CN1596463A - Capacitor and method for producing a capacitor - Google Patents
Capacitor and method for producing a capacitor Download PDFInfo
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- CN1596463A CN1596463A CNA028237919A CN02823791A CN1596463A CN 1596463 A CN1596463 A CN 1596463A CN A028237919 A CNA028237919 A CN A028237919A CN 02823791 A CN02823791 A CN 02823791A CN 1596463 A CN1596463 A CN 1596463A
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- ditches
- irrigation canals
- substrate
- illusory
- conductor structure
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- 239000003990 capacitor Substances 0.000 title claims abstract description 75
- 238000004519 manufacturing process Methods 0.000 title description 9
- 239000000758 substrate Substances 0.000 claims abstract description 109
- 239000004020 conductor Substances 0.000 claims abstract description 97
- 239000004065 semiconductor Substances 0.000 claims abstract description 47
- 230000002262 irrigation Effects 0.000 claims description 146
- 238000003973 irrigation Methods 0.000 claims description 146
- 239000000463 material Substances 0.000 claims description 43
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- 229910021332 silicide Inorganic materials 0.000 claims description 17
- 238000009413 insulation Methods 0.000 claims description 15
- 229910052698 phosphorus Inorganic materials 0.000 claims description 8
- 239000011574 phosphorus Substances 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 6
- 230000004888 barrier function Effects 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 150000003017 phosphorus Chemical class 0.000 claims description 2
- 230000008676 import Effects 0.000 claims 2
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/66181—Conductor-insulator-semiconductor capacitors, e.g. trench capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
- H01L29/945—Trench capacitors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
The invention relates to a capacitor comprising a semiconductor substrate (114), in which a trench (112a, 112b), which is used to dope the substrate, is formed. A dielectric layer (118) covers the surface of the trench (112a, 112b) and an electrically conductive material (120a, 120b) is also located in the trench. In addition, a first contact structure (126) for electrically contacting the electrically conductive material (126) in the trench (112a, 112b) and a second contact structure (130) for electrically contacting the doped semiconductor substrate (114) are formed in the capacitor. The electrodes of the latter exhibit a low series resistance and said capacitor can be produced in a simple manner.
Description
The present invention system is relevant to capacitor, particularly is relevant to the capacitor that is integrated in the semi-conductive substrate.
Integrated capacitor is important inscape in many semiconductor devices or integrated circuit, for example, integrated capacitor is used in PIN switch or the microphone filter (microphone filters) by system, in addition, integrated capacitor is to unite with a transistor in memory cell, to be stored in the digital information in this cell element.
And the high area capacity (high areacapacity) in order to obtain the capacitor on chip, that is, the low-loss of the chip area of each feeding capacity, then use channel capacitor device (trench capacitors), in this channel capacitor device, capacitor system is coated among the irrigation canals and ditches of substrate, and by using irrigation canals and ditches, the degree of depth that then must utilize substrate by this, can be reached the result of high area capacity so that the zone that forms capacitor to be provided.
For example, the narration of EP 0 479 143 A1 system has a channel capacitor device DRAM internal memory of voltage field insulation (voltage fieldinsulation), and this channel capacitor device lies in the irrigation canals and ditches that are formed in the substrate,
Include the complex capacitance device flat board (capacitor plates) that is produced by dielectric medium, among semiconductor material formed all capacitor plates systems are coated over these irrigation canals and ditches that mix, and these irrigation canals and ditches extend to thin layer certainly.And another series of strata that are configured near the sidewall of these irrigation canals and ditches act as a shielding layer (field-shielding layer), the plural number sacrifice layer is then used and forms and cover this structure, and the dull and stereotyped system of other of this channel capacitor device is connected to a transistorized source territory via an articulamentum.
Because both are positioned at first and second capacitor plate among these irrigation canals and ditches, therefore, above-mentioned known channel capacitor device is to comprise the capacitor plate that forms thin layer, and so shortcoming is, just need very high doping for the low series resistance (low series resistances) of reaching the capacitor plate that is formed thin semiconductor layer at every turn, in addition, apply these layers and then need the cost consumption of great number, and, except the electric capacity dielectric medium, still needing will apply one and be electrically insulated from the sidewall of these irrigation canals and ditches.
Purpose of the present invention ties up in providing one simply and not expensive capacitor.
This purpose system can be by being reached according to the capacitor of 1 of claim the and according to the method for 7 of claims the.
The present invention's basis is, the one capacitor system with low area consumption and low series resistance can obtain in semi-conductive substrate by irrigation canals and ditches, and the fact that the surface of these irrigation canals and ditches system is covered one of to be provided in this Semiconductor substrate dielectric layer, wherein, because conductive material system is positioned among these irrigation canals and ditches, therefore, one first electrode system of this capacitor is formed by conductive material, and with the conduction mode contact via one first contact structures, and one second electrode system of this capacitor formed by this Semiconductor substrate, and contacts by one second contact structures and in the mode of conduction.This Semiconductor substrate is to have the substrate that the doping of low ohmic resistance finishes or be preferably the not dope semiconductor substrates that is doped by irrigation canals and ditches.
Advantage of the present invention is, among these irrigation canals and ditches, only need to apply one deck, that is, this dielectric layer, specifically, according to the present invention, by using this Semiconductor substrate as electrode, and, except this dielectric layer, then no longer need an insulating barrier this irrigation canals and ditches that are used for insulating, this is then bootable to go out a simple fabrication schedule.
What is more, capacitor of the present invention is to make the chip area at each feeding capacity have low consumption by being arranged in the capacitor in the irrigation canals and ditches.
Further advantages of the invention are low series resistances of capacitor, because this Semiconductor substrate of having mixed system is used as an electrode for capacitors, and irrigation canals and ditches that are used as other electrode for capacitors are filled and then can be formed in every way and in addition, because only these irrigation canals and ditches are filled and this dielectric layer is configured among these irrigation canals and ditches.
Moreover capacitor of the present invention also might contact a side that all extends in substrate by two electrode, by this, can avoid expensive dorsal part contact (back-side contacting).
One further advantages are, can use the high ohmic substrate that can mix in the mode of partial restriction by irrigation canals and ditches, and wherein, owing to use high ohmic substrate, therefore being no longer necessary for the adjacent circuit that is disposed on this substrate partly provides insulating properties.Moreover, because of the ohmic loss of electromagnetic coupled can minimize by this.
Except being provided for supplying with the irrigation canals and ditches of a capacity, a preferred embodiment of the present invention is to comprise at least one illusory irrigation canals and ditches, and near these at least one illusory irrigation canals and ditches, be to dispose second contact structures that are used for contacting with electrically conducting manner this Semiconductor substrate of having mixed.Be preferably, in a manufacturing step, should " capacitor irrigation canals and ditches " and this extra illusory irrigation canals and ditches Semiconductor substrate of doping not that is used to mix.
By this Semiconductor substrate of mixing with at least one illusory irrigation canals and ditches, near the doping of the Semiconductor substrate these irrigation canals and ditches system is good especially, and wherein, also similar these capacitor irrigation canals and ditches of these illusory irrigation canals and ditches equally can be filled up by conductive material.And by near capacitor irrigation canals and ditches these illusory irrigation canals and ditches, it can guarantee the reaching of a special low-ohmic area of this Semiconductor substrate, then reaches the low series resistance of this capacitor by this.
In one first preferred embodiment, this first and this second contact structures system be formed conductive plugs on the homonymy that extends this substrate, wherein, they are to be formed finger-like by being connected to respectively and first and second conductor structure of interdigitate configuration each other in one deck, the advantage of this configuration is not need the dorsal part contact.
One further in the preferred embodiment, this first contact structures system is connected to one first conductor structure that is disposed at one first plane, and in this embodiment, these second contact structures are also put conductor structure via one and are connected to one second conductor structure, put conductor structure system between wherein being somebody's turn to do and be configured among this plane of this first conductor structure, and between this second conductor structure and this substrate.The advantage that this configuration is provided is do not need the dorsal part contact, and when design one configuration of circuit, this capacitor to be integrated in simply among the known circuit design.
These and other purpose of the present invention and feature are to become more clear with appended graphic the binding in ensuing narration, wherein:
The 1st figure: it is that demonstration is graphic along the section of one first preferred embodiment of hatch region A-B;
The 2nd figure: it is the top view that shows the embodiment of the 1st figure;
The 3rd figure: it is that demonstration is graphic along the section of one second preferred embodiment of hatch region A-B; And
The 4th figure: it is the top view that shows the embodiment of the 3rd figure.
As one first preferred embodiment, the 1st figure system is presented at a side direction electric capacity (lateral capacitor) 110 that comprises two irrigation canals and ditches 112a and 112b in the substrate 114, this figure system illustrates an outline (cutout), and its cording has further with horizontal direction and extends across the substrate that is shown in this outline among the 1st figure, as shown in more detailed the 2nd figure.
What is more, two illusory irrigation canals and ditches (dummy trenches) 116a and 116b system are formed among this substrate 114, at these irrigation canals and ditches 112a, 112b and 116a, on the surface of 116b, system is formed with a dielectric layer 118, moreover, one dielectric layer 118a system extends between these irrigation canals and ditches 112a and 112b on the surface of this substrate 114, this substrate 114 preferably comprises a single crystal semiconductor material (single-crystal semiconductormaterial), and this single crystal semiconductor material system is via these irrigation canals and ditches 112a, 112b and 116a, 116b, and be higher than 10 with one
18Cm
-3, be preferably and be higher than 10
20Cm
-3, doping content and by high doped, and then in the zone of these irrigation canals and ditches, obtain high conductivity.Be preferably, when having a silicon substrate, silicon dioxide, silicon nitride or ONO (oxide-nitride thing-oxide stack) are suitable as dielectric layer, because it can simply produce, and it is the good dependency that is included on the silicon.And in inside, these irrigation canals and ditches 112a and 112b system comprise that one fills material 120a and 120b, fill the identical one deck 120c of material with this, it then extends the surface across this substrate 114, therefore, these two fill area 120a and 120b system can conduct electricity via this layer 120c and be connected to each other, identical, be to be formed with identical filling material 122a and 122b in these irrigation canals and ditches 116a and 116b, and this filling material is preferably and comprises polysilicon, because it has high conductivity and at a SiO
2Good dependency on the dielectric layer, and it can also be easily apply with known silicon science and technology, however each other conductive material also can be used as the filling material.
Be preferably, these irrigation canals and ditches 112a, 112b, 116a, 116b form cylindric, because this is easier to reach for known etching technique, wherein, in other embodiments, they can also be other shapes.Be preferably, these irrigation canals and ditches 112a, 112b, 116a, 116b are arranged as well-regulated pattern, as having more detailed explanation with the 2nd figure as reference.
