CN1750393A - Novel surface sticked quartz crystal resonator and producing method - Google Patents
Novel surface sticked quartz crystal resonator and producing method Download PDFInfo
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- CN1750393A CN1750393A CN 200410074375 CN200410074375A CN1750393A CN 1750393 A CN1750393 A CN 1750393A CN 200410074375 CN200410074375 CN 200410074375 CN 200410074375 A CN200410074375 A CN 200410074375A CN 1750393 A CN1750393 A CN 1750393A
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- 239000010453 quartz Substances 0.000 title claims abstract description 60
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 60
- 239000013078 crystal Substances 0.000 title claims description 107
- 238000000034 method Methods 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims description 2
- 239000004615 ingredient Substances 0.000 claims description 2
- 238000004026 adhesive bonding Methods 0.000 description 14
- 239000000919 ceramic Substances 0.000 description 12
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 11
- 150000001875 compounds Chemical class 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 238000004806 packaging method and process Methods 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 7
- 229940127573 compound 38 Drugs 0.000 description 6
- 238000013461 design Methods 0.000 description 6
- PIDFDZJZLOTZTM-KHVQSSSXSA-N ombitasvir Chemical compound COC(=O)N[C@@H](C(C)C)C(=O)N1CCC[C@H]1C(=O)NC1=CC=C([C@H]2N([C@@H](CC2)C=2C=CC(NC(=O)[C@H]3N(CCC3)C(=O)[C@@H](NC(=O)OC)C(C)C)=CC=2)C=2C=CC(=CC=2)C(C)(C)C)C=C1 PIDFDZJZLOTZTM-KHVQSSSXSA-N 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 108010022579 ATP dependent 26S protease Proteins 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
This invention relates to a new quartz oscillator with adhered surfaces and its manufacturing method. Said oscillator is composed of an oscillating plate, a base plate and a shell plate characterizing that the middle part of the oscillator is deposited with an electrode to generate resonance and its both ends can be fixed on the base plate.
Description
Technical field
The present invention relates to quartz-crystal resonator and manufacture method thereof, specifically, the invention relates to a kind of novel surface-pasted quartz-crystal resonator and manufacture method thereof.
Background technology
Quartz-crystal resonator is because the accuracy and the stability of its frequency are indispensable parts in hyundai electronics industry such as communication, computer, amusement equipment and other our related field.Up to the present, quartz-crystal resonator is normally by piezoelectric quartz crystal thin slice elementary cell, as circular or rectangular, with one can be formed with the encapsulant of sealing someway, alternating voltage can act on by the lead-in wire of sealed package on the quartz crystal elementary cell and to produce vibration.On piezoelectric quartz crystal thin slice elementary cell, have one group of extremely thin conductive metal electrode and be deposited on its two main surface (upper surface and lower surface), form resonance piece.The overlapping part of double-sided electrode has determined the resonance area on the resonance.When the resonance frequency of the frequency of the alternating voltage that provides and this quartz crystal resonance piece was identical, the piezoelectric quartz crystal resonance piece began resonance.The resonance frequency of quartz crystal resonance piece is determined by the piezoelectricity of quartz crystal and elastic constant, size and metal electrode and other factors.
Generally, the surface sticked quartz crystal resonator is made up of a piezoelectric quartz crystal resonance piece that has plated electrode and ceramic packaging thing or pedestal, this type of quartz crystal resonance piece is to be fixed on the ceramic packaging thing by conducting resinl 2 with the one end, a metal shell is welded on the metal rim of ceramic packaging thing again, in addition, also can with the ceramic package sticker or by the low-melting glass welding on ceramic packaging thing or pedestal.
Ceramic packaging thing or pedestal are stacked integrated applications metal the overdoes ceramic structure of technology such as deposition, metal mixed and ceramet involution, this type of ceramic component needs high-tech to produce, quite production cost is than higher, and all relatively lacks product all the time.
In the case, can provide simple structure, low-cost production, effectively durable surface sticked quartz crystal resonator has its tangible advantage and advantage.
