CN1648604A - Interference type silicon base chip optical gyroscope - Google Patents
Interference type silicon base chip optical gyroscope Download PDFInfo
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- CN1648604A CN1648604A CN 200510049066 CN200510049066A CN1648604A CN 1648604 A CN1648604 A CN 1648604A CN 200510049066 CN200510049066 CN 200510049066 CN 200510049066 A CN200510049066 A CN 200510049066A CN 1648604 A CN1648604 A CN 1648604A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 82
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 22
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 22
- 239000010703 silicon Substances 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000012545 processing Methods 0.000 claims abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 24
- 239000000377 silicon dioxide Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 9
- 235000012239 silicon dioxide Nutrition 0.000 claims description 9
- 229910052681 coesite Inorganic materials 0.000 claims description 8
- 229910052906 cristobalite Inorganic materials 0.000 claims description 8
- 229910052682 stishovite Inorganic materials 0.000 claims description 8
- 229910052905 tridymite Inorganic materials 0.000 claims description 8
- 238000005516 engineering process Methods 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 6
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 4
- 230000007062 hydrolysis Effects 0.000 claims description 4
- 238000006460 hydrolysis reaction Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 238000001259 photo etching Methods 0.000 claims description 2
- 239000013307 optical fiber Substances 0.000 abstract description 9
- 239000000835 fiber Substances 0.000 abstract 1
- 238000013461 design Methods 0.000 description 6
- 230000010287 polarization Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- QWVYNEUUYROOSZ-UHFFFAOYSA-N trioxido(oxo)vanadium;yttrium(3+) Chemical compound [Y+3].[O-][V]([O-])([O-])=O QWVYNEUUYROOSZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000243 photosynthetic effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- WQEVDHBJGNOKKO-UHFFFAOYSA-K vanadic acid Chemical compound O[V](O)(O)=O WQEVDHBJGNOKKO-UHFFFAOYSA-K 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
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Abstract
The interferential silicon chip micro optical gyroscope has successively connected detector, sample circuit, DSP circuit, modulating driver circuit, Y-waveguide modulator, beam splitter, light source, and spiral light waveguide with upper layer spiral light waveguide, lower layer spiral light waveguide and Si substrate for spiral light waveguide. The present invention is superior to optical fiber gyroscope, which has great fiber length and great temperature and vibration influence, and has small size, high reliability and high precision. The present invention is also superior to micro mechanical gyroscope, and has light source, optical device and processing circuit integrated on one chip and thus high precision and high reliability.
Description
Technical field
The present invention relates to a kind of interference type silicon base chip optical gyroscope.
Technical background
High precision, highly reliable, small light are that Inertial Navigation Gyro pursues one's goal always.Utilize the optical gyroscope of Sagnac effect to compare, just meet this target with the various mechanical gyros of the first generation.Therefore the laser gyro (ROG) in the optical gyroscope just becomes second generation gyro, is the innovation product of nineteen seventies; Optical fibre gyro (FOG) is a third generation gyro, is the innovation product of nineteen nineties, and FOG has entered complete and used at present; Micro-optical gyroscope (MOG) can be described as the 4th generation gyro, be the new product of 21st century.MOG compares with micromechanical gyro (MEMS gyro), though size is more bigger, precision is wanted high 1～2 order of magnitude.Micro-optical gyroscope is compared with optical fibre gyro, has outstanding advantage, is the developing direction of optical circulator technology.
Summary of the invention
The purpose of this invention is to provide a kind of interference type silicon base chip optical gyroscope.
It has detector, sample circuit, digital signal processing circuit, modulation drive circuit, Y waveguide modulator, beam splitter, the detector that connects successively, beam splitter and light source join, Y waveguide modulator and spiral optical waveguide are joined, and the spiral optical waveguide has last helical layer optical waveguide, the Si substrate of helical layer optical waveguide, spiral optical waveguide down.
Beneficial effect of the present invention
1) compare with optical fibre gyro, micro-optical gyroscope replaces optical fiber with optical waveguide, and overcoming the deficiency, particularly optical fiber of discrete component combination, long (shortcoming that 300～500m) temperature and vibration effect are big can obtain the littler high reliability of size, high precision optical circulator.
