Quartz crystal oscillator pasted on surface
Technical field
The present invention relates to quartz oscillator and manufacture method thereof, specifically, the invention relates to surface-pasted quartz oscillator and manufacture method thereof.
Background technology
Quartz oscillator, due to accuracy and the stability of its frequency, is an indispensable part in hyundai electronics industry such as communication, computer, amusement equipment and other our related field.Up to the present, quartz oscillator is normally added corresponding oscillating circuit by the piezoelectric quartz crystal resonator, with one can be formed by the encapsulant with sealing someway, direct voltage can act on by the lead-in wire of sealed package on quartz oscillator and to produce vibration.On quartz wafer in the piezoelectric quartz crystal resonator, have one group of very thin conductive metal electrode and be deposited on its two main surface (upper surface and lower surface), form resonance piece.The overlapping part of double-sided electrode has determined the resonance area on the resonance piece.When the frequency of the alternating voltage that produces by oscillating circuit when the direct voltage that provides was identical with the resonance frequency of this quartz crystal resonance piece, the piezoelectric quartz crystal resonance piece started resonance.The resonance frequency of quartz crystal resonance piece is to be determined by the piezoelectricity of quartz crystal and elastic constant, size and metal electrode and other factors.
Generally, quartz crystal oscillator pasted on surface is added corresponding oscillating circuit and ceramic packaging thing or pedestal by a piezoelectric quartz crystal resonator and is formed.
Ceramic packaging thing or pedestal are stacked integrated applications metal the overdoes ceramic structure of the technology such as deposition, metal mixed and ceramet involution, this type of ceramic component needs high-tech to produce, quite production cost is higher, and all relatively lacks product all the time.
In the case, can provide simple structure, low-cost production, effectively durable quartz crystal oscillator pasted on surface has its obvious advantage and advantage.
Summary of the invention
For above-mentioned problem, the present invention proposes a kind of quartz crystal oscillator pasted on surface and manufacture method thereof, this oscillator and manufacture method thereof make of the present invention simple in structure clear, be applicable to low cost fabrication, have durability, validity, easy to implement, with low cost, be convenient to make and the characteristics such as easy to use, and this kind oscillator has highly low characteristics.
Based on this, the present invention is achieved in that
At first the present invention provides a kind of resonance piece based on quartz crystal, and it is an important component part of this quartz oscillator.This resonance piece resonance, in characteristic frequency, requires to make response for the alternating voltage that is added on resonance piece usually.In use, based on the resonance piece resonance of quartz crystal in one in response to relevant the requiring on frequency of the frequency of alternating voltage, and this alternating voltage from corresponding oscillating circuit.
Outer periphery based on the resonance piece of quartz crystal can be any suitable geometry.Such as its shape is suitable for surperficial quartz oscillator, but in its essential structure, the middle part of this resonance piece is bridge shape structure, so that generation resonance, its two ends are standing part, this standing part can link together with other parts (other parts as described herein normally are used for the fixedly base pieces of resonance piece), and it is fixed.
the standing part that its two ends of this resonance piece can be provided for being fixedly connected with, its shape of this standing part can be greater than the bridge shape structure at its middle part, also can be less than bridge shape structure, above-mentioned bridge shape structure is mainly the resonance portion of resonance piece, its concrete shape can design according to actual needs, in a kind of useful especially shape, it is rectangle that bridge shape structure can be main body, square, it is circular that (circle is the main body of resonance portion, circular two ends can be by putting up a bridge, lead-in wire or other form are connected with the standing part of resonance piece) or oval-shaped structure, or similar regular geometric shapes.
It is circular that useful especially other geometry comprises approximate, or approximate be rectangular shape etc.In a kind of useful especially shape, resonance piece has a rectangular periphery.
Resonance piece has electrode, in order to apply external alternating voltage.In a useful especially form, resonance piece has upper surface and lower surface, and the first electrode is positioned at the upper surface of quartz wafer, and another electrode, namely the second electrode is positioned at the lower surface of corresponding wafer.
The thickness of resonance piece can be very consistent or change.In consistent very useful concrete manifestation form, the thickness in resonance range (being the shared zone that has of first, second electrode part) zone in addition that is determined by double overlying electrode in resonance piece reduces to some extent.This feature will have detailed discussion subsequently.
