CN1670599A - Active matrix liquid crystal display - Google Patents

Active matrix liquid crystal display Download PDF

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Publication number
CN1670599A
CN1670599A CNA2005100545273A CN200510054527A CN1670599A CN 1670599 A CN1670599 A CN 1670599A CN A2005100545273 A CNA2005100545273 A CN A2005100545273A CN 200510054527 A CN200510054527 A CN 200510054527A CN 1670599 A CN1670599 A CN 1670599A
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film
active matrix
liquid crystal
crystal display
tfts
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CN100559246C (en
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山崎舜平
竹村保彦
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78603—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the insulating substrate or support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78609—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing leakage current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78651—Silicon transistors
    • H01L29/7866—Non-monocrystalline silicon transistors
    • H01L29/78672—Polycrystalline or microcrystalline silicon transistor
    • H01L29/78675—Polycrystalline or microcrystalline silicon transistor with normal-type structure, e.g. with top gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13454—Drivers integrated on the active matrix substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/13624—Active matrix addressed cells having more than one switching element per pixel
    • G02F1/136245—Active matrix addressed cells having more than one switching element per pixel having complementary transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78651—Silicon transistors
    • H01L29/7866—Non-monocrystalline silicon transistors
    • H01L29/78663—Amorphous silicon transistors
    • H01L29/78666—Amorphous silicon transistors with normal-type structure, e.g. with top gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/05—Making the transistor

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  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
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  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
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  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Semiconductor Memories (AREA)
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Abstract

Provided is a liquid crystal display device with a display circuit and a driving circuit, including: a first insulation film containing silicon nitride formed on a substrate; a second insulation film containing silicon nitride formed on the first insulation film; a semiconductor film formed on the second insulation film; a gate insulating film formed on the semiconductor film; and a gate electrode formed on the gate insulating film, wherein the semiconductor film contains carbon, oxygen or nitrogen with the concentration of 7 X 10 [19] atomic per cubic centimeter.

Description

Active matrix liquid crystal display apparatus
The application is that application number is 99120597.9, the applying date is on May 29th, 1993 and denomination of invention dividing an application for the application of " electron device, array device, photoelectric display device and semiconductor memory with thin film transistor (TFT) ".
Technical field
The present invention relates to a kind of array device, it has a kind of matrix structure, has as the MOSFETs and the MISEFTS (being referred to as mos device) of conversion equipment and is used to carry out dynamic operation such as liquid crystal display and dynamic ram (DRAM).The example of these array devices comprises photoelectric display device and semiconductor memory.The invention still further relates to a kind of circuit that is used to drive this array device.Particularly, the present invention relates to a kind of use thin film transistor (TFT), the device of all thin film transistor (TFT)s that on dielectric base, forms in this way as a MOS device.
Background technology
Recently, realized a kind of insulated gate semiconductor device, this device comprises an active layer that exists with the film pattern (also claiming active area) on its dielectric base.Particularly, thin-film insulated gate transistor or so-called thin film transistor (TFT) (TFT) are being studied in earnest.People tend to use these devices to go to be controlled at and have such as the pixel on the display device of the matrix structure of liquid crystal display, and according to employed semiconductor material and crystal state, these devices can be divided into non-crystalline silicon tft s or multi-crystal TFT s.In addition, also studied a kind of material at present, this material list reveals the situation between polycrystalline and the noncrystalline state.This material is referred to as half non-crystalline material, and thinks that it is the relocatable non crystalline structure of a kind of crystallite.As will illustrating later on, this is high mobility under the monocrystalline state and a kind of material of the two good combination of low-leakage current under the noncrystalline state.
In addition, multi-crystal TFT s also is used on the integrated circuit of monocrystalline silicon, and as a kind of SOI (silicon on the insulator) technology, this is known.For example, in the SRAM of large scale integrated circuit, this TFTs is used as load transistor.But just few non-crystalline silicon tft s that uses in this case.
Since conductive interconnection be not be capacitively coupled to suprabasil, so the semiconductor circuit on the dielectric base can quite high speed operation.Proposed a kind of plan this semiconductor circuit has been used for hypervelocity microprocessor and hypervelocity memory.
Usually, amorphous silicon semiconductor has lower field mobility, thereby makes it need among those TFTs of high speed operation can not be applied to.In addition, P type amorphous silicon has extremely low field mobility; Thereby can not make P-channel TFT s or PMOS TFTs with it.Therefore, it is impossible attempt to utilize P-channel TFT s or PMOS TFTs and N-channel TFT s or NMOS TFTs to mutually combine making complementary type MOS (CMOS).
But the TFS that is made by amorphous silicon semiconductor has the advantage of low cut-off current.So this TFTs is used for the occasions such as active matrix transistor such as liquid crystal indicator, under this occasion, does not need high speed operation, only needs a kind of conduction type and must keep electric charge well.
On the other hand, polysilicon semiconductor has higher field mobility and therefore can carry out high speed operation than amorphous silicon semiconductor.For example, use the field mobility of the silicon fiml that generates by the laser annealing recrystallization up to 300cm 2/ vs, this is about 500cm of the very approaching MOS transistor that forms on a common monocrystal silicon substrate just 2The field mobility of/vs.The operating speed of MOS circuit is subjected to the restriction of the stray capacitance between substrate and the conduction connection on the silicon single crystal silicon.By contrast, under the situation of polysilicon semiconductor (silicon fiml of crystallization again), because circuit is positioned on the dielectric base, this restriction has not just existed.Therefore, expectation hypervelocity operation.