2) compare with micromechanical gyro, it is approaching to obtain size, the full curing of movement-less part, the gyro that precision is higher, can manufacture.
3) new optical waveguide is to realize on silicon (Si) base, so micro-optical gyroscope is the chip gyro.Light source, optical device, treatment circuit can be made on the silicon, improve precision and reliability.
In sum, seeing that from precision and integrated level micro-optical gyroscope is the gyro of new generation that is better than micromechanical gyro, is in recent years in the technical developing direction of gyro.
Description of drawings
Fig. 1 is an interference type silicon base chip optical gyroscope structural representation of not being with quantum control light path;
Fig. 2 is the interference type silicon base chip optical gyroscope structural representation of band quantum control light path;
Fig. 3 is the sectional view of spiral optical waveguide of the present invention;
Fig. 4 is the vertical view of spiral optical waveguide of the present invention;
Fig. 5 is the upward view of spiral optical waveguide of the present invention;
Fig. 6 is the sectional view of upper strata of the present invention optical waveguide;
Fig. 7 is a spiral optical waveguide active-mode active optical waveguide schematic diagram of the present invention;
Fig. 8 is a beam splitter light source polarization spectro schematic diagram of the present invention;
Fig. 9 is a quantum control light path principle figure of the present invention;
Lower floor's optical waveguide 7 of the upper strata optical waveguide 6 of light source 1, detector 2, beam splitter 3, Y waveguide modulator 4, spiral optical waveguide 5, spiral optical waveguide, spiral optical waveguide, modulation drive circuit 8, digital signal processing circuit 9, sample circuit 10, quantum control light path 11, the Si substrate 12 of spiral optical waveguide, SiO2 layer 13, YiVO among the figure
4Birefringece crystal 14, magnetic opticity device 15, frequency shifter 16, phase compensator 17, the first Y waveguide device, 18, the second Y waveguide devices 19.
Embodiment
Micro-optical gyroscope replaces optical fiber with silica-based optical waveguide, and other optical device are integrated on the silicon chip, and the structure composition that the present invention adopts is:
As shown in Figure 1, interfere type micro-optical gyroscope (IMOG) structure.Interference type silicon base chip optical gyroscope has detector 2, sample circuit 10, digital signal processing circuit 9, modulation drive circuit 8, Y waveguide modulator 4, beam splitter 3, the detector 2 that connects successively, beam splitter 3 joins with light source 1, Y waveguide modulator 4 joins with spiral optical waveguide 5, and spiral optical waveguide 5 has last helical layer optical waveguide 6, the Si substrate 12 of helical layer optical waveguide 7, spiral optical waveguide down.Last helical layer optical waveguide 6, down helical layer optical waveguide 7 be positioned at same silicon base above, relatively and with one heart, the outer end is connected with the two ends of Y waveguide respectively.From the light beam of light source 1 behind beam splitter 3, Y waveguide 4, form clockwise light beam (CW) and counterclockwise light beam (CCW) enter the input end of two spirality waveguides 6,7 respectively, turn back to Y waveguide 4 through input end again, on detector 2, form the interference strength signal through beam splitter 3.According to the Sagnac effect, CW and CCW two light beams produce phasic difference when angular velocity, and its value is proportional to velocity of rotation.Y waveguide utilizes driving circuit 8 to realize position modulation mutually to CW or CCW by digital signal processing circuit 9, and modulated signal obtains output information after by the treatment circuit demodulation.Light source, beam splitter, Y waveguide, detector, treatment circuit etc. all can adopt the technology of present high-precision optical fiber gyro to carry out when the advantage of this programme was to test, and this technology has reached the engineering level of application.
As shown in Figure 2, interfere type micro-optical gyroscope (IMOG) structure is characterized in that between light source 1 and beam splitter 3 have a quantum control light path 11.
As shown in Figure 3, the sectional view of spiral optical waveguide is lower floor's optical waveguide 7, the SiO2 layer 13 of upper strata optical waveguide 6, SiO2 layer 13, the spiral optical waveguide of SiO2 layer 13, spiral optical waveguide, the Si substrate 12 of spiral optical waveguide from top to bottom successively.