In the useful especially shape of another one, the thickness of resonance piece is basically identical, but with respect to boundary member (boundary member refers to not have the zone of electrode in general), obvious minimizing is arranged, this situation of subsequent discussion.
Another one implementation method of the present invention, the assembling that is exactly oscillator is included in other the local resonance piece based on quartz crystal and base pieces of describing, so that base pieces and resonance piece firmly connect together.And resonance piece is with respect to base pieces, can be according to the suitable alternating voltage that offers the resonance piece two ends and resonance, and this alternating voltage comes from corresponding oscillating circuit.Base pieces has a pair of resonance piece connecting electrode, and base pieces and resonance piece connect together at the resonance piece connecting electrode place of base pieces and the electrode of resonance piece, have formed conducting aspect electrical property.Because resonance piece at one end is connected with base pieces at two ends rather than as ceramic resonator, this connection provides a kind of very strong mechanical connection performance, makes between resonance piece and base pieces and has formed a kind of very strong mechanical connection.This method has strengthened the durability of this kind oscillator, and with respect to the oscillator of former explained hereafter, this method has increased the useful life of this kind oscillator.
Although base pieces can be in the same place with the whole bag of tricks, various technical battery with the resonance piece based on crystal, but preferably with binding, connect together, so when assembling just should be fixed with binding at the resonance piece connecting electrode place of base pieces with based on the electrode place of the resonance piece of crystal.This binding is always effective in cementation base pieces and resonance piece.A kind of especially effectively binding is exactly the colloidality binding.
Although base pieces can be comprised of any suitable material, such as metal, glass, pottery etc., better material or crystal (being quartz crystal).The use of crystal is very effective on reducing costs, and basically meets physical characteristic, particularly hot expansibility based on the resonance piece of crystal fully.This class feature will reduce the negative effect of stress to the oscillator performance to greatest extent.
Base pieces comprises a pair of resonance piece connecting electrode, in order to there is a resonance piece connecting electrode to be electrically connected to the first electrode of resonance piece, another one resonance piece connecting electrode has electrical connection with second electrode of resonance piece again simultaneously.The AC signal that this type of resonance piece connecting electrode can provide oscillating circuit very effectively offers resonance piece.
Base pieces also comprises the oscillating circuit terminal pad, so that oscillating circuit links together by oscillating circuit terminal pad and base pieces on base pieces.
Base pieces also comprises a pair of test panel, so that oscillator in assembling process, can be tested or electric machining the oscillator assembly by test panel.
Base pieces also comprises circuit, so that resonance piece connecting electrode, oscillating circuit terminal pad and test panel are electrically connected to by circuit.
The circuit that deposits on the surface, inside of base pieces or electrode can extend to by the side on four limits the outer surface of this base pieces or even the lower surface of base pieces.
Electrode described herein, terminal pad, test panel and circuit can be comprised of any applicable electric conducting material, but materials preferably includes metal ingredient.Can plate with any suitable method, preferably adopt the method evaporation of vacuum coating to surface.Here said electrode comprises resonance piece connecting electrode on base pieces and the electrode of resonance piece.
Another one implementation method of the present invention, the assembling that is exactly oscillator comprises oscillating circuit, so that oscillating circuit and base pieces firmly connect together.And oscillating circuit is relative and base pieces, can produce alternating voltage according to the direct voltage that offers oscillating circuit, and this alternating voltage is offered resonance piece.Oscillating circuit and the base pieces oscillating circuit terminal pad place on base pieces connects together, and has formed conducting aspect electrical property.
Although oscillating circuit can be in the same place with the whole bag of tricks, various technical battery with base pieces, preferably the method by the conductor wire pressure welding links together.Conductor wire preferably includes metal ingredient.
The quartz oscillator that the present invention mentions comprises as other the local resonance piece based on crystal, oscillating circuit and base pieces of describing, also comprises casing sheets.This casing sheets is securely fixed on base pieces, so that this resonance piece and oscillating circuit are between casing sheets and base pieces, whole oscillator mechanically is fixed together securely, resonance piece and oscillating circuit based on crystal can be completely sealed.
Under a kind of form, bonding object point is on the respective electrode of base pieces and resonance piece for the first time, and effectively base pieces and resonance piece are firmly fixed together, simultaneously for the second time bonding object point on shell sheet and base pieces, and effectively casing sheets and base pieces are firmly fixed together, binding, also can be different with the part of binding can be the same for the second time for the first time.
Although any material can be used for casing sheets, casing sheets is preferably made by crystal (being quartz crystal).So in a kind of useful especially form, based on resonance piece, base pieces and the casing sheets of crystal, be all by crystal composition.
In a kind of useful especially form, casing sheets can have outward extending recess, and this feature will be described in detail in the back.
Of the present invention one realizes greatly aspect, just has been to provide the method for producing quartz oscillator, and this method has comprised provides a complete quartz wafer; The first and second electrodes are plated on upper surface and the corresponding lower surface of quartz wafer, form resonance piece.Resonance piece and the base pieces that is coated with the resonance piece connecting electrode connect together securely, so that resonance piece is with respect to base pieces, and can resonance when the alternating voltage that provides at oscillating circuit acts on resonance piece; Oscillating circuit terminal pad on oscillating circuit and base pieces connects together securely,, so that oscillating circuit under the effect of external direct voltage, produces alternating voltage effect and resonance piece, makes resonance piece resonance; Again base pieces is connected together with casing sheets securely, so that resonance piece and oscillating circuit are positioned in the middle of base pieces and casing sheets securely.Manufacture thus surface-pasted quartz oscillator.
In one form, base pieces and casing sheets all are comprised of quartz crystal.Fixing step comprises uses binding respectively resonance piece and base pieces to be sticked together securely, and base pieces and casing sheets are sticked together securely.
This cementation step mechanically sticks together base pieces, resonance piece and casing sheets effectively securely, in order to form a complete hermetic periphery.
The conductive adhesion thing, preferably conducting resinl, be used between the electrode of resonance piece and the resonance piece connecting electrode on base pieces, in order to form the electronic loop of a resonance.
So far each characteristic or two or more characteristics comprehensive descriptions introduced all comprise within the scope of the invention, and this specific character does not have mutual inconsistency.
The oscillator configurations of the present invention's design is simple, and the energy low-cost production is effective and durable.As being used for the electronic equipments such as computer, mobile phone, radio control and data transmission system.Because shell and the pedestal of this oscillator can be produced by the producer oneself of quartz oscillator, this measure makes the production of quartz oscillator be no longer dependent on the outside ceramic packaging producer.Such as, this quartz crystal oscillator pasted on surface demand and no longer comprise above-mentioned ceramic packaging thing or pedestal no longer.So the problem that any relation is arranged and bring thus with this type of ceramic packaging thing or pedestal has been avoided in this invention.Being more preferably this quartz oscillator is to be formed by a quartz crystal pedestal and a quartz crystal shell encapsulation.After this quartz crystal oscillator pasted on surface is contained on application circuit, can obviously improve the ability of shock resistance and anti-vibration.Also have, the oscillator that this oscillator is produced with respect to manufacturing technology in the past has highly low characteristics, the manufacturing process of this quartz crystal oscillator pasted on surface is easy to implement, and provides a kind of cost-effective method to produce quartz crystal oscillator pasted on surface.
In sum, the present invention has the low cost fabrication that understands, is suitable for simple in structure, the characteristics that in use have validity and durability, and but the electrode Direct Electroplating of resonance piece is on wafer, and corresponding with the resonance piece connecting electrode on base pieces, make it to produce resonance and needn't alternating voltage be acted on resonance piece with metal lead wire.Therefore can reduce the height of whole quartz crystal oscillator pasted on surface, concrete height will decide according to designing requirements such as resonance frequencys certainly.
Description of drawings
Fig. 1 is the structural representation of quartz crystal resonance piece of the present invention;
Fig. 2 is the structural representation of quartz crystal base pieces of the present invention;
Fig. 3 is the fixing schematic diagram of the gluing compound of resonance piece and base pieces in the present invention;
Fig. 4 is the structural representation that in the present invention, resonance piece, oscillating circuit and base pieces are fixed together;
Fig. 5 is the structural representation that has the crystal casing sheets of recess in the present invention;
Fig. 6 is the schematic diagram of the gluing compound of fixed pedestal sheet and casing sheets in the present invention;
Fig. 7 is the oscillator structure schematic diagram that has broken section in the present invention;
Fig. 8 is the cutaway view of another kind of quartz crystal resonance piece in the present invention;
Fig. 9 is the cutaway view of another kind of quartz crystal resonance piece in the present invention.
