CN1576908A - 起偏器、投影透镜系统、曝光装置及曝光方法 - Google Patents
起偏器、投影透镜系统、曝光装置及曝光方法 Download PDFInfo
- Publication number
- CN1576908A CN1576908A CNA2004100628746A CN200410062874A CN1576908A CN 1576908 A CN1576908 A CN 1576908A CN A2004100628746 A CNA2004100628746 A CN A2004100628746A CN 200410062874 A CN200410062874 A CN 200410062874A CN 1576908 A CN1576908 A CN 1576908A
- Authority
- CN
- China
- Prior art keywords
- polarizer
- light
- even number
- sees
- amplitude direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/72—Controlling or varying light intensity, spectral composition, or exposure time in photographic printing apparatus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Polarising Elements (AREA)
Abstract
Description
Claims (17)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003190205A JP2005024890A (ja) | 2003-07-02 | 2003-07-02 | 偏光子、投影レンズ系、露光装置及び露光方法 |
JP190205/2003 | 2003-07-02 | ||
JP190205/03 | 2003-07-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1576908A true CN1576908A (zh) | 2005-02-09 |
CN100514095C CN100514095C (zh) | 2009-07-15 |
Family
ID=34188166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100628746A Expired - Fee Related CN100514095C (zh) | 2003-07-02 | 2004-07-02 | 起偏器、投影透镜系统、曝光装置及曝光方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US7499148B2 (zh) |
JP (1) | JP2005024890A (zh) |
CN (1) | CN100514095C (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103149806A (zh) * | 2007-10-12 | 2013-06-12 | 株式会社尼康 | 照明光学装置、曝光装置及元件制造方法 |
CN104656265A (zh) * | 2013-11-25 | 2015-05-27 | 曲阜师范大学 | 偏振面旋转式光强空间分布调节器 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101484435B1 (ko) | 2003-04-09 | 2015-01-19 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
TWI609409B (zh) | 2003-10-28 | 2017-12-21 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造方法 |
JP2005136244A (ja) * | 2003-10-31 | 2005-05-26 | Semiconductor Leading Edge Technologies Inc | 露光方法 |
TWI385414B (zh) | 2003-11-20 | 2013-02-11 | 尼康股份有限公司 | 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法 |
US20070019179A1 (en) * | 2004-01-16 | 2007-01-25 | Damian Fiolka | Polarization-modulating optical element |
CN101799637B (zh) * | 2004-01-16 | 2012-07-04 | 卡尔蔡司Smt有限责任公司 | 照明光学装置、显微光刻投射系统及装置制造方法 |
US8270077B2 (en) * | 2004-01-16 | 2012-09-18 | Carl Zeiss Smt Gmbh | Polarization-modulating optical element |
TWI505329B (zh) * | 2004-02-06 | 2015-10-21 | 尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法以及元件製造方法 |
US7324280B2 (en) | 2004-05-25 | 2008-01-29 | Asml Holding N.V. | Apparatus for providing a pattern of polarization |
US20140240705A1 (en) * | 2013-02-27 | 2014-08-28 | Kabushiki Kaisha Toshiba | Semiconductor device, reticle method for checking position misalignment and method for manufacturing position misalignment checking mark |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4286843A (en) * | 1979-05-14 | 1981-09-01 | Reytblatt Zinovy V | Polariscope and filter therefor |
JP2796005B2 (ja) | 1992-02-10 | 1998-09-10 | 三菱電機株式会社 | 投影露光装置及び偏光子 |
US5438761A (en) * | 1993-09-16 | 1995-08-08 | Krumszyn; Luba M. | Rotatable carpenter's level |
