CN1382957A - Integrated multifunctional optical lithium niobate chip for optical gyro - Google Patents
Integrated multifunctional optical lithium niobate chip for optical gyro Download PDFInfo
- Publication number
- CN1382957A CN1382957A CN 02112000 CN02112000A CN1382957A CN 1382957 A CN1382957 A CN 1382957A CN 02112000 CN02112000 CN 02112000 CN 02112000 A CN02112000 A CN 02112000A CN 1382957 A CN1382957 A CN 1382957A
- Authority
- CN
- China
- Prior art keywords
- optical
- lithium niobate
- symmetrical
- integrated
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Gyroscopes (AREA)
Abstract
The invention relates to the multifunctional integrated optical chips that is made of lithium niobate and used in the optical gyro. The polarizer, the symmetrical Y optical tapping element, the two-phase modulator and the two input/output coupler of the resonant cavity are integrated on the lithium niobate substrate in turn from the input end to the outupt end. Each of the phase modulator is composed of the wave-guide and electrode which is on the 2-branch path wave-guide of the symmetrical Y optical tapping element. Also each coupler is on the 2-branch path wave-guide of the symmetrical Y optical tapping element respectively. The integrated optical chips make the parts of the optical path get the integration simplified, increase stability and reduce size.
Description
Technical field
The present invention relates to the light path of a kind of light path of optical gyroscope, particularly a kind of resonance type optical gyroscope.
Background technology
Optical gyroscope is a kind of novel angular velocity Sensitive Apparatus with great value.From a structural point, optical gyroscope is divided into interfere type optical gyroscope and resonance type optical gyroscope.Though the interfere type optical gyroscope has obtained successful Application in many traditional navigation field, for high precision interfere type optical gyroscope, the research that overcome temperature drift, reduce source noise, reduces cost is still underway.Resonance type optical gyroscope is by laser instrument, polarizer, Symmetric Y optical branching device, 2 I/O coupling mechanisms, resonator cavity coupling mechanism and optical fiber or the wave guide ring shaped resonant cavity of 2 symmetrical phase-modulator resonant cavity constitute in the Y shunt respectively, the coupling mechanism that uses in the light path (comprising optical branching device) all is that the guarantor is inclined to one side, though it has the higher detection precision, dynamic range is big, but the optical device that separates exists volume big, the cost height, the light path devices complexity, stability is owed problems such as height.Want to make optical gyroscope to be widely used in the civil areas such as auto navigation, aircraft navigation, reduce cost, improve cost performance and just become a main problem.
Summary of the invention
The multi-functional lithium niobate integrated optics chip that the purpose of this invention is to provide the I/O coupling mechanism that comprises polarizer, shunt, phase-modulator resonant cavity that a kind of optical gyroscope uses.
The objective of the invention is to realize: on lithium niobate substrate, from the input end to the output terminal, the integrated successively polarizer that constitutes by waveguide, Symmetric Y optical branching device, constituting 2 symmetrical phase-modulators in the shunt waveguide of Symmetric Y optical branching device by waveguide and electrode, constituting 2 I/O coupling mechanisms of symmetrical resonator cavity in the shunt waveguide at the Symmetric Y optical branching device by 2 waveguides respectively respectively by following proposal.
The present invention utilizes integrated light guide and device on lithium niobate substrate, thereby the light path devices that resonance type optical gyroscope is separated obtains integrated simplification, has increased stability, has reduced volume, has reduced cost.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the structural representation of former resonance type optical gyroscope.
Embodiment
With reference to Fig. 1,, make 2 shunt waveguides of Symmetric Y optical branching device 2 can finish 50: 50 light equal distribution function at integrated 1 polarizer 1 and the Symmetric Y optical branching device 2 that constitutes by waveguide of input end of the present invention.Make along separate routes the symmetrical phase-modulator 3 that constitutes by waveguide and lumped parameter structure electrode in the waveguides respectively at 2 of Symmetric Y optical branching device 2, during the electrode of elected suitable length, can guarantee bandwidth required for the present invention and operating voltage.At its output terminal is output terminal 7,8 places of 2 shunt waveguides of Symmetric Y optical branching device 2, integrated 2 symmetrical coupling ratios that are made of 2 waveguides are 50: 50 directional coupler, I/O coupling mechanism 6 as the optics ring resonator, its coupling ratio depends on the spacing between the two straight parallel waveguides and the length of parallel coupled end, and 4,5 is the output terminal of optical gyroscope.Specific design parameter of the present invention depends on the concrete manufacture craft process of lithium niobate waveguide and device.Selected lithium niobate monomode optical waveguide will have and the refringence distribution and single mode waveguide size of communicating by letter and mating as far as possible with standard single-mode fiber.Simulate on this basis and optimize analysis, choose other parameter again.
The present invention can utilize the annealing proton exchange method on the lithium niobate substrate to realize that its manufacturing process steps is: (1) at first prepares reticle.(2) lithium niobate substrate is made the standard substrate sheet through cutting, corase grind, finishing polish.(3) on lithium niobate substrate, evaporate the thick aluminium film of 1 μ m with vacuum evaporator.(4) by reticle the aluminium film of lithium niobate substrate is carried out photoetching with litho machine.(5) on its substrate, prepare the aluminium mask pattern with phosphoric acid corrosion liquid.(6) in benzoic acid crystal liquation, carry out proton exchange again, the preparation waveguide.(7) annealing.(8) alignment lumped parameter structure aluminium electrode pattern in the above then.(9) at last its end face is handled, and finished coupling with polarization maintaining optical fibre.
With reference to Fig. 2, A is a laser instrument, and 1 is polarizer, and 2 is shunt, 3 is phase-modulator, and D1, D2 are photodetector, and 4,5 is the optical gyroscope output terminal, 6 is the I/O coupling mechanism of resonator cavity, and C is the resonator cavity coupling mechanism, and L is optical fiber or wave guide ring shaped resonant cavity.
If connect laser instrument A at input end of the present invention, between output terminal 7,8, connect resonator cavity coupling mechanism C, on resonator cavity coupling mechanism C, arrange optical fiber or wave guide ring shaped resonant cavity L, just constitute the resonance type optical gyroscope device behind arranged light electric explorer D1, the D2 respectively at output terminal 4,5 places again.
Claims (1)
1, a kind of integrated multifunctional optical lithium niobate chip for optical gyro, it is characterized in that: on lithium niobate substrate, from the input end to the output terminal, the integrated successively polarizer that constitutes by waveguide (1), Symmetric Y optical branching device (2), constituting symmetrical 2 phase-modulators (3) in the shunt waveguide of Symmetric Y optical branching device (2) by waveguide and electrode, in the shunt waveguide of Symmetric Y optical branching device (2), constituting 2 I/O coupling mechanisms (6) of symmetrical resonator cavity respectively respectively by 2 waveguides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02112000 CN1382957A (en) | 2002-06-08 | 2002-06-08 | Integrated multifunctional optical lithium niobate chip for optical gyro |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02112000 CN1382957A (en) | 2002-06-08 | 2002-06-08 | Integrated multifunctional optical lithium niobate chip for optical gyro |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1382957A true CN1382957A (en) | 2002-12-04 |
Family
ID=4741849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02112000 Pending CN1382957A (en) | 2002-06-08 | 2002-06-08 | Integrated multifunctional optical lithium niobate chip for optical gyro |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1382957A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100453973C (en) * | 2006-05-24 | 2009-01-21 | 北京航空航天大学 | Space-resonance type micro-light electromechanical gyro |
| CN1751261B (en) * | 2003-02-21 | 2010-07-28 | 利特夫有限责任公司 | High-resolution digital phase modulator for a fiber-optic signal transmission or measuring device |
| CN102645708A (en) * | 2012-04-10 | 2012-08-22 | 浙江大学 | Optical waveguide resonant cavity with high polarization extinction ratio based on inclined waveguide grating structure |
| CN103213204A (en) * | 2013-04-24 | 2013-07-24 | 中国电子科技集团公司第四十四研究所 | Processing method of lithium nibate polarizer chip |
| CN103900550A (en) * | 2014-03-06 | 2014-07-02 | 哈尔滨工程大学 | Circulating interference type optical gyroscope based on orientation coupling modulator |
| CN105547276A (en) * | 2016-01-29 | 2016-05-04 | 长春理工大学 | Air-gap groove waveguide annular resonant cavity integrated optical gyroscope |
| CN108225297A (en) * | 2016-12-09 | 2018-06-29 | 黑龙江工业学院 | A kind of SiO 2 waveguide and the vertical coupled resonance type integrated optical gyroscope of LiNbO_3 film |
| CN112833872A (en) * | 2020-03-11 | 2021-05-25 | 天津领芯科技发展有限公司 | Integrated optical chip based on lithium niobate waveguide and integrated optical assembly |
| CN116045940A (en) * | 2023-03-31 | 2023-05-02 | 中国船舶集团有限公司第七〇七研究所 | Micro-ring coupling structure based on integrated optical gyroscope and adjusting method |
| CN117570954A (en) * | 2024-01-15 | 2024-02-20 | 中北大学 | Resonant optical gyroscope based on wide-spectrum light source and angular velocity measurement method |
-
2002