Summary of the invention
At above-mentioned problem, the present invention proposes a kind of novel surface sticked quartz crystal resonator and manufacture method, this resonator and manufacture method thereof make of the present invention simple in structure clear, are applicable to low-cost the manufacturing, have characteristics such as durability, validity.
Another object of the present invention provides a kind of novel surface sticked quartz crystal resonator and manufacture method, and this resonator and manufacture method are easy to implement, and be with low cost, is convenient to make, and is easy to use, and this kind resonator has highly low characteristics.
Based on this, the present invention is achieved in that
The present invention at first provides a kind of resonance piece based on quartz crystal, and it is an important component part of this quartz-crystal resonator.This resonance piece resonance requires to make response for the alternating voltage that is added on resonance piece in characteristic frequency usually.In use, based on the resonance piece resonance of quartz crystal in relevant requiring on the frequency of frequency of pressing in response to external AC.
Outer periphery based on the resonance piece of quartz crystal can be any suitable geometry.Be suitable for surperficial quartz-crystal resonator such as its shape, but in its essential structure this resonance piece be bridge shape structure so that produce resonance, and its two ends are fixed.
Specifically the middle part of this quartz crystal resonance piece deposits electrode, to produce resonance, its two ends can be fixed on its base pieces that depends on the formation resonator (being described subsequently) simultaneously, that is to say that its two ends of this resonance piece are the parts that are used for fixing, resonance piece is distinguished from such structure, constitute the bridge architecture part in the middle of it, two ends then are standing parts.This fixing its shape of part can be greater than the bridge shape structure at its middle part, also can be less than bridge shape structure, so-called bridge shape structure is the resonance portion of resonance piece, its concrete shape can design according to actual needs, in a kind of useful especially shape, it is rectangle or oval-shaped structure that bridge shape structure can be main body, or similarly uniform regular geometric shapes.
It is circular that useful especially other geometry comprises approximate, or approximate be rectangular shape etc.In a kind of useful especially shape, resonance piece has a rectangular periphery.
Resonance piece has electrode, so that use external alternating voltage.In a useful especially form, resonance piece has upper surface and lower surface, and first electrode is positioned at the upper surface of quartz wafer, and another electrode is positioned at the lower surface of corresponding wafer.
The thickness of resonance piece can be very consistent or change.In the very useful concrete manifestation form of unanimity, the thickness by resonance range (being the zone that first, second electrode part branch occupies) zone in addition that double overlying electrode determined in the resonance piece reduces to some extent.This feature will have detailed discussion subsequently.
In the useful especially shape of another one, the thickness basically identical of resonance piece, but with respect to boundary member (boundary member is meant the zone that does not have electrode in general) obvious minimizing is arranged, this situation of subsequent discussion.
Another one implementation method of the present invention, the assembling that is exactly resonator is included in other local resonance piece and base pieces of describing based on quartz crystal, so that base pieces and resonance piece firmly connect together.And resonance piece is with respect to base pieces, can be according to the suitable alternating voltage that offers the resonance piece two ends and resonance.Base pieces has electrode, and base pieces and resonance piece connect together at the electrode place of pedestal and the electrode place of resonance piece, have formed conducting aspect electrical property.Because resonance piece at one end is connected with base pieces at two ends rather than as ceramic resonator, this connection provides a kind of very strong mechanical connection performance, makes and has formed a kind of very strong mechanical connection between resonance piece and the base pieces.This method has strengthened the durability of this kind resonator, and with respect to the resonator of former explained hereafter, this method has increased the useful life of this kind resonator.
Though the resonance piece based on crystal of base pieces can preferably connect together with binding with the whole bag of tricks, various technical battery together, thus when assembling just should fix with binding at the base electrode place of base pieces with based on the electrode place of the resonance piece of crystal.This binding is always effective in cementation base pieces and resonance piece.A kind of especially effectively binding is exactly the colloidality binding.