PMOS TFTs is similar to NMOS TFTs, also can make with polysilicon.Therefore, can form cmos circuit.For example, have the active matrix liquid crystal display of so-called single chip architecture, i.e. its active matrix part not only, and be known by the product that CMOS multi-crystal TFT s makes also such as external applications such as driver part.
Employed TFTs considers this point and forms in aforementioned SRAM.The PMOS device be constitute by TFTs and be used as load transistor.
In common amorphous TFTs, be very difficult by handling formation source/drain region as employed autoregistration in the monocrystalline manufacturing technology.Because the overlapping caused stray capacitance of geometry in grid and source/drain region can cause problem.Therefore, multi-crystal TFT s can utilize autoregistration to handle, and stray capacitance is greatly suppressed.
Although multi-crystal TFT s has above-mentioned advantage, pointed out wherein also to exist some problem.In common multi-crystal TFT s, on dielectric base, form an active layer.Form an insulated gate film and a plurality of grid on active layer, this structure is a coplanar type, though this structure can be used to straight processing, but is difficult for the leakage current (cut-off current) that reduces from active layer.
Though can't understand all causes of leakage current fully, it mainly is owing to the interface trap-charge of setting up between substrate and the active layer below causes.Therefore, by careful and its interface bulk trap densities is reduced to almost with density on the interface between gate oxidation tunic and the active layer equate to make leakage problem to be solved.
Particularly, in pyroprocessing (maximum processing temperature is about 1000 ℃ of maximum dose utmost points), matrix is made by quartz, forms silicon covering layer on matrix, and forms the clean surface of silicon covering layer through about 1000 ℃ thermal oxidation.Then, utilize low pressure chemical vapor deposition or additive method to form silicon active layer.
In sub zero treatment (maximum temperature is lower than 650 °, be also referred to as medium temperature handle), forms one have and the silicon oxide layer of the interface bulk trap densities that gate insulating film interface bulk trap densities is same low to be used as the Ranvier's membrane between substrate and the active layer.For forming a silicon oxide layer, sputter is a goodish method.Oxide film with superperformance can also obtain by the plasma assisted CVD of ECR, CVD or TROS.
Yet, do so still and can not reduce leakage current.Particularly, comparing from the leakage current of NMOS will a big order of magnitude or more on amplitude from the leakage current of PMOS.Our guess is that more weak N type active layer has caused the leakage current that this is bigger.In fact, we have utilized high duplication to observe the variation of threshold voltage on negative direction by the PMOS and the nmos device of high temperature or sub zero treatment manufacturing.Particularly, under the HIGH-PURITY SILICON situation of any other alloy that do not mix, we can derive, and under the weak crystallinity situation that is obtained as the amorphous silicon situation, active layer becomes weak N type.Contain a lot of lattice imperfections and dangling bonds by the polysilicon that pyroprocessing obtained, this and a desirable monocrystalline silicon are far from it.These lattice imperfections and dangling bonds just become the alms giver and electronics are provided.Certainly, such as the influence of impurity elements such as trace sodion.
In a word, if above-mentioned any situation exists, we just can explain above-mentioned phenomenon, and promptly nmos device has much lower threshold voltage and bigger leakage current compared with the PMOS device.This point is shown in Fig. 1 (A)-(B).Shown in Fig. 1 (A), the N of NMOS +Source electrode 12 ground connection.A positive voltage is received N +Drain electrode 13.In this state, if add a voltage that is higher than grid 11 threshold voltage vth, so, will on this side of the grid of active layer 14, form a raceway groove, and drain current will flow with the direction shown in the solid arrow.But, because active layer 14 has weak N type (N -Type) characteristic will be so one almost will flow to drain electrode by source electrode with the irrelevant electric Chinese of grid voltage shown in the dotted arrow direction.
Even if grid potential is lower than threshold voltage vth, still have the electric current shown in the dotted arrow to flow through.If grid potential is a big negative value, will set up a p type inversion layer 16 so, shown in Fig. 1 (B), but raceway groove does not have complete transoid.On the contrary, if applied an excessive voltage,, electronics produces a raceway groove thereby will being accumulated in the opposing face of grid, and then just inconsistent with above-mentioned consideration around the data of the actual acquisition of nmos device institute.
Under the PMOS situation, because active layer has N -The type characteristic so threshold voltage is higher, but has reduced greatly at the leakage current of grid reverse side.Fig. 2 (A) and (B) show some situation in these situations, adds respectively to be lower than threshold voltage according and to surpass threshold voltage according on PMOS.
This tangible leakage current from NMOS particularly all is a kind of obstruction in the application that needs dynamic operation for various application.For example, in the active matrix array of liquid crystal or DRAM, picture information can be made or the information dropout of being stored is fallen.Therefore, this leakage current of essential minimizing.
A kind of method is made a kind of intrinsic (I-type) or weak P-type NMOS active layer exactly.For example, when forming active layer,, only be injected among NMOS or NMOS and the PMOS to make the active layer of a NMOS I-type or weak P-type such as boron with the P-type alloy of appropriate amount.The threshold voltage of NMOS is improved, and leakage current is greatly reduced.But there is some problem in this method.
