CN1645550A - spherical micro-channel plate and preparation method thereof - Google Patents
spherical micro-channel plate and preparation method thereof Download PDFInfo
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- CN1645550A CN1645550A CN 200410073378 CN200410073378A CN1645550A CN 1645550 A CN1645550 A CN 1645550A CN 200410073378 CN200410073378 CN 200410073378 CN 200410073378 A CN200410073378 A CN 200410073378A CN 1645550 A CN1645550 A CN 1645550A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 238000007796 conventional method Methods 0.000 claims abstract description 7
- 239000011162 core material Substances 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 6
- 239000011265 semifinished product Substances 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 238000005253 cladding Methods 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000004927 fusion Effects 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 238000003556 assay Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 230000005484 gravity Effects 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 5
- 239000002245 particle Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000005251 gamma ray Effects 0.000 abstract 1
- 238000003384 imaging method Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
- H01J43/246—Microchannel plates [MCP]
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- Electron Tubes For Measurement (AREA)
Abstract
A spherical micro-channel plate and a preparation method thereof are provided, the spherical micro-channel plate is a plate-shaped object with the thickness t of 0.6-1.5 mm and the middle part of the plate-shaped object is the outer edge of a spherical crown body which is connected with a torus into a whole, the external diameter D of the spherical micro-channel plate is 35-100 mm, the diameter D of the bottom surface of the spherical crown body is 25-90 mm, the ratio of the radius R to the radius D of the spherical crown body is 0.8-5.0, and the diameter of each micro-channel is 10 mu m. The preparation method comprises the following steps: preparing a planar microchannel plate according to a conventional method, fixing the planar microchannel plate on a mould, preparing a spherical microchannel plate, and manufacturing a protection area. The invention enlarges the application range of the planar microchannel plate, and improves and changes the imaging quality. The method can be popularized and used in the technical field of X-ray, gamma-ray, extreme ultraviolet ray and charged particle detection and multiplication device image surfaces. The preparation process has the advantages of simple and feasible process route, stable and reliable preparation method and the like, and can be used for preparing the spherical micro-channel plate.
Description
Technical field
Patent of the present invention belongs to χ ray, gamma-rays, extreme ultraviolet line and charged particle detection technical field, is specifically related to Extreme Ultravio let Explorer.
Technical background
The planar microchannels plate is an a kind of battle array microchannel electron multiplier, and each microchannel hollow pipe is equivalent to a miniature dynode electron multiplier, and two ends are added with certain voltage, can obtain very high electron gain.
The manufacture process of planar microchannels plate is that core material and cladding are nested together, the microchannel plate core material is a real plug, cladding is a hollow glass tube, through drawing monofilament, row silk, draw multifilament, fusion pressure, section, two face optical polishs form the planar microchannels plates.The planar microchannels plate is because volume is little, in light weight, and the electron gain height has been widely used in the detection and multiplication device of χ ray, gamma-rays, extreme ultraviolet line and charged particle.But in some application, requiring the image planes of the ray (charged particle) of detection or multiplication is curved surface, as sphere, parabolic surface, hyperboloid, the planar microchannels plate obviously just can not use, and the current technical problem that presses for solution in optical system provides a kind of spherical microchannel board.
Summary of the invention
A technical problem to be solved by this invention is to overcome the shortcoming of above-mentioned planar microchannels plate, provides a kind of reasonable in design, simple in structure, the spherical microchannel board that volume is little, easy to use.
Another technical problem to be solved by this invention is to provide a kind of preparation method of spherical microchannel board.
Solving the problems of the technologies described above the technical scheme that is adopted is: this spherical microchannel board is that thickness t is that 0.6～1.5mm, middle part are the outer of ball-crown body and the plate object that torus is connected as a single entity, the profile diameter D of spherical microchannel board is 35～100mm, the bottom surface diameter d of ball-crown body is that 25～90mm, ball-crown body radius R are 0.8～5.0 with the ratio of d, and the diameter of each microchannel is 10 μ m.
The preferred thickness t of spherical microchannel board of the present invention is that 0.8～1.0mm, preferred profile diameter D are that the preferred bottom surface diameter d of 50～80mm, ball-crown body is that 45～75mm, ball-crown body radius R are 1.0～4.0 with the preferred ratio of d.
The optimum thickness t of spherical microchannel board of the present invention is that 0.9mm, optimum configuration diameter D are that the best bottom surface diameter d of 65mm, ball-crown body is that 55mm, ball-crown body radius R are 3 with the best ratio of d.