As shown in Figure 4, the vertical view of spiral optical waveguide is clockwise spiral optical waveguide.
As shown in Figure 5, the vertical view of spiral optical waveguide is counterclockwise spiral optical waveguide.
As shown in Figure 6, technological design of low-loss disc waveguide design technology and micro-machined scheme.Adopt the radiation loss simulation of the method for Full-FDTD to curved waveguide, the index modulation of curved waveguide is 0.02, radius-of-curvature 4mm, duct width 3 μ m, the degree of depth 1.5 μ m.Technological design that we propose according to Design Theory and micro-machined scheme are as shown in Figure 3.The main method and the polar coordinates laser direct-writing technology of flame hydrolysis (FHD) of adopting realizes.Flame hydrolysis is the method for making preform, the purity of the SiO2 waveguide of being made by this method is very high, absorption loss is little does substrate with quartz or silicon, method with flame hydrolysis generates SiO2 substrate and ducting layer thereon, with technology photoetching of polar coordinates laser direct-writing and etching spiral optical waveguide, one deck coating of growing in the above again.The bent lightguide layer can adopt the material of doping, as the Al to the employing er-doped/ytterbium of 1550nm wavelength
2O
3, then be the SiO2 that mixes Ge to the 1310nm wavelength.The degree of depth of optical waveguide and width can make the loss of waveguide reach minimum according to the method optimal design of theoretical research model with Full-FDTD.
As shown in Figure 7, the design concept of active-mode active optical waveguide.The spiral optical waveguide adopts directional light pumping and microlens array, and waveguide material is the SiO of er-doped/ytterbium
2The loss of straight wave guide and curved waveguide at present is still bigger, influences realization and the precision of MOG, before not making a breakthrough technically.We propose to adopt the method for active waveguide amplifier, and this is compensation optical loss and the effective way that improves precision.Adopt the mode of laser side pump, can realize that waveguide material is the SiO of er-doped/ytterbium with semiconductor laser or LD pumping and microlens array
2
As shown in Figure 8, beam splitter light source polarization spectro schematic diagram.Beam splitter 3 has YiVO
4Birefringece crystal 14, magnetic opticity device 15.In view of the loss in the silica-based optical waveguide and active curved waveguide amplifier do not make a breakthrough at present as yet, loss is much larger than the loss of Optical Fiber Transmission.For improving the transmission light intensity in the micro-optical gyroscope, adoptable polarization spectro scheme.This scheme is with having the vanadic acid yttrium (YiVO of birefringence effect greatly
4) alternative 2 * 2 traditional coupling mechanisms of crystal, the utilization ratio of light source is improved more than 4 times, be equivalent to silica-based optical waveguide length and improve more than 4 times, to guarantee the sensitivity of micro-optical gyroscope.In Fig. 5, the emergent light of SLD light source is full polarization state, enter yttrium vanadate crystal 14 backs birefringence takes place, e light wherein is after magneto-optical rotator 15, can all enter micro-optical gyroscope, and return again through after the magneto-optical rotator and become o light, arrive detector through yttrium vanadate crystal by the Y modulator, therefore in this scheme, energy of light source can utilize 50%.And in tradition 2 * 2 coupling mechanism schemes, twice of light beam is through 2 * 2 coupling mechanisms, and luminous energy only be 1/4 of a light source gross energy, and when the light of polarization state enters the Y waveguide modulator entirely, lose half again, so energy of light source has only utilized 12.5%.
As shown in Figure 9, quantum control light path.Quantum control light path 11 has the first Y waveguide device 18, the first Y waveguide device 18 joins through phase compensator 17, frequency shifter 16 and the second Y waveguide device 19 respectively.Optical waveguide is the base components of integrated optical circuit, and in order to realize the superperformance of optical integrated device, the utmost point needs low-loss waveguide.By the loss of quantum coherent control exploration integrated light guide, can improve the performance of waveguide device greatly.Light comes out from light source 1, be divided into two-beam through first Y waveguide device 18, a branch of light enters second Y waveguide device 19 through phase compensator 17, another Shu Guang also enters second Y waveguide device 19 and photosynthetic being in the same place of first bundle through frequency shifter 16, enters beam splitter 3 again.
