CN102157217A - Parabolic two-dimensional focusing X-ray compound refractive lens - Google Patents
Parabolic two-dimensional focusing X-ray compound refractive lens Download PDFInfo
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- CN102157217A CN102157217A CN2011100629787A CN201110062978A CN102157217A CN 102157217 A CN102157217 A CN 102157217A CN 2011100629787 A CN2011100629787 A CN 2011100629787A CN 201110062978 A CN201110062978 A CN 201110062978A CN 102157217 A CN102157217 A CN 102157217A
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Abstract
The invention discloses a parabolic two-dimensional focal X-ray compound refractive lens, which comprises a glass substrate and a mother mirror; the mother mirror comprises a mother mirror main body, a first parabolic cavity and square cavities which are orderly arranged on the mother mirror main body at intervals,and formed by connecting cross sections thereof, wherein the cross sections are two symmetric parabolic openings; the first parabolic cavity is provided with a first paraboloid, each square cavity is embedded with a sub-mirror body with a cross section in square, a second parabolic cavity formed by connecting two symmetrical parabolic openings is arranged in the middle of the sub-mirror body, the second parabolic cavity is provided with a paraboloid, and the first paraboloid and the second paraboloid are in mutual orthogonal structure. An optical axis is capable of performing self-calibration in high precision, the focusing efficiency is high, the precision of fabrication process is high, the limitation to the lens material is smaller, and the system design and assembling are simple.
Description
Technical field
The present invention relates to a kind of X ray Microstructure Optics device, be applicable to the sigmatron wave band (＞5keV) occasion of two-dimension focusing and imaging is carried out in radiation.
Background technology
The X ray compound lens to be A.Snigirev proposed in 1996 a kind of be applicable to sigmatron wave band (being that the X-radiation energy surpasses 5keV), based on the X ray Microstructure Optics device of refraction effect.Have the light path that do not need to turn back, high-temperature stability is good and easily cooling, simple and compact for structure, the lens surface roughness is required advantages such as low.Have wide practical use in ultrahigh resolution radiodiagnosis Science and Technology field.In recent years, very active based on the various radiodiagnosis technical research of X ray compound lens.Analyse experimental system such as the sigmatron fluorescence microbedding that is used for sample element distribution measuring; Utilize the middle sub-microscope of aluminium-material X-ray assembled lens; And be used for sigmatron experimental system of unicellular detection, chemical microanalysis, early stage breast tumor detection etc. or the like.
Initial X ray compound lens is the method that adopts the accurate keyhole of computing machine, produce on aluminum metallic material that tens cylindrical bore of arranging to hundreds of order realize, X ray is carried out one-dimensional focusing, and utilize it to carry out X ray and survey and diagnostic techniques research.Afterwards in order to improve the making precision, the plane micro production technology that adopt (comprise thin film deposition more, technology such as photoetching, electron beam lithography, ion beam etching) making cross sectional shape is the X ray compound lens of circle, paraboloidal, elliptical area shape, the compound lens material expands to aluminium, silicon, lithium, boron, carbon, aluminium oxide, organic material PMMA or the like, the effect that focuses on is improved significantly, be such X ray compound lens still be one-dimensional focusing.Yet X ray is surveyed and the diagnostic techniques application, needs the X ray of micron even sub-micrometer scale to survey hot spot (promptly focusing on focal spot) usually, and is not only the focusing focal line.The X ray compound lens that therefore must development can carry out two-dimension focusing to X-radiation.