Fill on the material layers 120c at this, cording has by one aims at the formed metal silicide layer 124a of silication program (self-aligned silicide process) voluntarily, in the same manner, metal silicide layer 124b and 124c also are formed at that this substrate 114 surfaces are gone up, these illusory irrigation canals and ditches 16a and 116b these fill on texture area 112a and the 112b, moreover a metal silicide layer 124d then is the part that is formed between these substrate 114 surfaces, this layer 124b and this layer 124c.This metal silicide layer 124a system is connected to this filling material layers 120c one good electrical contact that these fill texture area 120a and 120b in order to supply company, and form one first electrode of this capacitor in the mode of conduction, so, for this purpose, this silicide layer 124a system is connected to a conductor structure 128c with an electrically conducting manner and via being positioned at the conductive plugs (conductive plug) 126 on this silicide layer 124.
What is more, this silicide layer 124d system is used to supply with this Semiconductor substrate one good electrical contact, with as second electrode, wherein, this silicide layer 124d system is connected to one second conductor structure 132c via a bolt 130, this first conductor structure 128c and this second conductor structure 132c system are disposed among the plane, and wherein they are by SiO
2 Insulating regions 133 and be electrically insulated from each other.In addition, these bolts 126 and 130 are preferably for cylindric, and formed by tungsten, simultaneously, it is to lay respectively at this plane of being formed at a 128c and the 2nd 132c conductor structure place and among the monoxide material layers 134 between this layer 124 on these substrate 114 surfaces, by this, because the position that this layer 124a constantly rises, so these layer 124 cordings have a stairstepping (step shape).
Moreover, in filling material layers 120c and the formed ladder of this layer 124a place by these, system is formed with a clearance wall 136, and this clearance wall 136 is preferably by TEOS (Tetra-Ethyl-Ortho-Silicate, tetraethyl orthosilicate) material forms, this clearance wall 136 is in order to this layer 124a and this substrate 114 of electric insulation at the key area (critical area) of the ladder that is formed, and thereby avoids an electricity to collapse (breakdown).Be preferably, in this embodiment, these conductor structures 128 and 132 are formed in the mode of finger-shaped (finger-shaped), and interdigitate ground (inter-digitally) is disposed and is obtained low series resistance each other, as the more clear interpretation that continues and have as reference with the 2nd figure.
Now, as reference, the operator scheme of the present invention's capacitor will have more detailed explanation with the 1st figure.This Semiconductor substrate cording that is connected to these conductor structures via this bolt 130 has the doping of height, and this doping is in production stage, via these irrigation canals and ditches 112 and 116 generations, this will be successively in after detailed explanation is arranged.Therefore, this Semiconductor substrate system is as one first electrode of the present invention, and wherein, owing to this Semiconductor substrate fact of high doped by these irrigation canals and ditches, therefore, a low series resistance can be reached.In addition, to further minimizing of this series resistance and a low electric conductivity, then be to be connected to this conductor structure 132 and to reach by this bolt 130 that directly will have a short length.
By this dielectric layer 118 with these conductive fill texture area 120a and 120b of this Semiconductor substrate electric insulation, system as this Semiconductor substrate to electrode (counter-electrodes), and formation like this is to be connected to this conductor structure 128 via a short path to electrode system because of it, so it also has low series resistance and low non-conductive property (lowinductivity), say again, because these irrigation canals and ditches 112a and 112b only comprise these filling texture area 112a and 112b respectively, and, this dielectric layer 118 is typically to be formed thin layer, so, it is extensible and across the width of whole irrigation canals and ditches that these fill texture area 112a or 112b, and this will cause large-scale cross-sectional area of conductor, and, this also comprises the material with high conductivity to these low resistance and this filling materials of filling texture area 112a or 112b together, for example, polysilicon, the fact contribute to some extent.
By this bolt 130 being placed on position near these irrigation canals and ditches 112a and 112b to act as the capacitor irrigation canals and ditches, the power path system from this bolt 130 to these irrigation canals and ditches 112a in this substrate can be reduced, and this is advantageously to influence resistance.
In view of the above, this capacitor system comprises the low series resistance of these electrodes, and therefore, it is to be fit to be used to integrated filter circuit.
Point at this moment, what will address especially is, illusory irrigation canals and ditches 116a of shown in an embodiment these and 116b system only are used to this substrate that mixes in a doping step, and, it does not have the function that capacity is provided, this then makes and uses high ohm (highly ohmic) substrate to become possibility, because it can optionally be mixed in a doping step, and by this, when having mixed in the substrate of finishing one, when adjacent circuit part need insulate, promptly do not need to produce insulation.
The 2nd figure is the top view that shows the embodiment shown in the 1st figure, wherein, is the line that reference symbol 137 is indicated corresponding to the section plane A-B that is given an example in the 1st figure.The 2nd figure is the top view from this plane that these conductor structures are configured.In the 2nd figure, four conductor structure 128a, 128b, 128c and 128d systems demonstrate and are formed finger-like (fingers), and disposed to interdigitate each other with these conductor structures 132a, 132b and 132c, wherein, they are insulated from each other by insulating regions 133.Moreover, each all icon be these circular irrigation canals and ditches 112 and 116, system is arranged in the mode of a rule, formation is to be configured in to arrange among 138a, 138b, 138c, 138d, 138e and the 138f as each of these irrigation canals and ditches 116 of illusory irrigation canals and ditches, and each is arranged system and comprises three illusory irrigation canals and ditches 116.Arrange among the 138a-f at these, each these irrigation canals and ditches 116 is arranged with the form of an equilateral triangle haply, and all has a bolt 130 in this leg-of-mutton center.This bolt 130 is that being electrically connected of these conductor structures 132a, 132b and 132c and 140 of this substrates is provided, as in front with the 1st figure as with reference to and explained.Be preferably, these are arranged 138a-f system and disperse equably across the surface, therefore, conductor path from this indivedual bolts 130 to these " capacitor irrigation canals and ditches " 112 in this substrate then can maintain very little, and this is very strong for reaching a low resistance, because, though this substrate high doped and therefore have high conductivity, but compare with metal, its cording has lower conductivity and therefore resistance is had contribution fatefully.
