JP2536627B2 - Chip-shaped piezoelectric component - Google Patents

Chip-shaped piezoelectric component

Info

Publication number
JP2536627B2
JP2536627B2 JP1200010A JP20001089A JP2536627B2 JP 2536627 B2 JP2536627 B2 JP 2536627B2 JP 1200010 A JP1200010 A JP 1200010A JP 20001089 A JP20001089 A JP 20001089A JP 2536627 B2 JP2536627 B2 JP 2536627B2
Authority
JP
Japan
Prior art keywords
substrate
chip
protective
shaped piezoelectric
piezoelectric component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1200010A
Other languages
Japanese (ja)
Other versions
JPH0364082A (en
Inventor
康廣 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP1200010A priority Critical patent/JP2536627B2/en
Publication of JPH0364082A publication Critical patent/JPH0364082A/en
Application granted granted Critical
Publication of JP2536627B2 publication Critical patent/JP2536627B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は各種の電子機器においてフィルタ回路やトラ
ップ回路あるいは周波数復調回路等に使用されるチップ
状圧電部品に関する。
Description: TECHNICAL FIELD The present invention relates to a chip-shaped piezoelectric component used for a filter circuit, a trap circuit, a frequency demodulation circuit, or the like in various electronic devices.

(従来の技術) 従来のチップ状圧電部品の一例の分解斜視図、外観斜
視図および縦断面図をそれぞれ第6図、第7図および第
8図に示す。
(Prior Art) An exploded perspective view, an external perspective view and a longitudinal sectional view of an example of a conventional chip-shaped piezoelectric component are shown in FIG. 6, FIG. 7 and FIG. 8, respectively.

上記チップ状圧電部品は、セラミックの圧電基板1の
エネルギー閉じ込め型の厚み縦振動を利用した圧電共振
子をチップ化したもので、上記圧電基板1により構成さ
れる圧電共振子のエレメント2と、このエレメント2の
上記圧電基板1の一方の主面および他方の主面に夫々接
着される第1の保護基板3および第2の保護基板4と、
上記エレメント2と保護基板3,4の端面に形成される第
1の外部端子電極5および第2の外部端子電極6とから
なる。
The chip-shaped piezoelectric component is a piezoelectric resonator using energy trap type thickness longitudinal vibration of a ceramic piezoelectric substrate 1, which is formed into a chip. A first protective substrate 3 and a second protective substrate 4, which are adhered to one main surface and the other main surface of the piezoelectric substrate 1 of the element 2, respectively;
It is composed of the element 2 and a first external terminal electrode 5 and a second external terminal electrode 6 formed on the end faces of the protective substrates 3 and 4.

上記エレメント2は、セラミック製の圧電基板1の一
方の主面および他方の主面の各中央部に夫々形成された
共振器の一方の振動電極7および他方の振動電極8を有
する。そして、上記一方の振動電極7は、引出電極9に
より圧電基板1の一方の主面の一つの辺に形成された引
出端子10に引き出される。また、上記他方の振動電極8
は、引出電極11により、圧電基板1の他方の主面の一つ
の辺に形成された引出端子12に引き出される。上記引出
端子10と引出端子12とは、圧電基板1の中心に関して、
互いに反対側に位置する。上記圧電基板1は、その振動
電極7および8の間およびその近傍がエネルギー閉じ込
め型の厚み縦振動を行なう。
The element 2 has one oscillating electrode 7 and the other oscillating electrode 8 of the resonator, which are respectively formed in the central portions of one main surface and the other main surface of the piezoelectric substrate 1 made of ceramic. Then, the one vibrating electrode 7 is led out by the lead electrode 9 to a lead terminal 10 formed on one side of one main surface of the piezoelectric substrate 1. In addition, the other vibrating electrode 8
Is drawn out to the lead-out terminal 12 formed on one side of the other main surface of the piezoelectric substrate 1 by the lead-out electrode 11. The lead terminal 10 and the lead terminal 12 are
Located on opposite sides of each other. The piezoelectric substrate 1 performs energy trap type thickness longitudinal vibration between the vibrating electrodes 7 and 8 and in the vicinity thereof.