Usually, employed cmos circuit contains a substrate, and manufacturing has nmos device and PMOS device in this substrate.Only be injected into occasion in the N-type at alloy, need too much lithography step.To be injected into occasion in the active layer of NMSO and PMOS device at P-type alloy, need the little alloy implantttion technique of concentration.If dosage is too big, so, the threshold voltage of PMOS just reduces, and leakage current will increase.
Also there are some problems in ion implantation technique.Cause in the implantttion technique of a large amount of separations in realization, may only inject required impurity element.But, treatable zone be very little.So-called ion doping method provides a bigger processing region, but because this method does not comprise a large amount of separate steps, so some undesirable ion also has been injected into.So just exist the accurate inadequately possibility of dosage.
In this method of quickening and inject ion, active layer and below set up a plurality of fixing traps on the interface between the substrate.With prior art to inject ion to single crystal semiconductor different, this injection is carried out above insulating body, thereby makes that tangible electric charge can take place to be increased.This just makes it be difficult to accurately control dosage.
Therefore, aforesaid to introduce P-type alloy when active layer forms be admissible, but this method is difficult to the alloy of control trace.Using identical film to make the occasion of NMOS and PMOS, unless its quantity is enough, otherwise, will increase from the leakage current of PMOS.Just need an additional mask step for the occasion of using different films to make.If utilize this method to control threshold voltage, because the influence of air-flow or other factors, the TFTs of manufacturing is uneven in the threshold voltage direction.Its batch and batch between threshold voltage will great changes have taken place.
Summary of the invention
The invention provides a kind of active matrix liquid crystal display apparatus, comprising: first dielectric film that comprises the silicon nitride that is formed on the substrate with display circuit and driving circuit; Comprise second dielectric film that is formed on the monox on described first dielectric film; Be formed on the semiconductor film on described second dielectric film; Be formed on the gate insulating film on the described semiconductor film; And being formed on gate electrode on the described gate insulating film, it is 7 * 10 that wherein said semiconductor film contains concentration 19The carbon of atom/cubic centimetre.
One object of the present invention is exactly to provide a kind of being used to allow to use TFTs to produce the semiconductor circuit of big leakage current by optimizing circuit design; And needn't reduce leakage current by the control manufacture process from nmos device.As mentioned above, in the occasion that active layer is formed by high-purity silicon material, this layer becomes N --type.Repeatability and stable aspect, its energy level is quite good.In addition, processing itself is quite simple and sufficiently high output can be provided.On the other hand, in the whole bag of tricks of control threshold value, processing is pretty troublesome.In addition, the energy level in the active layer that is obtained changes by criticizing such as Fermi level, thereby has reduced output.
Clearly, it is easier than carrying out following method to carry out a processing procedure of eliminating impurity as much as possible, in this method, handles by improving to make, and promptly carries out 10 17Atom/centimetre 3Order of magnitude low concentration doping makes the nmos device of manufacturing remove to be fit to this circuit.Preferably design this circuit and make it be suitable for the nmos device that is produced.Technological concept of the present invention that Here it is.An electron device according to the present invention comprises:
The transistor unit of forming by at least one N-transistor npn npn;
P-transistor npn npn and
A capacitor
Wherein, described transistor unit, described P-transistor npn npn and described capacitor are connected in series each other.The semiconductor circuit that the present invention uses is not general circuit.The present invention be specially adapted to liquid crystal display active matrix circuit, be applicable to by stored charge in capacitor and keep the DRAM memory of information and the dynamic circuit of dynamic shift register, this dynamic displacement register, the MOS structure of use MOS transistor is as capacitor or use other capacitor to drive the next stage circuit.The active matrix circuit of above-mentioned liquid crystal display has used a kind of material, by influencing electric field, makes the printing opacity ratio and the reflectivity of this material change, and this material is sandwiched between two opposite electrodes.Applying electric field between electrode shows so that image to be provided.Particularly the present invention is applicable to circuit or the network that dynamic and static circuit mutually combines.
In first characteristic of the present invention, the PMOS TFTs (P-transistor npn npn) of display part that forms the active matrix circuit of for example liquid crystal display is used as switching transistor (switchgear).PMOS TFTs must be inserted in the mode of series connection in company with data line and pixel capacitors.If NMOS TFTs inserts with parallel way, will produce a large amount of leakage currents so, thereby make this structure be unsuitable for as display device.Therefore, the present invention includes following situation, in this case, PMOS TFTs and NMOS TFTs insert in the mode of series connection, are used for the TFTs circuit of pixel.In this case, have at least a N-transistor npn npn to be used for active matrix, and each in the one n-transistor npn npn is in series with corresponding P-transistor npn npn at least, simultaneously at least in the one n-transistor npn npn source electrode of each be connected with drain electrode with the source electrode of corresponding P-transistor npn npn with drain electrode.Certainly, the present invention also can be applicable to two PMOS, the situation that TFTs (two P-transistor npn npns) inserts with parallel way.