- 2002-06-08 CN CN 02112000 patent/CN1382957A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1751261B (en) * | 2003-02-21 | 2010-07-28 | 利特夫有限责任公司 | High-resolution digital phase modulator for a fiber-optic signal transmission or measuring device |
| CN100453973C (en) * | 2006-05-24 | 2009-01-21 | 北京航空航天大学 | Space-resonance type micro-light electromechanical gyro |
| CN102645708A (en) * | 2012-04-10 | 2012-08-22 | 浙江大学 | Optical waveguide resonant cavity with high polarization extinction ratio based on inclined waveguide grating structure |
| CN102645708B (en) * | 2012-04-10 | 2014-10-15 | 浙江大学 | Optical waveguide resonant cavity with high polarization extinction ratio based on inclined waveguide grating structure |
| CN103213204A (en) * | 2013-04-24 | 2013-07-24 | 中国电子科技集团公司第四十四研究所 | Processing method of lithium nibate polarizer chip |
| CN103900550A (en) * | 2014-03-06 | 2014-07-02 | 哈尔滨工程大学 | Circulating interference type optical gyroscope based on orientation coupling modulator |
| CN105547276A (en) * | 2016-01-29 | 2016-05-04 | 长春理工大学 | Air-gap groove waveguide annular resonant cavity integrated optical gyroscope |
| CN108225297A (en) * | 2016-12-09 | 2018-06-29 | 黑龙江工业学院 | A kind of SiO 2 waveguide and the vertical coupled resonance type integrated optical gyroscope of LiNbO_3 film |
| CN108225297B (en) * | 2016-12-09 | 2021-05-14 | 黑龙江工业学院 | Resonant integrated optical gyroscope with vertically coupled silicon dioxide waveguide and lithium niobate thin film |
| CN112833872A (en) * | 2020-03-11 | 2021-05-25 | 天津领芯科技发展有限公司 | Integrated optical chip based on lithium niobate waveguide and integrated optical assembly |
| CN116045940A (en) * | 2023-03-31 | 2023-05-02 | 中国船舶集团有限公司第七〇七研究所 | Micro-ring coupling structure based on integrated optical gyroscope and adjusting method |
| CN117570954A (en) * | 2024-01-15 | 2024-02-20 | 中北大学 | Resonant optical gyroscope based on wide-spectrum light source and angular velocity measurement method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109579818B (en) | Preparation method of hybrid integrated fiber-optic gyroscope optical chip | |
| CN108225297B (en) | Resonant integrated optical gyroscope with vertically coupled silicon dioxide waveguide and lithium niobate thin film | |
| CN109579817B (en) | Preparation method of silicon-based-LN-based hybrid integrated optical chip | |
| US10191214B2 (en) | Photonic integrated circuit having a relative polarization-rotating splitter/combiner | |
| CN112833873A (en) | Photonic integrated chip and interference type optical fiber gyroscope | |
| CN1382957A (en) | Integrated multifunctional optical lithium niobate chip for optical gyro | |
| CN113280802B (en) | Multifunctional lithium niobate chip for resonant integrated optical gyroscope | |
| CN108645405B (en) | Inertial sensing unit with height integration of optical gyroscope and accelerometer | |
| US10564355B2 (en) | Optical waveguide element | |
| WO2024000936A1 (en) | Optical gyroscope double-layer sin-based integrated drive chip | |
| CN114739376A (en) | Hollow-core photonic crystal fiber gyroscope based on silicon dioxide waveguide polarization beam splitter | |
| CN116009294A (en) | Lithium niobate thin film phase modulator heterogeneous integrated with silicon nitride | |
| WO2023103610A1 (en) | Sin-based integrated optical chip for optical fiber gyroscope employing sion polarizer | |
| CN112066973A (en) | Integrated photonic crystal fiber-optic gyroscope with lithium niobate waveguide | |
| CN113534337A (en) | Processing method and structure of silicon photonic chip optical coupling structure | |
| CN112097754B (en) | Lithium niobate and SU-8 hybrid integrated hollow-core photonic crystal fiber optic gyroscope | |
| CN109186598A (en) | One kind being used for the unpiloted navigation chip of new-energy automobile | |
| CN113406745A (en) | Waveguide-to-optical fiber three-dimensional polymer horizontal lens coupler | |
| CN113376743A (en) | Spot-size converter based on long-period grating | |
| Chang et al. | An ultra-compact colorless dual-mode 3 dB power splitter based on axisymmetrical subwavelength structure | |
| Chen et al. | Ultra-high-speed high-resolution laser lithography for lithium niobate integrated photonics | |
| CN113884085B (en) | Based on SiO2Integrated optical chip for fiber-optic gyroscope with-SiN coupled chip structure | |
| CN109813313A (en) | A kind of positioning gyro for inertial navigation automobiles in internet of things | |
| CN109612452A (en) | Silicon substrate-LN base hybrid integrated optical chip for three axis optical fibre gyro | |
| Yao et al. | Compact spot-size converter for low-loss coupling and miniaturization of interferometric fiber optic gyroscopes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |