CN1647245A - 使一个板状基片定位的装置和方法 - Google Patents

使一个板状基片定位的装置和方法 Download PDF

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Publication number
CN1647245A
CN1647245A CN 03808274 CN03808274A CN1647245A CN 1647245 A CN1647245 A CN 1647245A CN 03808274 CN03808274 CN 03808274 CN 03808274 A CN03808274 A CN 03808274A CN 1647245 A CN1647245 A CN 1647245A
Authority
CN
China
Prior art keywords
substrate
grating
conveyer belt
detection range
described device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 03808274
Other languages
English (en)
Chinese (zh)
Inventor
D·埃辛格
M·措勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of CN1647245A publication Critical patent/CN1647245A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Conveyors (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
CN 03808274 2002-04-12 2003-04-01 使一个板状基片定位的装置和方法 Pending CN1647245A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2002116284 DE10216284C1 (de) 2002-04-12 2002-04-12 Vorrichtung und Verfahren zum Positionieren eines plattenförmigen Substrates
DE10216284.0 2002-04-12

Publications (1)

Publication Number Publication Date
CN1647245A true CN1647245A (zh) 2005-07-27

Family

ID=29224480

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 03808274 Pending CN1647245A (zh) 2002-04-12 2003-04-01 使一个板状基片定位的装置和方法

Country Status (4)

Country Link
EP (1) EP1495488A2 (fr)
CN (1) CN1647245A (fr)
DE (1) DE10216284C1 (fr)
WO (1) WO2003088321A2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101143654B (zh) * 2006-09-12 2012-03-28 西门子公司 航空行李运输设备
CN108657818A (zh) * 2017-03-31 2018-10-16 可能可特科技（深圳）有限公司 一种基于fpc电镀的搬运装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3956632A (en) * 1975-06-30 1976-05-11 Fmc Corporation Conveyor belt position monitoring device
US4463845A (en) * 1981-09-24 1984-08-07 Harris Gerald R Material-handling apparatus and method
DE19823938C1 (de) * 1998-05-28 2000-02-10 Siemens Ag Verfahren und Vorrichtung zum linearen Positionieren und zur Lageerkennung eines Substrates

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101143654B (zh) * 2006-09-12 2012-03-28 西门子公司 航空行李运输设备
CN108657818A (zh) * 2017-03-31 2018-10-16 可能可特科技（深圳）有限公司 一种基于fpc电镀的搬运装置
CN108657818B (zh) * 2017-03-31 2024-04-26 可能可特科技（深圳）有限公司 一种基于fpc电镀的搬运装置

Also Published As

Publication number Publication date
WO2003088321A3 (fr) 2003-12-18
WO2003088321A2 (fr) 2003-10-23
EP1495488A2 (fr) 2005-01-12
DE10216284C1 (de) 2003-12-18

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication