CN1609599A - Three-dimensional electronic speckle interferometer with phase shifting function - Google Patents
Three-dimensional electronic speckle interferometer with phase shifting function Download PDFInfo
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- CN1609599A CN1609599A CN 200310108158 CN200310108158A CN1609599A CN 1609599 A CN1609599 A CN 1609599A CN 200310108158 CN200310108158 CN 200310108158 CN 200310108158 A CN200310108158 A CN 200310108158A CN 1609599 A CN1609599 A CN 1609599A
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Abstract
The 3D electronic speckle interferometer with phase shift function includes three green lasers and their W field optical path, U field optical path and V field optical path. The W field optical path laser, total reflector, beam expander, light splitter to reflect one light beam to the measured object and the other light beam to the diffusing device, imager and camera with information fed to computer, and computer controlled phase shifter connected to the diffusing device. Each of the U field optical path and V field optical path includes laser, light splitting prism to make one light beam reach the measured object via three total reflectors and beam expander and the other light beam reach the measured object via two total reflectors and beam expander, imager and camera with information fed to computer, and computer controlled phase shifter on the other side of the total reflector.
Description
Technical field
The present invention relates to a kind of optical measurement mechanics instrument, relate in particular to a kind of three-dimensional electronic speckle interferometer that deformation of body rear surface micrometric displacement amount is accurately measured with phase shift function.
Background technology
The detection of prior art after to deformation of body mainly contains following two kinds of technology:
A kind of is holographic interferometry technique, and its method is, arranges holographic light path earlier, is double exposed in the stressed front and back of testee, then holographic plate is shown photographic fixing and handles, and realizes reproducing by laser at last.The defective that holographic interferometry technique is carried out deformation displacement is that operation is more, promptly must be through carrying out numerous and diverse apparent photographic fixing wet process earlier, also will be through a process of reproducing, and above work must be carried out in dark place in strictness; And if will realize detecting in real time with holographic interference technique, holographic plate is accurately resetted, method be more complicated, so this technology is restricted in actual applying;
Another kind is the electronic speckle pattern interferometry technology, and electronic speckle pattern interferometry (ESPI) (full name ElectronicSpeckle Pattern Interferometry) is a kind of complex art that Computer Image Processing, laser and holographic interference combine.
Electronic speckle interferometer is used in the optical measurement mechanics field, research and teaching is of many uses in testing, and non-cpntact measurement can obtain the displacement of the measured object whole audience; For finite element provides reliable boundary condition; Can be used for structure optimization; Can be applied in mesomechanics, residual stress measurement, compound substance research, structure analysis and non-destructive and detect, can also study impact, dynamic and vibration problem, by the needed information of aftertreatment acquisition deviser of necessity.
Similar products are abroad arranged at present, as Steibichler and Ettemeyer company the electronic speckle interferometer product is arranged, but the electronic speckle interferometer of above-mentioned company all can not directly obtain the independently interference fringe of U, V and W field, must try to achieve U field, V field and W field indirectly by de-connecting a cube journey.Therefore in actual application, certainly will bring bigger error, its practicality and construction value then greatly reduce thus.
See also shown in Figure 1ly, this is the structural representation of light path in the three-dimensional electronic speckle interferometer produced of Steibichler company.From Fig. 1 light channel structure as seen, Steibichler company adopts the three beams of laser irradiation, and the angle that laser beam A and laser beam B are positioned at xoy plane and z axle is respectively α, β.Laser A and laser B irradiation can solve U, W field displacement; The angle that another laser beam C is positioned at xoz plane and Z axle is γ, and the result reflects the equation of V and W, obtains the displacement of U, V and W field by simultaneous equations.This shows,, must bring than mistake by program solution.
