CN1664953B - Phase-change memory device and method of writing a phase-change memory device - Google Patents

Phase-change memory device and method of writing a phase-change memory device Download PDF

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Publication number
CN1664953B
CN1664953B CN2005100062460A CN200510006246A CN1664953B CN 1664953 B CN1664953 B CN 1664953B CN 2005100062460 A CN2005100062460 A CN 2005100062460A CN 200510006246 A CN200510006246 A CN 200510006246A CN 1664953 B CN1664953 B CN 1664953B
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Prior art keywords
write driver
pulse
memory device
storage unit
current
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CN1664953A (en
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崔炳吉
郭忠根
金杜应
赵柏衡
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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Priority claimed from KR10-2004-0007112A external-priority patent/KR100520228B1/en
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0069Writing or programming circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0004Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0023Address circuits or decoders
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0069Writing or programming circuits or methods
    • G11C2013/0078Write using current through the cell
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021Auxiliary circuits
    • G11C13/0069Writing or programming circuits or methods
    • G11C2013/0092Write characterized by the shape, e.g. form, length, amplitude of the write pulse

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Semiconductor Memories (AREA)

Abstract

A phase change cell memory device includes two or more phase change memory cells, an address circuit, a write driver, and a write driver control circuit. The phase change memory cells each includes a substance which can be programmed between the amorphous state and the crystalline state. The address circuit selects at least one of memory cells, and the write driver generates a reset pulse current to program the memory cell selected by the address circuit into the amorphous state, and also generates a set pulse current to program the memory cell selected by the address circuit into the crystalline state. The write driver control circuit varies at least one of a pulse width and a pulse count of at least one of the reset pulse current and the set pulse current according to a load between the write driver and the memory cell selected by the address circuit.

Description

Phase change memory device and the method for writing phase change memory device
Technical field
The present invention relates generally to phase change memory device and the method for writing phase change memory device.More particularly, the present invention relates to change the phase change memory device and the method for writing phase change memory device of write current pulse characteristic according to the load of phase change cells to be written.
Background technology
Phase change memory cell device depends on such as chalkogenide, stably the phase-change material of transition between amorphous phase and crystalline phase.The different resistance values that this two-phase presents is used to distinguish the logical value of storage unit.That is to say that amorphous state presents high relatively resistance, and crystalline state presents low relatively resistance.
Fig. 1 illustration under the amorphous state 52-1 and the phase-change memory cell under crystalline state 52-2.Phase-change memory cell can be the part of phase change random access memory devices (PRAM).Phase-change memory cell 52 comprises the phase change layer 55 between hearth electrode (BE) 54 and the top electrode (UE) 56.Phase change layer 55 is made up of the phase-change material such as alloy of chalkogenide (GST).Bit line (BL) and top electrode 56 couplings.Hearth electrode 54 is coupled with the ground of process transistor NT.The gate coupled of word line (WL) and transistor NT.
When phase-change memory cell 52 is in following time of amorphous state 52-1, phase change layer part 55 is noncrystal.Equally, when phase-change memory cell 52 is in following time of crystalline state 52-2, phase change layer part 55 is crystal.Shown in the equivalent circuit diagram among Fig. 1, depend on the electric current that applies by bit line BL, phase-change material layers 55 is set (ST1) and becomes crystalline state, or reset (ST2) becomes amorphous state.
Those of ordinary skill in the art should be understood that term " amorphous state " and " crystalline state " are not the absolute specificities of phase-change material.But, when thinking that phase-change material partly is in amorphous state (that is, the RESET state) following time, mean that this material is enough decrystallized, have the resistance value R1 that can be easily distinguishes with the resistance value R2 that is in the material under the crystalline state (SET state).On the contrary,, mean the enough crystallization of this material, have the resistance value of can be easily separating with the resistor tracks that is in the material under the amorphous state (RESET state) when thinking that phase-change material partly is in crystalline state (that is, the SET state) following time.
Fig. 2 illustration in the set programming operation (programming operation) and the programming operation that resets the temperature characterisitic of phase-change memory cell.The set programming operation makes the phase-change material crystallization of phase-change memory cell, has therefore reduced the resistivity of phase-change material layers.Equally, it is noncrystal that the programming operation that resets becomes the phase-change material of phase-change memory cell, therefore improved the resistivity of phase-change material layers.
As shown in Figure 2, the phase-change memory cell programming depends on the temperature of phase-change memory cell.Decrystallized (RESET) temperature pulse comprises rising part 12, peak value part 10 and sloping portion 14.Decrystallized in order to utilize (RESET) pulse resets phase-change memory cell, and resistive heater is heated to phase-change material layers the fusing point (Tm) above it in relative short time interval.Between time T 0 and time T 1, the temperature of phase-change material layers is elevated to the temperature above phase-change material layers fusing point (Tm) rapidly.During sloping portion 14, phase-change material layers cools off rapidly, therefore makes phase-change material layers become relative amorphous state.In other words, the fusing point (Tm) that the temperature of phase-change material layers is elevated to above it disconnects the crystal structure in the phase-change material.Because phase-change material layers cools off rapidly, thus under amorphous state relatively, phase-change material layers become solid-state before, the chance that forms crystal in phase-change material layers is very little.
