CN101388654A - Manufacturing method for complete quartz crystal resonator and quartz crystal resonator - Google Patents
Manufacturing method for complete quartz crystal resonator and quartz crystal resonator Download PDFInfo
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- CN101388654A CN101388654A CNA2008101660624A CN200810166062A CN101388654A CN 101388654 A CN101388654 A CN 101388654A CN A2008101660624 A CNA2008101660624 A CN A2008101660624A CN 200810166062 A CN200810166062 A CN 200810166062A CN 101388654 A CN101388654 A CN 101388654A
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Abstract
The invention relates to an all silica crystal resonator and a new manufacture method thereof, wherein the all silica crystal resonator comprises a group of resonance plates, wherein the resonance plates are fixed by each base on a base big sheet and are sealed by each outer shell on an outer shell big sheet, a group of resonators are manufactured simultaneously in the manufacture process and are finally decomposed into single resonators, which enables the processing and manufacture process to be simple, the manufacture cost is lowered, and the efficiency is improved. The resonance plates, the outer shell big sheet and the base big sheet are made of quartz crystal materials, the use of ceramic packaging objects is avoided, the problem which is caused by the ceramic packaging objects and by any relations with the ceramic packaging objects or the bases are also avoided, and the service life of the silica crystal resonator is prolonged.
Description
Technical field
The present invention relates to the manufacture method and the resonator thereof of quartz-crystal resonator, specifically, the invention relates to a kind of surface sticked quartz crystal resonator and its novel manufacturing method.
Background technology
Quartz-crystal resonator is because the accuracy and the stability of its frequency, is an indispensable part in hyundai electronics industry such as communication, computer, amusement equipment and other field known to us.Up to the present, quartz-crystal resonator is piezoelectric quartz crystal thin slice elementary cell normally, and as circle or rectangle, reaching one can be formed with the encapsulant of sealing someway.Alternating voltage can act on by the lead-in wire that passes sealed package and produce vibration on the quartz crystal elementary cell.On piezoelectric quartz crystal thin slice elementary cell, have one group of extremely thin conductive metal electrode and be deposited on its two main surface, form resonance piece.The overlapping part of double-sided electrode has determined the resonance area on the resonance piece.When the resonance frequency of the frequency of the alternating voltage that provides and this quartz crystal resonance piece was identical, the piezoelectric quartz crystal resonance piece began resonance.The resonance frequency of quartz crystal resonance piece is by the piezoelectricity and the elastic constant of quartz crystal, and size and metal electrode and other factors determine.
Generally, the surface sticked quartz crystal resonator is made up of a piezoelectric quartz crystal resonance piece that has plated electrode and ceramic packaging thing or pedestal.This type of quartz crystal resonance piece is to be fixed on the ceramic packaging thing by conducting resinl 2 with the one end.A metal shell is welded on the metal rim of ceramic packaging thing again.In addition, also can with the ceramic package sticker or by the low-melting glass welding on ceramic packaging thing or pedestal.
Ceramic packaging thing or pedestal are stacked integrated applications metal the overdoes ceramic structure of technology such as deposition, metal mixed and ceramet involution, this type of ceramic component needs high-tech to produce, and is relatively expensive, and all compares in short supply all the time.Therefore the production bottleneck of currently used ceramic-packaged quartz crystal resonator is ceramic component.
In the case, can provide textural simple, low-cost production, effective and durable surface sticked quartz crystal resonator then can address the above problem, and breaks through production bottleneck, further promotes the development of quartz-crystal resonator.
Summary of the invention
At the problems referred to above, the present invention proposes a kind of novel manufacturing method and quartz-crystal resonator thereof of surface sticked quartz crystal resonator, this resonator and manufacture method are simple and clear, are applicable to extensive, the low-cost manufacturing.
Be to provide a kind of complete quartz crystal resonator and preparation method thereof another order of the present invention, the manufacture method of this quartz-crystal resonator adopts complete quartz crystal as encapsulant, avoided the use of expensive ceramic packaging thing, make that the processing and fabricating program is simple, reduce cost of manufacture, and increased the useful life of quartz-crystal resonator.