JP2001185476A (ja) | 1999-12-27 | 2001-07-06 | Mitsubishi Electric Corp | 投影露光装置 |
DE10124803A1 (de) * | 2001-05-22 | 2002-11-28 | Zeiss Carl | Polarisator und Mikrolithographie-Projektionsanlage mit Polarisator |
EP1429190B1 (en) * | 2002-12-10 | 2012-05-09 | Canon Kabushiki Kaisha | Exposure apparatus and method |
-
2003
- 2003-07-02 JP JP2003190205A patent/JP2005024890A/ja active Pending
-
2004
- 2004-07-02 US US10/883,007 patent/US7499148B2/en not_active Expired - Fee Related
- 2004-07-02 CN CNB2004100628746A patent/CN100514095C/zh not_active Expired - Fee Related
-
2009
- 2009-01-26 US US12/359,673 patent/US20090135481A1/en not_active Abandoned
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103149806A (zh) * | 2007-10-12 | 2013-06-12 | 株式会社尼康 | 照明光学装置、曝光装置及元件制造方法 |
US9097981B2 (en) | 2007-10-12 | 2015-08-04 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
CN103149806B (zh) * | 2007-10-12 | 2016-04-06 | 株式会社尼康 | 照明光学装置、曝光装置及元件制造方法 |
US10101666B2 (en) | 2007-10-12 | 2018-10-16 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
CN104656265A (zh) * | 2013-11-25 | 2015-05-27 | 曲阜师范大学 | 偏振面旋转式光强空间分布调节器 |
Also Published As
Publication number | Publication date |
---|---|
JP2005024890A (ja) | 2005-01-27 |
US7499148B2 (en) | 2009-03-03 |
CN100514095C (zh) | 2009-07-15 |
US20050041232A1 (en) | 2005-02-24 |
US20090135481A1 (en) | 2009-05-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1576908A (zh) | 起偏器、投影透镜系统、曝光装置及曝光方法 | |
CN1690861A (zh) | 照明光学系、曝光装置、及器件制造方法 | |
TW201706730A (zh) | 曝光裝置用之對準裝置及對準記號 | |
CN1975569A (zh) | 灰度掩模、微透镜及其制造方法、空间光调制装置及投影机 | |
JPH10123496A (ja) | 液晶表示装置とその製造方法 | |
JP2006023732A (ja) | 微小光学素子、この微小光学素子を用いた空間光変調装置及びプロジェクタ装置 | |
CN1702492A (zh) | 提供偏振图案的设备 | |
CN1255699C (zh) | 透射-反射型液晶显示装置 | |
KR20090126175A (ko) | 표시 장치 | |
CN104024931A (zh) | 液晶显示装置、光控膜、显示装置 | |
CN102645831A (zh) | 照明光学系统及投影机装置 | |
CN107918241B (zh) | 偏振光栅的制造方法 | |
WO2023011365A1 (zh) | 超构透镜、摄像模组和电子设备 | |
TW201314374A (zh) | 配向膜之光配向裝置及配向膜製造方法及液晶顯示裝置製造方法 | |
CN1645258A (zh) | 高数值孔径光刻成像偏振控制装置 | |
CN105759431A (zh) | 一种三维光场显示系统 | |
TWI521242B (zh) | An optical filter element that corrects spectral aberration | |
US20120120330A1 (en) | Stereoscopic display device and manufacturing method thereof | |
CN102741746A (zh) | 光掩模、曝光装置以及液晶显示面板的制造方法 | |
US20180335694A1 (en) | Wire grid polarizer manufacturing methods using frequency doubling interference lithography | |
CN101807009A (zh) | 一种照明均匀性补偿装置及具有该装置的光刻机 | |
JP2010134069A (ja) | 電気光学装置の製造装置及び電気光学装置の製造方法 | |
US10969676B2 (en) | Photomask and exposure method | |
JP2008065181A (ja) | 半透過型液晶表示装置 | |
CN1834746A (zh) | 液晶显示器下基板的制作方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: RENESAS ELECTRONICS CO., LTD. Free format text: FORMER OWNER: RENESAS TECHNOLOGY CORP. Effective date: 20100925 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20100925 Address after: Kawasaki, Kanagawa, Japan Patentee after: Renesas Electronics Corporation Address before: Tokyo, Japan, Japan Patentee before: Renesas Technology Corp. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090715 Termination date: 20140702 |
|
EXPY | Termination of patent right or utility model |