Equally, crystallization (SET) temperature pulse comprises rising part 22, peak part 20 and sloping portion 24.In order to utilize crystallization (SET) pulse set phase-change memory cell, resistive heater (for example, is heated to crystallization point (Tx) above it with phase-change material layers in 50ns) at the relative short time interval longer than time interval of elevating the temperature during decrystallized (RESET) temperature pulse.Between time T 0 and time T 2, the temperature of phase-change material layers is elevated to the crystallization point (Tx) above phase-change material layers rapidly, therefore, crystallization takes place.During sloping portion 24, phase-change material layers cools off rapidly, therefore phase-change material layers is set under the relative crystalline state.
Comparable ground of Fig. 3 illustration RESET current impulse G1 and SET current impulse G2.RESET current impulse G1 is the relative short pulse of amplitude I-RESET, and it changes the temperature of phase-change material, and this material is reset to as top amorphous state shown in Figure 2.SET current impulse G2 is the relative long pulse of amplitude I-SET (here, I-SET is less than I-RESET), and it changes the temperature of phase-change material, and this material is arranged to as top crystalline state shown in Figure 2.
Fig. 4 illustration contain the storer 100 of phase-changing memory cell array 160.As shown in the figure, cell array 160 comprises several storage blocks, that is, and and Block (A00) 160a, Block (A01) 160b, Block (A10) 160c and Block (A11) 160d.Each storage block comprises several phase-change memory cells that are connected with word line WLi, the WLj, WLk and the WLl that are included in respectively in the storage block jointly.
Impact damper 110_1 and 110_2 receive address signal A0 and A1.Address signal A0 and A1 decode through pre decoder 120, generating solution coded signal A00_DEC, A01_DEC, A10_DEC and A11_DEC, and they through main decoder 140 decodings, export block selection signal A00, A01, A10 and A11 again.Block selection signal A00, A01, A10 and A11 drive all word line WLi, WLj, WLk and the WLl of storage block 160a, 160b, 160c and 160d respectively.
Write driver 130 is according to programming signal SET (RESET) _ CON_PULSE with from the data-signal DIN of impact damper 111, output SET or RESET write current pulse SDL.Then, column decoder 150 is supplied to storage block 160a, 160b, 160c and 160d with write current pulse SDL.
As shown in the example of Fig. 4, storage block 160d than storage block 160a more near demoder 150.So, have different loads to storage block 160a, 160b, 160c and 160d from demoder 150.These loads are represented with resistive element R1, R2, R3 and R4 in the drawings.
The different loads of storage block 160a, 160b, 160c and 160d causes the different write conditions of the phase-change memory cell of storage block.Below with reference to Fig. 5 to 7 this is illustrated.
Fig. 5 is different set programming pulses (for example, reduced graph SET_CON_PULSE) of the illustration phase-change memory cell piece 160a, 160b, 160c and the 160d that impose on storage array 160.As can be seen from Figure 5, the set programming pulse all has identical pulse width.
Fig. 6 illustration the RESET distribution of resistance district of the phase-change memory cell among piece 160a, 160b, 160c and the 160d.Along with the load increase of storage block, the distribution of resistance district dwindles.For fear of write error, the pulse of RESET write current must be able to be write high capacity storage block 160a, so that most low-resistance distributive province (Region (A00)) is in the RESET district fully.Because storage block 160d has minimum load, strong relatively RESET write current pulse is applied on the storage unit of storage block 160d.Like this, obtained to cause the high relatively crystalline state of relative high resistance distributive province (Region (A11)).On the contrary, the highest storage block 160a of load will present relative low resistance distributive province (Region (A00)).
Fig. 7 illustration the SET distribution of resistance district of the phase-change memory cell among piece 160a, 160b, 160c and the 160d.In addition, along with the load increase of storage block, the distribution of resistance district dwindles.For fear of write error, the pulse of SET write current must be able to be write minimum load storage block 160d, so that maximum resistance distributive province (Region (A11)) is in the SET district fully.Otherwise, the SET failure will appear in a part of WIN of the nearest distributive province of piece (Region (A11)).Therefore, enter fully in the SET district in order to make Region (A11), the phase-change memory cell of Region (A00) becomes " excessive (over-programming) programmes ".That is to say, for the SET programming (programming) of the phase-change memory cell that interrelates with Region (A00), needn't consumed power.And, during the RESET programming, need secondary power to make identical storage unit turn back to the RESET district.
Summary of the invention
According to an aspect of the present invention, provide the phase change cells memory device that comprises several phase-change memory cells, address circuit, write driver and write driver control circuit.Each of phase-change memory cell all comprises hearth electrode, top electrode and the phase change layer between the two, and this phase change layer is by can a programmable block of material forming between amorphous state and crystalline state.Address circuit is selected at least one storage unit, and write driver generates the storage unit that address circuit is selected and be programmed for amorphous reset pulse electric current, and the set pulse current that the storage unit that address circuit is selected is programmed for crystalline state.The write driver control circuit is according to the load between the storage unit of write driver and address circuit selection, the pulse width of at least one in change reset pulse electric current and the set pulse current and at least one in the step-by-step counting.
According to another aspect of the present invention, provide the phase change cells memory device that comprises a plurality of memory cell blocks, address circuit, write driver and write driver control circuit.Each of memory cell block all comprises several phase-change memory cells, and each of phase-change memory cell all comprises hearth electrode, top electrode and the phase change layer between the two, and this phase change layer is by can a programmable block of material forming between amorphous state and crystalline state.One of address circuit select storage unit piece, the storage unit that generates the memory cell block that address circuit is selected with write driver selectively is programmed for amorphous reset pulse electric current, and the storage unit of the memory cell block that address circuit is selected is programmed for the set pulse current of crystalline state.The memory cell block that the write driver control circuit is selected according to address circuit, the pulse width of at least one in change set pulse current and the reset pulse electric current and at least one in the step-by-step counting.