Embodiment
Fig. 1 has shown a kind of rectangular piezoelectric quartz crystal resonance piece 10.In the present invention, the long limit of resonance piece 10, be parallel to X-axis 11, and this X-axis 11 is just the direction that quartz crystal characteristic axle and AT cut shape, and this kind AT cuts the shape quartz crystal generally for high frequency quartz crystal resonance piece.The width of resonance piece 10 is parallel to Z axis 13, and thickness is parallel to Y-axis 12.
For not specific limited the present invention, the general size of resonance piece 10 has comprised length range: between 2.mm-12mm, as 7.5mm; Width range: between 1.5mm-5.5mm, as 5mm.Thickness depends on resonance frequency according to following relation
T=1.67/F EQN.1 (formula one)
The t representative thickness, the mm of unit, F represents resonance frequency, the MHz of unit, this resonance frequency is usually between 1MHz-200MHz.
In order to resonance piece 10, to provide the signal of telecommunication, conductive metal electrode 14,15 correspondingly has been plated in the top of quartz wafer 10 and following (being also said the first electrode 14 of preamble, the second electrode 15) by vacuum, forms resonance piece.
Conductive metal electrode 14,15 size are decided by the parametric index of equivalent electric circuit, and final quartz crystal resonance piece to be circuit equivalent according to this design to meet the restriction of size in application.But conductive metal electrode 14,15 thickness and the density that is applied to metals above conductive metal electrode 14,15 be determine resonance piece 10 the electrode frequency is arranged from descend what principal element of the electrodeless frequency of resonance piece 10.Resonance frequency is called the mass loading (or the frequency amount of returning) of electrode usually with respect to the rate of descent of electrodeless frequency, by following formula, represented:
△=(f
u-f
θ)/f
uEQN.2 (formula two)
f
uRepresent the electrodeless frequency of resonance portion, f
θWhat represent resonance portion has an electrode frequency.
The acoustics result shows, the frequency that forms between conductive metal electrode 14,15 be the thickness shear ripple of f θ can't be diffused into resonance piece 10 other there is no the zone of electrode, and when sound wave be passed to the edge 18 of resonance piece 10,19 the time, the amplitude of sound displacement is exponential form and descends.
Since the energy of sound wave be proportional to the sound wave displacement square, when sound wave from electrode edge 16,17 be radiated the edge 18 of resonance piece 10, acoustic wave energy is exponential form and descends 19 the time.This phenomenon is called the trap effect of energy, arrives resonance piece 10 edges 18,19 energy, distributing and absorbing from resonator and disappeared because of sound wave.The larger sound wave of Δ value displacement amplitude index rate of descent is larger, and the trap effect of energy is also just larger simultaneously.When the energy loss that causes when inadequate energy trapping effect was very large, equivalent series resistance was just very large.
Generally, the quartz crystal resonance piece all requires the equivalent series resistance of less.So the Δ value and electrode edge 16,17 and the edge 18,19 of resonance piece 10 between length consider through special design, in order to determine the size of resonance piece 10, so that the quartz crystal resonance piece can meet practical requirement.
Conducting metal extends to the end points electrode district 20,21 of quartz crystal resonance piece 10 from the first electrode 14 and the second electrode 15.End points electrode district 20,21 effect are that resonance piece connecting electrode 26,27 correspondences on the upper inner surface 23 of they and crystal base sheet 22 shown in Figure 2 are in the same place, and can use conducting resinl that the resonance piece connecting electrode 26 of the end points electrode district 20 of resonance piece 10 and base pieces 22 is linked together, also the end points electrode district of resonance piece 10 21 and the resonance piece connecting electrode 27 of base pieces 22 are coupled together simultaneously.
Resonance piece 10, comprise conductive metal electrode 14,15, is to link together at above-mentioned electrode district place and base pieces 22 by conducting resinl.