一方、第1の保護基板3および第2の保護基板4はい
ずれも有機系もしくは無機系の絶縁材料からなるもので
ある。上記第1の保護基板3および第2の保護基板4の
エレメントに対向する面には、それぞれ、圧電基板1の
振動部分15の振動を許容する間隙を形成するために、そ
の中央部に円形凹部Cが設けられている。
On the other hand, both the first protective substrate 3 and the second protective substrate 4 are made of an organic or inorganic insulating material. On the surfaces of the first protective substrate 3 and the second protective substrate 4 facing the elements, circular recesses are formed in the central portions thereof in order to form a gap for allowing the vibration of the vibrating portion 15 of the piezoelectric substrate 1, respectively. C is provided.

上記第1の保護基板3はその円形凹部Cの形成された
面にて、エレメント2の圧電基板1の一つの主面に塗布
された接着剤13により、圧電基板1の一つの主面に接着
される。また、上記第2の保護基板4も、上記と同様
に、エレメント2の圧電基板1のいま1つの主面に塗布
された接着剤14により、圧電基板1のいま一つの主面に
接着される。
The first protective substrate 3 is adhered to one main surface of the piezoelectric substrate 1 by an adhesive 13 applied to one main surface of the piezoelectric substrate 1 of the element 2 on the surface where the circular recess C is formed. To be done. Further, the second protective substrate 4 is also adhered to the other main surface of the piezoelectric substrate 1 by the adhesive 14 applied to the other main surface of the piezoelectric substrate 1 of the element 2 in the same manner as described above. .

そして、上記第1の外部端子電極5は、上記引出電極
10の形成されている一つの辺側のそれぞれ接着された上
記エレメント2および保護基板3,4の一つの端面側にス
パッタリング等によって形成された一次金属膜Sp上にハ
ンダを覆わせて形成され、引出電極10に電気的に接続さ
れる。また、上記第2の外部端子電極6は、上記引出電
極12の形成されている一つの辺側のそれぞれ接着された
上記エレメント2および保護基板3,4の一つの端面側に
スパッタリング等によって形成された一次金属膜Sp上に
ハンダを覆わせて形成され、引出電極12に電気的に接続
される。
The first external terminal electrode 5 is the lead electrode.
10 is formed by covering the solder on the primary metal film Sp formed by sputtering or the like on one end face side of the element 2 and the protective substrates 3 and 4 which are bonded to one side of each formed side, It is electrically connected to the extraction electrode 10. The second external terminal electrode 6 is formed by sputtering or the like on one end face side of the element 2 and the protective substrates 3 and 4 which are bonded to each other on one side where the extraction electrode 12 is formed. It is formed by covering the solder on the primary metal film Sp and is electrically connected to the extraction electrode 12.

(発明が解決しようとする課題) 上記のような構成を有する従来のチップ状圧電部品に
おいては、一般に第5図に示すような円形凹部Cが多数
設けられた一枚の絶縁基板Sでできたマザー基板を切り
離したものが、第1および第2の保護基板3,4に用いら
れている。
(Problems to be Solved by the Invention) In the conventional chip-shaped piezoelectric component having the above-described structure, it is generally made of one insulating substrate S provided with a large number of circular recesses C as shown in FIG. Separated mother boards are used for the first and second protective boards 3 and 4.

このマザー基板は、円形凹部Cに対応するパターンを
有した所定の金型でプレスし、焼成して製造される。と
ころが、焼成の段階で多少とも収縮してしまうことは避
けがたく、円形凹部Cのピッチ、大きさ、位置および深
さが様々に変化してしまう上に、この変化度も一様では
ないため、圧電部品組立時の精度上の問題となり、特に
必要振動をダンピングしてしまうので、特性にバラツキ
のない圧電部品を大量に製造することが困難であった。
This mother substrate is manufactured by pressing and firing with a predetermined die having a pattern corresponding to the circular recess C. However, it is unavoidable that the circular recesses shrink a little during the firing stage, and the pitch, size, position, and depth of the circular recesses C change variously, and the degree of change is not uniform. However, since it becomes a problem in accuracy when assembling the piezoelectric parts, and particularly the necessary vibration is damped, it is difficult to mass-produce the piezoelectric parts without variations in characteristics.

