first pulse of its response and the not enough whole element in said a plurality of element.

At another embodiment, a display is provided.Said display comprises a plurality of MEMS elements that arrange in a row, and wherein the MEMS element with every row further is arranged in the plurality of sub row, and wherein makes the electrical connection of passing through of the plurality of sub of every row.In this embodiment; A plurality of resistors also are provided; In the said resistor each is connected to each the son row in the said plurality of sub row respectively, each resistor of resistor that is used for each sub-rows of each row have one be different from the resistors of other son row that are connected to this row resistance.

In another embodiment; The method of a plurality of display elements of a kind of addressing; Said a plurality of display element has at least one first and second display elements and it is characterized in that response lag separately; Said method comprises: produce one first pulse, said first pulse is characterised in that it has a parameter, and the value of this parameter is greater than the response lag of whole said a plurality of display elements; With said first pulse is applied to said a plurality of display element.In addition, produce one second pulse, said second pulse is characterised in that it has a parameter, and the value of this parameter is greater than the response lag of said first display element and less than the response lag of said second display element.Said second pulse is applied to said a plurality of display element.

In another embodiment; The driving circuit of a plurality of display elements of a kind of addressing; Said a plurality of display element has at least one first and second display elements and it is characterized in that response lag separately; Said driving circuit comprises: be used to produce the member of one first pulse, said first pulse is characterised in that it has a parameter, and the value of this parameter is greater than the response lag of whole said a plurality of elements; With the member that is used for said first pulse is applied to said a plurality of display elements.Said driving circuit also comprises: be used to produce the member of one second pulse, said second pulse is characterised in that it has a parameter, and the value of this parameter is greater than the response lag of said first display element and less than the response lag of said second display element; With the member that is used for said second pulse is applied to said a plurality of display elements.

Another embodiment comprises a device.Said device comprises a plurality of members that are used for light modulated, and said modulation member has different tilt values for the selected voltage that applies.Said display further comprises the addressing member, and being used for provides the addressing pulse with different electric voltage level to said a plurality of elements, so that different modulation component compositions switches with an optional mode according to the voltage level of addressing pulse.Said addressing member be configured to said a plurality of elements are provided whole modulation members all to one first pulse of its response and of at least one second pulse of not enough whole said modulation member to its response.

Another embodiment comprises a kind of method of manufacturing one display.Said method comprises provides a plurality of MEMS elements that arrange in a row.The MEMS element of every row further is arranged in the plurality of sub row.Be electrically connected the plurality of sub row of every row.Said method also comprises a plurality of resistors is connected to the MEMS element.Each resistor is connected to each the son row in the said plurality of sub row.Each resistor of resistor that is used for each sub-rows of each row have separately one be different from the resistors of other son row that are connected to this row resistance.

Another embodiment provides a display.Said display comprises: a plurality of display members that arrange in a row, wherein the display member of every row further is arranged in the plurality of sub row, and the wherein plurality of sub of the every row electrical connection of passing through.Said display also comprises a plurality of members that are used for the impedance electric current; Each impedance components is connected to each son row of said plurality of sub row, each resistive elements of resistive elements that is used for each sub-rows of each row have one be different from the resistive elements of other son row that are connected to this row resistance.

Description of drawings

Fig. 1 is an isometric perspective figure; It shows the part of an embodiment of an interferometric modulator display; Wherein one of one first interferometric modulator removable mirror is in reflection (or " opening ") position; With a fixed mirror at a distance of a preset distance, and the removable mirror of one second interferometric modulator is in a non-reflection (or " pass ") position.

Fig. 2 is a system block diagram, and it shows that one comprises an embodiment of the electronic installation of one 3 * 3 interferometric modulator displays.

Fig. 3 is the removable mirror position of an exemplary embodiments of interferometric modulator shown in Figure 1 and the graph of a relation of the voltage that applies.

Fig. 4 can be used for driving several groups of row voltage of interferometric modulator display and the synoptic diagram of column voltage.

Fig. 5 A is presented at an exemplary frame of display data in 3 * 3 interferometric modulator displays shown in Figure 2.

Fig. 5 B demonstration can be used for writing the capable signal of frame shown in Fig. 5 A and an exemplary sequential chart of column signal.

Fig. 6 A is the sectional view of a device shown in Figure 1.

Fig. 6 B is a sectional view of an alternate embodiment of an interferometric modulator.

Fig. 6 C is a sectional view of another alternate embodiment of an interferometric modulator.

Fig. 7 is the part synoptic diagram of an embodiment of an interferometric modulator display, and wherein said several rows have been subdivided into three sub-rows that shared one common driver connects.

Fig. 8 is a sequential chart, shows a series of capable signal and column signal that the top row of the embodiment of the array be applied to Fig. 7 is arranged with the display shown in producing.

Fig. 9 is similar with Fig. 3, is the removable mirror position of an exemplary embodiments of paired interferometric modulator with nested stability window and the graph of a relation of the positive voltage that is applied.

Figure 10 is a sequential chart, shows a series of capable signal and column signal that the top row of the embodiment of the array be applied to Fig. 7 is arranged with the display shown in producing.

Figure 11 is a process flow diagram, shows that one drives such as an embodiment about the method for the interferometric modulator array described in Fig. 6 and Fig. 7.

Figure 12 A and Figure 12 B are system block diagram, show that one comprises the embodiment of the visual display unit of a plurality of interferometric modulators.