In second characteristic of the present invention, a device comprises that an aforesaid display circuit part or an active matrix circuit and drive circuit (or external application circuit) and this drive circuit that is used for the display circuit part are made of cmos circuit.All be not made of cmos circuit although require all circuit, transmission grid circuit and inverter circuit preferably are made of cmos device (complementary transistor), and these devices schematically are shown among Fig. 3.On as the dielectric base 37 around the active matrix circuit 33 of peripherals, data driver 31 and gate driver 32 have been formed.Peripheral circuit comprises that n-type and p-type complementary thin-film transistor are right.The active matrix circuit 33 that comprises PMOS TFTs (P-type thin film transistor (TFT)) is formed at substrate surface central authorities.P-type thin film transistor (TFT) comprises a grid and an anodic oxide coating, and this oxide layer comprises the oxide layer of a grid material and is provided in this gate surface.These drivers utilize gate line 35 to be connected with data line 36 to form a display device with active matrix.Active matrix 33 is the compositions that include the pixel unit 34 of PMOS device (P-transistor npn npn).The P-transistor npn npn links with pixel capacitors by one in its source and the drain region, also links to each other with data line with the drain region by another source, also links to each other with gate line by its grid simultaneously, shown in pixel unit among Fig. 3 34.It is 10 that its concentration is contained in the zone that is provided between source and the drain region in the P-transistor npn npn 17Atom/centimetre 3Or P-type impurity still less.All to contain its concentration be 10 in the active region of each in active matrix circuit P-transistor npn npn and peripheral circuit n-type and the P-transistor npn npn 17Atom/centimetre 3Or P-type impurity still less.
With regard to regard to the cmos circuit, if the threshold voltage of the TFTs that obtained for being 2v for the nmos device, for the PMOS device, being 6v, and if from the leakage current of nmos device be from the leakage current of PMOS device 10 or more than 10 times, so, owing to do not have serious problems from the electric energy that leakage current consumed such as the logical circuit of phase inverter, so the CMOS phase inverter can not encounter problems yet.Working as follows, be lower than under low-pressure state promptly that the nmos device threshold voltage according is carried out work and under high pressure conditions, carry out under the mode situation of work with the voltage that surpasses PMOS device drain voltage and threshold voltage (＜0) sum, need a phase inverter.In this case, if drain voltage surpasses 8v, be in theory greater than 10V, just can not produce any problem.If 0v and two values of 8v are got in input, will obtain gratifying result so.
The 3rd characteristic of the present invention is relevant with semiconductor memory such as DRAM.The operating rate of the semiconductor memory that exists with monocrystalline integrated circuit (IC) s form has reached the limit.In order to make them carry out work with more speed, the transistorized current capacity of just essential raising, but this has just caused increasing the quantity of institute's power consumption stream.Stored charge is with the DRAM situation of storage information in capacitor for passing through, and the electric capacity of capacitor can not further increase again, therefore just has only a kind of feasible method, improves driving voltage exactly.
The reason why speed of monocrystalline integrated circuit reaches their limit be by substrate and make between the conductive interconnections a large amount of losses of producing of the electric capacity that forms.If an insulator is used as substrate, can obtains enough high-speed work so and can not increase current loss.The integrated circuit (IC) s of a kind of SOI (semiconductor on the insulator) structure has been proposed for this reason.
Each unit comprises that a transistorized DRAM is similar to above-mentioned LCD on circuit structure.Have such as each unit and comprise that the DRAM of 3 transistorized other structures uses the PMOS TFTs that produces small amount of leakage current as the TFTs that forms the storage position.The basic structure of these DRAM is identical with structure shown in Figure 3.For example, DRAM comprises a column decoder 31, line decoder 32, storage elements 33, unit storage position 34, bit line 35, word line 36 and an insulating body 37.
The active matrix of LCD and DRAM all must be refreshed.During refresh operation, the resistance of TFTs must must be enough to make pixel capacitance and capacitor to avoid discharge greatly.In this case, if use NMOS TFTs, so because bigger leakage current just can not drive these elements satisfactorily.In this respect, it is useful adopting the PMOSTFTs that produces less leakage current.
In the present invention, using by pyroprocessing is favourable with the TFTs that makes.Using by sub zero treatment then is especially easily with the TFTs that makes.By among the TFTs of sub zero treatment manufacturing, the structure of its active layer and will produce bigger distortion of lattice between noncrystalline state and monocrystalline state.Therefore, TFTs presents a kind of so-called half noncrystalline state and its actual characteristic approaches to be in Devices Characteristics under the noncrystalline state.That is to say that great majority have N by the active layer of pure silicon by the sub zero treatment manufacturing -The feature of type.
At length set forth half noncrystalline state now.When heat is provided for the silicon that is under the noncrystalline state, crystal growth.Under atmospheric pressure, reaching before about 650 °, crystal is not grown.Particularly, the relatively low part of crystallinity is placed into the high-crystallinity part.In addition, molecule closely is bonded together, and presents the segregation form that is different from the conventional crystal of ionic crystal.In other words, half noncrystalline state is characterised in that it has considerably less dangling bonds.If temperature surpasses 680 ℃, the speed of growth of crystal is just greatly quickened, and then will present the polycrystalline state that includes great number of grains.In this case, the molecular link that is positioned at the place, grain boundary that is separated by distortion of lattice is destroyed, thereby has caused having a large amount of dangling bonds at the place, grain boundary.