Though base pieces can be made up of any suitable material, such as metal, glass, pottery or the like, better material still is crystal (being quartz crystal).The use of crystal is very effective on reducing cost, and satisfies physical characteristic, particularly hot expansibility based on the resonance piece of crystal fully basically.This class feature will reduce the negative effect of stress to resonator behavior to greatest extent.
Base pieces preferably includes the pair of base electrode so that there is a base electrode to be electrically connected with first electrode of resonance piece, and the another one base electrode has electrical connection with second electrode of resonance piece again simultaneously.This type of base electrode can offer resonance piece with the external communication signal very effectively.
Electrode described herein can be made up of any suitable electric conducting material, but this type of material preferably includes metal ingredient.Can plate with any suitable method, preferably adopt the method for vacuum coating to be plated to the surface.Here said electrode comprises the electrode of base pieces electrode and resonance piece.
The suitable crystal resonator that the present invention mentioned comprises as other local resonance piece and base pieces of describing based on crystal, also comprises casing sheets.This casing sheets is securely fixed on the base pieces, so that this resonance piece is between casing sheets and base pieces, whole resonator mechanically is fixed together securely, and suitably the resonance piece based on crystal can be completely sealed.
Under a kind of form.Bonding object point is on the respective electrode of base pieces and resonance piece for the first time, and effectively base pieces and resonance piece are firmly fixed together, the second time, bonding object point was on shell sheet and base pieces simultaneously, and effectively casing sheets and base pieces are firmly fixed together, binding also can be different with the part of binding can be the same for the second time for the first time.
Though any material can be used for casing sheets, casing sheets is preferably made by crystal (being quartz crystal).So in a kind of useful especially form, all form by crystal based on resonance piece, base pieces and the casing sheets of crystal.
In a kind of useful especially form, base pieces and casing sheets can have outward extending recess, and this feature will be done detailed description in the back.
Of the present invention one big realization aspect has just provided the method for producing quartz-crystal resonator, and this method has comprised provides a complete quartz wafer; First and second electrodes are plated on the upper surface and the corresponding lower surface of quartz wafer, form resonance piece, resonance piece and the base pieces that is coated with electrode connect together securely, so that resonance piece is with respect to base pieces, and can resonance when external alternating voltage acts on resonance piece; Again base pieces is connected together with casing sheets securely, so that resonance piece is positioned in the middle of base pieces and the casing sheets securely.Manufacture surface-pasted quartz-crystal resonator thus.
In one form, base pieces and casing sheets all are made up of quartz crystal.Fixing step comprises uses binding respectively resonance piece and base pieces to be sticked together securely, and base pieces and casing sheets are sticked together securely.
This cementation step mechanically sticks together base pieces, resonance piece and casing sheets effectively securely, so that form a periphery of sealing fully.
The conductive adhesion thing, preferably conducting resinl is used between the electrode and base pieces electrode of resonance piece, so that form the electronic loop of a resonator.
So far each characteristic of Jie Shaoing or two or more characteristics comprehensive descriptions all comprise within the scope of the invention, and this specific character does not have mutual inconsistency.
The resonator configurations of the present invention's design is simple, and the energy low-cost production is effective and durable.As be used for electronic equipments such as computer, mobile phone, radio control and data transmission system.Because the shell of this resonator and pedestal can be produced by the producer oneself who uses crystal resonator, this measure makes the production of quartz-crystal resonator be no longer dependent on the outside ceramic packaging producer.Such as, this surface sticked quartz crystal resonator demand and no longer comprise above-mentioned ceramic packaging thing or pedestal no longer.So this invention has avoided having any relation to reach the problem of bringing thus with this type of ceramic packaging thing or pedestal.Being more preferably this quartz-crystal resonator is to be formed by a quartz crystal pedestal and a quartz crystal shell encapsulation.After this surface sticked quartz crystal resonator is contained on the application circuit, can obviously improve the ability of shock resistance and anti-vibration vibration.Also have, the resonator that this resonator is produced with respect to manufacturing technology in the past has highly low characteristics, the manufacturing process of this surface sticked quartz crystal resonator is easy to implement, and provides a kind of cost-effective method to produce the surface sticked quartz crystal resonator.