At present the X ray compound lens of two-dimension focusing is domestic does not appear in the newspapers as yet, mainly takes dual mode to reach purpose to the X ray two-dimension focusing in the world.A kind of is to adopt the planar light lithography, make two one-dimensional focusing X-ray compound lenss, two one-dimensional focusing X-ray compound lens quadratures are placed, respectively X-ray beam is carried out horizontal direction line focus and vertical direction line focus, with purpose (C.G.Schroer, the et al. that reaches two-dimension focusing, Appl.Phys.Lett., 2003, vol.82, pp1485-1487).The shortcoming of this technology is: (1) one-dimensional focusing X-ray compound lens itself is a micro structural component, and X ray is again an invisible light, and when two one-dimensional focusing X-ray compound lenss were placed in system, optical axis calibrator was extremely difficult; (2) two one-dimensional focusing X-ray compound lenss are finished the two-dimensional x-ray bundle jointly and are focused on, and the length that makes X-ray beam pass through lens material is the twice of a compound lens approximately, and the X-ray beam loss significantly increases; The focal length of (3) two one-dimensional focusing X-ray compound lenss must be by certain rule match, system design and debug all very complicated.Another kind method is at first to make the lens refraction unit mould of paraboloid of revolution shape, adopt mould pressing technology on aluminum, to suppress a single compound lens refraction unit then, with compound lens reflect the unit one by one series arrangement combine and form the X ray compound lens of two-dimension focusing, the paraboloid of revolution against each refraction unit is realized two-dimension focusing (B.Lengeler, et al., Appl.Phys.Lett., 1999, vol.74, pp3924-3926).The shortcoming of this technology is: (1) adopts the precision optical machinery manufacturing technology, and microstructure size can not be made very for a short time, and therefore the focusing efficiency to X-radiation can not be very high; (2) compound lens is made up of discrete one by one refraction sequence of unit discharging, and optical axis alignment is difficulty extremely, and the deviation of optical axis will cause the reduction of compound lens performance; (3) method based on the precision optical machinery manufacturing technology is bigger for the materials limitations of compound lens, only is applicable to the metal material that machining property is good, ductility is good usually, such as aluminum; (4) the unusual difficulty of the paraboloid of revolution Mold Making that is used to suppress the refraction unit needs expensive special process equipment.
Summary of the invention
Extremely difficult for the optical axis alignment that overcomes existing two-dimension focusing X ray combination refractor, focusing efficiency is not high enough, the manufacture craft precision is not high enough, Mould Machining is difficult, the lens material restriction is big, system design and debug very complicated deficiency, but the invention provides that a kind of optical axis high precision self calibration, focusing efficiency height, manufacture craft precision height, lens material restriction are less, system design and the easy parabolic shape two-dimension focusing X ray combination refractor of assembling and setting.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of parabolic shape two-dimension focusing X ray combination refractor, comprise glass substrate and female mirror, described female mirror is installed on the described glass substrate, the cross section that described female mirror comprises female mirror main body and sequence interval is arranged on described female mirror main body is first parabola shaped cavity and the square cavities that the parabola shaped opening of two symmetries joins and constitutes, the center of each first parabola shaped cavity and square cavities center all are positioned on the same straight line of length direction of described female mirror main body, the described first parabola shaped cavity is provided with first parabola that to reach X-radiation is focused on along the first parabola shaped cavity short-axis direction in order to X ray is reflected, each square cavities is embedded in sub-mirror body, the cross section of described sub-mirror body is square, described sub-mirror body hits exactly the second parabola shaped cavity that the parabola shaped opening that is provided with two symmetries joins and constitutes, the described second parabola shaped cavity is provided with second parabola that to reach X-radiation is focused on along the second parabola shaped cavity short-axis direction in order to X ray is reflected, the described first parabolic and described second parabolic mutual orthogonal thereto structure.
Further, a plurality of sub-mirror bodies are installed on the clamping limb, and the center distance of adjacent sub-mirror body equates with the center distance of adjacent square cavity.
Further again, described sub-mirror body is a square, the major axis of the second parabola shaped cavity of the parabola shaped formation of described two symmetries and minor axis are all little than the described square length of side, the central lines of the second parabola shaped cavity of the parabola shaped formation of the center line of described square and described two symmetries, the described square length of side of the side ratio of described square cavities is big, and the degree of depth of the first parabola shaped cavity of the parabola shaped formation of described two symmetries and the degree of depth of square cavities equate with the length of side of described square.
Distance between the center of the center of described square cavities and the first parabola shaped cavity equates with the length of side of described square.