Its preparation method comprises the steps:
1, prepares the little same guidance tape in plane according to conventional method
Prepare the little same guidance tape in plane according to conventional method, be about to real plug core material and be sleeved in the hollow glass tube, put into heating furnace, be warmed up to 450～650 ℃, through drawing monofilament, row's silk, drawing multifilament, fusion pressure, section, two face optical polishs, make the planar microchannels plate.
2, the planar microchannels plate is fixed on the mold
The planar microchannels plate is placed on the bottom inner core of positioning clamping fixture, be spherical concave spherical surface with the center, upper surface then, the outer is that the following mold of circular planes is placed under the planar microchannels plate of positioning clamping fixture bottom inner core, following mold axially be processed with steam vent, be spherical protruding sphere again with the lower surface, the outer is that the last mold of circular planes is placed on the positioning clamping fixture upper inner cylinder planar microchannels plate, the spherical radius of the spherical convex surface of the external diameter of last mold and lower surface is identical with the external diameter and the spherical radius of the spherical concave curved surface in following mold upper surface, place balancing weight on last mold, the pressure that balancing weight produced is 10～20g/cm
2
3, preparation spherical microchannel board
The mold that the planar microchannels plate is housed is put into pot arch, energized heats up, heating rate is 5～10 ℃/minute, be warmed up to 600～620 ℃ of the softening points of planar microchannels plate, be incubated 20～30 minutes, under the action of gravity of balancing weight, the planar microchannels plate subsides and forms the shape of sphere, natural cooling takes out in pot arch, makes semi-finished product.
4, make the protection zone
The semi-finished product of step 3 preparation are placed in 30% hydrochloric acid solution corrode, core material is corroded, remaining cladding, removing edge outerplanar microchannel plate remainder becomes netted hollow spherical plate, puts into hydrogen furnace again, 300～350 ℃ were reduced 4～6 hours, natural cooling is put into coating machine, surface vacuum evaporation one deck conductive electrode, after the assay was approved, make spherical microchannel board.
The present invention is prepared into spherical microchannel board with the planar microchannels plate, has enlarged the range of application of planar microchannels plate, improves and changed image quality.Can be to promote the use of in the sphere technical field in the detection of χ ray, gamma-rays, extreme ultraviolet line and charged particle and the image planes of multiplication device.Preparation technology of the present invention has the reliable advantage such as reliable of process route simple possible, preparation method, can be used for preparing spherical microchannel board.
Description of drawings
Fig. 1 is the structural representation of one embodiment of the invention.
Fig. 2 is that planar microchannels plate 4 is fixed on the schematic diagram on the mold.
Embodiment
The present invention is described in more detail below in conjunction with drawings and Examples, but the invention is not restricted to these embodiment.
Embodiment 1
In Fig. 1, the structure of the structure of spherical microchannel board 1 and planar microchannels plate 1 is identical but shape is inequality.The thickness t of the spherical microchannel board 1 of present embodiment is 1.0mm, and the shape of spherical microchannel board 1 is that the middle part is connected as a single entity for ball-crown body, ball-crown body outer and annulus.The profile diameter D of spherical microchannel board 1 is 65mm, and the bottom surface diameter d of ball-crown body is 55mm, and spherical radius R is 165mm, and R/d is 3, and the diameter of each microchannel is 10 μ m.
Its preparation method is as follows:
1, it is little with guidance tape 4 to prepare the plane according to conventional method
It is little with guidance tape 4 to prepare the plane according to conventional method, be about to real plug core material and be sleeved in the hollow glass tube, put into heating furnace, be warmed up to 450～650 ℃, through drawing monofilament, row's silk, drawing multifilament, fusion pressure, section, two face optical polishs, make planar microchannels plate 4.
2, the planar microchannels plate is fixed on the mold
Fig. 2 is that planar microchannels plate 4 is fixed on the schematic diagram on the mold.In Fig. 2, positioning clamping fixture 2 is columnar structured, and the external diameter of following inner core is greater than the external diameter of last inner core.The planar microchannels plate 4 of step 1 preparation is placed on the bottom inner core of positioning clamping fixture 2, to descend mold 3 to be placed into the planar microchannels plate 4 times of positioning clamping fixture 2 bottom inner cores again, following mold 3 axially be processed with steam vent a, steam vent a is used for heating in pot arch and during planar microchannels plate 4 distortion, air between planar microchannels plate 4 and the following mold 3 is drained, the center, upper surface of following mold 3 is spherical concave curved surface, the outer is a circular planes, the external diameter of circular planes, the spherical radius of spherical concave curved surface is identical with the external diameter and the spherical radius of the spherical microchannel board that will make.To go up mold 5 is placed on the positioning clamping fixture 2 upper inner cylinder planar microchannels plates 4, the lower surface of last mold 5 is that spherical convex surface, outer are circular planes, and the spherical radius of the spherical convex surface of the external diameter of last mold 5 and lower surface is identical with the external diameter and the spherical radius of the spherical concave curved surface in following mold 3 upper surfaces.Place balancing weight 6 on last mold 5, the pressure that balancing weight 6 is produced is 15g/cm
2
3, preparation spherical microchannel board
The mold that planar microchannels plate 4 is housed is put into pot arch, energized heats up, heating rate is 5～10 ℃/minute, be warmed up to 600～620 ℃ of the softening points of planar microchannels plate, be incubated 20～30 minutes, under the action of gravity of balancing weight 6, planar microchannels plate 4 subsides and forms the shape of sphere, natural cooling takes out in pot arch, makes semi-finished product.
