CN101728146B - Device for preparing spherical solid-core microchannel plate - Google Patents
Device for preparing spherical solid-core microchannel plate Download PDFInfo
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- CN101728146B CN101728146B CN2009102180563A CN200910218056A CN101728146B CN 101728146 B CN101728146 B CN 101728146B CN 2009102180563 A CN2009102180563 A CN 2009102180563A CN 200910218056 A CN200910218056 A CN 200910218056A CN 101728146 B CN101728146 B CN 101728146B
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- microchannel plate
- screw
- transmission mechanism
- vacuum cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
- H01J43/246—Microchannel plates [MCP]
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Abstract
The invention relates to a device for preparing a spherical solid-core microchannel plate, and belongs to the device related in the technical fields of detection of gamma rays, X rays, cosmic rays, ultraviolet rays and charged particles. The device aims to solve the technical problems of providing the device for preparing the spherical solid-core microchannel plate. The device solves the technical scheme that: the device consists of a transmission mechanism and a vacuum heating device, wherein the transmission mechanism is positioned on the upper part of the whole device; and the vacuum heating device is arranged on the lower part of the whole device. In the device, one surface of a plane solid-core microchannel plate is contacted with a clamping fixture in the process of preparation by clamping the edge of the plane solid-core microchannel plate. The device ensures that both surfaces of the prepared spherical solid-core microchannel plate are parallel and have the same radius of curvature, and avoids the edge wrinkling; the device is completed in a vacuum system in the whole process of preparation so as to avoid oxidation on the surfaces; and the device improves quality and yield of the spherical solid-core microchannel plate.
Description
Technical field
The invention belongs to the Detection Techniques field of X ray, gamma-rays, cosmic ray, ultraviolet ray, charged particle, the preparation facilities of a kind of sphere solid-core microchannel plate that relates to.
Background technology
The planar microchannels plate is the electron tube of the continuous electron multiplication of a kind of two dimension, and it is to be arranged by certain geometrical pattern by many passages with continuous electron multiplication ability to form.Add certain voltage at its two ends, can obtain very high electron gain, extremely faint two-dimentional electronic image is doubled and amplifies.
Microchannel plate both can be used for surveying the light radiation from near-infrared to the hard X ray wave band, also can be used for surveying electronics, ion, α particle and gamma-rays and cosmic ray.At present, microchannel plate is mainly used in fields such as photon counting imaging detection and lll night vision imaging, uses microchannel plate to be widely used in fields such as space science (space astronomy, space plasma physics, survey of deep space etc.), synchrotron radiation physics, chemistry, material science, optics (fluorescence imaging, Raman spectrum) and biomedicine as the position sensitive photon counting imaging detector of image intensifier.
For big field optical imaging system, the planar microchannels plate can not satisfy the image quality requirement, spherical microchannel board can be eliminated the distortion that spherical aberration causes, and then improve the image quality of big field optical imaging system, therefore, the device of preparation spherical microchannel board is the problem that the insider very pays close attention to.Being application number with the most approaching prior art of the present invention, the preparation facilities of a kind of sphere solid-core microchannel plate of providing in 200410073378.0 the patent of invention is provided, as shown in Figure 1: comprise mold 4 on mold 2 under cylindrical shape positioning clamping fixture 1, the concave spherical surface cylindricality, plane solid-core microchannel plate 3, the protruding sphere cylindricality, balancing weight 5, mold steam vent 6 down.
With plane solid-core microchannel plate 3 be placed on mold 2 under the concave spherical surface cylindricality above, the place of keeping to the side of mold 2 has axially mold steam vent 6 down under the concave spherical surface cylindricality, cylindrical shape positioning clamping fixture 1 is placed on the plane solid-core microchannel plate 3, on the protruding sphere cylindricality the last inner core of mold 4 by cylindrical shape positioning clamping fixture 1 be pressed in plane solid-core microchannel plate 3 above, on the axostylus axostyle of mold 4 on the protruding sphere cylindricality, place balancing weight 5, on the protruding sphere cylindricality under the radius of curvature of the protruding sphere of mold 4 and the concave spherical surface cylindricality radius of curvature of the concave spherical surface of mold 2 identical.Whole device is put into heating furnace, when temperature reaches the softening point temperature of plane solid-core microchannel plate 3, under the action of gravity of mold 4 and balancing weight 5 on the protruding sphere cylindricality, plane solid-core microchannel plate 3 is pressed into the spherical crown shape curved surface with ring plain edge, the radius of curvature of the protruding sphere of mold 4 is identical on its upper surface radius of curvature and the protruding sphere cylindricality, and the radius of curvature of the concave spherical surface of mold 2 is identical under its lower surface radius of curvature and the concave spherical surface cylindricality.