The major axis of the described second parabola shaped cavity and the minor axis all length of side than described square are little.
The major axis of the major axis of the described first parabola shaped cavity and the described second parabola shaped cavity equates that the minor axis of the minor axis of the described first parabola shaped cavity and the described second parabola shaped cavity equates.Certainly, also can be unequal.
The material of described female mirror main body and sub-mirror body is one of following: 1. SU-8,2. copper, 3. nickel.
The number of the described first parabola shaped cavity and square cavities is that scope is 20 to 100.
The thickness of described glass substrate is 1～2 millimeter, the major axis scope of the described first parabola shaped cavity and the second parabola shaped cavity is that 42 microns to 242 microns, minor axis scope are 32 microns to 222 microns, described foursquare side size range is 50 microns to 250 microns, and the difference range of the described square cavities and the positive dirction length of side is 1 micron to 2 microns.
Described clamping limb thickness 50-100 micron.
Technical conceive of the present invention is: described female mirror and sub-mirror, through after the microscopically assembling, promptly form parabolic shape two-dimension focusing X ray combination refractor (as shown in Figure 1) of the present invention, the z axle of coordinate system shown in Figure 1 is the optical axis of described parabolic shape two-dimension focusing X ray combination refractor.The two-dimension focusing function of described parabolic shape two-dimension focusing X ray combination refractor, finish by refraction unit of the two-dimension focusing one by one in it (shown in Fig. 1 c), described two-dimension focusing refraction unit constitutes along y axle, two orthogonal parabolas along the x axle jointly by one.The incident X-rays bundle is along the z direction of principal axis directive parabolic shape two-dimension focusing X ray combination refractor of coordinate system as shown in Figure 1, through the repeatedly refraction of two-dimension focusing refraction unit one by one, after the outgoing of described parabolic shape two-dimension focusing X ray combination refractor, form the two-dimension focusing focal spot.
Beneficial effect of the present invention mainly shows: 1, propose a kind of novel mosaic X ray combination refractor that is made of female mirror and sub-mirror, realize the purpose to the X-radiation two-dimension focusing; 2, the optical axis calibrator of X ray compound lens is technological difficulties, performance impact to compound lens is very big, the optical axis calibrator of the parabolic shape two-dimension focusing X ray combination refractor that the present invention proposes is that the assembling process that leans on sub-mirror to embed female mirror is finished, because female mirror and sub-mirror are finished by the plane Micrometer-Nanometer Processing Technology, precision is very high, therefore guarantee high-precision optical axis calibrator, solved the technical barrier of X ray device optical axis calibrator; 3, by the two-dimension focusing of novel device architecture design realization to X-radiation, focusing performance and optical property guarantee by device architecture, the system design of having avoided using two one-dimensional focusing X-ray compound lens quadratures to arrange and being faced and debug all very complicated problems; 4, adopt parabolic shape to play the effect of eliminating spherical aberration, improve focusing and image quality the focusing and the imaging of the radiation of paraxial incident X-rays; 5, adopt the plane Micrometer-Nanometer Processing Technology, the machining precision height, the device depth-to-width ratio is big, and is little to materials limitations, can integrated, disposable Precision Machining moulding.
Description of drawings
Fig. 1 a is the front elevation of parabolic shape two-dimension focusing X ray combination refractor of the present invention.
Fig. 1 b is the vertical view of parabolic shape two-dimension focusing X ray combination refractor of the present invention.
Fig. 1 c is the enlarged drawing of the local I of two-dimension focusing refraction unit in the parabolic shape two-dimension focusing X ray combination refractor of the present invention.
Fig. 1 d is the vertical view of the local I of two-dimension focusing refraction unit in the parabolic shape two-dimension focusing X ray combination refractor of the present invention.
Fig. 2 a is the front elevation of female mirror of parabolic shape two-dimension focusing X ray combination refractor of the present invention.
Fig. 2 b is the vertical view of female mirror of parabolic shape two-dimension focusing X ray combination refractor of the present invention.
Fig. 2 c is the front elevation of the sub-mirror of parabolic shape two-dimension focusing X ray combination refractor of the present invention.
Fig. 2 d is the vertical view of the sub-mirror of parabolic shape two-dimension focusing X ray combination refractor of the present invention.
Wherein: o represents the initial point of rectangular coordinate system, x, y, z represent x axle, y axle and the z axle of rectangular coordinate system respectively, and g represents optical axis, and a is the length of side of sub-mirror body (square), a+ δ is the length and the width of square cavities, and R is the radius-of-curvature at place, para-curve summit.
Embodiment
Below in conjunction with accompanying drawing the present invention is further described.
With reference to Fig. 1 a～Fig. 2 d, a kind of parabolic shape two-dimension focusing X ray combination refractor, comprise glass substrate and female mirror, described female mirror is installed on the described glass substrate, the cross section that described female mirror comprises female mirror main body and sequence interval is arranged on described female mirror main body is first parabola shaped cavity and the square cavities that the parabola shaped opening of two symmetries joins and constitutes, the center of each first parabola shaped cavity and square cavities center all are positioned on the same straight line of length direction of described female mirror main body, the described first parabola shaped cavity is provided with first parabola that to reach X-radiation is focused on along the first parabola shaped cavity short-axis direction in order to X ray is reflected, each square cavities is embedded in sub-mirror body, the cross section of described sub-mirror body is square, described sub-mirror body hits exactly the second parabola shaped cavity that the parabola shaped opening that is provided with two symmetries joins and constitutes, the described second parabola shaped cavity is provided with second parabola that to reach X-radiation is focused on along the second parabola shaped cavity short-axis direction in order to X ray is reflected, the described first parabolic and described second parabolic mutual orthogonal thereto structure.
In the present embodiment, the parabolical The Representation Equation of two symmetries in the described first parabola shaped cavity is x
2=2Rz, the parabolical The Representation Equation of two symmetries in the described second parabola shaped cavity is y
2=2Rz, wherein R is the radius-of-curvature at place, para-curve summit, x axle, y axle and the z axle of rectangular coordinate system in x, y, the z difference representative graph 1, the major axis of the described first and second parabolic type cavitys and minor axis can be drawn by above-mentioned two Equation for Calculating.
A plurality of sub-mirror bodies are installed on the clamping limb, and the center distance of adjacent sub-mirror body equates with the center distance of adjacent square cavity.
Described sub-mirror body is a square, the major axis of the described second parabola shaped cavity and minor axis are all little than the described square length of side, the central lines of the center line of described square and the described second parabola shaped cavity, the described square length of side of the side ratio of described square cavities is big, and the degree of depth of the described first parabola shaped cavity equates with the length of side of described square.Distance between the center of the center of described square cavities and the first parabola shaped cavity equates with the length of side of described square.The major axis of the major axis of the described first parabola shaped cavity and the described second parabola shaped cavity equates that the minor axis of the minor axis of the described first parabola shaped cavity and the described second parabola shaped cavity is equal, certainly, and also can be unequal.The number of the described first parabola shaped cavity and square cavities is that scope is 20 to 100.
In the present embodiment, 1 millimeter of thickness of glass substrate, base as parabolic shape two-dimension focusing X ray combination refractor, described female mirror is produced on the glass substrate, female mirror comprise female mirror material of main part and on material of main part the tactic first parabola shaped cavity and square cavities constitute jointly, the parabola of the described first parabola shaped cavity is finished the refraction to X ray, reach the focusing of X-radiation along the short-axis direction of the first parabola shaped cavity, described square cavities is used for embedding sub-mirror.Described sub-mirror comprises that clamping limb and sub-mirror body form jointly, 50 microns of described clamping limb thickness, described sub-mirror body is a square, there is the second parabola shaped cavity square center, the parabola of the described second parabola shaped cavity is finished the refraction to X ray, reach the focusing of X-radiation along the short-axis direction of the second parabola shaped cavity, the sub-mirror body of described sub-mirror embeds the square cavities of female mirror from the top of described female mirror.