In order to reach low series resistance, the arrangement of other irrigation canals and ditches or conductor structure and pattern can also be used, and shown arrangement system provides the advantage of electric capacity simple designs and production in the 2nd figure.
What is more, those irrigation canals and ditches 112 that are configured under these conductor structures 128a, 128b, 128c and the 128d are to comprise bolt 126, and these conductor structures are connected to these irrigation canals and ditches 112 in the mode of conduction these fill material layers, for example, according to the filling material layers 120c of the 1st figure.Point at this moment, be noted that, though these irrigation canals and ditches 112 are to be configured on these conductor structures 132a-132c, but they with this conductor structure 132a-132c between be not electrically connected, these irrigation canals and ditches 112 are to be connected to these bolts 126 preferably, and therefore be connected to these conductor structures 128a-128d via filling material layers, for example fill material layers 120c according to being somebody's turn to do of the 1st figure.
In view of the above, the representative of these conductor structures 132a, 132b and 132c system has a conductor structure that is connected to the electrical connection of substrate via these bolts 132, and these conductor structures 128a-128d then represents the lead (leads) of these conductive fill texture area that are electrically connected to these irrigation canals and ditches 112.
Now, as reference, one of the present invention second preferred embodiment system makes an explanation with the 3rd figure.Corresponding to embodiment according to the 1st figure, capacitor 310 is to comprise two irrigation canals and ditches 312a and 312b, and two illusory irrigation canals and ditches 316a and 316b, moreover, fill texture area 320a and 320b, with each of 322a and 322b be respectively via a dielectric layer 318 with semi-conductive substrate 314 electric insulations, these are filled texture area 320a and 320b system and fill material layers 320c via one and be electrically connected to each other.Corresponding to according to the 1st figure embodiment, one metal silicide layer 324c system is formed on this filling material layers 320c in addition, moreover, metal silicide layer 324b and 324c then are formed at these and fill on texture area 322a and the 322b, one further metal silicide layer 324d be formed on the substrate surface between these layers 324b and the 324c.
With respect to the embodiment according to the 1st figure, this embodiment system comprises the design of one or two thin sheet of metalization (two-sheet metallization).This filling material layers 320c system is connected to a conductor structure 328 via bolt 326a and 326b, moreover, this Semiconductor substrate of having mixed 314 is via this silicide layer 324d and a bolt 330 and be connected to one and put conductor structure (inter-conductor structure) 331, putting conductor structure 331 between being somebody's turn to do is to be disposed at same plane with this conductor structure 328, and via a SiO
2The zone and with its electric insulation.Put on the conductor structure 331 at conductor structure 328 and between being somebody's turn to do, an insulation material layers, for example, SiO
2, formed, and make configuration one of thereon conductor structure 332 be electrically insulated from each other with this conductor structure 328.According to the 3rd figure, this conductor structure 332 is to comprise a first area 332a and a second area 332b, and the regional 332b of this first area 332a and this two system each other by, for example, by SiO
2One of form insulating regions and electric insulation.This conductor structure zone 332b then is connected in the mode of conduction and via through hole 340a and 340b and puts conductor structure 331 between this.
What is more, corresponding to embodiment according to the 1st figure, shown embodiment lies in the plane of these conductor structures 328,331 and this substrate maybe between this filling material layers 320c, comprises that one has the layer 334 of a ladder, and this layer 334 is preferably formed by the monoxide material.Corresponding to the embodiment according to the 1st figure, this embodiment also includes one and is disposed at the clearance wall 336 that one of is formed ladder by this filling material layers 320c.Corresponding to embodiment according to the 1st figure, one first electrode system is formed by this Semiconductor substrate, simultaneously, one second electrode system is filled texture area 322a and 322b by these and is formed, embodiment according to the 1st figure, these illusory irrigation canals and ditches 316a and 316b system only are used to the high ohmic substrate of mixing in a doping step, and it does not have the function that a capacity is provided.
Now,, make an explanation as reference with the 4th figure according to the top view system of the embodiment of the 3rd figure.The last series of strata that comprise this conductor structure are drawn into transparent, with can the structure of icon under it.The end view of the 3rd figure the tangent plane zone system on edge so that reference symbol 137 was indicated from A icon to the line of putting B and in addition.
The 4th figure shows that three conductor structure 332a, 332b and 332c are configured among the metallized plane of this topmost.Embodiment corresponding to the 2nd figure, these irrigation canals and ditches 312 and 316 are arranged in the mode of a rule, each of these illusory irrigation canals and ditches 316 is to close to be connected in a through hole 340, should between put conductor structure 331 be comprise six insulated from each other and with class island (island-like) mode arrange between put the conductor structure zone, wherein, these through holes 340 are that these conductor structures 332a-c is connected to each the zone that these put conductor structure 331, per three illusory irrigation canals and ditches 316 bind to be combined into arranges 338a-338f, wherein each these arrange 338a-338f system close be connected in this first metallized plane with these conductive structure 328 electric insulations one in conductive structure 331.One three illusory irrigation canals and ditches 316 in arranging are to be arranged as equilateral triangle haply, wherein and these of their associated put conductor structure zone 331a-f each be to comprise that a class is triangular shaped.These put conductor structure zone 331a-f each be to be electrically connected to this Semiconductor substrate via a conductive plugs of the heart among three illusory irrigation canals and ditches that are disposed at an arrangement, in view of the above, each of these conductive structures 322a-322c is to put conductor structure zone 331a-f and be connected to this Semiconductor substrate that act as one of electric capacity electrode via in this first metallized plane these, and the conductor structure system of this first and second metallized plane is preferably formed by copper.