See also shown in Figure 2ly, this is the structural representation of light path in the three-dimensional electronic speckle interferometer produced of Ettemeyer company.Among Fig. 2, when 2 irradiations of light beam 1 and light beam, obtain independently U, V field, i.e. in-plane displacement, this moment, light beam 3 should cover; Obtain containing the W field of U, V component when light beam 2 and light beam 3 irradiations, this moment, there was error the W field, and error is relevant with the size of light beam 2 and measured object surface normal angle α, and the α angle is big more, and error is big more, otherwise then opposite; This moment, light beam 3 must cover.From Fig. 2 light channel structure as seen, the three-dimensional electronic speckle interferometer that Ettemeyer company produces can directly independently obtain U and V field, but the W field can only utilize the light of non-normal incidence as thing light, reference light again induces one, be that the W field is not independently, wherein must comprise the U field component, the W field component has error like this, and the W field is a very important component in measuring, and therefore there is the bigger defective of measuring error in above-mentioned three-dimensional electronic speckle interferometer.
Summary of the invention
The object of the present invention is to provide a kind of three-dimensional electronic speckle interferometer with phase shift function, it can obtain directly and purely measuring of W field striped, thereby obtains accurate measurement data.
The object of the present invention is achieved like this:
A kind of three-dimensional electronic speckle interferometer with phase shift function, be used for accurate measurement to deformation of body rear surface micrometric displacement amount, comprise: three solid green laser devices, and the machine element that is used for deal with data, the light connection is provided with W field light path, U field light path and V field light path respectively behind described three solid green laser devices; Be characterized in:
Described W light path comprises: a solid green laser device, and this laser instrument is launched beam of laser, is connected with laser optical and what receive laser beam is a completely reflecting mirror, and what be connected with completely reflecting mirror light is a beam expanding lens; What be connected with beam expanding lens light is a light-splitting device, the expansion Shu Jiguang that this light-splitting device reception beam expanding lens is sent here also should expand Shu Jiguang and be divided into two, wherein, one expands bundle laser-bounce to the measured object that is positioned at light-splitting device b side, and another expansion bundle laser-transmitting is crossed light-splitting device and is radiated on the diffuse reflectance device that is positioned at light-splitting device c side; The d of light-splitting device side promptly with measured object in opposite directions a side one imaging device is set, with the opposite side of imaging device one camera is set in opposite directions, camera with in the imaging device be filmed by the position situation of the measured object of imaging and this information delivered to computing machine; What be connected with diffuse reflectance device light is a phase-shifter, this phase-shifter makes diffuse reflectance device produce small translation by the small change in optical path length of voltage promotion generation of computer control output, diffused light reflexes to imaging device by light-splitting device, receives back input computing machine by camera;
Described U field light path is identical with V field light path, comprising: a laser instrument, and this laser instrument is launched beam of laser, is connected with laser optical and what receive laser beam is an Amici prism; This Amici prism is told two-way light, the road light that Amici prism is told is delivered to beam expanding lens through three completely reflecting mirrors, by completely reflecting mirror directive measured object, two completely reflecting mirrors of another Lu Guangjing that Amici prism is told are delivered to beam expanding lens, again by completely reflecting mirror directive measured object again; Relative position at measured object is provided with an imaging device, and with the camera that imaging device is oppositely arranged, this camera is filmed the position situation of measured object in the imaging device and this information is delivered in the computing machine; In addition side at completely reflecting mirror is provided with a phase-shifter, and this phase-shifter produces small translation by the control of computing machine output voltage, so that also respective change of light path.
In the above-mentioned three-dimensional electronic speckle interferometer with phase shift function, wherein, what described laser instrument all adopted is that optical maser wavelength is the pumping solid green laser device of 532 nanometers.
In the above-mentioned three-dimensional electronic speckle interferometer with phase shift function, wherein, the diffuse reflectance device in the described W of the being arranged on light path is made by the hair side plastics, forms diffuse surface.
In the above-mentioned three-dimensional electronic speckle interferometer with phase shift function, wherein, described two phase-shifters are made by the PZT piezoelectric ceramics.
In the above-mentioned three-dimensional electronic speckle interferometer with phase shift function, wherein, phase-shifter is directly installed on as on the diffuse reflectance device with reference to light in the described W of the being arranged on light path.
In the above-mentioned three-dimensional electronic speckle interferometer with phase shift function, wherein, phase-shifter is directly installed on the completely reflecting mirror of one of symmetrical incident light in the described U of being arranged on field light path and the V field light path.