The major defect that the device of above-mentioned preparation sphere solid-core microchannel plate exists: the one, the edge that following mold steam vent 6 is positioned at mold 2 under the concave spherical surface cylindricality is axial, prebending of preparation process midplane solid-core microchannel plate 3 marginal portions causes following mold steam vent 6 to be blocked, gas under the concave spherical surface cylindricality between mold 2 and the plane solid-core microchannel plate 3 can't be got rid of, and makes the sphere solid-core microchannel plate surface of preparing that projection or bubble be arranged; The 2nd, the sphere of mold 4 has only any to contact with plane solid-core microchannel plate 3 on the protruding sphere cylindricality, the sphere of mold 2 is parallel fully under the sphere that can't guarantee mold 4 on the protruding sphere cylindricality and the concave spherical surface cylindricality, cause two air spotss of the sphere solid-core microchannel plate prepared capable, the radius of curvature difference; The 3rd, cause the ring plain edge of the sphere solid-core microchannel plate 3 prepared fold to occur.
Summary of the invention
In order to overcome the defective that prior art exists, the objective of the invention is to improve the quality and the rate of finished products of sphere solid-core microchannel plate, the preparation facilities of a kind of sphere solid-core microchannel plate of ad hoc meter.
The technical problem to be solved in the present invention is: the preparation facilities that a kind of sphere solid-core microchannel plate is provided, the technical scheme of technical solution problem as shown in Figure 2, form by transmission mechanism and heating in vacuum device two parts, transmission mechanism is positioned at the top of whole device, and the heating in vacuum device is in the bottom of whole device.Wherein transmission mechanism comprises worm screw 7, worm gear 8, power transmission shaft 9, drive block 10, briquetting 11, transmission mechanism bracing frame 12, bellows 13, bellows flange 14, first screw 15, sealing ring 16, second screw 17; The heating in vacuum device comprises high-temperature heater 18, upper press ring 19, plane solid-core microchannel plate 20, the 3rd screw 21, following pressure ring 22, spherical mold 23, vacuum cavity 24, supports base plate 25, supporting seat 26, the 4th screw 27, vacuum cavity loam cake 28.Worm gear 8 and the engagement of worm screw 7 teeth in transmission mechanism, worm gear 8 is connected with the central shaft hole of drive block 10 is coaxial, power transmission shaft 9 passes the centre bore of worm gear 8 and drive block 10, put in the vacuum cavity 24, between power transmission shaft 9 and the drive block 10 with being threaded, transmission mechanism bracing frame 12 is sleeved on the outside of drive block 10 in the bottom of worm gear 8, the outside at drive block 10 is set with briquetting 11 near worm gear 8 places, the lower edge of briquetting 11 is dropped on the shoulder of transmission mechanism bracing frame 12, the bearing of drive block 10 is pushed down, and the limit of prolonging of transmission mechanism bracing frame 12 is connected with vacuum cavity loam cake 28 by second screw 17; In the chamber of the transmission mechanism bracing frame 12 below drive block 10, on power transmission shaft 9, be set with bellows 13, both are connected, below bellows flange 14, in the groove on vacuum cavity loam cake 28, sealing ring 16 is housed, and bellows 13 is connected with vacuum cavity loam cake 28 by bellows flange 14 usefulness first screw 15; In the heating in vacuum device, supporting seat 26 is connected with it in the bottom of vacuum cavity 24 and is supporting vacuum cavity 24, high-temperature heater 18 is contained on the support base plate 25 in the vacuum cavity 24, the lower end of power transmission shaft 9 puts in the high-temperature heater 18 by the mesopore of high-temperature heater 18 loam cakes, upper press ring 19 is connected with the lower end of the 4th screw 27 with power transmission shaft 9 by centre bore, spherical mold 23 is housed under upper press ring 19 in high-temperature heater 18, on spherical mold 23, place the plane solid-core microchannel plate 20 of diameter, make its edge below upper press ring 19, exceed the internal diameter of upper press ring 19 greater than upper press ring 19 internal diameters; Be set with down pressure ring 22 on spherical mold 23, the edge of plane solid-core microchannel plate 20 drops on down on the pressure ring 22, is connected with the 3rd screw 21 between upper press ring 19 and the following pressure ring 22.
Operation principle explanation: at first, with following pressure ring 22 plane solid-core microchannel plate 20 usefulness the 3rd screw 21 clampings are made it to contact with spherical mold 23 together with upper press ring 19; Secondly, vacuum cavity 24 is evacuated behind the state, start high-temperature heater 18, when temperature in the stove rises to the softening temperature of plane solid-core microchannel plate 20, be incubated 20-30 minute, start transmission mechanism then power transmission shaft 9 is moved downward, the distance of motion just in time is the rise of the sphere solid-core microchannel plate that will prepare, and forms the spherical crown with plane ring-shaped edge to upper process gradually at this process midplane solid-core microchannel plate 20; At last, close high-temperature heater 18, take out the cooling back.