According to a further aspect of the invention, provide the phase change cells memory device that comprises phase-changing memory cell array, address decoder, bit line select circuitry, write driver and write driver control circuit.Phase-changing memory cell array comprises several word lines, several bit lines and is in word line and several phase change cells of each zone of intersection of bit line, wherein, memory cell array comprises several storage blocks definition of at least one word line by each, and each of phase-change memory cell all comprise can be between amorphous state and crystalline state a programmable block of material.Address decoder decoding line of input address is with the word line of selecting each storage block with select one of storage block.Bit line select circuitry is selected at least one bit line according to the input column address.Write driver generates selectively and makes the storage unit on the selected bit line and selected word line point of crossing in the selected storage block be programmed for amorphous reset pulse electric current and make the storage unit on the selected bit line and selected word line point of crossing in the selected storage block be programmed for the set pulse current of crystalline state.The memory cell block that the write driver control circuit is selected according to address decoder, the pulse width of at least one in change set pulse current and the reset pulse electric current and at least one in the step-by-step counting.
According to a further aspect of the invention, the method that providing programming to contain the phase change memory device of several phase-change memory cells, each of phase-change memory cell all comprise can be between amorphous state and crystalline state a programmable block of material.This method comprises that utilizing write driver to generate the storage unit that address circuit is selected selectively is programmed for amorphous reset pulse electric current, and the set pulse current that the storage unit that address circuit is selected is programmed for crystalline state, and, change reset pulse electric current and the pulse width of set pulse current and at least one in the step-by-step counting according to the load between write driver and the programmable storage unit.
Description of drawings
By the reference accompanying drawing, the present invention is carried out following detailed description, of the present invention above and others and feature will be clearer, in the accompanying drawings:
Fig. 1 is under place's amorphous state and the illustration of the phase-change memory cell under the crystalline state;
Fig. 2 is the figure of the temperature characterisitic of the illustration phase-change memory cell response set programming signal and the programming signal that resets;
Fig. 3 is the reset curve map of write current pulse of programming signal and set programming signal of illustration;
Fig. 4 is the circuit diagram of phase change memory cell device;
Fig. 5 illustration impose on the set programming pulse of phase-change memory cell piece;
Fig. 6 illustration the RESET distribution of resistance district of the phase-change memory cell in the different storage blocks;
Fig. 7 illustration the SET distribution of resistance district of the phase-change memory cell in the different storage blocks;
Fig. 8 is the circuit diagram of phase change memory cell device according to an embodiment of the invention;
Fig. 9 illustration impose on the set programming pulse of phase-change memory cell piece according to an embodiment of the invention;
Figure 10 illustration the RESET distribution of resistance district of the phase-change memory cell in the different according to an embodiment of the invention storage blocks;
Figure 11 illustration the SET distribution of resistance district of the phase-change memory cell in the different according to an embodiment of the invention storage blocks;
Figure 12 is the circuit diagram of pre decoder according to an embodiment of the invention;
Figure 13 is the circuit diagram of set clamp-pulse generator according to an embodiment of the invention;
Figure 14 is the circuit diagram of multiplexer according to an embodiment of the invention;
Figure 15 is the circuit diagram of write driver according to an embodiment of the invention, and wherein, write driver is in the RESET operation down;
Figure 16 is the circuit diagram of write driver according to an embodiment of the invention, and wherein, write driver is in the SET operation down;
Figure 17 describes the sequential chart that generates the set programming pulse according to one embodiment of present invention;
Figure 18 is the circuit diagram of main decoder, column decoder and storage array according to an embodiment of the invention;
Figure 19 illustration be applied to set programming pulse on the phase-change memory cell piece in accordance with another embodiment of the present invention;
Figure 20 and 21 is circuit diagrams of pre decoder in accordance with another embodiment of the present invention;
Figure 22 describes the sequential chart that generates the set programming pulse according to another embodiment of the invention;
Figure 23 is the circuit diagram of set clamp-pulse generator in accordance with another embodiment of the present invention;
Figure 24 illustration be applied to the programming pulse that resets on the phase-change memory cell piece of another embodiment according to the present invention;
Figure 25 illustration be applied to the programming pulse that resets on the phase-change memory cell piece of another embodiment according to the present invention; And
Figure 26 and 27 describes the sequential chart that generates the programming pulse that resets according to other embodiments of the invention.
The present invention describes in detail
In general, the invention is characterized in the write driver of control phase change memory device, so as according to the load between write driver and the addressable memory cell change in RESET pulse current and the SET pulse current at least one pulse width and at least one between the step-by-step counting.Like this, can avoid the undue programming of storage unit, make the unit become SET and/or the required power consumption of RESET state reliably thereby reduce.
Now by several preferably but non-limiting example the present invention is described in detail.
Fig. 8 is the circuit diagram of the phase change memory cell device 200 of the one exemplary embodiment according to the present invention.As shown in the figure, phase change memory cell device 200 comprises address buffer 210_1 and 210_2, Input Data Buffer (DIN BUF) 211, write buffer 212, pre decoder 220, write driver 230, main decoder 240, storage array 260, SET clamp-pulse generator 270 and multiplexer (MUX) 280.