さらには、円形凹部Cの形状や大きさを変化させる場
合には、別の金型が必要であり、製造コストの増加にも
なる。
Furthermore, when changing the shape and size of the circular recess C, another mold is required, which also increases the manufacturing cost.

本発明は上記の課題を解決するためになされたもので
あり、製造段階において、容易に保護基板の所定の位置
に凹部を安定して設けることができ、さらに、凹部のパ
ターン変化に対しても金型を多数用意する必要がない構
成のチップ状圧電部品を提供することを目的とする。
The present invention has been made to solve the above problems, and in the manufacturing stage, it is possible to easily provide a concave portion stably at a predetermined position of the protective substrate, and even with respect to the pattern change of the concave portion. An object of the present invention is to provide a chip-shaped piezoelectric component that does not require a large number of molds.

(課題を解決するための手段) 上記目的を達成するため、本発明にかかるチップ状圧
電部品は、圧電基板が振動電極を有し、該振動電極部分
でエネルギー閉じ込め型の振動を行うエレメントを備
え、該エレメントが一対の保護基板間に挟持されるとと
もに上記振動電極が上記エレメントの端面に引き出され
てなるチップ状圧電部品において、上記保護基板は、上
記圧電基板の振動部分の振動を許容する凹部が上記振動
電極と対向する位置に形成されるように絶縁ペーストが
一つの主面に印刷されて焼き付けられた平板絶縁基板か
らなり、上記保護基板とエレメントとが上記絶縁ペース
トを間にして接着剤により接着されていることを特徴と
する。
(Means for Solving the Problems) In order to achieve the above object, in a chip-shaped piezoelectric component according to the present invention, a piezoelectric substrate has a vibrating electrode, and an element that performs energy trapping type vibration at the vibrating electrode portion is provided. In a chip-shaped piezoelectric component in which the element is sandwiched between a pair of protective substrates and the vibrating electrode is pulled out to an end face of the element, the protective substrate is a recess that allows the vibrating portion of the piezoelectric substrate to vibrate. An insulating paste is printed on one main surface so that it is formed at a position facing the vibrating electrode and is baked, and the protective substrate and the element are sandwiched between the insulating paste to form an adhesive agent. It is characterized by being bonded by.

(実施例) 以下、添付の図面を参照して本発明の実施例を説明す
る。
(Examples) Examples of the present invention will be described below with reference to the accompanying drawings.

本発明に係るチップ状圧電部品の一実施例の分解斜視
図、外観斜視図および縦断面図をそれぞれ第2図、第3
図および第4図に示す。
An exploded perspective view, an external perspective view and a longitudinal sectional view of an embodiment of the chip-shaped piezoelectric component according to the present invention are respectively shown in FIG. 2 and FIG.
Shown in Figures and FIG.

このチップ状圧電部品の構造は、第6図〜第8図で示
した従来のものと同様であるので、詳細な説明は省略す
る。
The structure of this chip-shaped piezoelectric component is the same as that of the conventional one shown in FIGS. 6 to 8, and therefore detailed description thereof will be omitted.

第1図は、本発明のチップ状圧電部品に用いられる保
護基板に下降されるマザー基板を示す図である。このマ
ザー基板は、予め焼成された平板絶縁基板Sと、この平
板絶縁基板Sの一面に所定のパターン、本実施例では円
形パターンに塗布された絶縁ベーストPとからなってい
る。
FIG. 1 is a view showing a mother substrate lowered onto a protective substrate used for the chip-shaped piezoelectric component of the present invention. This mother substrate is composed of a flat insulating substrate S that has been fired in advance, and an insulating base P applied on one surface of the flat insulating substrate S in a predetermined pattern, in this embodiment, a circular pattern.