In addition, in this embodiment, it is this conductive structure 328 that is connected to via a conductive plugs 326 at this first metallized plane that each of one irrigation canals and ditches 312 is filled texture area, as can be seen in the 4th figure, in this first metallized plane, this conductor structure 328 be via insulating regions 242 with formed in class island mode leg-of-mutton should between put conductor structure zone electric insulation mutually, in this embodiment, these conductor structures 328 on the metallized plane of difference and the arrangement of this conductor structure 332, it is to make each of these conductor structures 328 and 332 to be formed in large-area mode respectively, by this, electric series resistance can be lowered.Point at this moment, it is transparent to be noted that icon system in the 4th figure remains, therefore, can know see these irrigation canals and ditches 312 of this first metallized plane and this second metallized plane and 315 both.
Shown these its advantages that had of systematicness clustering of arranging 328a-f of being surrounded by irrigation canals and ditches 312 are, in this substrate, the access path system that arrives an other capacitor is maintained short, thereby reach one and hang down series resistance, moreover the advantage that these irrigation canals and ditches 316 are arranged as irrigation canals and ditches group is, in the doping step in this zone, can reach high doped, so this series resistance can be reduced by this.
Because the corresponding long electrical wave path of being fixed by this bolt 330 to the distance of capacitor irrigation canals and ditches 312 by substrate can produce when tying up to access path being disposed at the same side of substrate, therefore the high doped that needs substrate is to reach low resistance, and this low resistance can be reached via these irrigation canals and ditches.
Though be that each that show six arrangements comprises three illusory irrigation canals and ditches in shown embodiment,, the quantity of quantity of these arrangement and the illusory irrigation canals and ditches in an arrangement 328a-f is not limited to a specific number.In other embodiments, can also provide illusory irrigation canals and ditches with a specific quantity greater or less than six arrangement 328a-f.Be preferably, these are arranged 328a-f system and are configured to the regular pattern that helps designing and producing, yet, wherein, in other embodiments, can also provide the not arrangement of rule configuration, identical, these irrigation canals and ditches 112 and 116 can also be disposed with the form of non-rule.
Moreover in another embodiment, except illusory irrigation canals and ditches clustering is become the arrangement, these irrigation canals and ditches 312 can also be become island adjacent one another are and so on by clustering and arrange.
Now, please consult the 1st figure once more, next a kind of preferred approach of manufacturing one capacitor lies in is narrated in more detail.
In one first manufacturing step, these irrigation canals and ditches 112a, 112b, 116a and 116b tie up in the etching step of the known techniques in the Semiconductor substrate that is pursuant to not doping and are produced, and the Semiconductor substrate that this does not mix is preferably by monocrystalline silicon and is formed.Then, this Semiconductor substrate 114 is to carry out a phosphorus doping via the surface of these irrigation canals and ditches 112a, 112b, 116a and 116b in this substrate, for this purpose, is using PCl
3A first step in, phosphorus doping series of strata are formed on the surface of these irrigation canals and ditches 112a, 112b, 116a and 116b.In the step that continues, this chip system heats, with the diffusion that causes phosphorus as the dopant in this substrate, in following step, these irrigation canals and ditches 112a, 112b, 116a and 116b lip-deep this phosphorus doping series of strata by HF etched removing, and this removing of phosphorus doping layer be because compare with other its technology, it has had the dielectric speciality.It is to comprise greater than 10 that the typical case who is become in this doping step mixes
18Cm
-3, be preferably greater than 10
20Cm
-3The zone.Using mixes can guarantee reaching of high doped with irrigation canals and ditches, to minimize by the formed electrode series resistance of the substrate that will produce capacitor, in addition, for one not the advantage that doping had of dope semiconductor substrates be, no longer need extra manufacturing step, mixed in the Semiconductor substrate of finishing the required insulation person who is used for reaching the adjacent circuit part one as them.
In following step, this dielectric layer 118 is to be deposited on the surface of these irrigation canals and ditches 112a, 112b, 116a and 116b, and is deposited on these irrigation canals and ditches 112a of this substrate surface and the zone between the 112b.Then, this filling material system is imported among these irrigation canals and ditches 112a, 112b, 116a and the 116b by deposition, the filling material of this deposition also is deposited as at this substrate 114 lip-deep one decks, and this filler system conduct electricity for the material or of conduction when deposition step but become conductive material after depositing.Be preferably, use a polysilicon to fill material layers, obtaining a high conductivity, other filling material, for example tungsten can be used.
At filling material layers on this substrate surface and the dielectric layer on this substrate surface, system then by using known little shadow and engraving method by partly, that is, in the zone of these illusory irrigation canals and ditches 116a, 116b, be etched to this substrate, therefore, this filling material layers and this dielectric layer tie up in the zone between this illusory irrigation canals and ditches 116a and this neighbouring trenches 122b and are removed.
To fill material layers and this dielectric layer etch step to this substrate that has mixed in these illusory trench regions, be to make electrode contact can be pulled in a low ohm mode and the same side that contacts via the filling material of this capacitor irrigation canals and ditches 112 of this Semiconductor substrate.
In the step that continues, a silicide forms metal system and is deposited, and the silicification reaction of this metal is and the silicon under it carries out, to produce an excellent contact layer, therefore, a metal silicide can form by this and in addition, be preferably, this step comprises formation TiSi
2
At next step, this clearance wall 136 is by TEOS (TETRA-ETHYL-ORTHO-SILICATE, tetraethyl orthosilicate) deposition of material and the anisotropic etching that continues and produced, therefore, at the ladder place that is formed at this layer 120c, this clearance wall 136 is formed with a leg-of-mutton shape.