4, make the protection zone
The semi-finished product of step 3 preparation are placed in 30% hydrochloric acid solution corrode, core material is corroded, remaining cladding removes edge outerplanar microchannel plate remainder and has just become netted hollow spherical plate, puts into hydrogen furnace again, 320 ℃ were reduced 5 hours, natural cooling is put into coating machine, surface vacuum evaporation one deck conductive electrode, after the assay was approved, make spherical microchannel board 1.
In the present embodiment, the thickness t of spherical microchannel board 1 is 0.6mm, and the profile diameter D of spherical microchannel board 1 is that the bottom surface diameter d of 35mm, ball-crown body is that 25mm, spherical radius R are that 20mm, R/d are 0.8, and the diameter of each microchannel is 10 μ m.
Its preparation technology is fixed on planar microchannels plate 4 on the mold in the processing step, and placing the pressure that balancing weight 6 produced on last mold 5 is 10g/cm
2, in making the protection zone processing step, 300 ℃ were reduced 6 hours in hydrogen furnace.Other processing step is identical with embodiment 1.
In the present embodiment, the thickness t of spherical microchannel board 1 is 1.5mm, and the profile diameter D of spherical microchannel board 1 is that the bottom surface diameter d of 100mm, ball-crown body is that 90mm, spherical radius R are that 450mm, R/d are 5.0, and the diameter of each microchannel is 10 μ m.
Its preparation technology is fixed on planar microchannels plate 4 on the mold in the processing step, and placing the pressure that balancing weight 6 produced on last mold 5 is 20g/cm
2, in making the protection zone processing step, 350 ℃ were reduced 4 hours in hydrogen furnace.Other processing step is identical with embodiment 1.
Claims (4)
1, a kind of spherical microchannel board, it is characterized in that: this spherical microchannel board (1) is that thickness t is that 0.6～1.5mm, middle part are the outer of ball-crown body and the plate object that torus is connected as a single entity, the profile diameter D of spherical microchannel board (1) is 35～100mm, the bottom surface diameter d of ball-crown body is that 25～90mm, ball-crown body radius R are 0.8～5.0 with the ratio of d, and the diameter of each microchannel is 10 μ m.
2, according to the described spherical microchannel board of claim 1, it is characterized in that: wherein the thickness t of spherical microchannel board (1) is that 0.8～1.0mm, profile diameter D are that the bottom surface diameter d of 50～80mm, ball-crown body is that 45～75mm, ball-crown body radius R are 1.0～4.0 with the ratio of d.
3, according to the described spherical microchannel board of claim 1, it is characterized in that: wherein the thickness t of spherical microchannel board (1) is that 0.9mm, profile diameter D are that the bottom surface diameter d of 65mm, ball-crown body is that 55mm, ball-crown body radius R are 3 with the ratio of d.