平板絶縁基板Sは、好ましくは、アルミナなどの軽く
て絶縁性かつ強度の優れたものである。また、絶縁ペー
ストPはガラス等のやはり絶縁性に優れたものであっ
て、これをスクリーン印刷等の印刷技術を用いて、円形
凹部Cを形成するように塗布した後に焼付けを行い、マ
ザー基板が完成する。そして、このマザー基板をカット
して第1および第2の保護基板3,4に加工される。
The flat plate insulating substrate S is preferably made of a material such as alumina which is light and has excellent insulating properties and strength. In addition, the insulating paste P is also glass or the like having excellent insulating properties. The insulating paste P is applied by a printing technique such as screen printing so as to form the circular concave portions C and then baked, so that the mother substrate is Complete. Then, this mother substrate is cut and processed into the first and second protective substrates 3 and 4.

上記のように、すでに焼成された絶縁基板S上に絶縁
ペーストPを印刷によって塗布して凹部Cを所定のパタ
ーンに形成するため、凹部Cの位置・大きさ・深さは印
刷の精度によってのみ左右され、バラツキのない保護基
板が製造できる。
As described above, since the insulating paste P is applied by printing on the already baked insulating substrate S to form the recesses C in a predetermined pattern, the position, size, and depth of the recesses C depend only on the printing accuracy. It is possible to manufacture a protective substrate that is not affected by variations and is stable.

また、すでに凹部Cが形成されたマザー保護基板と振
動電極等が形成されたマザー圧電基板とを貼り合わせた
後にカットすれば、製品の組立てがより容易になる。
Further, if the mother protective substrate having the concave portion C already formed and the mother piezoelectric substrate having the vibrating electrode and the like are attached and then cut, the assembly of the product becomes easier.

以上の実施例において、1個のエレメントを用いるチ
ップ状圧電部品について説明したが、本発明はこれに限
られるものではなく、例えば、保護基板・エレメント・
保護基板・エレメント・保護基板…といったようにエレ
メントと保護基板とを交互に重ね合わせた積層型構造の
チップ状圧電部品についても適用できる。この場合、エ
レメントとエレメントとの間に挟まれる保護基板は、そ
の両面に、印刷によって凹部Cが設けられる。
Although the chip-shaped piezoelectric component using one element has been described in the above embodiments, the present invention is not limited to this.
The present invention can also be applied to a chip-shaped piezoelectric component having a laminated structure in which elements and protective substrates are alternately stacked, such as protective substrate / element / protective substrate. In this case, the protective substrate sandwiched between the elements is provided with recesses C on both sides by printing.

(発明の効果) 本発明によれば、保護基板に設けられる凹部の位置や
大きさは絶縁ペーストの印刷精度によってのみ決まるの
で、絶縁基板焼成時の収縮を考慮しないで、凹部を精度
良く設けることができる。
(Effect of the Invention) According to the present invention, since the position and size of the concave portion provided in the protective substrate are determined only by the printing accuracy of the insulating paste, the concave portion can be provided with high precision without considering shrinkage during firing of the insulating substrate. You can

また、絶縁基板に焼成時の収縮度の低い高価な材料を
あえて選択する必要がないため、製造コストも減少す
る。
Further, since it is not necessary to intentionally select an expensive material having a low shrinkage during firing for the insulating substrate, the manufacturing cost is reduced.

