CN1742226A - 利用等离子体选择性地去除涂覆于形成在衬底上的负型光致抗蚀剂上的聚酰亚胺配向层并再利用衬底的方法 - Google Patents

利用等离子体选择性地去除涂覆于形成在衬底上的负型光致抗蚀剂上的聚酰亚胺配向层并再利用衬底的方法 Download PDF

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Publication number
CN1742226A
CN1742226A CNA038259869A CN03825986A CN1742226A CN 1742226 A CN1742226 A CN 1742226A CN A038259869 A CNA038259869 A CN A038259869A CN 03825986 A CN03825986 A CN 03825986A CN 1742226 A CN1742226 A CN 1742226A
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CN
China
Prior art keywords
alignment layer
substrate
plasma
glass substrate
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA038259869A
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English (en)
Chinese (zh)
Inventor
李承虎
金明儫
郑钟必
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INNOVATION FOR CREATIVE DEVICE
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INNOVATION FOR CREATIVE DEVICE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INNOVATION FOR CREATIVE DEVICE filed Critical INNOVATION FOR CREATIVE DEVICE
Publication of CN1742226A publication Critical patent/CN1742226A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G02F1/133723—Polyimide, polyamide-imide
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
    • E03D1/00—Water flushing devices with cisterns ; Setting up a range of flushing devices or water-closets; Combinations of several flushing devices
    • E03D1/30—Valves for high or low level cisterns; Their arrangement ; Flushing mechanisms in the cistern, optionally with provisions for a pre-or a post- flushing and for cutting off the flushing mechanism in case of leakage
    • E03D1/34—Flushing valves for outlets; Arrangement of outlet valves
    • E03D1/35—Flushing valves having buoyancy
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
    • E03D1/00—Water flushing devices with cisterns ; Setting up a range of flushing devices or water-closets; Combinations of several flushing devices
    • E03D1/02—High-level flushing systems
    • E03D1/14—Cisterns discharging variable quantities of water also cisterns with bell siphons in combination with flushing valves
    • E03D1/142—Cisterns discharging variable quantities of water also cisterns with bell siphons in combination with flushing valves in cisterns with flushing valves
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
    • E03D3/00—Flushing devices operated by pressure of the water supply system flushing valves not connected to the water-supply main, also if air is blown in the water seal for a quick flushing
    • E03D3/12—Flushing devices discharging variable quantities of water
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
    • E03D5/00—Special constructions of flushing devices, e.g. closed flushing system
    • E03D5/02—Special constructions of flushing devices, e.g. closed flushing system operated mechanically or hydraulically (or pneumatically) also details such as push buttons, levers and pull-card therefor
    • E03D5/09—Special constructions of flushing devices, e.g. closed flushing system operated mechanically or hydraulically (or pneumatically) also details such as push buttons, levers and pull-card therefor directly by the hand
    • E03D5/092—Special constructions of flushing devices, e.g. closed flushing system operated mechanically or hydraulically (or pneumatically) also details such as push buttons, levers and pull-card therefor directly by the hand the flushing element, e.g. siphon bell, being actuated through a lever
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Public Health (AREA)
  • Water Supply & Treatment (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Liquid Crystal (AREA)
CNA038259869A 2003-02-18 2003-06-10 利用等离子体选择性地去除涂覆于形成在衬底上的负型光致抗蚀剂上的聚酰亚胺配向层并再利用衬底的方法 Pending CN1742226A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020030010183A KR20040074428A (ko) 2003-02-18 2003-02-18 플라즈마를 이용하여 네가티브 포토레지스트가 형성된글라스 기판 위에 도포된 폴리이미드 유기 배향막을선택적으로 제거하고 글라스 기판을 재생하는 방법
KR1020030010183 2003-02-18

Publications (1)

Publication Number Publication Date
CN1742226A true CN1742226A (zh) 2006-03-01

Family

ID=36093984

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA038259869A Pending CN1742226A (zh) 2003-02-18 2003-06-10 利用等离子体选择性地去除涂覆于形成在衬底上的负型光致抗蚀剂上的聚酰亚胺配向层并再利用衬底的方法

Country Status (6)

Country Link
JP (1) JP2006514328A (ja)
KR (1) KR20040074428A (ja)
CN (1) CN1742226A (ja)
AU (1) AU2003237047A1 (ja)
TW (1) TW200416458A (ja)
WO (1) WO2004074915A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102092205A (zh) * 2010-12-16 2011-06-15 贺术春 一种lcd样品制作方法
WO2012083542A1 (zh) * 2010-12-23 2012-06-28 深圳市华星光电技术有限公司 配向膜修补设备及其修补方法
CN105524627A (zh) * 2015-12-03 2016-04-27 阜阳欣奕华材料科技有限公司 一种液晶取向液废液的纯化方法及纯化装置
US9704897B1 (en) 2016-03-25 2017-07-11 Boe Technology Group Co., Ltd. Display panel and method of preparing the same, display device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2643172C2 (ru) * 2016-05-11 2018-01-31 федеральное государственное бюджетное образовательное учреждение высшего образования "Воронежский государственный университет" (ФГБОУ ВО "ВГУ") Способ удаления фоторезистивных пленок с поверхности оптических стекол

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4492764B2 (ja) * 1999-05-24 2010-06-30 日本ゼオン株式会社 プラズマ反応用ガス及びその製造方法
KR100407725B1 (ko) * 2001-03-14 2003-12-01 주식회사 엘리아테크 플라즈마 처리 장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102092205A (zh) * 2010-12-16 2011-06-15 贺术春 一种lcd样品制作方法
WO2012083542A1 (zh) * 2010-12-23 2012-06-28 深圳市华星光电技术有限公司 配向膜修补设备及其修补方法
CN105524627A (zh) * 2015-12-03 2016-04-27 阜阳欣奕华材料科技有限公司 一种液晶取向液废液的纯化方法及纯化装置
US9704897B1 (en) 2016-03-25 2017-07-11 Boe Technology Group Co., Ltd. Display panel and method of preparing the same, display device

Also Published As

Publication number Publication date
WO2004074915A1 (en) 2004-09-02
TW200416458A (en) 2004-09-01
AU2003237047A1 (en) 2004-09-09
KR20040074428A (ko) 2004-08-25
JP2006514328A (ja) 2006-04-27

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