Even adulterant is injected into the active layer that is in material under this half noncrystalline state, utilize the mode identical with amorphous silicon, its active layer also can not get bigger improvement.We think, this is because particularly caused at the selectivity trap that contains a large amount of dangling bonds place adulterant, consequently are difficult to remove to control threshold voltage with the doping of controlling active layer under half noncrystalline state or the active layer by the sub zero treatment manufacturing.
The present invention can be applied to easily as in by the TFTs with two active layers described in the Japanese patent application 73315/1922 of the applicant's application.In this TFTs, an amorphous active layer is directly to be formed on the substrate, and an active layer that is under half amorphous or the polycrystalline state is formed on this amorphous active layer.Substrate and begin between the described active layer have a large amount of electric charges at the interface and the magnitude of leakage current that produces is reduced to minimum value.But owing to used amorphous silicon, so lower active layer structurally has N --type feature.Therefore, can reduce, can not be reduced at an easy rate by the leakage current that this active layer produced although originate from the leakage current at this interface.For example, when drain voltage is 1, be lower than 10 from the leakage current of PMOS device -12A, and from the leakage current of nmos device than the former leakage current big 100 or more many times.
The method of making this structure is shown in Fig. 4.At first, on matrix 41, form a firm inert coatings 42 that constitutes by silicon nitride or other material.If this substrate is a clean enough, then just needn't form this coating.Then, on coating 42, form an oxide film 43, to set up a bottom.Form two amorphous silicon layers subsequently.In the thermal treatment afterwards, these amorphous silicon films are made into half amorphous or polycrystal, but have kept amorphous characteristic by preferred its sedimentation velocity and base reservoir temperature between depositional stage.In this example, be made into half amorphous or polycrystalline state, then kept noncrystalline state than lower floor 44 and 46 than upper strata 45 and 47.
The feature of this method just is to use same flood chamber, and the condition that constitutes steady state (SS) by trickle change can form two kinds of silicon fimls with different qualities.If control threshold voltage, so just can not obtain to use the advantage of this method by injecting a doping.If lower level 44 and 46 from N --type changes over the I-type, because these layers have kept amorphous characteristic, its ionization rate is just very low so.Therefore need carry out a large amount of doping.Its result, flood chamber will greatly be polluted by these impurity.Also have following possibility in addition, promptly the active layer of PMOS device is changed into the P-type.Therefore, the TFTs with these two kinds of active layers is highly suitable for the present invention, and it need only utilize doping and not need threshold voltage is controlled.Will be described in detail the method for making these TFTs below.
Electron device according to the present invention comprises:
A dielectric base;
A P-type thin film transistor (TFT) is formed on the described dielectric base, and is connected with a bit line by its grid, is connected with a bit line by one in its source and the drain region;
A capacitor, it is connected with described P-type thin film transistor (TFT) by in source and the drain region another; With
A peripheral circuit that provides around described P-type thin film transistor (TFT), n-type and the P-type thin film transistor (TFT) that is provided on the described insulating body is provided for it.
Other purpose of the present invention and characteristic will occur in the declarative procedure afterwards.
Description of drawings
Fig. 1 (A) and (B) be in order to show the NMOS TFTs cross section view of its duty;
Fig. 2 (A) and (B) be in order to show the PMOS TFTs cross section view of its duty;
Fig. 3 is the part plan view according to display device circuit diagram of the present invention;
Fig. 4 (A)-(C) is according to TFTs sectional view of the present invention, makes the performed sequential steps of these TFTs in order to show;
Fig. 5 (A)-(E) is the cut-open view according to some other TFTs of the present invention, makes the performed sequential steps of these TFTs in order to show: and
Fig. 6 is the sectional view according to an electron device of the present invention.
Embodiment
Example 1:
Below with reference to Fig. 4 (A)-(C) narrate example 1 of the present invention cmos circuit/electron device of example 1 is shown in Fig. 6 according to the present invention, it comprises pair of substrates, a cmos circuit and a pixel capacitors of in one of these two substrates, providing, transparent conductor film 72 and an electrooptical modulation layer 73 that between pixel capacitors (one of described two substrates) and nesa coating (described another substrate), provides of on another of this two substrates, providing.This circuit comprises that one is utilized 7059 by peaceful (corning) company limited of gram #The substrate 41 that glass is made, this substrate can be made with various other materials.No matter use which type of material to make this substrate, this substrate all must processedly must not enter semiconductor film such as the sodion that moves.A desirable substrate is to use the little synthetic quartz of alkalinity to make.If the reason for economic aspect is difficult to adopt this substrate, can use the alkalescent or the non-alkali glass that obtain by commercial sources so.In this example, in substrate 41, formed a silicon nitride thing film 42 that thickness is 5-200nm (for example 10nm), in order to avoid entering semiconductor film from the motion ion of substrate by low pressure chemical vapor deposition.Then, utilize sputtering technology on silicon nitride film 42, to form the silicon oxide film 43 of a thickness for 20-1000nm (as 50nm).The thickness of these films is that the degree that intrusion degree or the active layer according to the motion ion is affected is determined.As an example, the quality of its silicon nitride film 42 and bad and electric charge are firmly captured, on cover semiconductor layer and be affected by silicon oxide film.In this case, just must add thick silicon oxide film 43.
These films can form by plasma assisted CVD and above-mentioned low pressure chemical vapor deposition or sputtering technology.Particularly, silicon oxide film can utilize TEOS to make.Consider cost, productive capacity and other factor can be selected employed method.Certainly, these films can form by handling continuously.