The major axis of the first parabola shaped cavity is that 42 microns, minor axis are 32 microns on described female mirror main body, and the center line of the described first parabola shaped cavity is along the y direction of principal axis of coordinate system shown in Fig. 2 a; First parabola shaped cavity and the square cavities on described female mirror, according to one first parabola shaped cavity and then the order of a square cavities be arranged in order, the described first parabola shaped cavity and square cavities are coaxial along coordinate system z axle, and described square cavities has 20; The length of described square cavities and width are 51 microns, highly are 50 microns, and described height refers to the y direction of principal axis along coordinate system; In the cross section of coordinate system xoz shown in Fig. 2 a, distance is 50 microns between the center of the described first parabola shaped cavity cross section and the square center, square cavities cross section.
The length of the sub-mirror body of described sub-mirror, width and highly be 50 microns, described sub-mirror body has 20, the coaxial and series arrangement along the z axle; The center line of the second parabola shaped cavity in the described sub-mirror body is along the x direction of principal axis of coordinate system shown in Fig. 2 a, and the major axis of the described second parabola shaped cavity is that 42 microns, minor axis are 32 microns, is spaced apart 50 microns between two sub-mirror bodies; In the cross section of coordinate system yoz shown in Fig. 2 a, the center of the described second parabola shaped cavity cross section and sub-mirror body section square center overlap.
The material of described female mirror main body and sub-mirror is the SU-8 photoresist.
Described female mirror and sub-mirror through after the microscopically assembling, promptly form parabolic shape two-dimension focusing X ray combination refractor (as shown in Figure 1) of the present invention, and the z axle of coordinate system shown in Figure 1 is the optical axis of described parabolic shape two-dimension focusing X ray combination refractor.The two-dimension focusing function of described parabolic shape two-dimension focusing X ray combination refractor, finish by refraction unit of the two-dimension focusing one by one in it (shown in Fig. 1 c), described two-dimension focusing refraction unit constitutes along y axle, two orthogonal parabolas along the x axle jointly by one.The incident X-rays bundle is along the z direction of principal axis directive parabolic shape two-dimension focusing X ray combination refractor of coordinate system as shown in Figure 1, through the repeatedly refraction of two-dimension focusing refraction unit one by one, after the outgoing of described parabolic shape two-dimension focusing X ray combination refractor, form the two-dimension focusing focal spot.
Embodiment 2
With reference to Fig. 1 a～Fig. 2 d, in the present embodiment, 2 millimeters of described thickness of glass substrate, 100 microns of described clamping limb thickness.
The major axis of the first parabola shaped cavity is that 242 microns, minor axis are 222 microns on described female mirror main body, and the center line of the described first parabola shaped cavity is along the y direction of principal axis of coordinate system shown in Fig. 2 a; First parabola shaped cavity and the square cavities on described female mirror, according to one first parabola shaped cavity and then the order of a square cavities be arranged in order, the described first parabola shaped cavity and square cavities are coaxial along coordinate system z axle, and described square cavities has 100; The length of described square cavities and width are 252 microns, highly are 250 microns, and described height refers to the y direction of principal axis along coordinate system; In the cross section of coordinate system xoz shown in Fig. 2 a, distance is 250 microns between the center of the described first parabola shaped cavity cross section and the square center, square cavities cross section.
The length of the sub-mirror body of described sub-mirror, width and highly be 250 microns, described sub-mirror body has 100, the coaxial and series arrangement along the z axle; The center line of the second parabola shaped cavity in the described sub-mirror body is along the x direction of principal axis of coordinate system shown in Fig. 2 a, and the major axis of the described second parabola shaped cavity is that 242 microns, minor axis are 222 microns, is spaced apart 250 microns between two sub-mirror bodies; In the cross section of coordinate system yoz shown in Fig. 2 a, the center of the described second parabola shaped cavity cross section and sub-mirror body section square center overlap.
The material of described female mirror main body and sub-mirror is the nickel metal.