In sum, the present invention has low-cost manufacturing of understanding, be suitable for simple in structure, the characteristics that in use have validity and durability, and but the electrode Direct Electroplating of resonance piece is on wafer, and corresponding with the electrode on the base pieces, make it to produce resonance on the resonance piece and needn't alternating voltage be acted on metal lead wire.Therefore can reduce the height of whole surface sticked quartz crystal resonator, concrete height will decide according to designing requirements such as resonance frequencys certainly.
Description of drawings
Fig. 1 is the structural representation of quartz crystal resonance piece of the present invention,
Fig. 2 does not have the structural representation of the crystal base sheet of recess for the present invention,
Fig. 3 is the schematic diagram of the another kind of structure of crystal base of the present invention,
Fig. 4 is the fixing schematic diagram of the gluing compound of resonance piece and base pieces among the present invention,
Fig. 5 is the structural representation that resonance piece of the present invention and base pieces are fixed together,
The structural representation that Fig. 6 has the crystal casing sheets of recess for the present invention,
Fig. 7 is the schematic diagram of the gluing compound of fixed pedestal sheet of the present invention and casing sheets,
Fig. 8 has the structural representation of broken section for the present invention,
Fig. 9 is the cutaway view of the another kind of quartz-crystal resonator of the present invention,
Figure 10 is the cutaway view of the another kind of quartz crystal resonance piece of the present invention,
Figure 11 is the cutaway view of the another kind of quartz crystal resonance piece of the present invention.
Embodiment
Fig. 1 has shown a kind of rectangular piezoelectric quartz crystal resonance piece 10.In the present invention, the long limit of resonance piece 10 is parallel to X-axis, and this X-axis just is that quartz crystal characteristic axle and AT cut the shape direction, generally is used for the high frequency quartz-crystal resonator and this kind AT cuts the shape quartz crystal.The width of resonance piece 10 is parallel to the Z axle, and thickness is parallel to Y-axis.
For not specific limited the present invention, the general size of resonance piece 10 has comprised length range: between the 2.0mm-12mm, as 7.5mm; Width range: between the 1.5mm-5.5mm, as 5mm.Thickness depends on resonance frequency according to following relation
T=1.67/F EQN.1 (formula one)
The t representative thickness, the mm of unit, F represents resonance frequency, the MHz of unit, this resonance frequency is usually between 1MHz-200MHz.
In order to provide the signal of telecommunication to resonance piece 10, conductive metal electrode 14,15 correspondingly has been plated in the top of quartz wafer 10 and following (also being said first electrode of preamble, second electrode) by vacuum, forms resonance piece.
The size of electrode 14,15 is decided by the parametric index of equivalent electric circuit, and final quartz-crystal resonator is to design to satisfy the restriction of size in the application according to time equivalent circuit.But the thickness of electrode 14,15 and the density that is applied to metals above the electrode 14,15 be decision resonance piece 10 the electrode frequency is arranged from descend what principal element of the electrodeless frequency of resonance piece 10.Resonance frequency is called the mass loading (or the frequency amount of returning) of electrode usually with respect to the rate of descent of electrodeless frequency, by following formulate:
Δ=(f
u-f
θ)/f
uEQN.2 (formula two)
f
uRepresent the electrodeless frequency of resonance portion, f
θThat represents resonance portion has an electrode frequency.
The acoustics result shows that the frequency that forms is f between electrode 14,15
θThe thickness shear ripple can't be diffused into resonance piece 10 other do not have the zone of electrode, and when sound wave was passed to the edge 18,19 of resonance piece 10, the amplitude of sound displacement was exponential form and descends.
Since the energy of sound wave be proportional to the sound wave displacement square, descend when sound wave acoustic wave energy when electrode edge 16,17 is radiated the edge 18,19 of resonance piece 10 is exponential form.This phenomenon is called the trap effect of energy, arrives the energy at resonance piece 10 edges 18,19, distributing and absorbing from resonator and disappeared because of sound wave.The big more then sound wave of Δ value displacement amplitude index rate of descent is big more, and the trap effect of energy is also just big more simultaneously.When the energy loss that causes when inadequate energy trapping effect was very big, equivalent series resistance was just very big.
Generally, quartz-crystal resonator all requires less relatively equivalent series resistance.So Δ value and the length between the edge 18,19 of electrode edge 16,17 and resonance piece 10 are considered through special design, so that the size of decision resonance piece 10, so that quartz-crystal resonator can satisfy practical requirement.
The conducting metal utmost point 14 and bottom electrode 15 from power on extends to the end points electrode district 20,21 of quartz crystal resonance piece 10.The effect of end points electrode district 20,21 is that base electrode 26,27 correspondences that go up inner surface 23 of they and as shown in Figure 2 crystal base sheet 22 are in the same place.Using the purpose of conducting resinl is that end points electrode district 20 and base electrode 26 are linked together, and also end points electrode district 21 and base electrode 27 is coupled together simultaneously.
As shown in Figure 2, the metal electrode 26,27 at 23 places, the upper top of base pieces 22 surface encases the edge of base pieces 22, be connected respectively to be positioned at crystal base sheet 22 following outside 24 on end points electrode district 29,30.Use a kind of conducting resinl of routine so that the pedestal end points electrode district 26,27 that will be positioned at the end points electrode district 20,21 on the resonance piece 10 and be positioned at upper top surface 23 couples together, then again by metal electrode film and down the end points electrode district 29,30 on outside 24 couple together.The metal electrode 14 and 15 of resonance piece 10 finally has been connected to the end points electrode district 29,30 on following outside 24 on the base pieces 22.
Fig. 2 show be positioned at base pieces 22 following outside 24 on two end points electrode districts 29,30 and circuit link together.Shown in Figure 3, can increase other two end points districts 31,32, mainly be to be used for they being welded and fixing in the circuit board, locatees finally for simultaneously the surface mount crystal resonator, they can be reorientated in following outside 24 position, so that satisfy actual needs better.The conductive metal electrode sheet that is positioned on the zone 23,24 of base pieces 22 is to plate by the vacuum metal film that one deck is very thin to form, but they also can be plated on the surface with other method.
Shown in Figure 4, conventional conducting resinl 36 is used for connecting respectively the end points electrode district 20,21 that is positioned on the resonance piece 10 and the end points electrode district 26,27 on the base pieces 22.After using conducting resinl (gluing compound a kind of) 36, be cured according to the requirement of glue manufacturer.
Shown in Figure 5, after conducting resinl 36 was finished curing, the assembly 39 of resonance piece 10 and base pieces 22 can be tested before continuing processing, can end points electrode district 29,30 be connected together by suitable testing equipment and test.As the common way of quartz-crystal resonator industry, frequency is adjusted and is reached assigned frequency before being preferably in and finishing assembling and capping.
As shown in Fig. 6, crystal casing sheets 35 and crystal base sheet 22 have essentially identical size and outside recess are arranged, and the two is convenient to dock and fixes like this, but crystal casing sheets 35 nothings have functional electrode.Crystal casing sheets 35 is transparent, and the electrode on electrode on the resonance piece 10 and the crystal base sheet 22 can be observed by casing sheets, and crystal casing sheets 35 can be used for lettering simultaneously, so that produce sign.
Fig. 7 and shown in Figure 8, the assembling method of attachment of crystal casing sheets 35 and crystal base sheet 22 is: the gluing compound 38 of routine is used for boundary member on the crystal base sheet 22, carries out the two bonding then.The width of conventional gluing compound 38 that is used for crystal base sheet 22 peripheries is narrow, can not adhere on the resonance piece 10 so that guarantee unnecessary gluing compound.If too much gluing compound has been painted on the resonance piece 10 because of carelessness, then how many resonance characteristics will be subjected to very big influence because of the amount of gluing compound.The circumferential perimeter of gluing compound 38 and base pieces 22 and crystal casing sheets 35 peripheral roughly the same.