Embodiment

In a preferred embodiment, the present invention connects the drive signal that is applied to one group of display element with one through a common driver and comes one group of display element of addressing.Thus, said display can produce more gray scale or tone with applying the needed lead-in wire of the drive signal that is used for each display element lead-in wire still less such as fruit through the independently lead-in wire that is used for each display element.

Below specify and relate to some embodiments of the invention.But the present invention can implement through many different modes.In this explanation, will be with reference to accompanying drawing, in the accompanying drawings, similarly parts use similar number-mark from start to finish.Find out easily that according to following explanation the present invention can be to implement in arbitrary device that is arranged to display image (no matter no matter is dynamic image (for example video) or still image (for example rest image), be character image or picture).More specifically; Imagination the present invention can implement in inferior multiple electronic installation or is associated with these electronic installations for example (but being not limited to): mobile phone, wireless device, personal digital assistant (PDA), handheld computer or portable computer, gps receiver/omniselector, camera, MP3 player, video camera (camcorder), game machine, wrist-watch, clock, counter, TV monitor, flat-panel monitor, computer monitor, automotive displays are (for example; Mileometer displays etc.), driving cabin controller and/or display, camera view display are (for example; The rear view camera display of vehicle), electronic photo, electronics billboard or label, projector, building structure (the for example layout of wall brick), packing and aesthetic structures (for example, the image display of a jewelry).More generally, invention can be implemented in the electronic switching device.

The spatial light modulator that is used for imaging applications has multiple different form.Transmissive type liquid crystal display (LCD) modulator reverses and/or arranges with blocking-up or through light through the control crystalline material, thereby light is modulated.Reflective spatial light modulator then utilizes various physical influences to control the amount of the light that reflexes to imaging surface.The instance of this reflective modulator comprises reflective LCD and digital micro-mirror device.

Another instance of spatial light modulator is one through interfering the interferometric modulator that light is modulated.Show an interferometric modulator display embodiment who comprises a reflective MEMS display element among Fig. 1.In these devices, pixel is in bright state or dark state.Under bright (" opening (on) " or " opening (open) ") state, the bistable state display element reflects incident light to the user.Be in dark (" closing (off) " or " closing (closed) ") state following time, bistable state display element absorbing light and almost do not have light to reflect to the user.Look embodiment and decide, can display 110 be configured to reflected light under " pass " state, and under " opening " state absorbing light, that is, put upside down the light reflectance properties of " opening " and " pass " state.The also configurable one-tenth of MEMS pixel only reflects selected color, thereby produces colored a demonstration but not white and black displays.

Fig. 1 is an isometric perspective figure, and it shows that one comprises two neighbors in the delegation of an embodiment of visual displays of MEMS interferometric modulator.One interferometric modulator display comprises the row/column array be made up of these interferometric modulators.Each interferometric modulator includes a pair of mirror, they each other at a distance of one the distance to form an optical resonator.In one embodiment, one of them mirror can move between at least two positions.In primary importance, said removable mirror is positioned at apart from another mirror one first distance, so that this interferometric modulator is mainly is reflexive.In the second place, said removable mirror is positioned at a different distances place, for example near this fixed mirror, so that this interferometric modulator is mainly is absorbefacient.

Shown pixel array portion comprises two adjacent

interferometric modulator

12a and 12b that are arranged in delegation.Shown in interferometric modulator embodiment in, show that removable mirror 14a is in reflection (" release ", " opening " or " opening ") position at a

fixing part mirror

16a, 16b one preset distance place.The removable mirror 14b that shows interferometric modulator 12b among the figure is in non-reflection near part mirror (partial mirror) 16b, absorption (" excited target ", " pass " or " closing ") position.

Fixed

mirror

16a, 16b tool electric conductivity, and can (for example) through deposition chromium layer and indium tin oxide layer on a transparent substrates 20 and subsequently these layer patterns are changed into parallel bar and bring and process, and can form the row electrode.The removable mirror 14a, the 14b that follow direction can form a series of parallel bands that formed by one or more depositing metal layers (with

row electrode

16a, 16b quadrature) on substrate 18, wherein aluminium is a kind of suitable material, and can form column electrode.

When a selected row and column applies a potential difference (PD), the electric capacity that is in column electrode and the formation of row electrode intersection in the pixel of correspondence will charge, and electrostatic force is moved these electrodes together to.If voltage is enough high, shown in the pixel on right side among Fig. 1, travelling electrode is forced on the stationary electrode (can deposit a dielectric material, to prevent short circuit and to control spacing) on stationary electrode, shown in the pixel on right side among Fig. 1 so.Regardless of the polarity of the potential difference (PD) that is applied, operating condition (behavior) is all identical.In this way, OK/reflective condition and the non-reflective state of each pixel of row excitations may command.

Fig. 2 to Fig. 5 B shows the exemplary process and the system that in display application, use an interferometric modulator array.Fig. 2 is a system block diagrams, and it shows that one can comprise an embodiment of the electronic installation of the some aspects of the present invention.In this exemplary embodiments; Said electronic installation comprises a processor 21; It can be any general purpose single-chip or multicore sheet microprocessor; For example ARM, Pentium

, PentiumII

, Pentium III

, Pentium IV

, Pentium

Pro, 8051, MIPS

, Power PC , ALPHA

or any special microprocessor, for example digital signal processor, microcontroller or programmable gate array.According to the convention in the affiliated field, can processor 21 be configured to carry out one or more software modules.Except that carrying out an operating system, also can this processor be configured to carry out one or more software applications, comprise web browser, telephony application, e-mail program or any other software application.