Then, put oxide layer (inter-oxide layer) (ZOX layer) for one and deposited, and in the step that continues, carry out complanation, therefore, should between put oxide layer surface system can have a planar structure, and can be with this substrate surperficial parallel.
In the step that continues, these contact holes 126 and 130 that form syndeton are etched entering among this ZOX layer, and this etching is carried out by known method, thereby a selective etch step can be held on silicide layer.Then, these contact holes 126 and 130 are by a conductive material, are preferably to comprise tungsten, and institute fills up.
In next step, cmp system is carried out, and with the metallization step in order to continue, and obtains the discontinuous complanation of ladder, and in the metallization step that continues, these conductor structures 128c or 132c system are applied thereto according to known method.
Be noted that, in this preferred approach, the illusory irrigation canals and ditches 116 that imported are the surface in order to provide the diffusing, doping material to enter only, wherein these put on wherein, that is, this is filled in material and this dielectric layer, material in these illusory irrigation canals and ditches, do not have the useful function of a capacitor assembly.
List of numerals
110 capacitors
112 irrigation canals and ditches
The 112a irrigation canals and ditches
The 112b irrigation canals and ditches
114 substrates
116 illusory irrigation canals and ditches
The illusory irrigation canals and ditches of 116a
The illusory irrigation canals and ditches of 116b
118 dielectric layers
120a fills texture area
120b fills texture area
120c fills texture area
122a fills texture area
122b fills texture area
The 124a-d layer
126 bolts
128 conductor structures
130 bolts
132 conductor structures
134 layers
136 clearance walls
137 lines
138 arrange
310 capacitors
312 irrigation canals and ditches
The 312a irrigation canals and ditches
The 312b irrigation canals and ditches
314 substrates
316 illusory irrigation canals and ditches
The illusory irrigation canals and ditches of 316a
The illusory irrigation canals and ditches of 316b
318 dielectric layers
320a fills texture area
320b fills texture area
320c fills texture area
322a fills texture area
322b fills texture area
The 324a-d layer
326 bolts
328 conductor structures
330 bolts
Put conductor structure for 331
Put conductor structure for 331
332 conductor structures
334 layers
336 clearance walls
337 lines
338 arrange
340 through holes
The 340a through hole
The 340b through hole
342 insulating regions
Claims (25)
1. capacitor, it comprises:
One Semiconductor substrate of having mixed (114; 134);
One irrigation canals and ditches (112,112a, 112b; 312,312a, 312b), be formed on this Semiconductor substrate (114; 134) among;
One dielectric layer (118; 318), cover these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) the surface;
One conductive material (120a, 120b; 320a, 320b), be positioned at these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) among;
One first contact structures (126; 326), its be with the conduction mode contact these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) in this conductive material (120a, 120b; 320a, 320b); And
One second contact structures (130; 330), it is to contact this Semiconductor substrate of having mixed (114 in the mode of conducting electricity; 314).
2. according to 1 described capacitor of claim the, wherein this Semiconductor substrate (114; 134) be the high ohmic semiconductor substrate of one of doping around these irrigation canals and ditches.
3. according to claim the 1 or the 2nd one of them described capacitor, wherein, except these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) outside, more irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) formed.
According to claim the 1 to the 3rd one of them described capacitor, wherein, except these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) outside, illusory irrigation canals and ditches (dummy trench) (116,116a, 116b; 316,316a, 316b) formed these second contact structures (130 wherein; 330) be with one the conduction mode contact these illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b) near this substrate (114; 134).
5. according to 4 described capacitors of claim the, wherein, except these illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b) outside, another illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b) formed these second contact structures (130 wherein; 330) be with one the conduction mode contact these illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b) and this another illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b) between this substrate (114; 134).
According to claim the 1 to the 5th one of them described capacitor, wherein, at this substrate (114; 134) be to be formed with an electric insulation clearance wall (136 on the surface; 336), to increase by a voltage strength.
According to claim the 1 to the 6th one of them described capacitor, wherein these first contact structures (126; 326) and these second contact structures (130; 330) be to extend this substrate (114; 134) the same side.
According to claim the 1 to the 7th one of them described capacitor, wherein these first contact structures (126; 326) be to comprise being formed at an insulating barrier (134; 334) conductive plugs in (conductive plugs), and this insulating barrier (134; 334) be extension across these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) and these illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b).
According to claim the 1 to the 8th one of them described capacitor, wherein these second contact structures (130; 330) be to comprise being formed at an insulating barrier (134; 334) conductive plugs in, and this insulating barrier (134; 334) be extension across these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) and these illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b).
According to claim the 1 to the 9th one of them described capacitor, wherein these first contact structures (126; 326) be to be connected to one first conductor structure (128a-d with electrically conducting manner; 328), and these second contact structures (130; 330) then be connected to one second conductor structure (132a-c with electrically conducting manner; 332a-c).
11. according to 10 described capacitors of claim the, wherein this first conductor structure (128a-d) and this second conductor structure (132a-c) are to be configured in the plane parallel with one of this substrate surface.
12. according to 11 described capacitors of claim the, wherein this first conductor structure (128a-d) and this second conductor structure (132a-c) are to comprise a finger (finger structure), wherein it is disposed to interdigitate each other.
13. according to 10 described capacitors of claim the, wherein this first conductor structure (328) is to be configured among one first plane parallel with one of this substrate surface, and this second conductor structure (332a-c) then is configured among one second plane parallel with one of this substrate surface simultaneously.
14. according to 13 described capacitors of claim the, wherein and to put conductor structure (331) between one of this first conductor structure (328) electric insulation conduction be to be formed among this plane at this first conductor structure (328) place, wherein this second conductor structure (322a-c) is that this plane with this first conductor structure (328) place can be configured in this plane at this second conductor structure (322a-c) place and the mode between this substrate (314) and disposed, and this second conductor structure (322a-c) is also to be connected to electrically conducting manner and via conductive through hole (340a-b) to put conductor structure between this.
15. according to claim the 1 to the 14th one of them described capacitor, wherein, except these irrigation canals and ditches (112,112a, 112b), number irrigation canals and ditches (112,112a, 112b) and the illusory irrigation canals and ditches of number (116,116a, 116b) are also formed, wherein this one to count irrigation canals and ditches (112,112a, 112b) and the illusory irrigation canals and ditches of this number (116,116a, 116b) with this be the pattern that is configured to a rule, and wherein illusory irrigation canals and ditches (116) bind and synthesize arrangement (138a-f).
16. according to 14 described capacitors of claim the, put conductor structure system between wherein being somebody's turn to do and comprise that several are put conductor structure zone (331a-f), wherein, except these irrigation canals and ditches (312), the number another irrigation canals and ditches (312) with, except these illusory irrigation canals and ditches (316), the number another illusory irrigation canals and ditches (316) formed, and wherein illusory irrigation canals and ditches (316) bind and synthesize arrangement (338a-f), and each these several put that conductor structure system is relevant to be connected in one and to arrange (338a-f).
17. a method that is used to make a capacitor, it comprises the following steps:
Semi-conductive substrate (114 is provided; 134);
At this substrate (114; 134) produce in irrigation canals and ditches (112,112a, 112b; 312,312a, 312b);
Via these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) and this Semiconductor substrate of mixing (114; 134);
In these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) the surface go up to produce a dielectric layer (118; 318);
To fill material (120a, 120b; 320a, 320b) import these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) among, wherein this filling material lies in it and has promptly had conductivity or just have conductivity after it is imported into before being imported into; And
Produce one first contact structures (126; 326), contact this conductive material (120a, 120b in the mode of utilizing conduction; 320a, 320b), and one second contact structures (130; 330), contact this Semiconductor substrate (114 in the mode of utilizing conduction; 314).
18. according to 17 described methods of claim the, wherein should via these irrigation canals and ditches (112,112a, 112b; 312,312a, 312b) and this substrate that mixes (114; 134) step system comprises diffusion one admixture.
19. according to 18 described methods of claim the, this substrate (114 wherein should mix; 134) step system further comprises the following steps:
Among these irrigation canals and ditches, produce a phosphorus doping silicic acid layer (phosphorus-dopedsilicate); And
Heating is so that diffuse into this substrate as the phosphorus of admixture from this phosphorus doping silicic acid layer.
20. to the 19th one of them described method, it more comprises the following steps: according to claim the 17
Produce an electric insulation clearance wall (136; 336), to be increased in this substrate (114; 314) a lip-deep voltage strength.
21., wherein should produce an electric insulation clearance wall (136 according to 20 described methods of claim the; 336) step system comprises this electric insulation clearance wall (136 of anisotropic etching; 336).
22. according to the 17 to the 21 one of them described method of claim the, it more comprises the following steps:
In this Semiconductor substrate (114; 314) produce in illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b);
Via these illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b) and this substrate that mixes (114; 314);
In these illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b) the surface on produce a dielectric layer (118; 318); And
To fill material (120a, 120b; 320a, 320b) import these illusory irrigation canals and ditches (116,116a, 116b; 316,316a, 316b) among;
Wherein this filling material lies in it and has promptly had conductivity or just have conductivity after it is imported into before being imported into.
23. to the 22nd one of them described method, wherein produce one first contact structures (126 according to claim the 17; 326), contact this conductive material (120a, 120b in the mode of utilizing conduction; 320a, 320b), and one second contact structures (130; 330), contact this Semiconductor substrate (114 in the mode of utilizing conduction; 314) step is to be included in this filling material (120a, 120b; 320a, 320b) go up and in this Semiconductor substrate (114; 314) produce a silicide layer (124a-d on the surface; 324a-d).
24. according to 23 described methods of claim the, wherein the step of these generation one first contact structures system comprises that putting oxide layer (inter-oxide layer) with one puts on this Semiconductor substrate (114; 314) on the surface, and then etching should between put the step of oxide layer, therefore should between put the oxidation series of strata and partly removed, wherein this silicide layer lies in this etching the layer that stops as selective etch.