Then, can use single silane to form the amorphous silicon film of thickness as 20-200nm (for example 100nm) by low pressure chemical vapor deposition, base reservoir temperature be 430-480 ℃, for example 450 ℃.Base reservoir temperature is a continually varying, and thickness is that the amorphous silicon film of 5-200nm (for example 10nm) forms at 520-560 ℃ (for example 550 ℃).Our research shows that the temperature of substrate contains the insulation course during the appreciable impact crystallization after a while.For example, when these films are to be lower than when forming under 480 ℃ the temperature, it is very difficult making their crystallizations.On the contrary, when under these films are being higher than 520 ℃ temperature, forming, their just crystallizations at an easy rate.The amorphous silicon film of Huo Deing was 600 ℃ of following thermal annealings 24 hours by this way.Its result has only the silicon fiml crystallization than top.In this manner, can obtain the silicon metal of so-called half amorphous silicon semiconductor.Silicon metal can be monocrystalline silicon semiconductor or polysilicon semiconductor, rather than so-called half amorphous silicon semiconductor.Lower silicon fiml keeps the amorphous silicon characteristic.
In order to quicken the crystallization of top silicon fiml, the concentration of carbon, nitrogen and the oxygen atom that is comprised in this film is preferably lower than 7 * 10 19Atom/centimetre 3The sims analysis explanation, in this example, these concentration are lower than 1 * 10 17Atom/centimetre 3On the contrary, in order to contain the crystallization of bottom silicon fiml, the high concentration of these elements is favourable.But excessive doping will produce harmful effect to semi-conductive characteristic, therefore also will produce harmful effect to the TFTs characteristic.So the amount that whether needs to mix and mix is to determine according to the characteristic of TFTs.
After making amorphous silicon film annealing occupy a crystal silicon film with shape, it is etched into a suitable figure, thereby produces a semiconductor island district 45 and a semiconductor island district 47 that is used for PTFTs that is used for NTFTs.The upper face in each island district is not done any artificial doping.Sims analysis shows that the doping content of boron is lower than 10 17Atom/centimetre 3Therefore we infer, the conduction type of this part belongs to N --type.On the other hand, the low silicon layer 44 and 48 of semiconductor region is essentially amorphous silicon semiconductor.
After, when using silicon oxide target, its thickness is that the gate insulating film 48 of 50-300nm (as 100nm) can be formed by monox by the sputtering technology in aerobic environment.The thickness of this film is to determine according to some factors of the condition of work of this TFTs and its warp.
Subsequently, utilize sputtering technology to form the thick aluminium film of 500nm.This is that the phosphoric acid solution composition that utilizes mixed acid solution or be added with 5% nitric acid is to form grid and coupling part 49 and 50.When etch temperature was 40 ℃, etching speed was 225nm/min.In this manner, the profile of TFTs can be done suitable adjusting.The long 8 μ m of each raceway groove, wide 20 μ m.This state is shown in Fig. 4 (A).
Then, utilize anodic oxidation on the surface of aluminium coupling part, to form aluminum oxide.As anodised a kind of method, used the disposal route of being narrated in the Japanese patent application 231188/1991 or 238713/1991 of Japanese publication people's application.According to the characteristics of required device, treatment conditions, cost and other some factors can modify to implement this method.In this example, having formed thickness by anodized is the alumite 51 and 52 of 250nm.
After this, the ion by the insulated gate film injects and well-known CMOS manufacturing technology formation N-type source/drain region 53 and P-type source/drain region 54.The concentration of adulterant is 8 * 10 in each district 19Atom/centimetre 3Make the boron fluoride ion during for P-type ion gun.Use phosphonium ion for N type ion gun.Before a kind of ion be injected into during at accelerating potential for 80Kev, then a kind of ion is introduced into when 110KtV.Accelerating potential is that the thickness of consideration gate insulating film and the thickness of semiconductor region 45 and 47 are determined.What utilized is not the injection of ion, but the doping of ion.Inject at ion, the ion that is injected is because of their different separating of quality, thereby can not inject undesirable ion, but can by an ion implanter the size of treatable substrate be limited.On the other hand, in the ion doping processing procedure, can handle bigger substrate (being longer than 30 inches), but hydrogen ion and other undesirable ion also can be quickened simultaneously and be injected into, thereby make this substrate be tending towards being heated as diagonal line.In this case, the selection of removing to implement adulterant is with photoresist injected is very difficult as injecting at ion.
In this mode, can make the TFTs shown in Fig. 4 (B) with bias area.At last, utilize grid, under the Japanese patent application of as above being quoted from 231188/1991 or 238713/1991 narration condition, utilize laser annealing to make the crystallization again of source/drain region as mask.Utilize the rf plasma assisted CVD to form interlayer insulation device 55 from monox.In this insulator, form a plurality of holes to allow to generate electrode.Aluminium interconnecting parts 56-68 forms, finally to finish a device.
