CN1623156A - 使用制程叙述与架构关系控制制程之方法与装置 - Google Patents

使用制程叙述与架构关系控制制程之方法与装置 Download PDF

Info

Publication number
CN1623156A
CN1623156A CNA028284151A CN02828415A CN1623156A CN 1623156 A CN1623156 A CN 1623156A CN A028284151 A CNA028284151 A CN A028284151A CN 02828415 A CN02828415 A CN 02828415A CN 1623156 A CN1623156 A CN 1623156A
Authority
CN
China
Prior art keywords
context
configuration
procedure
producing
association
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA028284151A
Other languages
English (en)
Chinese (zh)
Inventor
B·R·豪勃斯
Y·施
R·C·布朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of CN1623156A publication Critical patent/CN1623156A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41835—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by program execution
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32043—Program, information flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S707/00—Data processing: database and file management or data structures
    • Y10S707/99941—Database schema or data structure
    • Y10S707/99944—Object-oriented database structure
    • Y10S707/99945—Object-oriented database structure processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S707/00—Data processing: database and file management or data structures
    • Y10S707/99941—Database schema or data structure
    • Y10S707/99948—Application of database or data structure, e.g. distributed, multimedia, or image

Landscapes

  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Strategic Management (AREA)
  • Economics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Resources & Organizations (AREA)
  • Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Entrepreneurship & Innovation (AREA)
  • General Business, Economics & Management (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Marketing (AREA)
  • Tourism & Hospitality (AREA)
  • Operations Research (AREA)
  • Development Economics (AREA)
  • Educational Administration (AREA)
  • Game Theory and Decision Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
CNA028284151A 2002-02-28 2002-12-18 使用制程叙述与架构关系控制制程之方法与装置 Pending CN1623156A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/085,956 2002-02-28
US10/085,956 US6826437B2 (en) 2002-02-28 2002-02-28 Association of process context with configuration document for manufacturing process

Publications (1)

Publication Number Publication Date
CN1623156A true CN1623156A (zh) 2005-06-01

Family

ID=27753758

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA028284151A Pending CN1623156A (zh) 2002-02-28 2002-12-18 使用制程叙述与架构关系控制制程之方法与装置

Country Status (8)

Country Link
US (1) US6826437B2 (https=)
EP (1) EP1479018A1 (https=)
JP (1) JP4647215B2 (https=)
KR (1) KR20040089641A (https=)
CN (1) CN1623156A (https=)
AU (1) AU2002361791A1 (https=)
TW (1) TWI326432B (https=)
WO (1) WO2003075202A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109972122A (zh) * 2019-03-28 2019-07-05 惠科股份有限公司 一种用于显示面板的物料派送控制方法及系统

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030204528A1 (en) * 2002-04-30 2003-10-30 Yeaun-Jyh Su Semiconductor wafer manufacturing execution system with special engineer requirement database
US20060282462A1 (en) * 2003-08-13 2006-12-14 Koninklijke Philips Electronics N.V. Context-of-use-independent content systems
US20050268219A1 (en) * 2004-05-28 2005-12-01 Microsoft Corporation Method and system for embedding context information in a document
US9070172B2 (en) * 2007-08-27 2015-06-30 Schlumberger Technology Corporation Method and system for data context service
US8156131B2 (en) * 2007-08-27 2012-04-10 Schlumberger Technology Corporation Quality measure for a data context service
TWI380390B (en) * 2008-04-08 2012-12-21 Inotera Memories Inc Method and system for detecting tool errors to stop a process recipe for a single chamber
US20140324769A1 (en) * 2013-04-25 2014-10-30 Globalfoundries Inc. Document driven methods of managing the content of databases that contain information relating to semiconductor manufacturing operations

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6000830A (en) * 1997-04-18 1999-12-14 Tokyo Electron Limited System for applying recipe of semiconductor manufacturing apparatus
US6035293A (en) * 1997-10-20 2000-03-07 Advanced Micro Devices, Inc. Validating process data in manufacturing process management
US6397225B1 (en) 1998-12-23 2002-05-28 Advanced Micro Devices, Inc. Messaging system with protocol independent message format
US6334122B1 (en) 1998-12-23 2001-12-25 Advanced Micro Devices, Inc. Method and apparatus for translating variable names to column names for accessing a database
JP3998372B2 (ja) * 1999-06-30 2007-10-24 株式会社東芝 半導体処理工程制御システム、半導体処理工程制御方法、及び、そのための処理を記録した記録媒体
US6415193B1 (en) * 1999-07-08 2002-07-02 Fabcentric, Inc. Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109972122A (zh) * 2019-03-28 2019-07-05 惠科股份有限公司 一种用于显示面板的物料派送控制方法及系统

Also Published As

Publication number Publication date
TW200305090A (en) 2003-10-16
US6826437B2 (en) 2004-11-30
TWI326432B (en) 2010-06-21
AU2002361791A1 (en) 2003-09-16
JP4647215B2 (ja) 2011-03-09
US20030163213A1 (en) 2003-08-28
KR20040089641A (ko) 2004-10-21
WO2003075202A2 (en) 2003-09-12
EP1479018A1 (en) 2004-11-24
JP2005519461A (ja) 2005-06-30

Similar Documents

Publication Publication Date Title
US11132491B2 (en) DRC processing tool for early stage IC layout designs
CN101351751B (zh) 半导体器件实验流程和生产流程的综合配置、流程及执行系统
US6516237B1 (en) System for and method of preparing manufacturing process specifications and production control system
JP4588037B2 (ja) ドキュメントの整合性検査支援システムおよび方法、ならびにそのプログラム
CN1623156A (zh) 使用制程叙述与架构关系控制制程之方法与装置
US20230386015A1 (en) Layout-based wafer defect identification and classification
US20120053719A1 (en) Method and apparatus for automated validation of semiconductor process recipes
CN117217163B (zh) 一种基于脚本的soc芯片的测试方法
US6499001B1 (en) Engineering database feedback system
CN101419544A (zh) 一种计算机程序代码自动生成器
CN114942749B (zh) 审批系统开发方法、装置、设备及存储介质
US20140195994A1 (en) Defective artifact removal in photolithography masks corrected for optical proximity
CN1885049A (zh) 计量工具的误差记录分析方法和系统
Hahn et al. Process management and design for MEMS and microelectronics technologies
CN112818628A (zh) 集成电路制造工艺设计规则的自动化开发方法及其系统
US20020065974A1 (en) Measurement-based management of relational databases
CN120457543A (zh) 在半导体晶粒上印制唯一标识符的方法和系统
JP2004241697A (ja) 半導体ウェハの製造管理装置
JP2005071371A (ja) コンピュータ支援設計ツールにおける設計要素を解析するシステムおよび方法
CN1384532A (zh) 半导体电路用光掩模的订货方法
CN112214501A (zh) 用于利用序列库的模块工程化的系统和方法
CN101206679B (zh) 布局图设计规则检查的方法与计算机可读取记录介质
Morgan et al. ATCG: AN AUTOMATED TEST CASE GENERATOR.
JP4413810B2 (ja) 製品構成管理プログラム、製品構成管理方法および製品構成管理装置
JPH11195594A (ja) 半導体露光装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Open date: 20050601