Described female mirror and sub-mirror through after the microscopically assembling, promptly form parabolic shape two-dimension focusing X ray combination refractor (as shown in Figure 1) of the present invention, and the z axle of coordinate system shown in Figure 1 is the optical axis of described parabolic shape two-dimension focusing X ray combination refractor.The two-dimension focusing function of described parabolic shape two-dimension focusing X ray combination refractor, finish by refraction unit of the two-dimension focusing one by one in it (shown in Fig. 1 c), described two-dimension focusing refraction unit constitutes along y axle, two orthogonal parabolas along the x axle jointly by one.The incident X-rays bundle is along the z direction of principal axis directive parabolic shape two-dimension focusing X ray combination refractor of coordinate system as shown in Figure 1, through the repeatedly refraction of two-dimension focusing refraction unit one by one, after the outgoing of described parabolic shape two-dimension focusing X ray combination refractor, form the two-dimension focusing focal spot.
Other schemes of present embodiment are all identical with embodiment 1.
Embodiment 3
With reference to Fig. 1 a～Fig. 2 d, in the present embodiment, 1.8 millimeters of described thickness of glass substrate, 80 microns of described clamping limb thickness.
The major axis of the first parabola shaped cavity is that 200 microns, minor axis are 180 microns on described female mirror main body, and the center line of the described first parabola shaped cavity is along the y direction of principal axis of coordinate system shown in Fig. 2 a; First parabola shaped cavity and the square cavities on described female mirror, according to one first parabola shaped cavity and then the order of a square cavities be arranged in order, the described first parabola shaped cavity and square cavities are coaxial along coordinate system z axle, and described square cavities has 60; The length of described square cavities and width are 211.5 microns, highly are 210 microns, and described height refers to the y direction of principal axis along coordinate system; In the cross section of coordinate system xoz shown in Fig. 2 a, distance is 210 microns between the center of the described first parabola shaped cavity cross section and the square center, square cavities cross section.
The length of the sub-mirror body of described sub-mirror, width and highly be 210 microns, described sub-mirror body has 60, the coaxial and series arrangement along the z axle; The center line of the second parabola shaped cavity in the described sub-mirror body is along the x direction of principal axis of coordinate system shown in Fig. 2 a, and the major axis of the described second parabola shaped cavity is that 200 microns, minor axis are 180 microns, is spaced apart 210 microns between two sub-mirror bodies; In the cross section of coordinate system yoz shown in Fig. 2 a, the center of the described second parabola shaped cavity cross section and sub-mirror body section square center overlap.
The material of described female mirror main body and sub-mirror is the copper metal.
Described female mirror and sub-mirror through after the microscopically assembling, promptly form parabolic shape two-dimension focusing X ray combination refractor (as shown in Figure 1) of the present invention, and the z axle of coordinate system shown in Figure 1 is the optical axis of described parabolic shape two-dimension focusing X ray combination refractor.The two-dimension focusing function of described parabolic shape two-dimension focusing X ray combination refractor, finish by refraction unit of the two-dimension focusing one by one in it (shown in Fig. 1 c), described two-dimension focusing refraction unit constitutes along y axle, two orthogonal parabolas along the x axle jointly by one.The incident X-rays bundle is along the z direction of principal axis directive parabolic shape two-dimension focusing X ray combination refractor of coordinate system as shown in Figure 1, through the repeatedly refraction of two-dimension focusing refraction unit one by one, after the outgoing of described parabolic shape two-dimension focusing X ray combination refractor, form the two-dimension focusing focal spot.
Other schemes of present embodiment are all identical with embodiment 1.
The described content of this instructions embodiment only is enumerating the way of realization of inventive concept; protection scope of the present invention should not be regarded as only limiting to the concrete form that embodiment states, protection scope of the present invention also reach in those skilled in the art conceive according to the present invention the equivalent technologies means that can expect.