In one embodiment, processor 21 also is configured to communicate with an array controller 22.In one embodiment, array control unit 22 comprises the horizontal drive circuit 24 and column drive circuit 26 that signal is provided to pel array 30.The sectional view of array shown in Fig. 1 illustrates with line 1-1 in Fig. 2.The several portions of array control unit 22 and other circuit and function can be provided by the graphics controller that is connected in usually between an actual displayed driver and the general purpose microprocessor.The exemplary embodiments of said graphics controller comprises 69030 or 69455 controllers of Chips and Technology company, the S1D1300 series and the Solomon Systech 1906 of Seiko Epson.

For the MEMS interferometric modulator, the hysteresis property of said row/row excitation protocol these devices shown in Figure 3 capable of using.It for example possibly need, and one 10 volts potential difference (PD) makes pixel be deformed into actuated state from release conditions.Yet, when voltage when this value reduces, be brought down below before 2 volts at voltage, pixel can not discharge.Thereby, there is a voltage range (in instance shown in Figure 3 for about 3V to 7V), existence one stability window in this voltage range, in this stability window, device will remain in its residing any state when beginning.Therefore, OK/the row excitation protocol can be designed to be expert at during the gating, make the selected actuated pixel of treating in current be exposed to about 10 a volts voltage difference, and make pixel to be discharged be exposed to one near 0 volt voltage difference.After gating, it is poor to make pixel be exposed to about 5 a volts steady state voltage, makes its residing any state so that it remains in capable gating.After being written into, in this example, each pixel all experiences " stability window " interior potential difference (PD) of 3-7 volt.This characteristic makes pixel design shown in Figure 1 be stabilized under the voltage conditions under the existing foment or release conditions in identical applying.Owing to no matter be in actuated state or release conditions; Each pixel of interferometric modulator all is the capacitor that formed by said fixed mirror and moving lens basically, so this steady state (SS) can be able to keep and almost inactivity consumption under the voltage in the lag windwo.If mirror is not fixed at the current potential that moves and applied, then there is not electric current to flow into pixel basically.

In typical application, can be through confirming that according to one group of desired actuated pixels in first row one group of row electrode forms a display frame.After this, horizontal pulse is put on the electrode of row 1, thereby encourage the pixel corresponding with determined alignment.After this, with determined one group of row electrode become with second row in desired one group of actuated pixels corresponding.After this, pulse is put on the electrode of row 2, thereby come the suitable pixel in the action line 2 according to determined row electrode.The pixel of row 1 does not receive the influence of the pulse of row 2, and remains under the state that its impulse duration of 1 of being expert at sets.The property mode is to this process of capable repetition of whole series, to form said frame in order.Usually, repeating this process continuously through the speed with a certain required frame number/second to refresh and/or upgrade these frames with new video data.Other also have a variety of row and the row electrodes that are used for the driving pixels array also to be known by people with the agreement that forms display frame, and can use with the present invention.

Fig. 4, Fig. 5 A and Fig. 5 B show a possible excitation protocol that is used on 3 * 3 arrays shown in Figure 2, forming a display frame.Fig. 4 shows the one group of possible row of the pixel that can be used for those hysteresis curves that represent Fig. 3 and the voltage level of going.In the embodiment shown in fig. 4, encouraging a pixel to comprise is set to suitable row-V _Bias, and suitable row is set to+Δ V.Through suitable row are set to+V _BiasAnd suitable row is set to identical+Δ V realizes the release of pixel.Remain in 0 volt the row at those row voltages, pixel is stable at its residing any state at first, and is to be in+V with these row _BiasStill-V _BiasIrrelevant.

Fig. 5 B is a series of sequential charts that are applied to the row and column signal of 3 * 3 arrays shown in Figure 2 of a demonstration, and it will form the display shown in Fig. 5 A and arrange, and wherein actuated pixels is non-reflexive.Before writing the frame shown in Fig. 5 A, pixel can be in any state, and in this example, all row all are in 0 volt, and all row all be in+5 volts.In this state, all pixels are stable at its existing actuated state or release conditions.

In the frame shown in Fig. 5 A, pixel (1,1), (1,2), (2,2), (3,2) and (3,3) excited target.For realizing this, during be expert at 1 " line time (line time) ", row 1 and row 2 are set at-5 volts, and row 3 are set at+5 volts.This can not change the state of any pixel, because all pixels all keep being in the stability window of 3-7 volt.After this, rise to 5 volts of pulses that are back to 0 volt that descend again then through one from 0 volt and come gating capable 1.This has encouraged pixel (1,1) and (1,2) and has discharged pixel (1,3).Other pixels in the array are all unaffected.For row 2 is set at desired state, row 2 is set at-5 volts, and row 1 and row 3 are set at+5 volts.After this, apply identical strobe pulse with actuate pixel (2,2) and discharge pixel (2,1) and (2,3) to row 2.Equally, other pixels in the array are all unaffected.Similarly, through row 2 and row 3 being set at-5 volts and row 1 are set at+5 volts and row 3 is set.The strobe pulse of row 3 is set at row 3 pixels shown in Fig. 5 A.After writing incoming frame, the row current potential is 0, and the row current potential can remain on+5 or-5 volts, and after this display will be stable at the arrangement shown in Fig. 5 A.Should be appreciated that, can use identical programs the array that constitutes by tens of or hundreds of row and columns.Should also be clear that the timing, order and the level that are used to carry out the row energization and the voltage of row excitation can alter a great deal in above-mentioned General Principle, and above-mentioned instance is merely exemplary, and any actuation voltage method can be used all with the present invention.