After coating gluing compound 38, casing sheets 35 is placed on the top of assembly, so as the peripheral complete and gluing compound of casing sheets 35 38 in conjunction with and without any the space, gluing compound 38 is cured according to the requirement of producer.
Gluing compound has certain viscosity and surface tension, this specific character is supporting three wafers 22,10,35 in assembling process, and after curing, make them keep not contact, more very important, resonance piece 10 does not have any contact with crystal base sheet 22 with crystal casing sheets 35 except its two ends are fixed by conducting resinl and base pieces 22.These contacts will make resonator depressed, or produce very high equivalent series resistance.If any reason designing requirement resonance piece 10 is thicker, the central part of crystal casing sheets and base pieces can be done enough recessedly so, and to avoid any contact, this names a person for a particular job and discusses afterwards.
Characteristics of the present invention are that resonance piece 10, crystal base sheet 22 and crystal casing sheets 35 all have identical thermal coefficient of expansion, and this point can be avoided using the different stress that pedestal and sheathing material brought in the technology in the past.
On the structure of this resonator group piece installing 40, can reflect another characteristics of the present invention, be that resonance piece 10 is arranged in by base pieces 22, casing sheets 35 with around the formed recess of thickness of the gluing compound 38 that assembles the part periphery, and supported at the two ends of resonance piece by conducting resinl 36.
Fig. 9 has shown another form of implementation of the present invention.Except top introduction in the past, this other resonator group piece installing is labeled as 140, its 26S Proteasome Structure and Function is much the same with the assembly 40 of front resonator.The identification method of this resonator group piece installing 140 parts is just numbered the front and has been added " 1 " as the identification method of previously described resonator group piece installing 40.
As shown in Figure 9, the main distinction of resonator group piece installing 140 resonator 40 is that casing sheets 135 and base pieces 122 have comprised recessed portion simultaneously.What particularly point out is that base pieces 122 has comprised an outward extending recessed district 50, and casing sheets 135 comprises a recessed district 52 simultaneously.These recessed districts 50,52 can produce with conventional method.These concave portions are that design provides additional space, this space to make resonance piece 110 can not touch base pieces 122 and casing sheets 135 when resonance, and this form is with particularly useful when requiring to reduce size, such as the height that reduces resonator.
Figure 10 has represented another form of quartz crystal resonance piece among the present invention.Except former description in the past, the quartz crystal resonance piece of this form, label are 210, its 26S Proteasome Structure and Function was similar with the resonance piece of introducing in the past 10.The component identification method of resonance piece 210 is the same with the method for numbering serial of the parts of the resonance piece of describing 10 in the past, has just added before numbering " 2 ".
Figure 10 shows that another method improves the thickness of electrode.The frequency of the thickness shear pattern that this kind form is occurred among the present invention is that the thickness with resonance piece 210 is inversely proportional to, and can describe with above-mentioned formula EQN.1.If as shown in figure 10 after the thickness between electrode edge 216,217 and the resonance piece edge 218,219 reduces, the frequency in interval 60,62 as shown in the figure will exceed the frequency of electrode part 64 far away, reduce 10% such as thickness, ignoring under the situation of other factors, frequency will rise about 10%.Since mass loading Δ, describe as formula EQN.2, be proportional to electrodeless regional 60,62 and the poor of frequency between the electrode zone 64 arranged, so the thickness of the resonance piece that the mass loading Δ can be by reducing electrode zone 64 outsides is realized, and be not to realize by the thickness that rolls up electrode, this method can be designed the equivalent resistance that high-intensity energy trapping effect is become reconciled, and keeps little size simultaneously.
Its importance of the crystal resonator of upper frequency is increasing, but according to shown in the formula EQN.1, the frequency that increases resonator must reduce the thickness of resonance piece.The thin more then easy more fragmentation of resonance piece is also more difficult goes processing by production process.A kind of method is to reach upper frequency with the fundamental frequency overtone, and this kind overtone will use thicker resonance piece, but the substitutional connection of overtone resonance has higher equiva lent impedance and lower dynamic capacity compared with the fundamental resonance pattern.In the utilization of many reality, all require fundamental frequency model based on this reason.