Claims (10)
1. a parabolic shape two-dimension focusing X ray makes up refractor, it is characterized in that: comprise glass substrate and female mirror, described female mirror is installed on the described glass substrate, the cross section that described female mirror comprises female mirror main body and sequence interval is arranged on described female mirror main body is first parabola shaped cavity and the square cavities that the parabola shaped opening of two symmetries joins and constitutes, the center of each first parabola shaped cavity and square cavities center all are positioned on the same straight line of length direction of described female mirror main body, the described first parabola shaped cavity is provided with first parabola that to reach X-radiation is focused on along the first parabola shaped cavity short-axis direction in order to X ray is reflected, each square cavities is embedded in sub-mirror body, the cross section of described sub-mirror body is square, described sub-mirror body hits exactly the second parabola shaped cavity that the parabola shaped opening that is provided with two symmetries joins and constitutes, the described second parabola shaped cavity is provided with second parabola that to reach X-radiation is focused on along the second parabola shaped cavity short-axis direction in order to X ray is reflected, the described first parabolic and described second parabolic mutual orthogonal thereto structure.
2. parabolic shape two-dimension focusing X ray combination refractor as claimed in claim 1, it is characterized in that: a plurality of sub-mirror bodies are installed on the clamping limb, and the center distance of adjacent sub-mirror body equates with the center distance of adjacent square cavity.
3. parabolic shape two-dimension focusing X ray combination refractor as claimed in claim 1 or 2, it is characterized in that: described sub-mirror body is a square, the major axis of the second parabola shaped cavity of the parabola shaped formation of described two symmetries and minor axis are all little than the described square length of side, the central lines of the second parabola shaped cavity of the parabola shaped formation of the center line of described square and described two symmetries, the described square length of side of the side ratio of described square cavities is big, and the degree of depth of the first parabola shaped cavity of the parabola shaped formation of described two symmetries and the degree of depth of square cavities equate with the length of side of described square.
4. parabolic shape two-dimension focusing X ray combination refractor as claimed in claim 3, it is characterized in that: the distance between the center of the center of described square cavities and the first parabola shaped cavity equates with the length of side of described square.
5. parabolic shape two-dimension focusing X ray combination refractor as claimed in claim 3, it is characterized in that: the major axis of the described second parabola shaped cavity and the minor axis all length of side than described square are little.
6. parabolic shape two-dimension focusing X ray combination refractor as claimed in claim 1 or 2, it is characterized in that: the major axis of the major axis of the described first parabola shaped cavity and the described second parabola shaped cavity equates that the minor axis of the minor axis of the described first parabola shaped cavity and the described second parabola shaped cavity equates.
7. inserted two-dimension focusing X ray combination refractor as claimed in claim 1 or 2 is characterized in that: the material of described female mirror main body and sub-mirror body is one of following: 1. SU-8,2. copper, 3. nickel.
8. parabolic shape two-dimension focusing X ray combination refractor as claimed in claim 1 or 2, it is characterized in that: the number of the described first parabola shaped cavity and square cavities is that scope is 20 to 100.
9. parabolic shape two-dimension focusing X ray combination refractor as claimed in claim 5, it is characterized in that: the thickness of described glass substrate is 1～2 millimeter, the major axis scope of the described first parabola shaped cavity and the second parabola shaped cavity is that 42 microns to 242 microns, minor axis scope are 32 microns to 222 microns, described foursquare side size range is 50 microns to 250 microns, and the difference range of the described square cavities and the positive dirction length of side is 1 micron to 2 microns.
10. parabolic shape two-dimension focusing X ray combination refractor as claimed in claim 2 is characterized in that: described clamping limb thickness 50-100 micron.
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| CN104681118A (en) * | 2015-02-13 | 2015-06-03 | 浙江工业大学 | Focal-spot-adjustable two-dimensional X-ray planar combined refractive lens |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102214493A (en) * | 2011-03-16 | 2011-10-12 | 浙江工业大学 | Method for manufacturing metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor |
| CN104681118A (en) * | 2015-02-13 | 2015-06-03 | 浙江工业大学 | Focal-spot-adjustable two-dimensional X-ray planar combined refractive lens |
| CN104681118B (en) * | 2015-02-13 | 2017-05-24 | 浙江工业大学 | Focal-spot-adjustable two-dimensional X-ray planar combined refractive lens |
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