In this embodiment, because laser annealing is a kind of efficient and simple method, thus be not only the film 45 and 47 that is under the silicon metal state, and the film 44 and 46 that is under the amorphous silicon state all is to utilize laser annealing to make it crystallization.Its result is shown in Fig. 4 (C), and the part 59 and 60 under being positioned at raceway groove, amorphous area 44 originally and 46 all has been transformed into to have and source/drain region material of the syncrystallization mutually.Thereby make that the thickness in source/drain region is basic identical with semiconductor island district 45 and 47 basically.But, can see that from this figure the actual (real) thickness of raceway groove approximately is 10nm, this thickness is less than the thickness in source/drain region.Therefore, the sheet resistance in source/drain region is very little.In addition, the minimizing of channel thickness has correspondingly reduced cut-off current, thereby very excellent characteristic is provided.
Fig. 4 (A)-(C) shows the sequential steps that is used to make a kind of cmos circuit, and sort circuit is used for the driving circuit relevant with liquid crystal display.Similarly, on the active matrix of same substrate, form the PMOS device.TFTs promptly constitutes by this way.The channel length of these TFTs is 5 μ m, and width is 20 μ m.When source/drain voltage is 1v, is about 100PA from the leakage current of nmos device, and is about 1PA from the leakage current of PMOS device.In this manner, the off-resistances of PMOS device is 100 times of nmos device off-resistances.When grid voltage for+8v (under the PMOS situation for-8v) and TFTs be in conducting state following time, the electric current of the electric current of one 10 μ A and a 100nA is respectively by NMOS and PMOS device.Because under PMOS device situation, threshold voltage is offset to negative direction, so recently much smaller from the drain current of nmos device from the drain current of PMOS device.Whereby, when the grid voltage of this PMOS device be placed in-during 12v, drain current is 1 μ A.In other words, in the occasion that the transmission grid uses these TFTs to make, the current potential that imposes on these PTFTs will be offset to negative direction.The size of active matrix PMOS TFTs is to be provided with like this, and its channel length is 5 μ m, and its width is 10 μ m.When as the grid voltage of the TFTs of the PMOS device of active matrix from 0v change to-during 12v, drain current increases by 166 times.Therefore, the occasion in that TFTs is applied to display device any problem can not occur.If need the variation range of broad, two PMOS TFTs can be cascaded mutually, to form a so-called double-grid structure.In this case, under cut-off state, the resistivity of these TFTs will increase an order of magnitude on its amplitude.But under conducting state, the resistivity of these TFTs will only increase not enough twice.At last, drain current changes 10 7Doubly.If adopt three utmost point TFTs to connect mutually, drain current will further increase an order of magnitude of its amplitude so.
Example 2
Fig. 5 (A)-(E) shows according to the present invention to making NMOS and the performed sequential steps of PMOS device.In this example 2, TFTs makes by pyroprocessing.At first, utilize low pressure chemical vapor deposition on the dielectric base 61 of a quartz, to form a thickness and be 100-500nm, the undoped polycrystalline silicon film of 150-200nm preferably.The width of dielectric base 61 is 105nm, the long 105mm of being, thickness is 1.1mm.Subsequently, in dry, high temperature aerobic environment, 850-1100 ℃, preferably make the polysilicon film oxidation in 950-1050 ℃ of temperature range.In such a way, a silicon oxide film 62 is formed at (Fig. 5 (A)) on this dielectric base.
Utilizing plasma assisted CVD or low pressure chemical vapor deposition to form thickness by disilane is 100-1000nm, the amorphous silicon film of 350-700nm preferably.Base reservoir temperature is 350-450 ℃.This thin layer 550-650 ℃, preferably in 580-620 ℃ of temperature range through annealing for a long time, thereby make this diaphragm crystallization.This thin layer is through needle drawing, to form nmos area 63a and PMOS district 63b, shown in Fig. 5 (B).
Then, making the surface oxidation of silicon area 63a and 63b in dry, high temperature aerobic environment, is 50-150nm, the silicon oxide film 64 of 50-70nm preferably to form thickness on this silicon area surface, shown in Fig. 5 (C).Under the condition identical, finish oxidizing process with these silicon oxide film 62 situations.
Subsequently, thickness is 200-500nm, preferably 350-400nm and to utilize concentration be 10 19-2 * 10 20Atom/centimetre 3, for example be 8 * 10 9Atom/centimetre 3Phosphonium ion mix to form silicon fiml, be carved into the figure shown in Fig. 5 (D), thereby form a plurality of grid 65a of nmos device and a plurality of grid 65b of PMOS device.Be infused in by means of ion subsequently and form doped region 66 and 67 in NMOS and the PMOS device.
The bottom of these doped regions does not arrive the silicon oxide film 62 of bottom, in other words, forms a large amount of local traps at the interface between the oxide film of bottom and this silicon fiml.Subsequently, these parts of the silicon fiml of the oxide film of close bottom will present some conduction type, normally the N-type.If doped region is near these silicon fiml parts, will produce leakage current so, in this example 2, in order to prevent this leakage current, the interval of formation 50-200nm between the oxide film 62 of the bottom of each doped region and bottom.
In this current example, ion injects by silicon oxide layer 64.For the degree of depth in controlled doping district more accurately, can remove silicon oxide layer 64 and carry out thermal diffusion.
After forming doped region, recover the crystallization of doped region by thermal annealing.Then, form the interlayer insulation device 68 of boron-phosphorosilicate glass in the mode identical with the general step of making TFTs.Utilize technique of backflow to make its surperficial graduation, form contact hole and metal interconnection 69-71.