Claims (7)
1. interference type silicon base chip optical gyroscope, it is characterized in that, it has detector (2), sample circuit (10), digital signal processing circuit (9), modulation drive circuit (8), Y waveguide modulator (4), beam splitter (3), the detector (2) that connects successively, beam splitter (3) joins with light source (1), Y waveguide modulator (4) joins with spiral optical waveguide (5), and spiral optical waveguide (5) has last helical layer optical waveguide (6), the Si substrate (12) of helical layer optical waveguide (7), spiral optical waveguide down.
2. a kind of interference type silicon base chip optical gyroscope according to claim 1 is characterized in that, is connected with quantum control light path (11) between described light source (1) and detector (2).
3. a kind of interference type silicon base chip optical gyroscope according to claim 1 is characterized in that, described beam splitter (3) has YiVO
4Birefringece crystal (14), magnetic opticity device (15).
4. a kind of interference type silicon base chip optical gyroscope according to claim 1, it is characterized in that described quantum control light path (11) has the first Y waveguide device (18) and joins with the second Y waveguide device (19) through phase compensator (17), frequency shifter (16) respectively.
5. a kind of interference type silicon base chip optical gyroscope according to claim 1, it is characterized in that, described optical waveguide is to do substrate with quartz glass or silicon, method with flame hydrolysis generates SiO2 substrate and ducting layer thereon, form the spiral optical waveguide with technology photoetching of polar coordinates laser direct-writing and etching technique, the superstratum of growing in the above again forms the low-loss optically waveguide.
6. a kind of interference type silicon base chip optical gyroscope according to claim 1, it is characterized in that, describedly go up helical layer optical waveguide (6), (7) two spiral optical waveguides of helical layer optical waveguide are positioned on the same one side at the bottom of the silicon wafer-based down, both are relative and concentric, spiral optical waveguide outer end is connected with the two ends of Y waveguide respectively, forms the interfere type optical waveguide structure.
7. a kind of interference type silicon base chip optical gyroscope according to claim 1 is characterized in that, described spiral optical waveguide adopts directional light pumping and microlens array, and waveguide material is the SiO of er-doped/ytterbium
2
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100490660A CN100367002C (en) | 2005-02-05 | 2005-02-05 | Interference type silicon base chip optical gyroscope |
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| CNB2005100490660A CN100367002C (en) | 2005-02-05 | 2005-02-05 | Interference type silicon base chip optical gyroscope |
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| CN1648604A true CN1648604A (en) | 2005-08-03 |
| CN100367002C CN100367002C (en) | 2008-02-06 |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101858745A (en) * | 2010-06-21 | 2010-10-13 | 中北大学 | All solid state micro-opto-electro-mechanical gyro based on annular resonant cavity |
| WO2010118601A1 (en) * | 2009-04-15 | 2010-10-21 | 东南大学 | Integrated optical fiber gyroscope chip based on surface plasmon polariton waveguide |
| CN1945209B (en) * | 2006-10-20 | 2011-01-12 | 北京航空航天大学 | Combined modulating and demodulating method for inhibiting optic fiber gyroscope cross interference |
| CN1952601B (en) * | 2006-11-15 | 2011-04-13 | 北京航空航天大学 | Digital modulation argument adjusting instrument of optical fibre gyro based on FPGA |
| CN102927979A (en) * | 2012-11-19 | 2013-02-13 | 中国电子科技集团公司第四十四研究所 | Fiber-optic gyroscope and method for detecting optical fiber coupling quality online in manufacturing process of fiber-optic gyroscope |