凹部の形状・位置・深さを変更したい場合でも、絶縁
ペーストの印刷パターンや印刷回数を変えるだけで良
く、従来のように、絶縁基板用の金型を何種類も用意す
る必要がないので、この面からも製造コストの減少が見
込める。
Even if you want to change the shape, position, and depth of the recess, you only have to change the printing pattern and the number of times of printing the insulating paste, and there is no need to prepare many types of molds for insulating substrates, as in the past. From this aspect as well, a reduction in manufacturing cost can be expected.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明に係るチップ状圧電部品の第1および第
2の保護基板に加工されるマザー基板である。 第2図は本発明の一実施例に係るチップ状圧電部品の分
解斜視図である。 第3図は本発明の一実施例に係るチップ状圧電部品の外
観斜視図である。 第4図は本発明の一実施例に係るチップ状圧電部品の縦
断面図である。 第5図は従来のチップ状圧電部品の圧電基板の第1およ
び第2の保護基板に加工される、金型でプレスされ、焼
成によってできたマザー基板である。 第6図は従来のチップ状圧電部品の分解斜視図である。 第7図は従来のチップ状圧電部品の外観斜視図である。 第8図は従来のチップ状圧電部品の縦断面図である。 1…圧電基板、2…エレメント、3,4…保護基板、5,6…
端子電極、7,8…振動電極、9,11…引出電極、10,12…引
出端子、13,14…接着剤、15…振動部分、C…凹部、S
…絶縁基板、P…絶縁ペースト。
FIG. 1 is a mother substrate processed into first and second protective substrates of the chip-shaped piezoelectric component according to the present invention. FIG. 2 is an exploded perspective view of a chip-shaped piezoelectric component according to an embodiment of the present invention. FIG. 3 is an external perspective view of a chip-shaped piezoelectric component according to an embodiment of the present invention. FIG. 4 is a vertical sectional view of a chip-shaped piezoelectric component according to an embodiment of the present invention. FIG. 5 shows a mother substrate which is processed into the first and second protective substrates of the piezoelectric substrate of the conventional chip-shaped piezoelectric component, which is pressed by the die and fired. FIG. 6 is an exploded perspective view of a conventional chip-shaped piezoelectric component. FIG. 7 is an external perspective view of a conventional chip-shaped piezoelectric component. FIG. 8 is a vertical sectional view of a conventional chip-shaped piezoelectric component. 1 ... Piezoelectric substrate, 2 ... Element, 3,4 ... Protective substrate, 5, 6 ...
Terminal electrode, 7,8 ... Vibration electrode, 9,11 ... Extraction electrode, 10,12 ... Extraction terminal, 13,14 ... Adhesive agent, 15 ... Vibrating part, C ... Recess, S
Insulating substrate, P ... Insulating paste.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】圧電基板が振動電極を有し、該振動電極部
分でエネルギー閉じ込め型の振動を行うエレメントを備
え、該エレメントが一対の保護基板間に挟持されるとと
もに上記振動電極が上記エレメントの端面に引き出され
てなるチップ状圧電部品において、 上記保護基板は、上記圧電基板の振動部分の振動を許容
する凹部が上記振動電極と対向する位置に形成されるよ
うに絶縁ペーストが一つの主面に印刷されて焼き付けら
れた平板絶縁基板からなり、上記保護基板とエレメント
とが上記絶縁ペーストを間にして接着剤により接着され
ていることを特徴とするチップ状圧電部品。
1. A piezoelectric substrate has a vibrating electrode, and an element that vibrates in an energy trapping type is provided at the vibrating electrode portion. The element is sandwiched between a pair of protective substrates, and the vibrating electrode is formed of the element. In the chip-shaped piezoelectric component drawn out to the end face, the protective substrate has one insulating paste so that a concave portion for allowing the vibration of the vibrating portion of the piezoelectric substrate is formed at a position facing the vibrating electrode. A chip-shaped piezoelectric component comprising a flat insulating substrate printed and burned on, wherein the protective substrate and the element are adhered by an adhesive with the insulating paste interposed therebetween.
JP1200010A 1989-08-01 1989-08-01 Chip-shaped piezoelectric component Expired - Lifetime JP2536627B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1200010A JP2536627B2 (en) 1989-08-01 1989-08-01 Chip-shaped piezoelectric component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1200010A JP2536627B2 (en) 1989-08-01 1989-08-01 Chip-shaped piezoelectric component

Publications (2)

Publication Number Publication Date
JPH0364082A JPH0364082A (en) 1991-03-19
JP2536627B2 true JP2536627B2 (en) 1996-09-18

Family

ID=16417294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1200010A Expired - Lifetime JP2536627B2 (en) 1989-08-01 1989-08-01 Chip-shaped piezoelectric component

Country Status (1)

Country Link
JP (1) JP2536627B2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01158810A (en) * 1987-12-15 1989-06-21 Murata Mfg Co Ltd Manufacture of electrostriction effect element

Also Published As

Publication number Publication date
JPH0364082A (en) 1991-03-19

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