Figure 11 shows another form of quartz crystal resonance piece of the present invention.。Except described in the past, this resonance piece is labeled as 310, and its 26S Proteasome Structure and Function was all similar with the resonance piece of describing 10 in the past.The identification method of the part of resonance piece 310 is identical with the identification method of resonance piece 10, just adds in front " 3 ".
Shown in Figure 11, the thickness of the mid portion 65 of resonance piece 310 has reduced, so that satisfy the needs of using.This result can reach by suitable method, such as keeping under the still thicker and stronger situation of boundary member 66, optionally corrodes middle body 65 and just can reach this purpose.Take this method can reach the extremely thin resonance piece 310 of a middle body 65, under the situation of thickness of not sacrificing boundary member 66 and strength, still can reach high resonance frequency.
In this application, adopted different forms to be described to enforcement of the present invention, still, the present invention is in no way limited in these scopes, and it can be implemented with different forms in other claimed range.
Claims (19)
1, a kind of resonance piece deposits electrode on it, it is characterized in that constituting the bridge architecture part in the middle of this resonance piece, and two ends then are standing parts.
2, resonance piece as claimed in claim 1 is characterized in that this resonance piece is a rectangle, or square, or oval, or circular.
3, resonance piece as claimed in claim 1, the thickness that it is characterized in that this resonance piece is variable.
4, resonance piece as claimed in claim 3 is characterized in that the upper and lower surface of resonance piece is respectively arranged with first, second electrode part, can reduce the thickness of resonance piece in the zone that does not have first, second electrode part.
5, resonance piece as claimed in claim 3 is characterized in that the upper and lower surface of resonance piece is respectively arranged with first, second electrode part, has the thickness of first, second electrode part to reduce to some extent than the area thickness that does not have first, second electrode part.
6, a kind of resonator group piece installing is characterized in that this resonator group piece installing comprises:
Resonance piece based on quartz crystal, but this resonance piece resonance is in desired frequency;
A base pieces is fixed in resonance piece, so that resonance piece can be with respect to base pieces resonance.
7, resonator group piece installing as claimed in claim 6 is characterized in that resonance piece links together at two ends and base pieces, and base pieces has the electrode part, and the electrode pair of its electrode and resonance piece should and connect together.
8, resonator group piece installing as claimed in claim 6 is characterized in that this assembly includes base pieces and resonance piece are firmly fixed together binding.
9, resonator group piece installing as claimed in claim 6 is characterized in that base pieces is to be made of quartz crystal materials.
10, resonator group piece installing as claimed in claim 7, it is characterized in that the resonance piece upper surface has first electrode, lower surface has second electrode, the base pieces correspondence includes the pair of base electrode, this position and resonance piece first electrode, second electrode pair to base electrode is answered, and is connected with first electrode, second electrode respectively.
11 resonator group piece installings as claimed in claim 7 is characterized in that first electrode of resonance piece and the two ends that second electrode extends to this resonance piece, form first, second end points electrode district; First, second end points electrode district respectively with base pieces on two corresponding linking together of base electrode on inner surface; Two base electrode on inner surface extend to the outer surface of this base pieces on the base pieces by side faces at both ends.
12, resonator group piece installing as claimed in claim 11 is characterized in that first electrode of resonance piece and the electrode on second electrode and the base pieces contain metal ingredient.
13, a kind of novel surface sticked quartz crystal resonator, this resonator comprises:
Resonance piece based on quartz crystal, but this resonance piece resonance is in desired frequency;
A base pieces is fixed in resonance piece, and resonance piece can be with respect to base pieces resonance;
A casing sheets that is fixed together with base pieces, resonance piece is between base pieces and casing sheets.
14, novel surface sticked quartz crystal resonator as claimed in claim 13 is characterized in that this resonator includes between base pieces and casing sheets and with the two binding that is fixed together effectively.