| CN105204289A (en) * | 2014-06-17 | 2015-12-30 | 中国科学院物理研究所 | Preparing method for three-dimensional plasmon optical focusing structure |
| CN108180978A (en) * | 2018-01-30 | 2018-06-19 | 广州天长通信技术有限公司 | A kind of combination PGC technologies and the method and device of Φ-OTDR technique detection optical fiber vibration |
| CN110146109A (en) * | 2019-05-17 | 2019-08-20 | 浙江大学 | A kind of two-dimentional compensation method of optical fibre gyro magnetic temperature crosslinking coupling error |
| CN112965270A (en) * | 2021-02-05 | 2021-06-15 | 中国电子科技集团公司第四十四研究所 | Lithium niobate thin film double Y branch optical waveguide modulator adopting curve optical waveguide connection |
| CN112985370A (en) * | 2021-04-30 | 2021-06-18 | 瑞燃(上海)环境工程技术有限公司 | Anti-irradiation wide-spectrum high-precision optical fiber gyroscope |
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| DE4027024A1 (en) * | 1990-08-27 | 1992-03-05 | Standard Elektrik Lorenz Ag | FIBER GYRO |
| JPH0650764A (en) * | 1992-07-29 | 1994-02-25 | Japan Aviation Electron Ind Ltd | Light-interference angular-velocity meter |
| JPH0868640A (en) * | 1994-08-31 | 1996-03-12 | Nippondenso Co Ltd | Interference type optical gyro device |
| CN1338613A (en) * | 2001-10-12 | 2002-03-06 | 章燕申 | Nevigation-class cyclic interference type integrated optical gyroscope |
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2005
- 2005-02-05 CN CNB2005100490660A patent/CN100367002C/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1945209B (en) * | 2006-10-20 | 2011-01-12 | 北京航空航天大学 | Combined modulating and demodulating method for inhibiting optic fiber gyroscope cross interference |
| CN1952601B (en) * | 2006-11-15 | 2011-04-13 | 北京航空航天大学 | Digital modulation argument adjusting instrument of optical fibre gyro based on FPGA |
| US8532443B2 (en) | 2009-04-15 | 2013-09-10 | Southeast University | Integrated optical fiber gyroscope chip based on surface plasmon polariton waveguide |
| WO2010118601A1 (en) * | 2009-04-15 | 2010-10-21 | 东南大学 | Integrated optical fiber gyroscope chip based on surface plasmon polariton waveguide |
| CN101858745B (en) * | 2010-06-21 | 2011-08-31 | 中北大学 | All solid state micro-opto-electro-mechanical gyro based on annular resonant cavity |
| CN101858745A (en) * | 2010-06-21 | 2010-10-13 | 中北大学 | All solid state micro-opto-electro-mechanical gyro based on annular resonant cavity |
| CN102927979A (en) * | 2012-11-19 | 2013-02-13 | 中国电子科技集团公司第四十四研究所 | Fiber-optic gyroscope and method for detecting optical fiber coupling quality online in manufacturing process of fiber-optic gyroscope |
| CN102927979B (en) * | 2012-11-19 | 2015-04-08 | 中国电子科技集团公司第四十四研究所 | Fiber-optic gyroscope and method for detecting optical fiber coupling quality online in manufacturing process of fiber-optic gyroscope |
| CN105204289A (en) * | 2014-06-17 | 2015-12-30 | 中国科学院物理研究所 | Preparing method for three-dimensional plasmon optical focusing structure |
| CN105204289B (en) * | 2014-06-17 | 2020-01-07 | 中国科学院物理研究所 | Preparation method of three-dimensional plasmon optical focusing structure |
| CN108180978A (en) * | 2018-01-30 | 2018-06-19 | 广州天长通信技术有限公司 | A kind of combination PGC technologies and the method and device of Φ-OTDR technique detection optical fiber vibration |
| CN110146109A (en) * | 2019-05-17 | 2019-08-20 | 浙江大学 | A kind of two-dimentional compensation method of optical fibre gyro magnetic temperature crosslinking coupling error |
| CN112965270A (en) * | 2021-02-05 | 2021-06-15 | 中国电子科技集团公司第四十四研究所 | Lithium niobate thin film double Y branch optical waveguide modulator adopting curve optical waveguide connection |
| CN112985370A (en) * | 2021-04-30 | 2021-06-18 | 瑞燃(上海)环境工程技术有限公司 | Anti-irradiation wide-spectrum high-precision optical fiber gyroscope |
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| CN100367002C (en) | 2008-02-06 |
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