Input buffer 210_1 receives Input Address signal XA0 and will output to pre decoder 220 through the address signal A0P and the A0PB of buffering.Equally, input buffer 210_2 receives Input Address signal XA1 and will output to demoder 220 through the address signal A1P and the A1PB of buffering.And, write 212 receptions of enabling signal impact damper and write enabling signal XWE and the enabling signal WEb that writes through buffering will be outputed to pre decoder 220 and multiplexer 280.
What pre decoder 220 received buffer address signals A0P, A0PB, A1P and A1PB and buffering writes enabling signal WEb, and decode address signal A00_DEC, A01_DEC, A10_DEC and A11_DEC outputed to main decoder 240, and write control signal WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and the WE_A11_DEC of decoding outputed to multiplexer 280.In this one exemplary embodiment, write control signal WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and the WE_A11_DEC of decoding represents to write which of piece 260a, 260b, 260c and 260d of storage array 260.
Main decoder 240 receives decoded signal A00_DEC, A01_DEC, A10_DEC and A11_DEC, and output block selection signal A00, A01, A10 and A11.Block selection signal A00, A01, A10 and A11 drive word line WLi, WLj, WLk and the WLl of piece 260a, 260b, 260c and the 260d of storage array 260 respectively.
SET clamp-pulse generator 270 response addresses shift and detect (ADT) signal, generate the SET_PULSE that several have different pulse widths, that is, and and SET_PULSE (A00), SET_PULSE (A01), SET_PULSE (A10) and SET_PULSE (A11).As being described in more detail later, these different SET_PULSE are used to be provided with the pulse width of writing the SET current impulse that imposes on storage array 260 selectively.
Multiplexer 280 writes write control signal WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and the WE_A11_DEC of enabling signal WEb and decoding according to buffering, selects and output one of SET_PULSE (A00), SET_PULSE (A01), SET_PULSE (A10) and SET_PULSE (A11) (as SET_CON_PULSE).More particularly, when obtaining buffering and write enabling signal WEb and allow, multiplexer 280 when WE_A00_DEC is effective, output SET_PULSE (A00); Multiplexer is exported SET_PULSE (A01) when WE_A01_DEC is effective; Multiplexer is exported SETPULSE (A10) when WE_A10_DEC is effective; And multiplexer is exported SET_PULSE (A11) when WE_A11_DEC is effective.Notice that at any given time, WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and WE_A11_EC have only one to be effective.
Depend on input data signal (DIN) from input buffer 211, write driver 230 is exported write current pulse (SDL) according to SET Current Control pulse SET_CON_PULSE (from multiplexer) or RESET Current Control pulse RESET_CON_PULSE.For example, be LOW if treat write data, write driver output has the SET programming write current pulse of the pulse width of SET_CON_PULSE definition.On the other hand, be HIGH if treat write data, write driver output has the RESET programming write current pulse of the pulse width of RESET_CON_PULSE definition.In addition, as illustrating later, programming is compared to the higher electric current of SET programming (that is Ireset>Iset), for RESET in write driver 230 output.
Column decoder 250 is fed to write current pulse SDL the selected row of storage block 160a, 160b, 160c and 160d from write driver 230.
Fig. 9 illustration definition impose on the different pulse widths of SET current controling signal (SET_CON_PULSE) of pulse width of SET write current pulse of each piece 160a, 160b, 160c and the 160d of phase-changing memory cell array 260.As shown in Figure 9, the pulse width of importing the SET current signal of piece far away (260a) is lacked than the pulse width of the SET current signal of the nearly piece of input (260d).
By being applied to piece 260a far away than the current in short bursts width, the undue programming of the storage unit of that piece is avoided during the SET write operation.This is shown in Figure 10 and 11.Suppose during the RESET state the distribution of resistance district as shown in figure 10.Then hypothesis utilizes set current pulse as shown in Figure 9 to carry out the SEG write operation.Gained distribution of resistance district under the SET state as shown in figure 11.When comparing with the Fig. 7 that discussed in the past, the distribution of resistance district is compact more, so, need less power to make piece 260a far away turn back to the RESET district.
Figure 12 is the circuit diagram of pre decoder according to an embodiment of the invention.In this special case, pre decoder 220 comprises NAND door ND1, ND2, ND3 and ND4; NOR door NOR1, NOR2, NOR3 and NOR4; And phase inverter IN1, IN2, IN3, IN4, IN5, IN6, IN7, IN8, IN9, IN10, IN11 and IN12.As shown in the figure, what pre decoder 220 received buffer address signals AOP, AOPB, A1P and A1PB and buffering writes enabling signal WEb and write control signal WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and the WE_A11_DEC of output decoder address signal A00_DEC, A01_DEC, A10_DEC and A11_DEC and decoding.In this example, when buffering write enabling signal WEb and is LOW, write control signal WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and the WE_A11_DEC of decoding had only one to be HIGH.
Figure 13 is the circuit diagram of SET clamp-pulse generator 270 according to an embodiment of the invention.In this special case, the SET clamp-pulse generator comprises NAND door ND1, ND2, ND3 and ND4; NOR door NOR1; Delay circuit D1, D2, D3 and D4; And phase inverter IN1, IN2, IN3, IN4 and IN5.Obviously, the circuit of Figure 13 is configured to export the SET_PULSE_SIGNAL of different pulse widths as shown in Figure 9.