Good effect of the present invention: by the edge of clamping plane solid-core microchannel plate, one surface is contacted with mold, two surfaces that guaranteed the sphere solid-core microchannel plate prepared are parallel, have identical radius of curvature, and avoided the generation of marginal fold; Whole process of preparation is finished in vacuum system, has also avoided surperficial oxidation.
Description of drawings
Accompanying drawing 1 is the structural representation of prior art;
Accompanying drawing 2 is structural representations of the present invention.
Embodiment
The present invention implements by structure shown in Figure 2, wherein worm screw 7 is by the stainless steel manufacturing, worm gear 8 is by the red copper manufacturing, power transmission shaft 9 is also by the stainless steel material manufacturing, the part that power transmission shaft 9 is threaded with drive block 10 has been processed the about 0.5mm fine thread of spacing, diameter 10～the 30mm of power transmission shaft 9, the length of fine thread part is about tens to mm more than 100, power transmission shaft 9 at the shaft diameter of vacuum cavity 24 inside than the big several mm that processed fine thread; Briquetting 11 and transmission mechanism bracing frame 12 all adopt stainless steel material, and bellows 13 is the hydraulic pressure corrugated stainless steel tubing, are welded on the power transmission shaft 9, and diameter 40～80mm can realize tens to mm more than 100 the distance that moves downward; Bellows flange 14 is a steel flange, first screw 15 is the stainless steel screw of M6, sealing ring 16 is the fluorine rubber ring of diameter 10mm, and second screw 17 also is the stainless steel screw of M6, and whole transmission mechanism can be realized the kinematic accuracy of 0.01mm and tens to mm more than 100 the distance that moves downward; High-temperature heater 18 is that power is the square high temperature molybdenum sheet heating furnace of tens kW, except its following inner surface is not installed the molybdenum sheet, all the other five inner surfaces have all been installed molybdenum sheet, door has been installed in one of them side, five layers of stainless steel screen are arranged as thermal insulation layer in the outside of molybdenum sheet, the inside heating space of high-temperature heater is 300mm * 300mm * 300mm, the uniform temperature zone space is 200mm * 200mm * 200mm, temperature homogeneity is ± 2 ℃ in the uniform temperature zone, temperature-controlled precision is ± 1 ℃, the uniform temperature zone temperature range is room temperature～1000 ℃, upper press ring 19 is the cylinder of stainless steel material, be fixed together with power transmission shaft 9 by the 4th screw 27, the 3rd screw 21 is the stainless steel screw of M3, the diameter of processed plane solid-core microchannel plate 20 is 18～100mm, thickness is 0.3～2mm, following pressure ring 22 is the cylinder of stainless steel material, the internal diameter of cylinder is slightly larger than the external diameter of spherical mold 23, spherical mold 23 is a stainless steel material, top is ball-crown body, the bottom is a cylinder, the radius of curvature of ball-crown body is identical with the radius of curvature of the sphere solid-core microchannel plate that will make, its surface can reach more than the 1nm through roughness after the polishing, and cylindrical diameter is identical with the bore of the sphere solid-core microchannel plate that will make.Vacuum cavity 24 is the circular vacuum cavity of the double-deck water-cooled of stainless steel material, and cavity internal diameter 500～800mm uses vacuum pump that it is evacuated.Supporting base plate 25 and supporting seat 26 is stainless steel material, and the 4th screw 27 is the M6 stainless steel screw, and vacuum cavity loam cake 28 is a stainless steel flat plate.