Based on this, the present invention is achieved in that
A kind of resonance piece based on quartz crystal at first will be provided, and it is an important component part of this quartz-crystal resonator.This resonance piece resonance requires to make response for the alternating voltage that is added on resonance piece in characteristic frequency usually.In use, based on the resonance piece resonance of quartz crystal in relevant requiring on the frequency of frequency of pressing in response to external AC.
Outer periphery based on the resonance piece of quartz crystal can be any suitable geometry.Such as, its shape is suitable for surperficial quartz-crystal resonator.But in its basic structure, this resonance piece is bridge shape structure, so that produce resonance, and its both ends or one end are fixed.
Specifically, the middle part of the resonance piece of this quartz crystal deposits electrode, to produce resonance.Simultaneously, its both ends or one end can be fixed on its resonator base sheet that depends on.Also be to say, the both ends or one end of this resonance piece are the parts that is used for fixing.Resonance piece is distinguished from such structure, constitutes bridge shape structure division in the middle of it, and both ends or one end then are the parts of fixing.This fixing its shape of part can be greater than the bridge shape structure in the middle of it, also can be less than the bridge shape structure of centre.So-called bridge shape structure is the resonance portion of resonance piece, and its concrete shape can design according to actual needs.
In a kind of useful especially shape, it is rectangle or oval-shaped structure that bridge shape structure can be main body, or similarly uniform regular geometric shapes.
Useful especially other geometry comprises sub-circular, or approximate be rectangular shape etc.In a kind of useful especially shape, resonance piece has a rectangular periphery.
Resonance piece has electrode, so that use external alternating voltage.In a useful especially shape, resonance piece has upper surface and lower surface, and first electrode partly is positioned at the upper surface of resonance piece, and another second electrode partly is positioned at corresponding resonance piece lower surface.Simultaneously, resonance piece also has the metal endpoints electrode district, to carry out electric connection with pedestal.
The thickness of resonance piece can be very consistent or change.In a kind of very useful concrete manifestation form, the thickness by resonance range that double overlying electrode determined (i.e. first electrode partly and the zone occupied of the second electrode part branch) zone in addition in the resonance piece reduces to some extent.
In the useful especially shape of another one, the thickness of resonance piece is consistent basically, but with respect to boundary member (boundary member is meant the zone that does not have electrode) obvious minimizing is arranged.
The complete quartz crystal resonator manufacture method that the present invention realizes is exactly the assembling to quartz-crystal resonator, at first based on the resonance piece and the pedestal of quartz crystal, so that base pieces and resonance firmly connect together.And pedestal comes from the pedestal sheet.The pedestal sheet by certain cutting mode (as sandblast), sprays corresponding groove thereon on request after having fixed shape and size.Base pieces is separated by adjacent groove.Then, with certain coprecipitation mode, as sputter, plating or chemical plating, according to certain size, inner surface and outer surface at pedestal plate electrode, and inner surface electrode and outer surface electrode can link together by certain precipitated metal mode by the side that cutting groove forms.At the outer surface of each pedestal, also can plate a plurality of and connectionless outer surface electrode of inner surface electrode again, so that in the application of single resonator and extraneous stronger mechanical connection arranged by the precipitated metal mode.At the inner surface of each pedestal, yet can plate a plurality of and connectionless inner surface electrode of outer surface electrode again by the precipitated metal mode so as in single resonance piece fixing and resonance piece stronger mechanical connection is arranged.Resonance piece is fixed on each pedestal on the pedestal sheet, forms the assembly of one group of surface sticked quartz crystal resonator.And resonance piece is with respect to pedestal, can be according to the suitable alternating voltage that offers resonance piece two electrodes and resonance.
Pedestal has electrode (normally metal endpoints electrode district).Pedestal and resonance piece connect together at the electrode place of pedestal and the electrode place of resonance piece, have formed conducting aspect electrical property.Since resonance piece can be at one end or two ends rather than picture ceramic resonator at one end be connected with base pieces, the connection of this two ends provides a kind of very strong mechanical connection performance, makes and has formed a kind of very strong mechanical connection between resonance piece and the pedestal.This two ends method has strengthened the durability of this kind resonator, and with respect to the resonator of former explained hereafter, this method has strengthened the useful life of this kind resonator.
Though pedestal can be in the same place with the whole bag of tricks, various technical battery with the resonance piece based on crystal, preferably connects together with binding.So when assembling just should be fixed (electrode place, normally metal endpoints electrode district) with binding at the base electrode place of pedestal with based on the electrode place of the resonance piece of crystal.
This binding is always effective in cementation base pieces and resonance piece.A kind of especially effectively binding is exactly the colloidality binding.
Pedestal is that crystal (being quartz crystal) is made.The use of crystal is very effective on reducing cost, and satisfies physical characteristic, particularly hot expansibility based on the resonance piece of crystal fully basically.This class feature will reduce the negative effect of stress to resonator behavior to greatest extent.
Pedestal comprises the pair of base electrode so that there is a base electrode partly to be electrically connected with first electrode of resonance piece, and the another one base electrode partly has electrical connection with second electrode of resonance piece again simultaneously.This type of base electrode can very effectively offer resonance piece with the external communication signal.
Electrode described herein can be made up of any suitable electric conducting material.But this type of electrode preferably includes metal ingredient.Electrode can plate with any suitable method, preferably adopts the method for straight empty plated film to be plated to the surface.Here said electrode comprises base pieces electrode and resonance plate electrode.
The quartz-crystal resonator that the present invention mentioned comprises as other local resonance piece and pedestal of describing based on crystal, also comprises shell.And this shell comes from the shell sheet.The shell sheet by certain cutting mode (as sandblast), sprays corresponding groove and line of cut thereon on request after having fixed shape and size.Shell is surrounded by adjacent line of cut and adjacent groove.
When one group of resonator group piece installing large stretch of and large stretch of by pedestal and that one group of resonance piece forms is fixed together when this shell, just formed one group of surface sticked quartz crystal resonator.After according to line of cut the surface sticked quartz crystal resonator group being cut open, just produced single surface sticked quartz crystal resonator with certain cutting method (as sandblast).This shell is securely fixed on the pedestal, is to be positioned between shell and the pedestal so that make resonance piece.Whole resonator mechanically is fixed together securely, and also feasible resonance piece based on crystal can be completely sealed.
Under a kind of form, bonding object point is on the respective electrode of pedestal and resonance piece for the first time, and effectively pedestal and resonance piece are firmly fixed together, the second time, bonding object point was on shell and pedestal simultaneously, and effectively shell and pedestal was firmly fixed together.Binding also can be different with the part of binding can be the same for the second time for the first time.
Shell is to be made by crystal (being quartz crystal).So in a kind of useful especially form, all form by crystal based on resonance piece, pedestal and the shell of crystal.
In a kind of useful especially form, base pieces and casing sheets can have the recess of inside extension.
Of the present invention one big realization aspect has just provided the method for producing quartz-crystal resonator.This method has comprised provides one group of complete quartz wafer.First electrode and second electrode are plated on the upper surface and the corresponding lower surface of each quartz wafer, form resonance piece.Each pedestal that is coated with electrode with each resonance piece with on the pedestal sheet connects together securely, so that each resonance piece is with respect to each pedestal, and can resonance when external alternating voltage acts on each resonance piece.Again the pedestal sheet is connected together with the shell sheet securely, so that resonance piece is positioned in the middle of each pedestal and each shell on the shell sheet on the pedestal sheet securely.Make one group of surface sticked quartz crystal resonator thus earlier, use certain cutting method (as sandblast) again, this group surface sticked quartz crystal resonator cutting is come, manufacture each surface sticked quartz crystal resonator thus.
In one form, pedestal and shell all are made up of quartz crystal.Fixing step comprises uses binding respectively each pedestal on one group of resonance piece and the pedestal sheet to be sticked together securely, and pedestal sheet and shell sheet are sticked together securely.
This cementation step can mechanically stick together pedestal, resonance piece and shell effectively securely, so that form a periphery of sealing fully.
Above-mentioned cementation step adopts the conductive adhesion thing to carry out cementation, and preferably conducting resinl is used between the electrode and base electrode of resonance piece, so that form the electronic loop of a resonator.
So far each characteristic of Jie Shaoing or two or more characteristics comprehensive descriptions all comprise within the scope of the invention, and this specific character does not have mutual inconsistency.
The resonator configurations of the present invention's design is simple, and the energy low-cost production is effective and durable.As be used for electronic equipments such as computer, mobile phone, radio control and data transmission system.Because the shell of this resonator and pedestal can be produced by the producer oneself of quartz-crystal resonator, this measure makes the production of quartz-crystal resonator be no longer dependent on the outside ceramic packaging producer.Such as, this surface sticked quartz crystal resonator demand and no longer comprise above-mentioned ceramic packaging thing or pedestal no longer.So this invention has avoided having any relation to reach the problem of bringing thus with this type of ceramic packaging thing or pedestal.
Being more preferably this quartz-crystal resonator is to be formed by a quartz crystal pedestal and a quartz crystal shell encapsulation, basically the physical characteristic, particularly hot expansibility that satisfy fully based on the resonance piece of crystal can reduce the negative effect of stress to resonator behavior to greatest extent.Also have, the resonator that this resonator is produced with respect to manufacturing technology in the past has highly low characteristics.The manufacturing process of this surface sticked quartz crystal resonator is easy to implement, and provides the high method of a kind of cost poor benefit to produce the surface sticked quartz crystal resonator.
In sum, the present invention has the low-cost characteristics of making, in use having validity and durability of understanding, be suitable for simple in structure.And can reduce the height of whole surface sticked quartz crystal resonator, concrete height will decide according to designing requirements such as resonance frequencys certainly.
Description of drawings
Fig. 1 is the structural representation of quartz crystal resonance piece of the present invention;
Fig. 2 is the structural representation that the crystal base sheet of recess is arranged of the present invention;
Fig. 3 is the schematic diagram of the another kind of structure of the crystal base sheet that does not have a recess of the present invention;
Fig. 4 is the structural representation of crystal base sheet of the present invention;
Fig. 5 is the fixing gluing compound schematic diagram of resonance piece and base pieces among the present invention;
The structural representation that Fig. 6 is fixed together resonance piece and base pieces for the present invention;
Fig. 7 among the present invention one group be assembled in by the half-finished structural representation on the electrode base sheet by electrode wafer;
The structural representation of Fig. 8 for having the crystal casing sheets of recess among the present invention;
Fig. 9 is the structural representation of crystal shell sheet of the present invention;
Figure 10 is the structural representation of the gluing compound that base pieces and casing sheets is fixed together among the present invention;
Figure 11 is the partial structurtes cutaway view of single surface sticked quartz crystal resonator among the present invention;
Figure 12 is the partial structurtes cutaway view of one group of surface sticked quartz crystal resonator among the present invention;
Figure 13 is an assembling process schematic diagram of the present invention.
Specific implementation method
Fig. 1 has shown a kind of rectangular piezoelectric quartz crystal resonance piece 10.In the present invention, the long limit of resonance piece 10 is parallel to X-axis, and this X-axis just is that the crystal property axle and the AT of quartz crystal cuts the shape direction, generally is used for the high frequency quartz-crystal resonator and this kind AT cuts the shape quartz crystal.The width of resonance piece 10 is parallel to Z ' axle, and thickness is parallel to Y ' axle.
For not specific limited the present invention, the general size of resonance piece 10 has comprised length range: between the 0.5mm-12mm, as 7.5mm.Width range: between the 0.5mm-5.5mm, as 5mm.Thickness depends on resonance frequency according to following relation
T=1.67/F (formula one)
The t representative thickness, the mm of unit, F represents resonance frequency, single MHz, this resonance frequency is usually between 1MHz-200MHz.
In order to provide the signal of telecommunication to resonance piece 10, conductive metal electrode 14,15 correspondingly has been plated in the top of quartz wafer 10 and following (also being said first electrode of preamble and second electrode) by vacuum, forms resonance piece.
The size of electrode 14,15 is decided by the parametric index of equivalent electric circuit, and final quartz-crystal resonator is to design to satisfy the restriction of size in the application according to this equivalent circuit.But the thickness of electrode 14,15 and the density that is applied to metals above the electrode 14,15 be decision resonance piece 10 the electrode frequency is arranged from descend what principal element of the electrodeless frequency of resonance piece 10.Resonance frequency is called the mass loading (or the frequency amount of returning) of electrode usually with respect to the rate of descent of electrodeless frequency, by following formulate:
△=(f
u-f
θ)/f
u(formula two)
f
uRepresent the electrodeless frequency of resonance portion, f
θThat represents resonance portion has an electrode frequency.
The acoustics result shows that the frequency that forms is f between electrode 14,15
θThe thickness shear ripple can't be diffused into resonance piece 10 other do not have the zone of electrode, and when sound wave was passed to the edge 18,19 of resonance piece 10, the amplitude of sound displacement was exponential form and descends.
Since the energy of sound wave be proportional to the sound wave displacement square, descend when sound wave acoustic wave energy when electrode edge 16,17 width of cloth are mapped to the edge 18,19 of resonance piece 10 is exponential form.This phenomenon is called the trap effect of energy.Arrive the energy at resonance piece 10 edges 18,19, distributing and absorbing from resonator and disappeared because of sound wave.The big more then sound wave of △ value displacement amplitude index rate of descent is big more, and the trap effect of energy is also just big more simultaneously.When the energy loss that causes when inadequate energy trapping effect was very big, equivalent series resistance was just very big.
Generally, quartz-crystal resonator all requires less relatively equivalent series resistance.So △ value and the length between the edge 18,19 of electrode edge 16,17 and resonance piece 10 are considered through special design, so that the size of decision resonance piece 10, so that quartz-crystal resonator can satisfy practical requirement.
The conducting metal utmost point 14 and bottom electrode 15 from power on extends to the metal endpoints electrode district 20,21 of quartz crystal resonance piece 10.The effect of metal endpoints electrode district 20,21 is that base electrode 26,27 correspondences that go up inner surface 23 of they and as shown in Figure 2 crystal base 22 are in the same place.Using the purpose of conducting resinl is that metal endpoints electrode district 20 and base electrode 26 are linked together, and also metal endpoints electrode district 21 and base electrode 27 is coupled together simultaneously.
As shown in Figure 2, the metal electrode 26,27 at upper top 23 places of pedestal 22 encases the edge of pedestal 22, be connected respectively to be positioned at crystal base 22 following outside 24 on metal endpoints electrode district 29,30.Use a kind of conducting resinl of routine so that the base electrode 26,27 that will be positioned at the metal endpoints electrode district 20,21 on the resonance piece 10 and be positioned at upper top 23 couples together, then again by metal electrode film and down the metal endpoints electrode district 29,30 on outside 24 couple together.The metal electrode 14 and 15 of resonance piece 10 finally has been connected to the metal endpoints electrode district 29,30 on following outside 24 on the pedestal 22.
Fig. 2 show be positioned at pedestal 22 following outside 24 on two metal endpoints electrode districts 29,30 and circuit link together.
What Fig. 3 showed is the pedestal of another pattern, make except the position of two electrodes of upper top is different resonance piece at two ends with base pieces is connected, also can outsidely down again increase other two metal endpoints districts 31,32, mainly be to be used for they being welded and fixing in the circuit board, the final simultaneously surface mount crystal resonator location of giving, their positions on following outside 24 can be reorientated, so that better meet actual needs.The conductive metal electrode sheet that is positioned on the zone 23,24 of pedestal 22 is to plate by the vacuum metal film that one deck is very thin to form, but their also available other methods are plated on the surface.
Fig. 4 shows that crystal base sheet 100 has comprised the pedestal before separating.Between pedestal, connect (just having the coupling part between the pedestal) by the part of not cutting.The groove 120 of all-pass is so that the metal electrode that processing makes the metal electrode on the upper top surface of pedestal encase susceptor edges and the following outer surface that is positioned at pedestal is connected.Pedestal large stretch of separated before, can carry out independent test and control to single pedestal or single resonator semi-finished product or single resonator finished product.When one group of surface sticked quartz crystal resonator being divided into single surface sticked quartz crystal resonator, then only need cut open just later on along the line of cut of shell sheet.
Fig. 5 shows, conventional conducting resinl 36 is used for connecting respectively the metal endpoints electrode district 20,21 that is positioned on the resonance piece 10 and the metal endpoints electrode district 26,27 on the pedestal 22.After using conducting resinl (gluing compound a kind of) 36, be cured according to the requirement of glue manufacturer.
Fig. 6 shows that after conducting resinl 36 was finished curing, the assembly 39 of resonance piece 10 and pedestal 22 can be tested before continuing processing.Can metal endpoints electrode district 29,30 be connected together by suitable testing equipment and test.As the common practice of quartz-crystal resonator industry, frequency is adjusted and is reached assigned frequency before being preferably in and finishing assembling and capping.
As shown in Figure 7, when wafer set 10 is solidificated in by electrode base sheet 100 by conducting resinl on after, can frequency be adjusted in the required scope by method, and can before capping, test.
As shown in Figure 8, crystal shell 35 and crystal base 22 have essentially identical size and inside recess are arranged, and the two is convenient to dock fixing like this.But crystal shell 35 does not have functional electrode.Crystal shell 35 is transparent, and the electrode on electrode on the resonance piece 10 and the crystal base 22 can be observed by shell 35.Crystal shell 35 can be used for lettering simultaneously, so that produce sign.
As shown in Figure 9, shell sheet 200 has comprised the shell before separating.Shell sheet and pedestal sheet have essentially identical size.The position of the groove 220 of all-pass corresponds to the all-pass groove 120 on the pedestal sheet on the shell sheet, and the position of Tong line of cut 210 is not with respect to uncut part on the pedestal sheet.
As Figure 10, shown in 11 and 12, the assembling method of attachment of crystal shell 35 and crystal base 22 is: the gluing compound 38 of routine is used for coupling part on the crystal base 22, carries out the two bonding then.The width of conventional gluing compound 38 that is used for crystal base 22 peripheries is narrow, can not adhere on the resonance piece 10 so that guarantee unnecessary gluing compound.If too much gluing compound has been painted on the resonance piece 10 because of carelessness, then what of the amount of gluing compound are resonance characteristic will be subjected to very big influence because of.The periphery of the circumferential perimeter of gluing compound 38 and pedestal 22 and crystal shell 35 is big to identical.
After coating gluing compound 38, shell 35 is placed on the top of assembly, so as the peripheral complete and gluing compound of shell 35 38 in conjunction with and without any the space.Gluing compound 38 is cured according to the requirement of producer.
Gluing compound has certain viscosity and surface tension, and this specific character is supporting three wafers 22,10,35 in assembling process, and makes them keep not contact fully after curing.More very important, resonance piece 10 does not have any contact with crystal base 22 with the crystal shell.These contacts will make resonator depressed, or produce very high equivalent series resistance.If any reason designing requirement resonance piece 10 is thicker, the central part of crystal shell and pedestal can be done enough recessedly so, to avoid any contact.
Characteristics of the present invention are that resonance piece 10, crystal base 22 and crystal shell 35 all have identical thermal coefficient of expansion, can avoid using the different stress that pedestal and sheathing material brought in the technology in the past.
Can reflect another characteristics of the present invention on the structure of resonator group piece installing 40 as shown in figure 11, resonance piece 10 is arranged in by pedestal 22, shell 35 with around the formed recess of thickness of the gluing compound 38 that assembles the part periphery, and by conducting resinl 36 2 of an end of resonance piece support.
As shown in figure 12, after shell large stretch of 200 is bonding by conventional gluing compound and semi-finished product group, just formed one group of surface sticked quartz crystal resonator.After along the line of cut on the shell sheet 200 210 one group of resonator being cut open, just obtained single surface mount crystal resonator with cutting method (as sandblast, silicon chip sawing method).
Figure 13 has shown main number of assembling steps of the present invention.
Show whole processing and making process from bottom to top:
At first according to aforesaid requirement crystal shell workprint 201, crystal base workprint 101 are processed, 201 process recess on the crystal shell workprint, form shell and compartment (processing groove and line of cut on the compartment), form crystal shell sheet 200; Process recess on the crystal base workprint 101, resonance piece is set, form pedestal and coupling part (processing groove on the coupling part), so just formed electrodeless crystal base sheet 102 with correspondence;
Secondly, again with electrodeless crystal base sheet 102 with coprecipitation mode, plate electrode as inner surface and the outer surface of electroplating at pedestal, inner surface electrode and outer surface electrode can link together by certain precipitated metal mode by the side that cutting groove forms, and are formed with the pedestal sheet 100 of electrode;
Then, resonance piece 10 is set on pedestal sheet 100, all corresponding pedestal of each resonance piece 10 is placed, and forms the semi-finished product structure 104 that resonance piece is arranged on the pedestal sheet;
This semi-finished product structure 104 forms one group of surface sticked quartz crystal resonator 300 by gluing compound 38 cementation crystal shell sheets 200;
One group of surface sticked quartz crystal resonator like this can be printed literal, sign etc. according to user's needs on each shell of shell sheet, form the surface sticked quartz crystal resonator 301 of one group of lettering, and certainly, this step is not necessary;
The surface sticked quartz crystal resonator of lettering is cut by the line of cut along the shell sheet, forms one group of surface sticked quartz crystal resonator 302 after being cut;
At last, take out single surface sticked quartz crystal resonator 400, just finished the manufacturing process of surface sticked quartz crystal resonator.
This shows that this manufacturing process technology is simple, easy to assembly, is convenient to batch making.
In this application, adopted different forms to be described to enforcement of the present invention, still, the present invention is in no way limited in these scopes, and it can be implemented with different forms in other claimed range.
Claims (16)
1, a kind of manufacture method of complete quartz crystal resonator is characterized in that this method may further comprise the steps:
A, preparation resonance piece, pedestal and shell,
B, resonance piece is fixed on the pedestal,
C, shell covered and be fixed on the pedestal that resonance piece is arranged,
D, cutting shell and pedestal, shell is securely fixed on the pedestal, forms quartz-crystal resonator;
And pedestal and shell all adopt quartz crystal materials; At least one comes from pedestal sheet or shell sheet pedestal and shell, and the pedestal sheet comprises more than one pedestal and the coupling part between pedestal; The shell sheet includes more than one shell and compartment.
2, the manufacture method of complete quartz crystal resonator as claimed in claim 1 is characterized in that the pedestal sheet after having fixed shape and size, and by cutting the groove of making corresponding all-pass thereon, this groove is positioned on the coupling part, and pedestal is separated by adjacent groove.
3, the manufacture method of complete quartz crystal resonator as claimed in claim 2, after it is characterized in that forming groove on the pedestal sheet, again with coprecipitation mode according to certain size, inner surface and outer surface at each pedestal plate electrode, and inner surface electrode and outer surface electrode link together by the precipitated metal mode by the side that described groove forms; Inner surface electrode and outer surface electrode have more than one.
4, whenever the manufacture method of complete quartz crystal resonator as claimed in claim 1 is characterized in that before finishing cutting, can test separately single resonator semi-finished product or single resonator finished product.
5, the manufacture method of complete quartz crystal resonator as claimed in claim 1, it is characterized in that each pedestal inner surface comprises a pair ofly with the outer surface electrode inner surface electrode that is connected being arranged, pedestal and resonance piece are fixedly the time, on each pedestal inner surface, one has the inner surface electrode that is connected to be electrically connected with an end points electrode district of resonance piece with the outer surface electrode, and another one has the inner surface electrode that is connected with another end points electrode district of resonance piece electrical connection to be arranged again with the outer surface electrode simultaneously.
6, the manufacture method of complete quartz crystal resonator as claimed in claim 1, it is characterized in that the shell sheet is after having fixed shape and size, produce the groove and the half logical line of cut of all-pass thereon by cutting mode, groove and line of cut all are positioned on the compartment, and shell is surrounded by adjacent line of cut and adjacent groove.
7, the manufacture method of complete quartz crystal resonator as claimed in claim 1 is characterized in that pedestal and resonance piece, pedestal and shell are to connect together with binding.
8, the manufacture method of complete quartz crystal resonator as claimed in claim 1, when it is characterized in that pedestal and resonance piece are fixedly, bonding object point is on the corresponding endpoint electrode of pedestal inner surface electrode and resonance piece end points for the first time, effectively pedestal and resonance piece are firmly fixed together, and between pedestal inner surface electrode and resonance piece end points electrode, form electrical connection, be electrically connected thereby make to form between resonance piece electrode and the pedestal outer surface electrode.Then, for the second time on the large stretch of respective surfaces with the pedestal sheet of bonding object point, and effectively each shell on the shell sheet and each pedestal on the corresponding pedestal sheet are firmly fixed together at shell.
9, the manufacture method of complete quartz crystal resonator as claimed in claim 8 is characterized in that the part of binding is a conducting resinl for the first time.
10, the manufacture method of complete quartz crystal resonator as claimed in claim 1 is characterized in that one of pedestal and shell or all also can have the recess that extends internally, and this recess can be in order to place resonance piece.
11, the manufacture method of complete quartz crystal resonator as claimed in claim 10, the position that it is characterized in that at first definite each pedestal of pedestal sheet, on the correspondence position of each pedestal, be formed with corresponding concave part then, and the coupling part between pedestal forms the groove of the all-pass be convenient to cut pedestal.
12, the manufacture method of complete quartz crystal resonator as claimed in claim 11, after it is characterized in that forming recess and groove, again with coprecipitation mode according to certain size, inner surface and outer surface at each pedestal plate electrode, and inner surface electrode and outer surface electrode link together by the precipitated metal mode by the side that described groove forms.
13, a kind of complete quartz crystal resonator, it comprises resonance piece, resonance piece is fixed by pedestal, and encapsulated by shell, it is characterized in that resonance piece and shell, pedestal are quartz crystal materials and make, and at least one end of this resonance piece is the part that is used for fixing, and constitutes bridge shape structure division in the middle of the resonance piece.
14, complete quartz crystal resonator as claimed in claim 13, the bridge shape structure that it is characterized in that resonance piece are that main body is rectangle or oval-shaped structure, or similarly uniform regular geometric shapes.
15, complete quartz crystal resonator as claimed in claim 13 is characterized in that the two ends of resonance piece all are fixed on the resonator base that it depended on.
16, complete quartz crystal resonator as claimed in claim 13, it is characterized in that the long limit of resonance piece and the same direction of X-crystallographic axis of the quartz crystal materials that forms resonance piece, resonance piece is finalized and processes so that when being subjected to activating, resonance is in a specific frequency.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101777883A (en) * | 2010-01-11 | 2010-07-14 | 三河奥斯特电子有限公司 | All-metal material packaged type quartz-crystal resonator and preparation process thereof |
| CN102324904A (en) * | 2011-05-19 | 2012-01-18 | 应达利电子(深圳)有限公司 | Manufacturing method of packaging body for quartz crystal resonator or oscillator |
| CN105322905A (en) * | 2014-05-30 | 2016-02-10 | 珠海东精大电子科技有限公司 | Method for preparing high-frequency 49S quartz crystal resonator |
| CN112713872A (en) * | 2020-12-31 | 2021-04-27 | 泰晶科技股份有限公司 | Wafer-level tuning fork resonator |
| CN113395050A (en) * | 2021-03-30 | 2021-09-14 | 台湾晶技股份有限公司 | Crystal oscillator packaging structure |
| CN112713872B (en) * | 2020-12-31 | 2024-07-09 | 泰晶科技股份有限公司 | Wafer level tuning fork resonator |
-
2008
- 2008-10-15 CN CNA2008101660624A patent/CN101388654A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101777883A (en) * | 2010-01-11 | 2010-07-14 | 三河奥斯特电子有限公司 | All-metal material packaged type quartz-crystal resonator and preparation process thereof |
| CN102324904A (en) * | 2011-05-19 | 2012-01-18 | 应达利电子(深圳)有限公司 | Manufacturing method of packaging body for quartz crystal resonator or oscillator |
| CN105322905A (en) * | 2014-05-30 | 2016-02-10 | 珠海东精大电子科技有限公司 | Method for preparing high-frequency 49S quartz crystal resonator |
| CN112713872A (en) * | 2020-12-31 | 2021-04-27 | 泰晶科技股份有限公司 | Wafer-level tuning fork resonator |
| CN112713872B (en) * | 2020-12-31 | 2024-07-09 | 泰晶科技股份有限公司 | Wafer level tuning fork resonator |
| CN113395050A (en) * | 2021-03-30 | 2021-09-14 | 台湾晶技股份有限公司 | Crystal oscillator packaging structure |
| CN113395050B (en) * | 2021-03-30 | 2024-01-26 | 台湾晶技股份有限公司 | Crystal oscillator packaging structure |
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