Figure 14 is the circuit diagram of multiplexer 280 according to an embodiment of the invention.The multiplexer 280 of this special case comprises transmission gate PG1, PG2, PG3 and PG4; Phase inverter IN1, IN2, IN3, IN4, IN5 and IN6; And transistor NM1.When buffering writes enabling signal WEb and is LOW, as write control signal WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and the WE_A11_DEC of decoding corresponding one when being HIGH, output SET_PULSE (A00), (A01), (A10) and one of (A11) are as SET_CON_PULSE.
Figure 15 is the circuit diagram of write driver 230 according to an embodiment of the invention.Appointment among the figure " H ", " L ", " OFF " and " ON " expression input data are RESET programming operations of HIGH.Appointment in figure " H ", " L ", " OFF " and " ON " expression input data are that Figure 16 is identical with Figure 15 the SET programming operation of LOW.
In the special case of Figure 15 and 16, write driver circuit 230 comprises logical circuit 231, current mirror 233 and output circuit 235.Logical circuit 231 comprises transmission gate PG1 and PG2 and phase inverter IN1, IN2, IN3 and IN4.Current mirror 233 comprises transistor NM1, NM2, NM3, NM4, NM5, PM1 and PM2.Output circuit 235 comprises transistor PM3 and NM6 and phase inverter IN5.
With reference to Figure 15, in the RESET programming operation, input data (DATA) are HIGH, and it closes transmission gate PG1.At RESET_CON_PULSE is under the situation of LOW, and the output of the phase inverter IN4 of logical circuit 231 is LOW.Like this, transistor NM6 is ON, and transistor NM5 is OFF, and node ND2 becomes LOW (ground connection).As a result, the Ireset=0 shown in output current SDL becomes.On the other hand, when RESET_CON_PULSE was HIGH, the output of the phase inverter IN4 of logical circuit 231 was HIGH, and transistor NM6 becomes OFF.And because DATA is HIGH, the output of the phase inverter IN2 of logical circuit 231 is HIGH, and the transistor NM3 and the NM4 of current mirror 233 become ON.As a result, the Ireset=i1+i2 shown in output current SDL becomes.
With reference to Figure 16, in the SET programming operation, input data (DATA) are LOW, and it closes transmission gate PG2.At SET_CON_PULSE is under the situation of LOW, and the output of the phase inverter IN4 of logical circuit 231 is LOW.Like this, transistor NM6 is ON, and transistor NM5 is that OFF and node ND2 become LOW (ground connection).As a result, the Iset=0 shown in output current SDL becomes.On the other hand, when SET_CON_PULSE was HIGH, the output of the phase inverter IN4 of logical circuit 231 was that HIGH and transistor NM6 become OFF.And because DATA is LOW, the output of the phase inverter IN2 of logical circuit 231 is that the transistor NM3 and the NM4 of LOW and current mirror 233 becomes ON.As a result, the Iset=i1 shown in output current SDL becomes.
Figure 17 illustration the sequential chart of generation of explanation SET programming pulse SET_CON_PULSE.As shown in the figure, when writing enabling signal XWE and be HIGH, it is HIGH that buffering writes enabling signal WEb.And response address shifts the negative edge that detects (ATD) signal, generates the SET_CON_PULSE signal.When WEb is LOW and WE_A00_DEC when being HIGH, the SET_CON_PULSE signal is corresponding to SET_PULSE (A00); When WEb is LOW and WE_A01_DEC when being HIGH, the SET_CON_PULSE signal is corresponding to SET_PULSE (A01); When WEb is LOW and WE_A10_DEC when being HIGH, the SET_CON_PULSE signal is corresponding to SET_PULSE (A10); And when WEb be LOW and WE_A11_DEC when being HIGH, the SET_CON_PULSE signal is corresponding to SET_PULSE (A11).
For the integrality that illustrates, Figure 18 shows according to one embodiment of the invention, comprises the detailed circuit diagram of pre decoder 220-1,220-2,220-3 and 220-n, main decoder 240, column decoder 250 and storage array.In this example, each piece (BLK) of storage array comprises 256 word lines (WL), every word line WL and the coupling of several phase-change memory cells.
Will be from the output of pre decoder 220-1,220-2,220-3 and 220-n with the NOR element that imposes on main decoder 240 from the anti-phase decode address signal of phase inverter I1...In.The output of NOR element drives each bar word line WL.Column decoder 250 comprises several selection transistor Ts 1 to Tn that are coupling between corresponding write driver 230-1...230-n and the bit line BL0...BLn.
In general, above-mentioned first embodiment is characterised in that the write driver of control phase change memory device, so that change the pulse width of SET pulse current according to the load between write driver and the addressable memory cell.Like this, can avoid the undue programming of storage unit, make the unit become SET and the required power consumption of RESET state reliably thereby reduce.
Figure 19 illustration the alternate embodiment of first embodiment.That is to say that according to second embodiment of Figure 19, the write driver of control phase change memory device is so that change the step-by-step counting of SET pulse current according to the load between write driver and the addressable memory cell.Just as illustrated, the different step-by-step countings of SET current controling signal (SET_CON_PULSE) define the step-by-step counting of the SET write current pulse of each piece 260a, 260b, 260c and the 260d that impose on phase-changing memory cell array 260.As shown in figure 19, the step-by-step counting of importing the SET current signal of piece far away (260a) is less than the step-by-step counting of the SET current signal of the nearly piece of input (260d).
Figure 20 and 21 illustrations under the situation of second embodiment of the invention the pre decoder 220 of Fig. 8.In this special case, pre decoder 220 comprises NAND door ND1...ND14; NOR door NOR1...NOR4; And phase inverter IN1...IN9.Just as illustrated, what pre decoder 220 received buffer address signals A0P, A0PB, A1P and A1PB and buffering writes enabling signal WEb and write control signal WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and the WE_A11_DEC of output decoder address signal A00_DEC, A01_DEC, A10_DEC and A11_DEC and decoding.In this example, when buffering write enabling signal WEb and is LOW, the one or more of write control signal WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and the WE_A11_DEC of decoding were HIGH.
Figure 22 illustration explanation generate the sequential chart of SET programming pulse SET_CON_PULSE according to second embodiment of the invention.As shown in the figure, when writing enabling signal XWE and be HIGH, it is HIGH that buffering writes enabling signal WEb.And response address shifts the negative edge that detects (ATD) signal, generates the SET_CON_PULSE signal.
As shown in figure 22, when WEb is LOW and when having only WE_A00_DEC to be HIGH, the SET_CON_PULSE signal is corresponding to SET_PULSE (A00); When WEb is LOW and when having only WE_A00_DEC and WE_A01_DEC to be HIGH, the SET_CON_PULSE signal is corresponding to the combination of SET_PULSE (A00) and SET_PULSE (A01); When WEb is LOW and when having only WE_A00_DEC, WE_A01_DEC and WE_A10_DEC to be HIGH, the SET_CON_PULSE signal is corresponding to the combination of SET_PULSE (A00), SET_PULSE (A01) and SET_PULSE (A10); And when WEb be LOW and WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and WE_A11_DEC when all being HIGH, the SET_CON_PULSE signal is corresponding to the combination of SET_PULSE (A00), SET_PULSE (A01), SET_PULSE (A10) and SET_PULSE (A11).
Figure 23 is the circuit diagram according to the SET clamp-pulse generator 270 of Fig. 8 of second embodiment of the invention.In this special case, SET clamp-pulse generator 270 comprises NOR door NOR1; NAND door ND1; And delay circuit D1, D2, D3, D4.Obviously, the circuit of Figure 23 is configured to export as shown in figure 22 SET_PULSE signal (A00), (A01), (A10) and (A11).
In general, above-mentioned second embodiment is characterised in that the write driver of control phase change memory device, so that change the step-by-step counting of SET pulse current according to the load between write driver and the addressable memory cell.Like this, can avoid the undue programming of storage unit, make the unit become SET and the required power consumption of RESET state reliably thereby reduce.
Figure 24 illustration the alternate embodiment of first and second embodiment.That is to say that according to the 3rd embodiment of Figure 24, the write driver of control phase change memory device is so that change the pulse width of RESET pulse current according to the load between write driver and the addressable memory cell.Just as illustrated, the pulse width of different pulse widths by RESET pulse A_RESET_PULSE, B_RESET_PULSE, C_RESET_PULSE and D_RESET_PULSE that imposes on the RESET current controling signal of each piece 260a, 260b, 260c and 260d defines.As shown in figure 24, import the pulse width of RESET current signal in piece far away district (A00) greater than the pulse width of RESET current signal in input nearly piece district (A11).
Figure 25 illustration another alternate embodiment of first to the 3rd embodiment.That is to say that according to the 4th embodiment of Figure 25, the write driver of control phase change memory device is so that change the step-by-step counting of RESET pulse current according to the load between write driver and the addressable memory cell.Just as illustrated, the step-by-step counting of different step-by-step countings by RESET pulse A_RESET_PULSE, B_RESET_PULSE, C_RESET_PULSE and D_RESET_PULSE that imposes on the RESET current controling signal of each piece 260a, 260b, 260c and 260d defines.As shown in figure 25, import the step-by-step counting of RESET current signal in piece far away district (A00) greater than the pulse width of RESET current signal in input nearly piece district (A11).
Figure 26 illustration explanation generate the sequential chart of RESET programming pulse RESET_CON_PULSE according to third embodiment of the invention.As shown in the figure, when writing enabling signal XWE and be HIGH, it is HIGH that buffering writes enabling signal WEb.And response address shifts the negative edge that detects (ATD) signal, generates the RESET_CON_PULSE signal.
As shown in figure 26, when WEb is LOW and WE_A00_DEC when being HIGH, the RESET_CON_PULSE signal is corresponding to A_RESET_PULSE; When WEb is LOW and WE_A01_DEC when being HIGH, the RESET_CON_PULSE signal is corresponding to B_RESET_PULSE; When WEb is LOW and WE_A10_DEC when being HIGH, the RESET_CON_PULSE signal is corresponding to C_RESET_PULSE; And when WEb be LOW and WE_A11_DEC when being HIGH, the RESET_CON_PULSE signal is corresponding to D_RESET_PULSE.In this case, A_RESET_PULSE, B_RESET_PULSE, C_RESET_PULSE and D_RESET_PULSE are as shown in figure 24.
Figure 27 illustration explanation generate the sequential chart of RESET programming pulse RESETCON_PULSE according to fourth embodiment of the invention.As shown in the figure, when writing enabling signal XWE and be HIGH, it is HIGH that buffering writes enabling signal WEb.And response address shifts the negative edge that detects (ATD) signal, generates the RESET_CON_PULSE signal.
As shown in figure 27, when WEb is LOW and WE_A00_DEC, WE_A01_DEC, WE_A10_DEC and WE_A11_DEC when being HIGH, the RESET_CON_PULSE signal is corresponding to the combination of A_RESET_PULSE, B_RESET_PULSE, C_RESET_PULSE and D_SET_PULSE; When WEb is LOW and when having only WE_A01_DEC, WE_A10_DEC and WE_A11_DEC to be HIGH, the RESET_CON_PULSE signal is corresponding to the combination of A_RESET_PULSE, B_RESET_PULSE and C_RESET_PULSE; When WEb is LOW and when having only WE_A10_DEC and WE_A11_DEC to be HIGH, the RESET_CON_PULSE signal is corresponding to the combination of A_RESET_PULSE and B_RESET_PULSE; And when WEb be LOW and when having only WE_A11_DEC to be HIGH, the RESET_CON_PULSE signal is corresponding to A_RESET_PULSE.
In general, above-mentioned third and fourth embodiment is characterised in that the write driver of control phase change memory device, so that change the pulse width or the step-by-step counting of RESET pulse current according to the load between write driver and the addressable memory cell.Like this, can avoid the undue programming of storage unit, make the unit become the required power consumption of RESET state reliably thereby reduce.
Should be noted that, also can realize the combination of the foregoing description.For example, can change the pulse width and/or the step-by-step counting of RESET and the pulse of SET write current according to the load of being write phase-change memory cell.
In accompanying drawing that discloses the embodiment of the invention and explanation, comprised specific examples.This discussion is only used on general and descriptive meaning, and the purpose that can not be used to limit.Therefore, should be understood that the present invention annotates by appended claims, rather than annotate by one exemplary embodiment.And those of ordinary skill in the art can correct and improvement under the situation of the spirit and scope that do not depart from the embodiment of the invention.

Claims (48)

1. phase change cells memory device comprises:
Several phase-change memory cells, each all comprises hearth electrode, top electrode and the phase change layer between the two, this phase change layer is by can a programmable block of material forming between amorphous state and crystalline state;
Address circuit is used to select at least one storage unit;
Write driver is used to generate the storage unit that address circuit is selected and is programmed for amorphous reset pulse electric current, and the set pulse current that the storage unit that address circuit is selected is programmed for crystalline state; And
Write driver control circuit with the address circuit coupling, be used for according to the load between the storage unit of write driver and address circuit selection, the pulse width of at least one in change reset pulse electric current and the set pulse current and at least one in the step-by-step counting.
2. memory device according to claim 1, wherein, the write driver control circuit is according to the load between the storage unit of write driver and address circuit selection, the pulse width of at least one in change reset pulse electric current and the set pulse current.
3. memory device according to claim 2, wherein, the pulse width of reset pulse electric current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit reduces the pulse width of set pulse current.
4. memory device according to claim 2, wherein, the pulse width of set pulse current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit reduces the pulse width of reset pulse electric current.
5. memory device according to claim 2, wherein, the pulse width of reset pulse electric current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit increases the pulse width of set pulse current.
6. memory device according to claim 2, wherein, the pulse width of set pulse current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit increases the pulse width of set pulse current.
7. memory device according to claim 2, wherein, along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit increases the pulse width of set pulse current and reset pulse electric current.
8. memory device according to claim 1, wherein, the write driver control circuit is according to the load between the storage unit of write driver and address circuit selection, the step-by-step counting of at least one in change set pulse current and the reset pulse electric current.
9. memory device according to claim 8, wherein, the step-by-step counting of reset pulse electric current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit reduces the step-by-step counting of set pulse current.
10. memory device according to claim 8, wherein, the step-by-step counting of set pulse current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit reduces the step-by-step counting of reset pulse electric current.
11. memory device according to claim 8, wherein, the step-by-step counting of reset pulse electric current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit increases the step-by-step counting of set pulse current.
12. memory device according to claim 8, wherein, the step-by-step counting of set pulse current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit increases the step-by-step counting of set pulse current.
13. memory device according to claim 8, wherein, along with the load between the storage unit of write driver and address circuit selection increases, the write driver control circuit increases the step-by-step counting of set pulse current and reset pulse electric current.
14. memory device according to claim 1, wherein, memory device is a phase change random access memory devices.
15. a phase change cells memory device comprises:
Several memory cell blocks, each all comprises several phase-change memory cells, wherein, each of phase-change memory cell all comprises hearth electrode, top electrode and the phase change layer between the two, and this phase change layer is by can a programmable block of material forming between amorphous state and crystalline state;
Address circuit is used for one of select storage unit piece;
Write driver, the storage unit that is used for generating selectively the memory cell block that address circuit is selected is programmed for the reset pulse electric current of amorphous set state, and the storage unit of the memory cell block that address circuit is selected is programmed for the set pulse current of crystalline state; And
The write driver control circuit is used for the memory cell block according to the address circuit selection, the pulse width of at least one in change set pulse current and the reset pulse electric current and at least one in the step-by-step counting.
16. memory device according to claim 15, wherein, the write driver control circuit is according to the load between the memory cell block of write driver and address circuit selection, the pulse width of at least one in change reset pulse electric current and the set pulse current.
17. memory device according to claim 16, wherein, the write driver control circuit comprises clamp-pulse generator, is used to generate several control waves that have different pulse widths respectively; And multiplexer, be used for memory cell block according to the address circuit selection, selectively one of control wave is imposed on write driver.
18. memory device according to claim 17, wherein, clamp-pulse generator shifts detection signal by the address and starts.
19. memory device according to claim 15, wherein, the write driver control circuit is according to the load between the memory cell block of write driver and address circuit selection, the step-by-step counting of at least one in change reset pulse electric current and the set pulse current.