Detailed structure according to the interferometric modulator of above-mentioned principle operation can have a great difference.For example, Fig. 6 A-Fig. 6 C shows three different embodiment of moving lens structure.Fig. 6 A is a sectional view embodiment illustrated in fig. 1, and wherein a strip of metal material 14 is deposited on the support member 18 of quadrature extension.In Fig. 6 B, removable mirror only is attached to the corner place of support member, on tethers 32.In Fig. 6 C, mirror 16 hangs on the deformable film 34.Present embodiment has advantage, because the structural design of mirror 16 and material therefor can be optimized aspect optical characteristics, and the structural design of deformable layer 34 and material therefor can be optimized aspect the desired mechanical property.In many open files, described the production of various dissimilar interferometric device, comprised the open application case of (for example) No. 2004/0051929 U.S., this case is incorporated herein with way of reference in full.

The data of describing monochromatic display image can comprise one digit number certificate/pixel.Monochrome display one embodiment comprises an interferometric modulator/pixel, the setting of the open and closed of wherein said modulator is based on the value of one digit number certificate/pixel.Gray scale image can comprise some bit data/pixels.For example, " three a " GTG display comprises three bit data/pixel, and it is corresponding to 8 gray scales that can be assigned to each pixel.Be used for showing an embodiment of the display of 3 gray scale images of an exemplary, each pixel comprises 3 interferometric modulators.For obtaining 8 gray scales, three modulators were according to 1: 2: 4 ratio reflected light.In this type of embodiment, each said interferometric modulator comprises the some mirrors with the reflective surface area that changes according to 1: 2: 4 ratio.In this embodiment, be through corresponding binary value based on 3 bit data, each modulator is set in one " opening " or " pass " state, thereby obtains the specific gray scale of pixel.An embodiment of color monitor works similarly, and just color monitor comprises one group of red, green and blue interferometric modulators.For example, in one 12 color monitors, 4 in 12 are corresponding in red, green and blue by 16 brightness red, green or that blue interferometric modulators produces each.Said GTG or color monitor have than the more display element confession of monochrome display addressing.These are used for the grey of this type of embodiment or the display element of color monitor for addressing, increase with the number that is electrically connected of display control.For example, in an embodiment of 3x33-position GTG display, every row is subdivided into 3 sub-rows.Among this display embodiment, each pixel comprises the interferometric modulator of three sub-rows.Such embodiment has the capable driving connection of 3*3=9 and is connected with 3 row drivings, and 12 drive connection altogether, but not 6 drivings in the 3x3 monochrome display connect.Reducing a kind of mode that drives the number that connects is that one group of modulator (for example, 3 sub-rows among above-mentioned 3 GTG embodiment) is electrically connected to together, and drives this group with the signal of the child group state that changes this electrical connection group.

For example, optionally one group of addressing a kind of mode of being electrically connected interferometric modulator is that a drive signal is put in the pulse of state that its duration is not enough to change some modulator in this group modulator.Generally speaking, can particular modulator in the display changes state in order to the forward position of responsive trip gating time cycle be called response time τ.It should be noted that " response time " both can refer to that interferometric modulator transferred to time of non-transfering state from reflective condition, can refer to also that perhaps modulator transfers to the time of transfering state from non-reflective state.In an embodiment of interferometric modulator display, time cycle τ conceptive for electroresponse time τ _RCWith mechanical response time τ _MWith.About the electroresponse time, each interferometric modulator in the display forms a corresponding circuit, and it can be a characteristic with a resistance-capacitance (RC) time constant.Said electroresponse time τ _RCBe that the circuit of forward position to mirror from the row strobe pulse charges to excitation or the time cycle during release voltage.In case said mechanical response time τ M has reached excitation or release voltage, removable mirror physically changes the time cycle of position.Modulator moves to the time τ of reposition _MDepend on following factor: as, the air resistance when spring constant that is associated with the removable mirror of modulator or mirror move.Said display one embodiment comprises electrical connection modulator in groups with different response times.Through applying one to this group regulator, can set the state of the various combination of said modulator less than response time of a part of modulator in the said modulator but greater than the common pulse of response time of other modulators in the said modulator.

Fig. 7 is similar to shown in Figure 5, is the part synoptic diagram of an embodiment of an interferometric modulator display, and wherein said row has been subdivided into shared one common three sub-rows that connect that drive.The interferometric modulator that every sub-rows definition lists.As stated, if the time that applies capable gating less than the response time, so, the removable mirror of interferometric modulator maintains its position basically.In the embodiment of Fig. 7, the capable interferometric modulator of shown child has the response time of minimizing from top to bottom.In this embodiment, the duration that can pass through the capable gating of appropriate change connects to come the sub interferometric modulator of going of addressing to change the only state of the selected part of son row via this driven in common.

The response time of interferometric modulator receives the influence of following aspect: comprise featured resistance-electric capacity (RC) time of the driving circuit of this modulator, that is, the removable mirror of this modulator will be charged to the time of specific voltage; The mechanical property of this modulator and moving lens move the resistance that receives in air.In the embodiment shown in fig. 7, the RC time along response time of the capable interferometric modulator of child modulator through changing every sub-rows changes.More particularly, in Fig. 7, each son is passed through and is connected by a resistor, and said resistor provides the resistance that reduces gradually for every sub-rows from top to bottom.When applying a voltage between these mirrors at said modulator; Duration of charging of those mirrors with big resistor is longer; Need when longer the chien shih voltage difference to fall the sufficiently long time outside the stability window thus, be activated to a reposition for removable mirror.

Fig. 8 is a sequential chart, shows a series of capable signal and column signal that the top row (row 1) of the embodiment of the array be applied to Fig. 7 is arranged with the display shown in producing.Capable signal in one embodiment and column signal are similar to those row signal and the column signals shown in Fig. 5, have just applied a series of pulses for every row, and with each sub-rows of addressing, the duration of each in the said pulse is different.The reflective condition of the display at the end of each line time with graphic presentation in Fig. 8, each pulse below of corresponding line time separately.During a series of line times of every row, apply pulse, line time of every sub-rows.Horizontal pulse under each line time of these line times has+5 volts the value and the duration of different (from left to right successively decreasing).Select said successively decreasing the duration, make horizontal pulse only those response times in the addressing row less than the modulator of said horizontal pulse.

The pulse of Fig. 8 is set at display state as shown in Figure 7, as follows.For first line time of row 1, row 1, apply-5 volts the row current potential and+5 volts horizontal pulse, with the setting state of the modulator of every sub-rows in energized position, as along shown in Fig. 8 bottom.Row 1 current potential remains on the line time-5 of remaining row 1, maintains the excited target position with the state of each element during child is capable.In row 2, the current potential of applying in first line time+5 volt is together with horizontal pulse, the whole modulators with the child that discharges row 2 in capable.Be expert at during 1 second line time, row 2 current potentials that apply-5 volts are together with horizontal pulse, with bottom two sub-rows of action line 1.The duration of the horizontal pulse in second line time is less than response time of a sub-rows topmost, thereby keeps the state of the modulator in one sub-rows of said the top.Be expert at the third line time durations of 1, row 2 current potentials that apply-5 volts are together with horizontal pulse, to encourage the modulator in the bottom sub-rows.Equally, the horizontal pulse duration of the third line time is less than the response time of the modulator in all the son row except a bottom sub-rows, thereby feasible only bottom line changes state.According to Fig. 8, use the pulse of row 3 and set, to set the capable state of child of row 3.

In the embodiment shown, each line time of delegation is near identical.Yet, should be appreciated that in other embodiments, line time can be shorter, for example, the line time of delegation can shorten to corresponding with the short horizontal pulse duration of each line time of delegation.In addition, any other fashionable driving voltage scheme can be used for replacing the exemplary scheme shown in Fig. 5 B and Fig. 7.In addition, although the capable change resistance that comprises the RC time that changes the son row of the child in the illustrated embodiment, in other embodiments, said sub-row can have electric capacity, resistance or its combination of change.

In certain embodiments; The response time of interferometric modulator according to removable mirror in slight cavity during, along with it expels the damping force that on removable mirror, produces at the cavity between removable mirror and the fixed mirror with air (or another gas) and changes with respect to air movement.The resistance that this damping force moves in air as removable mirror.In one embodiment, through in removable mirror, forming some holes,, change above-mentioned damping force thus with minimizing air pressure to said removable mirror when removable mirror excitation also changes the electomechanical response of driver thus.In another embodiment, in the deformable film 34 of Fig. 6 C, form some holes.Other similar embodiment of interferometric modulator with change response time have been discussed in No. the 10/794th, 737, the patent application of on March 3rd, 2004 application.In one embodiment, the response time of the interferometric modulator of son row changes according to one or more the variation of combination in RC characteristic, spring constant or the air damping power.

In other embodiments, other mechanical properties of interferometric modulator can change to change the mechanical response time of son interferometric modulator in the ranks.The said response time is depended on transformable some factors, comprises the deformable layer 34 of thickness, quality or material or Fig. 6 C of removable mirror 14.In certain embodiments, the interferometric modulator in each son row can have different spring constants.Embodiment also can change the response time through thickness, position or the formation that changes supporter.

In other embodiments, the interferometric modulator in each son row can have different excitations and release voltage, so that one group is electrically connected sub-row and can be addressed independently.Fig. 9 is similar with Fig. 3, has the graph of a relation of removable mirror position and the positive voltage that applied of exemplary embodiments of three interferometric modulators of nested stability window respectively for showing one.Innermost nested hysteresis window, with trace 802 expression, have one have 8 volts and 4 volts values respectively excitation and release voltage.The nested hysteresis window that is right after, with trace 804 expression, have one have 10 volts and 2 volts values respectively excitation and release voltage.Outmost nested hysteresis window, with trace 806 expression, have one have 12 volts and 0 volt values respectively excitation and release voltage.

Can be through changing the geometry and the material of modulator, the lag windwo of selecting modulator and each sub-line correlation to join.Specific, can be through changing the geometry and the material behavior of modulator, select width (excitation and release voltage poor), position (location) (encourage and release voltage absolute value) and its relative value of excitation and release voltage.The characteristic of said change can comprise: for example, and the distance between the removable mirror supporter, the quality, thickness, drawing stress or the mirror that are associated with respect to this spring constant with removable mirror and/or move the layer of said mirror or the rigidity of mechanism, the specific inductive capacity or the thickness of the dielectric layer between stationary electrode and travelling electrode.The selection that has disclosed the hysteresis characteristic of interferometric modulator in more detail in No. the 60/613rd, 382, the interim patent case of the U.S. on September 7th, 2004 application, that be entitled as " METHOD ANDDEVICE FOR SELECTIVE ADJUSTMENT OF HYSTERESIS WINDOW ".