As shown in Figure 2, metal electrode 26A, 26B, 27A, the 27B at 23 places, the upper top of base pieces 22 surface encase the edge of base pieces 22, be connected respectively to be positioned at crystal base sheet 22 lower outside 24 on end points electrode district 29,29A, 30,30A.Use a kind of conducting resinl of routine so as will to be positioned at end points electrode district 20 on resonance piece 10,21 and the resonance piece connecting electrode district 26,27 that is positioned at base pieces upper surface 23 couple together, then couple together by the metallic circuit 28 of base pieces upper surface 23 and oscillating circuit terminal pad 29B, 29C, 29D, 30B, 30C, 30D on upper surface 23 again.As shown in Figure 4, oscillating circuit 80 links together by the method for conductor wire 81 pressure weldings and oscillating circuit terminal pad 29B, 29C, 29D, 30B, 30C, 30D on base pieces upper surface 23.The conductive metal electrode 14 of resonance piece 10,15 has finally linked together by the resonance piece connecting electrode 26 and 27 on the upper surface 23 of base pieces 22, metallic circuit 28 and oscillating circuit terminal pad 29B, 29C, 29D, 30B, 30C, 30D and oscillating circuit 80.
Fig. 2 show be positioned at base pieces 22 lower outside 24 on 4 end points electrode districts 29,29A, 30 and 30A link together with the application circuit of oscillator outside.
Test panel 31 and 32 on base pieces upper surface 23 shown in Figure 2 is mainly in any time of assembling process, the oscillator assembly to be tested and electric machining.The resonance piece connecting electrode, circuit, oscillating circuit terminal pad and the test panel that are positioned on the zone 23,24 of base pieces 22 are to plate and form by the vacuum metal film that one deck is very thin, but they also can be with other method plating from the teeth outwards.
Shown in Figure 3, conventional conducting resinl 36 be used for connecting respectively the end points electrode district 20 that is positioned on resonance piece 10,21 and base pieces 22 on resonance piece connecting electrode district 26,27.After using conducting resinl (gluing compound a kind of) 36, according to the requirement of glue manufacturer, be cured.
Shown in Figure 4, after conducting resinl 36 was completed curing, the assembly 39 that resonance piece 10 and base pieces 22 assemblings form can be tested before processing, can test panel 31,32 be connected together and test by suitable testing equipment.As the common way of quartz oscillator industry, frequency is adjusted and is reached assigned frequency before being preferably in assembling and capping.
As shown in Fig. 5, crystal casing sheets 35 and crystal base sheet 22 have essentially identical size and outside recess are arranged, and so both are convenient to docking fixing, but crystal casing sheets 35 is without functional electrode is arranged.Crystal casing sheets 35 is transparent, and the electrode on the electrode on resonance piece 10 and crystal base sheet 22 can be observed by casing sheets, and crystal casing sheets 35 can be used for lettering simultaneously, in order to produce sign.
Fig. 6 and shown in Figure 7, the assembly and connection method of crystal casing sheets 35 and crystal base sheet 22 is:, with the boundary member that the gluing compound of routine 38 is used on crystal base sheet 22, then crystal casing sheets 35 is covered and carry out bondingly, form oscillator assembly 40.The width of conventional gluing compound 38 that is used for crystal base sheet 22 peripheries is narrow, in order to guarantee that unnecessary gluing compound can not adhere on resonance piece 10.If too much gluing compound has been painted on resonance piece 10 because of carelessness, resonance characteristic will be greatly affected because of the amount of gluing compound.The circumferential perimeter of gluing compound 38 and base pieces 22 and crystal casing sheets 35 peripheral roughly the same.
After coating gluing compound 38, casing sheets 35 is placed on the top of assembly, so as the peripheral complete and gluing compound 38 of casing sheets 35 in conjunction with and without any space, gluing compound 38 is cured according to the requirement of producer.
Gluing compound has certain viscosity and surface tension, this specific character is supporting three wafers 22,10,35 in assembling process, and make them keep not contact after curing, very important point, resonance piece 10 is fixed by conducting resinl and base pieces 22 except its two ends, with crystal base sheet 22, with crystal casing sheets 35, any contact do not arranged.These contacts will make resonance piece depressed, or produce very high equivalent series resistance.Thicker if there is any reason designing requirement resonance piece 10, the central part of crystal casing sheets can be done enough recessedly so, and to avoid any contact, this names a person for a particular job and discusses afterwards.