25. to the 24th one of them described method, wherein this Semiconductor substrate is a high ohmic semiconductor substrate according to claim the 17.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10158798.8 | 2001-11-30 | ||
| DE10158798A DE10158798A1 (en) | 2001-11-30 | 2001-11-30 | Capacitor and method of making a capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1596463A true CN1596463A (en) | 2005-03-16 |
| CN100423211C CN100423211C (en) | 2008-10-01 |
Family
ID=7707533
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028237919A Expired - Fee Related CN100423211C (en) | 2001-11-30 | 2002-11-14 | Capacitor and method for producing a capacitor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7030457B2 (en) |
| EP (1) | EP1449245A2 (en) |
| CN (1) | CN100423211C (en) |
| AU (1) | AU2002356602A1 (en) |
| DE (1) | DE10158798A1 (en) |
| WO (1) | WO2003046974A2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103579179A (en) * | 2012-08-10 | 2014-02-12 | 英飞凌科技股份有限公司 | Capacitor arrangements and method for manufacturing a capacitor arrangement |
| CN105390480A (en) * | 2015-10-23 | 2016-03-09 | 西安理工大学 | Three-dimensional high-value integrated capacitor based on through-silicon-via array, and manufacturing method thereof |
| CN113497006A (en) * | 2020-03-20 | 2021-10-12 | 中芯国际集成电路制造(北京)有限公司 | Capacitor structure and forming method thereof |
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| US7280590B1 (en) * | 2003-09-11 | 2007-10-09 | Xilinx, Inc. | Receiver termination network and application thereof |
| JP4830360B2 (en) * | 2005-06-17 | 2011-12-07 | 株式会社デンソー | Semiconductor device and manufacturing method thereof |
| JP5076570B2 (en) * | 2007-03-16 | 2012-11-21 | 富士通セミコンダクター株式会社 | Semiconductor device and manufacturing method thereof |
| US8429085B2 (en) * | 2007-06-22 | 2013-04-23 | Visa U.S.A. Inc. | Financial transaction token with onboard power source |
| US9324071B2 (en) | 2008-03-20 | 2016-04-26 | Visa U.S.A. Inc. | Powering financial transaction token with onboard power source |
| US8143659B2 (en) | 2008-04-14 | 2012-03-27 | Infineon Technologies Ag | Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor |
| US8552829B2 (en) | 2010-11-19 | 2013-10-08 | Infineon Technologies Austria Ag | Transformer device and method for manufacturing a transformer device |
| US9111781B2 (en) | 2012-02-24 | 2015-08-18 | Infineon Technologies Ag | Trench capacitors and methods of forming the same |
| EP2999002A1 (en) * | 2014-09-18 | 2016-03-23 | Services Petroliers Schlumberger | Capacitor cell and method for manufacturing same |
| US10084035B2 (en) * | 2015-12-30 | 2018-09-25 | Teledyne Scientific & Imaging, Llc | Vertical capacitor contact arrangement |
| EP3297024A1 (en) * | 2016-09-20 | 2018-03-21 | Ipdia | 3d-capacitor structure |
| EP3680934A1 (en) * | 2019-01-08 | 2020-07-15 | Murata Manufacturing Co., Ltd. | Rc architectures, and methods of fabrication thereof |
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| US4017885A (en) * | 1973-10-25 | 1977-04-12 | Texas Instruments Incorporated | Large value capacitor |
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| EP0283964B1 (en) * | 1987-03-20 | 1994-09-28 | Nec Corporation | Dynamic random access memory device having a plurality of improved one-transistor type memory cells |
| EP0479143A1 (en) | 1990-10-02 | 1992-04-08 | Ramtron International Corporation | Trench capacitor DRAM with voltage field isolation |
| US5256588A (en) * | 1992-03-23 | 1993-10-26 | Motorola, Inc. | Method for forming a transistor and a capacitor for use in a vertically stacked dynamic random access memory cell |
| DE4428195C1 (en) * | 1994-08-09 | 1995-04-20 | Siemens Ag | Method for producing a silicon capacitor |
| JPH08250674A (en) * | 1995-03-15 | 1996-09-27 | Toshiba Microelectron Corp | Semiconductor memory device |
| US5770484A (en) * | 1996-12-13 | 1998-06-23 | International Business Machines Corporation | Method of making silicon on insulator buried plate trench capacitor |
| DE19713052A1 (en) * | 1997-03-27 | 1998-10-01 | Siemens Ag | Capacitor structure |
| SE510455C2 (en) * | 1997-06-06 | 1999-05-25 | Ericsson Telefon Ab L M | Method of providing a buried capacitor and a buried capacitor arranged according to the method |
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-
2001
- 2001-11-30 DE DE10158798A patent/DE10158798A1/en not_active Withdrawn
-
2002
- 2002-11-14 CN CNB028237919A patent/CN100423211C/en not_active Expired - Fee Related
- 2002-11-14 AU AU2002356602A patent/AU2002356602A1/en not_active Abandoned
- 2002-11-14 WO PCT/EP2002/012786 patent/WO2003046974A2/en not_active Application Discontinuation
- 2002-11-14 EP EP02803774A patent/EP1449245A2/en not_active Ceased
-
2004
- 2004-05-25 US US10/853,740 patent/US7030457B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103579179A (en) * | 2012-08-10 | 2014-02-12 | 英飞凌科技股份有限公司 | Capacitor arrangements and method for manufacturing a capacitor arrangement |
| US9318485B2 (en) | 2012-08-10 | 2016-04-19 | Infineon Technologies Ag | Capacitor arrangements and method for manufacturing a capacitor arrangement |
| CN103579179B (en) * | 2012-08-10 | 2016-11-23 | 英飞凌科技股份有限公司 | Capacitor arrangement and the method manufacturing capacitor arrangement |
| CN105390480A (en) * | 2015-10-23 | 2016-03-09 | 西安理工大学 | Three-dimensional high-value integrated capacitor based on through-silicon-via array, and manufacturing method thereof |
| CN105390480B (en) * | 2015-10-23 | 2017-11-28 | 西安理工大学 | Three-dimensional high level integrated capacitor based on silicon hole array and preparation method thereof |
| CN113497006A (en) * | 2020-03-20 | 2021-10-12 | 中芯国际集成电路制造(北京)有限公司 | Capacitor structure and forming method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| DE10158798A1 (en) | 2003-06-18 |
| US7030457B2 (en) | 2006-04-18 |
| US20050013090A1 (en) | 2005-01-20 |
| WO2003046974A3 (en) | 2003-12-31 |
| AU2002356602A1 (en) | 2003-06-10 |
| WO2003046974A2 (en) | 2003-06-05 |
| EP1449245A2 (en) | 2004-08-25 |
| CN100423211C (en) | 2008-10-01 |
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