15, novel surface sticked quartz crystal resonator as claimed in claim 13 is characterized in that casing sheets is made of quartz crystal materials.
16, novel surface sticked quartz crystal resonator as claimed in claim 13 is characterized in that in this resonator that base pieces and casing sheets all include an outward extending recess.
17, a kind of manufacture method of novel surface sticked quartz crystal resonator is characterized in that this method comprises:
A complete quartz crystal slice is provided;
Upper surface and lower surface at quartz crystal slice plates first electrode and second electrode respectively, forms resonance piece;
Resonance piece is securely fixed on the base pieces that electrode arranged, so that resonance piece can be with respect to this base pieces resonance;
Base pieces is firmly fixed on the casing sheets, so that resonance piece is between base pieces and casing sheets.
18, the manufacture method of novel surface sticked quartz crystal resonator as claimed in claim 17 is characterized in that in the method base pieces and casing sheets all adopt quartz crystal materials; And fixing step comprises with binding resonance piece being firmly fixed with base pieces is in the same place, with binding base pieces is firmly fixed with casing sheets and to be in the same place, make resonance piece between base pieces and casing sheets, base pieces, resonance piece and casing sheets form a periphery of sealing fully.
19, the manufacture method of novel surface sticked quartz crystal resonator as claimed in claim 18 is characterized in that above-mentioned binding can be a conducting resinl, also can be other glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410074375 CN1750393B (en) | 2004-09-13 | 2004-09-13 | Novel surface sticked quartz crystal resonator and producing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410074375 CN1750393B (en) | 2004-09-13 | 2004-09-13 | Novel surface sticked quartz crystal resonator and producing method |
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| Publication Number | Publication Date |
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| CN1750393A true CN1750393A (en) | 2006-03-22 |
| CN1750393B CN1750393B (en) | 2012-10-10 |
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| Application Number | Title | Priority Date | Filing Date |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102820866A (en) * | 2012-08-31 | 2012-12-12 | 铜陵日科电子有限责任公司 | Quartz crystal fine tuning limiting plate moving device |
| CN102832897A (en) * | 2012-08-31 | 2012-12-19 | 铜陵日科电子有限责任公司 | Quartz crystal fine-tuning detecting system |
| CN105634436A (en) * | 2015-12-22 | 2016-06-01 | 成都泰美克晶体技术有限公司 | Quartz crystal resonator with circular wafer structure and manufacture method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1031739C (en) * | 1992-10-15 | 1996-05-01 | 松下电器产业株式会社 | Oscillator |
| JP2000138554A (en) * | 1998-11-02 | 2000-05-16 | Murata Mfg Co Ltd | Energy confinement piezoelectric resonator |
| US6590315B2 (en) * | 2000-05-26 | 2003-07-08 | William D. Beaver | Surface mount quartz crystal resonators and methods for making same |
| CN1761152B (en) * | 2004-10-12 | 2013-11-13 | 应达利电子(深圳)有限公司 | Quartz crystal oscillator pasted on surface, and preparation method |
-
2004
- 2004-09-13 CN CN 200410074375 patent/CN1750393B/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102820866A (en) * | 2012-08-31 | 2012-12-12 | 铜陵日科电子有限责任公司 | Quartz crystal fine tuning limiting plate moving device |
| CN102832897A (en) * | 2012-08-31 | 2012-12-19 | 铜陵日科电子有限责任公司 | Quartz crystal fine-tuning detecting system |
| CN102820866B (en) * | 2012-08-31 | 2015-07-15 | 铜陵日科电子有限责任公司 | Quartz crystal fine tuning limiting plate moving device |
| CN105634436A (en) * | 2015-12-22 | 2016-06-01 | 成都泰美克晶体技术有限公司 | Quartz crystal resonator with circular wafer structure and manufacture method thereof |
| WO2017107307A1 (en) * | 2015-12-22 | 2017-06-29 | 成都泰美克晶体技术有限公司 | Quartz crystal resonator having circular wafer structure and method for manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1750393B (en) | 2012-10-10 |
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