Characteristics of the present invention are that resonance piece 10, crystal base sheet 22 and crystal casing sheets 35 all have identical thermal coefficient of expansion, and this point can be avoided the stress that uses different pedestals and sheathing material to bring in technique in the past.
Can reflect another characteristics of the present invention on the structure of this oscillator assembly 40, be that resonance piece 10 is arranged in by base pieces 22, casing sheets 35 with around the formed recess of thickness of the gluing compound 38 that assembles the part periphery, and by conducting resinl 36, at the two ends of resonance piece, supported.
The present invention also has a characteristic, is exactly that test panel on base pieces 22 can be tested separately the resonance piece 10 that connects, and makes underproof oscillator assembly 39 avoid being reprocessed.This measure has reduced cost, has further guaranteed oscillator qualities
Fig. 8 has represented another form of quartz crystal resonance piece in the present invention.Except former description in the past, the quartz crystal resonance piece of this form, label are 210, its 26S Proteasome Structure and Function was similar with the resonance piece 10 of introducing in the past.The component identification method of resonance piece 210 is the same with the method for numbering serial of the parts of the resonance piece 10 of describing in the past, has just added before numbering " 2 ".
Resonance piece 210 is mainly in order to solve the energy trapping effect phenomenon.In effectively needing the very little application of overall dimension, quartz crystal resonance piece 210 needs to have a very large Δ value in design, in order to reach the energy trapping effect that needs, and can received low ESR to reach.The Δ value that generally needs, be mass loading (or the frequency amount of returning), the thickness that is the electrode 14 by being plated in resonance piece 10 tops reaches, but because the material of metal electrode has lower internal mechanical Q value than crystal, so use thicker electrode will increase equivalent resistance.
Fig. 8 shows that another method improves the thickness of electrode.The frequency of the thickness shear pattern that in the present invention, this kind form occurs, be that the thickness of same resonance piece 210 is inversely proportional to, and can describe with above-mentioned formula EQN.1.If as shown in figure 10 electrode edge 216,217 and resonance piece edge 218,219 between thickness reduce after, interval 60 as shown in the figure, 62 frequency will exceed the frequency of electrode part 64 far away, such as thickness reduces 10%, in the situation that ignore other factors, frequency will rise about 10%.Since mass loading Δ, describe as formula EQN.2, be proportional to electrodeless regional 60,62 and the poor of frequency between electrode zone 64 arranged, so the thickness of the resonance piece that the mass loading Δ can be by reducing electrode zone 64 outsides is realized, and not by the thickness that rolls up electrode, realize, this method can be designed the equivalent resistance that high-intensity energy trapping effect is become reconciled, and keeps simultaneously little size.
Its importance of the crystal oscillator of upper frequency is increasing, but according to shown in formula EQN.1, the frequency that increases resonance piece must reduce the thickness of resonance piece.The thinner easier fragmentation of resonance piece is also more difficult goes processing by production process.A kind of method is to reach upper frequency with the fundamental frequency overtone, and this kind overtone will use thicker resonance piece, but the substitutional connection of overtone resonance has higher equiva lent impedance and lower dynamic capacity compared with the fundamental resonance pattern.All require fundamental frequency model in the utilization of many reality based on this reason.
Fig. 9 shows another form of quartz crystal resonance piece of the present invention.Except in the past described, this resonance piece, be labeled as 310, and its 26S Proteasome Structure and Function was all similar with the resonance piece 10 of describing in the past.The identification method of the part of resonance piece 310 is identical with the identification method of resonance piece 10, just adds in front " 3 ".
Shown in Figure 9, the thickness of the mid portion 65 of resonance piece 310 has reduced, in order to meet the needs of application.This result can reach by suitable method,, such as in the situation that reservation boundary member 66 is still thicker and stronger, optionally corrodes middle body 65 and just can reach this purpose.Take this method can reach a resonance piece 310 that middle body 65 is very thin, in the situation that do not sacrifice thickness and the strength of boundary member 66, still can reach high resonance frequency.
In this application, to enforcement of the present invention, adopted different forms to be described, still, the present invention is in no way limited in these scopes, and it can be implemented with different forms in other claimed range.