In the above-mentioned three-dimensional electronic speckle interferometer with phase shift function, wherein, what the Amici prism in the described U of being arranged on field light path and the V field light path adopted is the depolarized smooth Amici prism that can eliminate polarisation and laser energy is fully utilized.
In the above-mentioned three-dimensional electronic speckle interferometer with phase shift function, wherein, described each completely reflecting mirror is the completely reflecting mirror that makes the electron gun dura mater high energy that laser energy is fully utilized.
The present invention has the three-dimensional electronic speckle interferometer of phase shift function owing to adopted above-mentioned technical scheme, makes it compared with prior art, has following advantage and good effect:
1. the present invention is owing to adopt above-mentioned technical scheme, therefore can be, even can be directly used in the scene, and be convenient to aftertreatment without dark place and apparent photographic fixing wet process, for the measurement of engineering structure displacement field provides noncontact and high sensitivity instrument;
2. therefore the present invention can obtain pure W field owing to light vertical incidence in the light path of W field vertically receives; In U, V field light path, because the incident of light symmetry, and the information of W field do not reflect because of offseting, so U field or V field also are independently, promptly directly obtain the interference fringe of pure U, V, W field, measuring condition is provided and obtains high-precision measurement result for accurately obtaining measurement data;
The present invention because adopted that volume is little, power is big, in light weight, single mode output, long, the portable 532nm pump laser of coherent length, the sensitivity of measurement is improved, and makes whole apparatus structure more compact;
4. the present invention not only makes this three-dimensional electronic speckle interferometer have phase shift function owing to adopt the PZT piezoelectric ceramics as phase-shifter, and improves measuring accuracy, can realize manually and the computer controlled automatic phase shift.
5. the present invention is directly installed on phase-shifter on the diffusing globe of reference light owing to make full use of the long advantage of 532nm laser instrument coherent length, thereby obtains the direct and pure measurement of W field striped, has improved measuring accuracy;
6. the present invention is owing to adopt to eliminate the Amici prism and the electron gun dura mater high energy completely reflecting mirror of polarisation, thereby valuable laser energy is fully utilized;
7. the present invention is owing to be provided with adjutage, thereby can utilize adjutage that the sensitivity of whole instrument when measuring U and V field can be regulated, and therefore can be fit to various occasions uses.
8. the present invention can be used for teaching, and the effect in electronic speckle pattern interferometry has deep understanding to computing machine to make the student, and can be used as the master of mechanics and optics specialty and the strong instrument that the doctoral candidate is engaged in correlative study;
9. whole instrument lightness of the present invention, densification, the rigidity height is easy to carry and can carries out in-site measurement work.
Description of drawings
Embodiment by the following three-dimensional electronic speckle interferometer that the present invention is had a phase shift function can further understand purpose of the present invention, specific structural features and advantage in conjunction with the description of its accompanying drawing.Wherein, accompanying drawing is:
Fig. 1 is the index path of prior art three-dimensional electronic speckle interferometer;
Fig. 2 is the index path of prior art three-dimensional electronic speckle interferometer;
Fig. 3 is the agent structure synoptic diagram of the three-dimensional electronic speckle interferometer of the present invention with phase shift function;
Fig. 4 is three-dimensional electronic speckle interferometer W, U, the V field structure synoptic diagram that the present invention has phase shift function;
Fig. 5 is the structural representation that the present invention has W field light path in the three-dimensional electronic speckle interferometer of phase shift function;
Fig. 6 is the structural representation that the present invention has U, V field light path in the three-dimensional electronic speckle interferometer of phase shift function.
Embodiment
See also shown in Figure 3ly, Fig. 3 is the agent structure synoptic diagram of the three-dimensional electronic speckle interferometer of the present invention with phase shift function.Among Fig. 3, M1 and M1 ' twin-beam are measured the V field displacement, and M2 and M2 ' twin-beam are measured the U field displacement, and suit light-splitting device 14 (referring to Fig. 5) is in order to measure the W field displacement on the ZOOM camera lens.