4, a kind of preparation method of claim 1 is characterized in that it comprises the steps:
(1), prepares the little same guidance tape in plane (4) according to conventional method
Prepare the little same guidance tape in plane (4) according to conventional method, be about to real plug core material and be sleeved in the hollow glass tube, put into heating furnace, be warmed up to 450～650 ℃, through drawing monofilament, row's silk, drawing multifilament, fusion pressure, section, two face optical polishs, make planar microchannels plate (4);
(2), planar microchannels plate (4) is fixed on the mold
Planar microchannels plate (4) is placed on the bottom inner core of positioning clamping fixture (2), be spherical concave spherical surface with the center, upper surface then, the outer is that the following mold (3) of circular planes is placed under the planar microchannels plate (4) of positioning clamping fixture (2) bottom inner core, following mold (3) axially be processed with steam vent (a), be spherical protruding sphere again with the lower surface, the outer is that the last mold (5) of circular planes is placed on positioning clamping fixture (2) the upper inner cylinder planar microchannels plate (4), the spherical radius of the spherical convex surface of external diameter and lower surface of last mold (5) is identical with the external diameter and the spherical radius of the spherical concave curved surface in following mold (3) upper surface, go up placement balancing weight (6) at last mold (5), the pressure that balancing weight (6) is produced is 10～20g/cm
2
(3), preparation spherical microchannel board (1)
The mold that planar microchannels plate (4) will be housed is put into pot arch, energized heats up, heating rate is 5～10 ℃/minute, be warmed up to 600～620 ℃ of the softening points of planar microchannels plate (4), be incubated 20～30 minutes, in balancing weight (6)) action of gravity under, planar microchannels plate (4) subsides and forms the shape of sphere, natural cooling takes out in pot arch, makes semi-finished product;
(4), make the protection zone
The semi-finished product of step (3) preparation are placed in 30% hydrochloric acid solution corrode, core material is corroded, remaining cladding, removing edge outerplanar microchannel plate remainder becomes netted hollow spherical plate, puts into hydrogen furnace again, 300～350 ℃ were reduced 4～6 hours, natural cooling is put into coating machine, surface vacuum evaporation one deck conductive electrode, after the assay was approved, make spherical microchannel board (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100733780A CN100338722C (en) | 2004-12-14 | 2004-12-14 | spherical micro-channel plate and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100733780A CN100338722C (en) | 2004-12-14 | 2004-12-14 | spherical micro-channel plate and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1645550A true CN1645550A (en) | 2005-07-27 |
| CN100338722C CN100338722C (en) | 2007-09-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2004100733780A Expired - Fee Related CN100338722C (en) | 2004-12-14 | 2004-12-14 | spherical micro-channel plate and preparation method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101728146B (en) * | 2009-12-22 | 2011-09-28 | 中国科学院长春光学精密机械与物理研究所 | Device for preparing spherical solid-core microchannel plate |
| CN103065905A (en) * | 2012-12-27 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Square-cylindrical-surface solid-core microchannel plate preparation method and square-cylindrical-surface solid-core microchannel plate |
| CN103065910A (en) * | 2012-12-21 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Thermal formed spherical surface solid core micro-channel plate preparing device based on gravity of mold |
| CN103794429A (en) * | 2014-01-22 | 2014-05-14 | 中国科学院长春光学精密机械与物理研究所 | Square cylindrical surface solid core microchannel plate manufacturing device and method |
| CN105016293A (en) * | 2015-05-08 | 2015-11-04 | 华东师范大学 | Device and manufacturing method for manufacturing silicon spherical micro-channel plate |
| CN106630596A (en) * | 2016-12-29 | 2017-05-10 | 中国建筑材料科学研究总院 | Silicate skin glass, micro-pore optics and preparation method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3863094A (en) * | 1969-04-08 | 1975-01-28 | Itt | Image intensifier and method of making an electron multiplier therefor |
| FR2491677A1 (en) * | 1980-10-06 | 1982-04-09 | Hyperelec | Electron multiplier for X=ray imaging tube - has multiplying elements which subtend angle w.r.t. axis of appts. which is proportional to element-axis spacing |
| CN1040913C (en) * | 1993-10-21 | 1998-11-25 | 中国科学院西安光学精密机械研究所 | Method for manufacturing small-size microchannel plate |
| JP2000011945A (en) * | 1998-06-19 | 2000-01-14 | Nec Corp | Taper-type microchannel plate |
-
2004
- 2004-12-14 CN CNB2004100733780A patent/CN100338722C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101728146B (en) * | 2009-12-22 | 2011-09-28 | 中国科学院长春光学精密机械与物理研究所 | Device for preparing spherical solid-core microchannel plate |
| CN103065910A (en) * | 2012-12-21 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Thermal formed spherical surface solid core micro-channel plate preparing device based on gravity of mold |
| CN103065905A (en) * | 2012-12-27 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Square-cylindrical-surface solid-core microchannel plate preparation method and square-cylindrical-surface solid-core microchannel plate |
| CN103794429A (en) * | 2014-01-22 | 2014-05-14 | 中国科学院长春光学精密机械与物理研究所 | Square cylindrical surface solid core microchannel plate manufacturing device and method |
| CN105016293A (en) * | 2015-05-08 | 2015-11-04 | 华东师范大学 | Device and manufacturing method for manufacturing silicon spherical micro-channel plate |
| CN106630596A (en) * | 2016-12-29 | 2017-05-10 | 中国建筑材料科学研究总院 | Silicate skin glass, micro-pore optics and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100338722C (en) | 2007-09-19 |
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