Utilize TFTs, can make the 16K position DRAM that each unit all is made up of transistor by the above-mentioned steps manufacturing.The channel length of these TFTs is 2 μ m, and width is 10 μ m.When source/drain voltage is 1v, from the about 10PA of the leakage current of nmos device.Under same case, be about 0.1PA from the leakage current of PMOS device.Storage elements comprises that a plurality of its channel lengths are that 2 μ m, width are the PMOS device of 2 μ m.The electric capacity of storage elements capacitor is 0.5PF.Maximum refresh interval is 5 seconds.In this manner, can preserve information for a long time.Why can accomplish this point, be actually because be in the resistance of the PMOS device under the cut-off state up to 5 * 10 13Ohm.Can adopt by the NMOS of above-mentioned steps manufacturing and the cmos device of PMOS device and make peripheral circuit.Because DKAM builds to place on the dielectric base by this way, so can have very high operating rate.Read/write operation can reach every 100ns.
Reliability and performance that the present invention can improve a dynamic circuit and use the device of this dynamic circuit.Use the occasion of prior art multi-crystal TFT s in the active matrix of LCD, the ratio of the drain current stream under the drain current under the conducting state and the cut-off state is low, and all difficulties can occur when reality is used these TFTs.We think that the present invention almost successfully solves these problems.In addition, the semiconductor circuit on the dielectric base has following advantage as described in Example 2, and promptly it can carry out work with very high speed.Clearly, at the TFTs that is used for constituting monocrystalline 3 D semiconductor circuit, similarly effectiveness is implemented the present invention.
For example, can constitute peripheral logical circuit, above this logical circuit, form TFTs via the interlayer insulation device by the semiconductor circuit of single crystal semiconductor.Can form storage elements in such a way.In this case, storage elements comprises the DRAM circuit that uses PMOS TFTs.Their driving circuit is to be set up by the cmos device that forms in the single crystal semiconductor circuit.If as microprocessor, these storage elements are positioned at the second layer with sort circuit, thereby its shared zone can be saved.This shows that we think that the present invention has great commercial value.

Claims (15)

1. active matrix liquid crystal display apparatus with display circuit and driving circuit comprises:
First dielectric film that comprises the silicon nitride that is formed on the substrate;
Comprise second dielectric film that is formed on the monox on described first dielectric film;
Be formed on the semiconductor film on described second dielectric film;
Be formed on the gate insulating film on the described semiconductor film; And
Be formed on the gate electrode on the described gate insulating film,
It is 7 * 10 that wherein said semiconductor film contains concentration 19The carbon of atom/cubic centimetre.
2. active matrix liquid crystal display apparatus according to claim 1, wherein said substrate are non-alkali glass substrate.
3. active matrix liquid crystal display apparatus according to claim 1, the thickness of wherein said first dielectric film is in the scope of 5-200nm.
4. active matrix liquid crystal display apparatus according to claim 1, the thickness of wherein said second dielectric film is in the scope of 20-1000nm.
5. active matrix liquid crystal display apparatus according to claim 1, the thickness of wherein said semiconductor film is in the scope of 20-200nm.
6. active matrix liquid crystal display apparatus with display circuit and driving circuit comprises:
First dielectric film that comprises the silicon nitride that is formed on the substrate;
Comprise second dielectric film that is formed on the monox on described first dielectric film;
Be formed on the semiconductor film on described second dielectric film;
Be formed on the gate insulating film on the described semiconductor film; And
Be formed on the gate electrode on the described gate insulating film,
It is 7 * 10 that wherein said semiconductor film contains concentration 19The oxygen of atom/cubic centimetre.
7. active matrix liquid crystal display apparatus according to claim 6, wherein said substrate are non-alkali glass substrate.
8. active matrix liquid crystal display apparatus according to claim 6, the thickness of wherein said first dielectric film is in the scope of 5-200nm.
9. active matrix liquid crystal display apparatus according to claim 6, the thickness of wherein said second dielectric film is in the scope of 20-1000nm.
10. active matrix liquid crystal display apparatus according to claim 6, the thickness of wherein said semiconductor film is in the scope of 20-200nm.
11. the active matrix liquid crystal display apparatus with display circuit and driving circuit comprises:
First dielectric film that comprises the silicon nitride that is formed on the substrate;
Comprise second dielectric film that is formed on the monox on described first dielectric film;
Be formed on the semiconductor film on described second dielectric film;
Be formed on the gate insulating film on the described semiconductor film; And
Be formed on the gate electrode on the described gate insulating film,
It is 7 * 10 that wherein said semiconductor film contains concentration 19The nitrogen of atom/cubic centimetre.
12. active matrix liquid crystal display apparatus according to claim 11, wherein said substrate are non-alkali glass substrate.
13. active matrix liquid crystal display apparatus according to claim 11, the thickness of wherein said first dielectric film is in the scope of 5-200nm.
14. active matrix liquid crystal display apparatus according to claim 11, the thickness of wherein said second dielectric film is in the scope of 20-1000nm.
15. active matrix liquid crystal display apparatus according to claim 11, the thickness of wherein said semiconductor film is in the scope of 20-200nm.
CNB2005100545273A 1992-05-29 1993-05-29 Active matrix liquid crystal display apparatus Expired - Lifetime CN100559246C (en)

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US7223996B2 (en) 2007-05-29
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