In the time must accurately measuring the V field displacement, on M1, change phase-shifter, add that by the phase-shifter power supply voltage promotes to produce small change in optical path length, try to achieve accurate displacement by computed in software;
In the time must accurately measuring the U field displacement, on M2, change phase-shifter, add that by the phase-shifter power supply voltage promotes to produce small change in optical path length, try to achieve accurate displacement by computed in software;
In the time must accurately measuring the W field displacement, on suit light-splitting device 14 on the ZOOM camera lens, install phase-shifter 15 additional, it adds that by the phase-shifter power supply voltage promotes to produce small change in optical path length, tries to achieve precise displacement by computed in software.
Please in conjunction with Fig. 3 referring to shown in Figure 4, Fig. 4 is three-dimensional electronic speckle interferometer W, U, the V field structure synoptic diagram that the present invention has phase shift function.The three-dimensional electronic speckle interferometer that the present invention has a phase shift function is used for the accurate measurement to structure micrometric displacement amount behind the deformation of body, three-dimensional electronic speckle interferometer comprises: three solid green laser devices, light is connected respectively with three solid green laser devices is W field light path 10, U field light path and V field light path 20, also is provided with the machine element that is used for deal with data in W field light path 10, U field light path and V field light path 20.In the present invention, it is 532 nanometer pumping solid green laser devices that three solid green laser devices all adopt optical maser wavelength, the advantage of 532nm pumping solid green laser device is, wavelength short (532 nanometers are than the short 100nm of the ammonia one Ne laser wavelength of general 633 nanometers), highly sensitive (can make the sensitivity of measurement improve 2M), and, have also that volume is little, power is big, in light weight, single mode output, coherent length is long, being easy to carry is applicable to on-the-spot advantage, thereby can make whole apparatus structure more compact; Utilize adjutage that the sensitivity of whole instrument when measuring U and V field can be regulated simultaneously, use thereby be fit to various occasions more.
Please in conjunction with Fig. 4 referring to shown in Figure 5, Fig. 5 is the structural representation that the present invention has W field light path in the three-dimensional electronic speckle interferometer of phase shift function.This W light path 10 comprises: a solid green laser device 11, this laser instrument 11 is launched beam of laser 111, be connected with laser instrument 11 light and what receive laser beam 111 is a completely reflecting mirror 12, this completely reflecting mirror 12 adopts the completely reflecting mirror that makes the electron gun dura mater high energy that laser energy is fully utilized, what be connected with completely reflecting mirror 12 light is a beam expanding lens 13, the beam of laser 111 that beam expanding lens 13 is sent completely reflecting mirror 12 here expands restraints into a branch of expansion Shu Jiguang, and the expansion Shu Jiguang that will expand behind the bundle delivers to the light-splitting device 14 that is connected with beam expanding lens 13 light; This light-splitting device 14 receives the expansion Shu Jiguang that beam expanding lens 13 is sent here, and should expand Shu Jiguang and be divided into two, wherein, one expands bundle laser-bounce to the measured object B that is positioned at light-splitting device 14b side, another expansion bundle laser-transmitting is crossed light-splitting device 14 and is radiated on the diffuse reflectance device 15 that is positioned at light-splitting device 14c side, and in the present embodiment, diffuse reflectance device 15 is made by the hair side plastics, form diffuse surface, as the special diffuse reflectance device of reference light; The d of light-splitting device 14 side promptly with measured object B in opposite directions a side one imaging device 17 is set, with the opposite side of imaging device 17 camera 18 is set in opposite directions; The reflected light of measured object B sees through light-splitting device 14 backs and forms the measured object reflected light, the reflected light of diffuse reflectance device 15 reflects the back again and forms the diffuse reflector reflected light in light-splitting device 14 rear surfaces, above-mentioned two-beam is all by imaging device 17, and interferes on the rake face of camera 18; Camera 18 with in the imaging device 17 be filmed by the position situation of the measured object B of imaging and this information delivered in the computing machine 19; What be connected with diffuse reflectance device 15 light is a phase-shifter 16, this phase-shifter 16 is made by the PZT piezoelectric ceramics, in the present embodiment, make full use of the long advantage of 532nm laser instrument coherent length, phase-shifter 16 is directly installed on the diffuse reflectance device 15, phase-shifter 16 promotes and produces small change in optical path length by the voltage of computing machine 19 control outputs, the change in displacement of phase-shifter 16 makes diffuse reflectance device 15 also produce small translation, diffused light is by the reflection of light-splitting device 14, by imaging device 17, receive back input computing machine 19 by camera 18 at last again.