Claims (1)
1. a sphere solid-core microchannel plate preparation facilities is characterized in that being made up of transmission mechanism and heating in vacuum device two parts, and transmission mechanism is positioned at the top of whole device, and the heating in vacuum device is in the bottom of whole device; Wherein transmission mechanism comprises worm screw (7), worm gear (8), power transmission shaft (9), drive block (10), briquetting (11), transmission mechanism bracing frame (12), bellows (13), bellows flange (14), first screw (15), sealing ring (16), second screw (17); The heating in vacuum device comprises high-temperature heater (18), upper press ring (19), plane solid-core microchannel plate (20), the 3rd screw (21), following pressure ring (22), spherical mold (23), vacuum cavity (24), supports base plate (25), supporting seat (26), the 4th screw (27), vacuum cavity loam cake (28); Worm gear in transmission mechanism (8) and the engagement of worm screw (7) tooth, coaxial being connected of central shaft hole of worm gear (8) and drive block (10), power transmission shaft (9) passes the centre bore of worm gear (8) and drive block (10), put in the vacuum cavity (24), between power transmission shaft (9) and the drive block (10) with being threaded, transmission mechanism bracing frame (12) is sleeved on the outside of drive block (10) in the bottom of worm gear (8), briquetting (11) is located to be set with near worm gear (8) in the outside at drive block (10), the lower edge of briquetting (11) is dropped on the shoulder of transmission mechanism bracing frame (12), the bearing of drive block (10) is pushed down, and the limit of prolonging of transmission mechanism bracing frame (12) is connected with vacuum cavity loam cake (28) by second screw (17); In the chamber of the transmission mechanism bracing frame (12) below drive block (10), on power transmission shaft (9), be set with bellows (13), both are connected, below bellows flange (14), in the groove on vacuum cavity loam cake (28), sealing ring (16) is housed, and bellows (13) is connected with vacuum cavity loam cake (28) with first screw (15) by bellows flange (14); In the heating in vacuum device, supporting seat (26) is connected with it in the bottom of vacuum cavity (24) and is supporting vacuum cavity (24), high-temperature heater (18) is contained on the interior support base plate (25) of vacuum cavity (24), the lower end of power transmission shaft (9) puts in the high-temperature heater (18) by the mesopore of high-temperature heater (18) loam cake, upper press ring (19) is connected with the lower end of the 4th screw (27) with power transmission shaft (9) by centre bore, spherical mold (23) is housed under the inherent upper press ring of high-temperature heater (18) (19), go up the plane solid-core microchannel plate (20) of placement diameter at spherical mold (23), make its edge below upper press ring (19), exceed the internal diameter of upper press ring (19) greater than upper press ring (19) internal diameter; Be set with down pressure ring (22) on spherical mold (23), the edge of plane solid-core microchannel plate (20) drops on down on the pressure ring (22), is connected with the 3rd screw (21) between upper press ring (19) and the following pressure ring (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102180563A CN101728146B (en) | 2009-12-22 | 2009-12-22 | Device for preparing spherical solid-core microchannel plate |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009102180563A CN101728146B (en) | 2009-12-22 | 2009-12-22 | Device for preparing spherical solid-core microchannel plate |
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| CN101728146A CN101728146A (en) | 2010-06-09 |
| CN101728146B true CN101728146B (en) | 2011-09-28 |
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| CN2009102180563A Expired - Fee Related CN101728146B (en) | 2009-12-22 | 2009-12-22 | Device for preparing spherical solid-core microchannel plate |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102830315B (en) * | 2012-09-05 | 2015-07-08 | 清华大学 | Device and method for simulating electronic component failure in aerospace environment |
| CN103065910A (en) * | 2012-12-21 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Thermal formed spherical surface solid core micro-channel plate preparing device based on gravity of mold |
| CN103065905A (en) * | 2012-12-27 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Square-cylindrical-surface solid-core microchannel plate preparation method and square-cylindrical-surface solid-core microchannel plate |
| CN103715034B (en) * | 2013-12-30 | 2016-06-08 | 中国科学院西安光学精密机械研究所 | Photoelectric detector transfer manufacturing system and manufacturing method |
| CN103794429A (en) * | 2014-01-22 | 2014-05-14 | 中国科学院长春光学精密机械与物理研究所 | Square cylindrical surface solid core microchannel plate manufacturing device and method |
| CN105016293B (en) * | 2015-05-08 | 2017-03-22 | 华东师范大学 | Device and manufacturing method for manufacturing silicon spherical micro-channel plate |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1089361A (en) * | 1993-10-21 | 1994-07-13 | 中国科学院西安光学精密机械研究所 | Method for manufacturing small-size microchannel plate |
| CN1444771A (en) * | 2000-06-08 | 2003-09-24 | 浜松光子学株式会社 | Micro-charnnel plate |
| CN1645550A (en) * | 2004-12-14 | 2005-07-27 | 中国科学院西安光学精密机械研究所 | spherical micro-channel plate and preparation method thereof |
-
2009
- 2009-12-22 CN CN2009102180563A patent/CN101728146B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1089361A (en) * | 1993-10-21 | 1994-07-13 | 中国科学院西安光学精密机械研究所 | Method for manufacturing small-size microchannel plate |
| CN1444771A (en) * | 2000-06-08 | 2003-09-24 | 浜松光子学株式会社 | Micro-charnnel plate |
| CN1645550A (en) * | 2004-12-14 | 2005-07-27 | 中国科学院西安光学精密机械研究所 | spherical micro-channel plate and preparation method thereof |
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| CN101728146A (en) | 2010-06-09 |
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Granted publication date: 20110928 Termination date: 20121222 |