In such embodiment, interferometric modulator is aligned to the son row, and is as shown in Figure 8.The modulator of every sub-rows has the hysteresis stability window, and said window is nested in wherein each other.In an illustrated embodiment, said stability window is from inside to outside nested, and the window shown in Fig. 9 is gone to nethermost son from uppermost son row.Figure 10 is a sequential chart, and demonstration is applied to first row (row 1) of this embodiment a series of capable signal and column signal with the display arrangement shown in the generation.Row and column class signal in one embodiment is similar to the row and column signal shown in Fig. 8, and just horizontal pulse is at value but not difference was arranged on the duration.Horizontal pulse is successively decreased on value from left to right, and is from top to bottom capable corresponding to child.Select this pulse delivery decrement value, only those have the modulator of less excitation/big release voltage in child is capable with addressing.For example, in the embodiment shown, be applied to these row with-6 volts current potential, and 2,4,6 volts horizontal pulse be applied to these are capable+6.

The pulse of Figure 10 is a state shown in Figure 7 with the setting state of display, as follows.For first line time of row 1, row 1, apply-6 volts the row current potential and+6 volts horizontal pulse, with the setting state of the modulator of every sub-rows in energized position, as along shown in Figure 10 bottom.Row 1 current potential remains on remaining row 1 line time-6, maintains the excited target position with the state of each element during child is capable.In row 2, the current potential of applying in first line time+6 volt is together with+6 volts horizontal pulse, the whole modulators with the child that discharges row 2 in capable.Be expert at during 1 second line time, row 2 current potentials that apply-6 volts are together with+4 volts horizontal pulse, with bottom two sub-rows of action line 1.Be expert at the third line time durations of 1, row 2 current potentials that apply-6 volts are together with+2 volts horizontal pulse, to encourage the modulator in the bottom sub-rows.According to Figure 10, use the pulse of row 3 and set, to set the capable state of child of row 3.

Figure 11 is a process flow diagram, and an embodiment such as the method 850 of an embodiment of the display among Fig. 6 and Fig. 9 is upgraded in demonstration one.Method 850 starts from square 852, and wherein the driver 22 of Fig. 2 receives the view data that is used for the son row.In one embodiment, array control unit 22 receptions are from the data value of frame buffer.Then at square 854, array control unit 22 applies capable gating and the row current potential corresponding with said image data value to all interferometric modulator row.Advance to square 856, array control unit 22 receives and is used for the capable data of next son.Then, repeat the action of

square

854 and 856 for every sub-rows at square 860.In one embodiment,

square

854 and 856 action take place at least in part simultaneously.

Figure 12 A and Figure 12 B are the system block diagram of an embodiment of demonstration one display device 2040.Display device 2040 can be (for example) cellular phone or mobile phone.Yet the same components of display device 2040 or its slight variations also can be explained dissimilar display device, for example TV or portable electronic device.

Display device 2040 comprises a shell 2041, a display 2030, an antenna 2043, a loudspeaker 2045, an input media 2048 and a microphone 2046.Shell 2041 comprises injection moulding and vacuum forming usually by any the processing in the many kinds of manufacturing process that the those skilled in the art knew.In addition, shell 2041 can include but not limited to plastics, metal, glass, rubber and pottery or its combination by any the processing in the many kinds of materials.In one embodiment, shell 2041 comprises the moveable part (not shown) that can have different colours with other or comprise the moveable part exchange of unlike signal, picture or symbol.

The display 2030 of exemplary display device 2040 can be any in the many kinds of displays, comprises the bistable display described in this paper.In other embodiments, know like the those skilled in the art, display 2030 comprises a flat-panel monitor, for example, and aforesaid plasma, EL, OLED, STN LCD or TFT LCD; Or non-tablet display, for example CRT or other tube arrangements.But, as described herein, from the purpose of explanation present embodiment, display 2030 comprises an interferometric modulator display.

The assembly that in Figure 12 B, schematically shows an embodiment of exemplary display device 2040.Shown in exemplary display device 2040 comprise a shell 2041 and can comprise that other are at least partially enclosed within the assembly in the shell 2041.For example, in one embodiment, exemplary display device 2040 comprises a network interface 2027, and network interface 2027 comprises that one is coupled to the antenna 2043 of a transceiver 2047.Transceiver 2047 is connected to and regulates the processor 2021 that hardware 2052 links to each other.Regulate hardware 2052 configurable one-tenth and regulate a signal (for example signal being carried out filtering).Regulate hardware 2052 and be connected to a loudspeaker 2045 and a microphone 2046.Processor 2021 also is connected to an input media 2048 and a driving governor 2029.Driving governor 2029 is coupled to one frame buffer 2028 and array driver 2022, and array driver 2022 is coupled to a display array 2030 again.One power supply 2050 provides power according to the designing requirement of this particular exemplary display device 2040 to all component.

Network interface 2027 comprises antenna 2043 and transceiver 2047, so that exemplary display device 2040 can be communicated by letter with one or more devices through network.In one embodiment, network interface 2027 also can have some processing capacity, to reduce the requirement to processor 2021.Antenna 2043 is used to transmit and receive the antenna of signal for any of those skilled in the art's convention.In one embodiment, said antenna transmits and receives the RF signal according to IEEE 802.11 standards (comprise IEEE 802.11 (a) and (b) or (g)).In another embodiment, said antenna is according to bluetooth (BLUETOOTH) standard emission and reception RF signal.If be a cellular phone, then said antenna is designed to receive and is used for the CDMA, GSM, AMPS or other convention signals that in a wireless cellular telephone network network, communicate.The signal that transceiver 2047 pre-service receive from antenna 2043 is so that these signals can be received and further handled by processor 2021.Transceiver 2047 is also handled the signal that self processor 2021 receives, so that can be through antenna 2043 from exemplary display device 2040 these signals of emission.