20. memory device according to claim 19, wherein, the write driver control circuit comprises clamp-pulse generator, is used to generate several control waves that have different timing respectively; And multiplexer, be used for the memory cell block selected according to address circuit, selectively one or several of control wave imposed on write driver.
21. memory device according to claim 20, wherein, clamp-pulse generator shifts detection signal by the address and starts.
22. memory device according to claim 15, wherein, memory device is a phase change random access memory devices.
23. a phase change cells memory device comprises:
Phase-changing memory cell array, comprise several word lines, several bit lines and be in word line and several phase change cells of each zone of intersection of bit line, wherein, memory cell array comprises several storage blocks definition of at least one word line by each, and each of phase-change memory cell all comprise can be between amorphous state and crystalline state a programmable block of material;
Address decoder, one of storage block selecting the word line of each storage block, and is selected in the line of input address that is used to decode;
Bit line select circuitry is used for selecting at least one bit line according to the input column address;
With the write driver of bit line select circuitry coupling, be used for generating selectively and make the storage unit on the selected bit line and selected word line point of crossing in the selected storage block be programmed for the reset pulse electric current of amorphous set state and make the storage unit on the selected bit line and selected word line point of crossing in the selected storage block be programmed for the set pulse current of crystalline state; And
The write driver control circuit is used for the memory cell block according to the address decoder selection, the pulse width of at least one in change set pulse current and the reset pulse electric current and at least one in the step-by-step counting.
24. memory device according to claim 23, wherein, the write driver control circuit is according to the load between the memory cell block of write driver and address circuit selection, the pulse width of at least one in change reset pulse electric current and the set pulse current.
25. memory device according to claim 24, wherein, the write driver control circuit comprises clamp-pulse generator, is used to generate several control waves that have different pulse widths respectively; And multiplexer, be used for memory cell block according to the address circuit selection, selectively one of control wave is imposed on write driver.
26. memory device according to claim 25, wherein, address decoder generates several storage blocks and writes enabling signal, and multiplexer response storage block writes enabling signal, selectively one of control wave is imposed on write driver.
27. memory device according to claim 25, wherein, clamp-pulse generator shifts detection signal by the address and starts.
28. memory device according to claim 26, wherein, clamp-pulse generator shifts detection signal by the address and starts.
29. memory device according to claim 23, wherein, the write driver control circuit is according to the load between the memory cell block of write driver and address circuit selection, the step-by-step counting of at least one in change reset pulse electric current and the set pulse current.
30. memory device according to claim 29, wherein, the write driver control circuit comprises clamp-pulse generator, is used to generate several control waves that have different timing respectively; And multiplexer, be used for the memory cell block selected according to address circuit, selectively one or several of control wave imposed on write driver.
31. memory device according to claim 30, wherein, address decoder generates several storage blocks and writes enabling signal, and multiplexer response storage block writes enabling signal, selectively one of control wave is imposed on write driver.
32. memory device according to claim 30, wherein, clamp-pulse generator shifts detection signal by the address and starts.
33. memory device according to claim 31, wherein, clamp-pulse generator shifts detection signal by the address and starts.
34. memory device according to claim 23, wherein, memory device is a phase change random access memory devices.
35. a programming contains the method for the phase change memory device of several phase-change memory cells, each of phase-change memory cell all comprise can be between amorphous state and crystalline state a programmable block of material, described method comprises:
Utilize write driver to generate the storage unit that address circuit is selected selectively and be programmed for amorphous reset pulse electric current, and the set pulse current that the storage unit that address circuit is selected is programmed for crystalline state; And
According to the load between write driver and the programmable storage unit, change reset pulse electric current and the pulse width of set pulse current and at least one in the step-by-step counting.
36. method according to claim 35, wherein, according to the load between the storage unit of write driver and address circuit selection, the pulse width of at least one in change reset pulse electric current and the set pulse current.
37. method according to claim 36, wherein, the pulse width of reset pulse electric current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, reduces the pulse width of set pulse current.
38. method according to claim 36, wherein, the pulse width of set pulse current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, reduces the pulse width of reset pulse electric current.
39. method according to claim 36, wherein, the pulse width of reset pulse electric current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, increases the pulse width of set pulse current.
40. method according to claim 36, wherein, the pulse width of set pulse current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, increases the pulse width of set pulse current.
41. method according to claim 36 wherein, along with the load between the storage unit of write driver and address circuit selection increases, increases the pulse width of set pulse current and reset pulse electric current.
42. method according to claim 35, wherein, according to the load between the storage unit of write driver and address circuit selection, the step-by-step counting of at least one in change set pulse current and the reset pulse electric current.
43. according to the described method of claim 42, wherein, the step-by-step counting of reset pulse electric current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, reduces the step-by-step counting of set pulse current.
44. according to the described method of claim 42, wherein, the step-by-step counting of set pulse current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, reduces the step-by-step counting of reset pulse electric current.
45. according to the described method of claim 42, wherein, the step-by-step counting of reset pulse electric current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, increases the step-by-step counting of set pulse current.
46. according to the described method of claim 42, wherein, the step-by-step counting of set pulse current is a constant, and along with the load between the storage unit of write driver and address circuit selection increases, increases the step-by-step counting of set pulse current.
47., wherein,, increase the step-by-step counting of set pulse current and reset pulse electric current along with the load between the storage unit of write driver and address circuit selection increases according to the described method of claim 42.
48. method according to claim 35, wherein, memory device is a phase change random access memory devices.
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