The principle of work of above-mentioned W field light path is:
The beam of laser 111 that laser instrument 11 is launched expands Shu Chengyi row by beam expanding lens 13 and expands Shu Jiguang, this row expands Shu Guangjing light-splitting device 14 back vertical incidence to measured object B, measured object B vertically receives, and to produce diffuse reflection light on measured object B surface be thing light, the reflected light of this measured object B sees through light-splitting device 14 backs and forms the measured object reflected light, meanwhile, the reflected light of diffuse reflectance device 15 reflects the back again and forms the diffuse reflector reflected light in light-splitting device 14 rear surfaces, be reference light; Above-mentioned measured object reflected light sees through light-splitting device 14 once more, and the diffuse reflector reflected light is at the d of light-splitting device 14 lateral reflection, and two-beam is all by imaging device 17 then, and interferes on the rake face of camera 18; PZT phase-shifter 16 is set on diffuse reflector 15, the voltage that produces with the phase-shifter power supply promotes the extremely small change in optical path length of reference light generation, this small change in optical path length is sent into computing machine 19 with camera 18 interference data, obtain displacement by calculation procedure, thereby can realize the accurate quantification measuring digitizing and obtain whole audience displacement.
Please in conjunction with Fig. 4 referring to shown in Figure 6, Fig. 6 is the structural representation that the present invention has U, V field light path in the three-dimensional electronic speckle interferometer of phase shift function.U field light path is identical with V field light path 20, includes: a laser instrument 21, and this laser instrument 21 is launched beam of laser 211, is connected with laser instrument 21 light and what receive laser beam 211 is an Amici prism 24; What this Amici prism 24 adopted is the depolarized smooth Amici prism that can eliminate polarisation and laser energy is fully utilized, Amici prism 24 is told two-way light, wherein, the road light that Amici prism 22 is told is delivered to beam expanding lens 231 through three completely reflecting mirrors 221,222,223, the beam of laser 211 that beam expanding lens 231 is sent completely reflecting mirror 223 here expands Shu Chengyi row and expands Shu Jiguang, again by completely reflecting mirror 224 directive measured object B; Another Lu Guangjing completely reflecting mirror 225 and completely reflecting mirror 226 that Amici prism 22 is told are delivered to beam expanding lens 232, the beam of laser 211 that beam expanding lens 232 is sent completely reflecting mirror 226 here expands Shu Chengyi row and expands Shu Jiguang, again by completely reflecting mirror 227 directive measured object B, in the present embodiment, above-mentioned each completely reflecting mirror adopts the completely reflecting mirror that makes the electron gun dura mater high energy that laser energy is fully utilized.Relative position at measured object B is provided with an imaging device 27, being arranged in opposite directions with imaging device 27 is a camera 28, this camera 28 with in the imaging device 27 be filmed by the position situation of the measured object B of the relative side of being positioned at of imaging, and the positional information of this this measured object B is delivered in the computing machine 29; In U field light path and V field light path 20, a phase-shifter 26 is set also, this phase-shifter 26 is directly installed on the in addition side of completely reflecting mirror 227 of one of symmetrical incident light, phase-shifter 16 is made by the PZT piezoelectric ceramics, phase-shifter 26 produces small translation by computing machine 29 output voltages control, so that also respective change of light path.
The principle of work of above-mentioned U field light path and V field light path 20 is:
The beam of laser 111 that laser instrument 21 is launched, tell two-way light by Amici prism 24, restraint into two row's expansion Shu Jiguang symmetries by beam expanding lens 231 and 232 expansions respectively and be incident to measured object B, measured object B receives above-mentioned two rows simultaneously and expands Shu Jiguang, and at measured object B surface generation diffuse reflection light, ZOOM camera lens 27 receives above-mentioned two diffuse reflection light, and interferes on the target surface of CCD camera 28, and measured object B positional information is delivered in the computing machine 29; Meanwhile, be arranged on completely reflecting mirror 227 other phase-shifters 26 of side and also send into computing machine 29 by the extremely small change in optical path length of voltage promotion reference light generation that the phase-shifter power supply produces, obtain displacement by calculation procedure, thereby can realize the accurate quantification measuring digitizing and obtain whole audience displacement.
In sum, the present invention has the three-dimensional electronic speckle interferometer of phase shift function, because at W field light The light vertical incidence vertically receives in the road, obtains pure W field; Light is to being weighed in U, V field light path Penetrate, and the information of W field do not reflect because offseting, therefore obtain the interference bar of pure U, V, W field Line is compared its certainty of measurement with other similar measuring instruments and is improved, for measuring the structure position in the engineering Move the field a kind of high sensitivity, noncontact, the whole audience, digitized instrument are provided, it not only can directly be used In the scene, and be convenient to post processing, for the measurement of engineering structure displacement field provides noncontact and high sensitivity Measuring instrument, and be undergraduate course, master and doctor's research of photo-measuring experimental mechanics and physical optics specialty Give birth to new instrument and new method that a kind of open thinking is provided, and it is relevant real to utilize this instrument to carry out Test research, therefore very practical.
Claims (8)
1. three-dimensional electronic speckle interferometer with phase shift function, be used for accurate measurement to deformation of body rear surface micrometric displacement amount, comprise: three solid green laser devices, and the machine element that is used for deal with data, the light connection is provided with W field light path (10), U field light path and V field light path (20) respectively behind described three solid green laser devices; It is characterized in that:
Described W light path (10) comprising: a solid green laser device (11), this laser instrument (11) is launched beam of laser (111), be connected with laser instrument (11) light and what receive laser beam (111) is a completely reflecting mirror (12), what be connected with completely reflecting mirror (12) light is a beam expanding lens (13); What be connected with beam expanding lens (13) light is a light-splitting device (14), the expansion Shu Jiguang (111) that this light-splitting device (14) reception beam expanding lens (13) is sent here also should expand Shu Jiguang and be divided into two, wherein, one expands bundle laser-bounce to the measured object (B) that is positioned at light-splitting device (14) b side, and another expansion bundle laser-transmitting is crossed light-splitting device (14) and is radiated on the diffuse reflectance device (15) that is positioned at light-splitting device (14) c side; The d side of light-splitting device (14) promptly with measured object (B) in opposite directions a side one imaging device (17) is set, with the opposite side of imaging device (17) camera (18) is set in opposite directions, camera (18) with in the imaging device (17) be filmed by the position situation of the measured object of imaging (B) and this information delivered to computing machine (19); What be connected with diffuse reflectance device (15) light is a phase-shifter (16), this phase-shifter (16) makes diffuse reflectance device (15) produce small translation by the small change in optical path length of voltage promotion generation of computing machine (19) control output, diffused light reflexes to imaging device (17) by light-splitting device (14), receives back input computing machine (19) by camera (18);
Described U field light path is identical with V field light path (20), comprising: a laser instrument (21), and this laser instrument (21) is launched beam of laser (211), is connected with laser instrument (21) light and what receive laser beam (211) is an Amici prism (22); This Amici prism (22) is told two-way light, the road light that Amici prism (24) is told is delivered to beam expanding lens (231) through three completely reflecting mirrors (221,222,223), again by completely reflecting mirror (224) directive measured object (B), two completely reflecting mirrors of another Lu Guangjing (225,226) that Amici prism (22) is told are delivered to beam expanding lens (231), again by completely reflecting mirror (227) directive measured object (B); Relative position at measured object (B) is provided with an imaging device (27), with the camera (28) that imaging device (27) is oppositely arranged, this camera (28) is filmed the position situation of measured object (B) in the imaging device (27) and this information is delivered in the computing machine (29); In addition side at completely reflecting mirror (227) is provided with a phase-shifter (26), and this phase-shifter (26) produces small translation by the control of computing machine (29) output voltage, so that also respective change of light path.
2. the three-dimensional electronic speckle interferometer with phase shift function as claimed in claim 1 is characterized in that: what described laser instrument (11,21) all adopted is that optical maser wavelength is the pumping solid green laser device of 532 nanometers.
3. the three-dimensional electronic speckle interferometer with phase shift function as claimed in claim 1 is characterized in that: the diffuse reflectance device (15) in the described W of the being arranged on light path (10) is made by the hair side plastics, forms diffuse surface.
4. the three-dimensional electronic speckle interferometer with phase shift function as claimed in claim 1 is characterized in that: described two phase-shifters (16) and (26) are made by piezoelectric ceramics.
5. the three-dimensional electronic speckle interferometer with phase shift function as claimed in claim 1 is characterized in that: phase-shifter (16) is directly installed on as on the diffuse reflectance device (15) with reference to light in the described W of the being arranged on light path (10).
6. the three-dimensional electronic speckle interferometer with phase shift function as claimed in claim 1 is characterized in that: phase-shifter (26) is directly installed on the completely reflecting mirror (227) of one of symmetrical incident light in the described U of being arranged on field light path and the V field light path (20).
7. the three-dimensional electronic speckle interferometer with phase shift function as claimed in claim 1 is characterized in that: what the Amici prism (24) in the described U of being arranged on field light path and the V field light path (20) adopted is the depolarized smooth Amici prism that can eliminate polarisation and laser energy is fully utilized.
8. the three-dimensional electronic speckle interferometer with phase shift function as claimed in claim 1 is characterized in that: described each completely reflecting mirror is the completely reflecting mirror that makes the electron gun dura mater high energy that laser energy is fully utilized.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101893683A (en) * | 2010-07-15 | 2010-11-24 | 桂林电子科技大学 | Method for forecasting operation life of integrated circuit based on phase shifting electronic speckle pattern interferometry |
| CN102706886A (en) * | 2012-05-16 | 2012-10-03 | 宁国大通工贸有限公司 | Device for detecting defects at inner part of tire |
| CN106052565A (en) * | 2016-06-12 | 2016-10-26 | 天津大学 | A dual-optical-path three-dimensional speckle interference system based on spectroscopes |
| CN108303035A (en) * | 2018-04-09 | 2018-07-20 | 广州迅智机械科技有限公司 | A kind of spatial phase shift interferometer |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2151436Y (en) * | 1992-11-02 | 1993-12-29 | 中国大恒公司 | Electronic scattering interferometer |
| DE10113727A1 (en) * | 2001-03-21 | 2002-09-26 | Steinchen Wolfgang | Combination of periodic lighting by laser diodes with acquisition- or phase-sifting for speckle interferometry involves directly illuminating object with variable phase/frequency |
| KR100441280B1 (en) * | 2001-06-05 | 2004-07-30 | 권호식 | A phase movement speckle interferometer using a quarter wavelength plate and a polarizing plate |
| CN1258670C (en) * | 2002-01-29 | 2006-06-07 | 罗至善 | Microcomputerized laser interferometer |
| CN2651745Y (en) * | 2003-10-24 | 2004-10-27 | 中国船舶重工集团公司第七一一研究所 | Three-dimensional electronic speckle interferometer with phase shift function |
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2003
- 2003-10-24 CN CNB2003101081582A patent/CN1322325C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101893683A (en) * | 2010-07-15 | 2010-11-24 | 桂林电子科技大学 | Method for forecasting operation life of integrated circuit based on phase shifting electronic speckle pattern interferometry |
| CN102706886A (en) * | 2012-05-16 | 2012-10-03 | 宁国大通工贸有限公司 | Device for detecting defects at inner part of tire |
| CN106052565A (en) * | 2016-06-12 | 2016-10-26 | 天津大学 | A dual-optical-path three-dimensional speckle interference system based on spectroscopes |
| CN108303035A (en) * | 2018-04-09 | 2018-07-20 | 广州迅智机械科技有限公司 | A kind of spatial phase shift interferometer |
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| CN1322325C (en) | 2007-06-20 |
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