In an alternate embodiment, transceiver 2047 can be substituted by a receiver.In another alternate embodiment, network interface 2027 can by one can store or produce the view data to processor 2021 to be sent the figure image source substitute.For example, this figure image source can be the software module that hard disk drive or that a digital video disk (DVD) or comprises view data produces view data.

Processor 2021 is the overall operation of control exemplary display device 2040 usually.Processor 2021 automatic network interfaces 2027 or a figure image source receive data, become raw image data or a kind of form that is easy to be processed into raw image data for example through the view data of compression, and with said data processing.After this, the data after processor 2021 will be handled are sent to driving governor 2029 or frame buffer 2028 is stored.Raw data is often referred to the information of the characteristics of image of each position in sign one image.For example, these characteristics of image can comprise color, saturation degree and gray level.

In one embodiment, processor 2021 comprises a microprocessor, CPU or is used to control the logical block of the operation of exemplary display device 2040.Regulate hardware 2052 and generally include amplifier and the wave filter that is used for receiving signal to loudspeaker 2045 transmission signals and from microphone 2046.Regulate hardware 2052 and can be the discrete component in the exemplary display device 2040, perhaps can incorporate in processor 2021 or other assemblies.

Driving governor 2029 directly receives the raw image data that is produced by processor 2021 from processor 2021 or from frame buffer 2028, and with said raw image data reformatting suitably, with high-speed transfer to array driver 2022.Particularly, driving governor 2029 is reformatted as one with raw image data and has the data stream of a grating class form, is applicable to the chronological order that scans whole display array 2030 so that it has one.After this, the information after driving governor 2029 will format is sent to array driver 2022.Although a driving governor 2029 (a for example lcd controller) usually as one independently integrated circuit (IC) be associated with system processor 2021, these controllers can be implemented by multiple mode.It can be used as in the hardware embedded processor 2021, as in the software embedded processor 2021 or together fully-integrated with example, in hardware and array driver 2022.

Usually; Array driver 2022 after driving governor 2029 receives format information and video data is reformatted as one group of parallel waveform, the parallel waveform per second of this group many times is applied to from the hundreds of of the x-y picture element matrix of display and is thousands of lead-in wires sometimes.

In one embodiment, driving governor 2029, array driver 2022 and display array 2030 are applicable to the display of any kind as herein described.For example, in one embodiment, driving governor 2029 is a traditional display controller or a bistable state display controller (a for example interferometric modulator controller).In another embodiment, array driver 2022 is a legacy drive or a bistable state display driver (a for example interferometric modulator display).In one embodiment, a driving governor 2029 integrates with array driver 2022.This embodiment is very common in the integrated system of for example cellular phone, table and other small-area display equal altitudes.In another embodiment, display array 2030 is a typical display array or a bistable state display array (for example one comprise an interferometric modulator array display).

Input media 2048 allows the user can control the operation of exemplary display device 2040.In one embodiment, input media 2048 comprises a keypad (for example qwerty keyboard or telephone keypad), a button, a switch, a touch sensitive screen, a pressure-sensitive or thermosensitive film.In one embodiment, microphone 2046 is input medias of exemplary display device 2040.When using microphone 2046, can provide voice command to control the operation of exemplary display device 2040 by the user to these device input data.

Well-known various energy storing devices in the field under power supply 2050 can comprise.For example, in one embodiment, power supply 2050 is a rechargeable accumulator, for example nickel-cadmium accumulator or lithium-ions battery.In another embodiment, power supply 2050 is a regenerative resource, capacitor or solar cell, comprises plastic solar cell and solar cell coating.In another embodiment, power supply 2050 is through being configured to receive electric power from wall plug.

As indicated above, in certain embodiments, the control programmability is stayed and is stored in the driving governor, and this driving governor can be arranged on several positions of electronic display system.In some cases, the control programmability is stayed and is stored in the array driver 2022.Be understood by those skilled in the art that above-mentioned optimization is implemented in hardware that can any amount and/or component software and different configurations.

Should be appreciated that although this paper has disclosed some embodiment about " OK " and " row ", the use of these terms has been merely convenience and has described these embodiment.It would be apparent to someone skilled in the art that in other embodiments, the characteristic that belongs to row or row in the exemplary embodiments can be completely or partially opposite.In addition, although with regard to a specific drive scheme some embodiment have been described among Fig. 7 and Figure 10, the present invention who is disclosed can adopt other suitable drive schemes, to change the duration or the value of the pulse that is applied.In addition, although in one embodiment, the interferometric modulator in groups that a shared driven in common is connected is arranged in the plurality of sub group, should be appreciated that other embodiment can comprise other any arrangements of interferometric modulator in groups.

In addition; Although just some embodiment have been discussed through the interferometric modulator in groups that is electrically connected with different response times; And just through the interferometric modulator in groups with different hysteresis stability window that is electrically connected some other embodiment have been discussed, other embodiment can comprise the modulator through being electrically connected in groups with different response times and different hysteresis stability window.Capable of usingly come this type of embodiment addressing in all vicissitudinous a series of pulses of duration and voltage two fermentation.

Although the preceding text embodiment has shown, has described and pointed out the novel feature that the present invention is applied to various embodiment; It should be understood that, the those skilled in the art can be under the situation that does not break away from spirit of the present invention to shown in device or the form and the details of process make various omissions, substitute or change.Scope of the present invention should be described by enclose claims but not preamble and define.All meaning and interior changes of scope that fall into the counterpart of claims all will be included within the scope of claims.

Claims

1. the method for a plurality of MEMS display elements of addressing, said a plurality of MEMS display elements have at least one first and second display elements and it is characterized in that response lag separately, and said method comprises:

Produce one first pulse, said first pulse is characterised in that it has a parameter, and the value of this parameter is greater than the response lag of whole said a plurality of MEMS display elements;

Said first pulse is applied to said a plurality of MEMS display element;

Produce one second pulse, said second pulse is characterised in that it has a parameter, the value of this parameter greater than the response lag of said first display element and less than the response lag of said second display element and

Said second pulse is applied to said a plurality of MEMS display element.

2. method according to claim 1, wherein said parameter comprise the response time that a duration of pulse and said response lag comprise each display element.

3. method according to claim 1, wherein said parameter comprise the actuation duration that a voltage value and said response lag comprise each display element.

4. method according to claim 1, the state of wherein said second display element is maintained.

5. method according to claim 1 further comprises:

Receive a viewdata signal; With

Based on said viewdata signal, set said first and second display elements state separately at least in part.

6. method according to claim 1 further comprises:

The 3rd pulse that generation one has the parameter of one the 3rd value, wherein said the 3rd value is greater than the response lag of one the 3rd display element, less than the response lag of said first and second display elements; With

Said the 3rd pulse is applied to said a plurality of MEMS display element.

7. method according to claim 1 wherein is applied to said a plurality of MEMS display element with said first pulse and comprises said first pulse is applied to a plurality of interferometric modulators.

8. method according to claim 1, wherein said a plurality of MEMS display elements are characterised in that resistance-capacitance time constant separately.

9. method according to claim 8; Wherein said a plurality of MEMS display element response time separately is at least in part based on separately resistance-capacitance time constant, and wherein said first and second display elements are characterised in that to have different resistance-capacitance time constants.

10. method according to claim 9, wherein said a plurality of MEMS display elements are characterised in that physical characteristics separately.

11. method according to claim 10, wherein said a plurality of MEMS display element response times separately are at least in part based on separately spring constant, and wherein said first and second display elements are characterised in that to have different spring constants.

12. method according to claim 7, wherein each said a plurality of interferometric modulator comprises a removable mirror, and said removable mirror is characterised in that the resistance that runs into separately when in air, moving.

13. method according to claim 12; Wherein said a plurality of interferometric modulator response time separately is at least in part based on removable mirror air resistance separately, and wherein said first and second display elements are characterised in that the different resistance that receives when in air, moving.

14. method according to claim 11 wherein is applied to said a plurality of MEMS display element with said first pulse and comprises a pixel that said first pulse is applied to a visual displays.

15. method according to claim 14, wherein said pixel comprise said a plurality of MEMS display element.

16. method according to claim 1 wherein is applied to said a plurality of MEMS display element with said first pulse and comprises and apply a potential pulse.

17. method according to claim 1; Wherein said first pulse is applied to said a plurality of MEMS display element and comprises one first potential pulse is applied to the delegation of said display element and one second potential pulse is applied to row of said display element, and in wherein said first and second display elements each is associated with said row and column.

18. the driving circuit of a plurality of MEMS display elements of addressing, said a plurality of MEMS display elements have at least one first and second display elements and it is characterized in that response lag separately, and said driving circuit comprises:

Be used to produce the member of one first pulse, said first pulse is characterised in that it has a parameter, and the value of this parameter is greater than the response Fujian value of whole said a plurality of MEMS display elements;

Be used for said first pulse is applied to first member of said a plurality of MEMS display elements;

Be used to produce the member of one second pulse, said second pulse is characterised in that it has a parameter, and the value of this parameter is greater than the response lag of said first display element and less than the response lag of said second display element; With

Be used for said second pulse is applied to second member of said a plurality of MEMS display elements.

19. driving circuit according to claim 18, the wherein said member that is used to produce said first pulse and said are used to produce the member of said second pulse and comprise a pulse generator horizontal drive circuit.

20. driving circuit according to claim 18, wherein said parameter comprise the response time that a duration of pulse and said response lag comprise each display element.

21. driving circuit according to claim 18, wherein said parameter comprise the driving voltage that a voltage value and said response lag comprise each display element.

22. driving circuit according to claim 18, the state of wherein said second display element is maintained.

23. driving circuit according to claim 18 further comprises:

Be used to produce one have the parameter of one the 3rd value the member of the 3rd pulse, wherein said the 3rd value is greater than the response lag of one the 3rd display element, less than the response lag of said first and second display elements; With

Be used for said the 3rd pulse is applied to the 3rd member of said a plurality of MEMS display elements.

24. driving circuit according to claim 23, the wherein said member that is used to produce said the 3rd pulse comprises horizontal drive circuit.

25. driving circuit according to claim 23, wherein said the 3rd member that is used to apply said the 3rd pulse comprises horizontal drive circuit.

26. driving circuit according to claim 18, said first member that is used to apply said first pulse comprises the member that said first pulse is applied to a plurality of interferometric modulators.

27. driving circuit according to claim 18, said first member that is used to apply said first pulse comprises the member that said first pulse is applied to a pixel of a visual displays.

28. driving circuit according to claim 18, said first member that is used to apply said first pulse comprises the member that is used to apply a potential pulse.

29. driving circuit according to claim 18; Wherein said first member that is used to apply said first pulse comprises one first potential pulse is applied to the delegation of said MEMS display element and one second potential pulse is applied to the member of row of said MEMS display element, and in wherein said first and second display elements each is associated with said row and column.