CN1575864A - Working table device for table type applicator - Google Patents
Working table device for table type applicator Download PDFInfo
- Publication number
- CN1575864A CN1575864A CNA2004100696885A CN200410069688A CN1575864A CN 1575864 A CN1575864 A CN 1575864A CN A2004100696885 A CNA2004100696885 A CN A2004100696885A CN 200410069688 A CN200410069688 A CN 200410069688A CN 1575864 A CN1575864 A CN 1575864A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- sliding part
- along
- sliding
- type applicator
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Coating Apparatus (AREA)
- Spray Control Apparatus (AREA)
Abstract
Provided is a stage apparatus which prevents the generation of pitching vibration by lowering the center of gravity of a slider part. The stage apparatus for a table coater is equipped with a first slider which can move in the Y-axis direction along the surface of a substrate table 100 on which a substrate to be treated is mounted and a second slider which is combined with the first slider to be able to move in the Y-axis direction with the first slider and drives a nozzle part 140 vertically. The first slider is composed of two Y-axis drive mechanisms 120A and 120B by linear motors which can travel along two rail parts 110A and 110B installed at positions corresponding to both sides of the substrate table to extend in parallel with each other. The second slider is composed of two slide wedge mechanisms 10 combined with the two Y-axis drive mechanisms. The nozzle part is set between the vertically moving blocks 11 in the two slide wedge mechanisms.
Description
Technical field
The present invention relates to a kind of table device, particularly relate to a kind of workbench (ス テ one ジ) device that is applicable to table type applicator (テ one Block Le コ one ).
Background technology
As an example of coating machine, the thin film cladding in the process of making liquid crystal board certain material the made coating machine to the glass substrate is for example arranged.Up to now, this coating machine is to adopt the spin coated mode, to be so-called spin coated machine.But there is the almost all discarded problem of coating material that is dropped in the costliness on the substrate in the spin coated machine on its structure.
Therefore, begin to provide table type applicator to replace the spin coated machine in recent years.Table type applicator is to make the spray nozzle part of the jet with coating material of certain-length or the workbench that is equipped with processed substrate along the machine that a direction of principal axis slides and applies, and has the few advantage (for example with reference to patent documentation 1) of discarded amount of coating material.
But, the processed in recent years substrate (2m * 2m) for example, so requirement can corresponding with it table device that constantly maximizes.
One example of the working table device for table type applicator that proposes as large-scale processed substrate usefulness is described below with reference to Fig. 4～Fig. 7.In Fig. 4, Fig. 5, fixing stone platform 160 on the pallet 150.A top side of stone platform 160 is provided with depressed part, is provided with the substrate platform 100 that is used for carrying processed substrate and its sorption is kept in this depressed part.With the both sides of the corresponding stone platform 160 in the both sides of substrate platform 100, promptly high than depressed part part is provided with rail portion 110A, the 110B of the extension parallel to each other made from stone material.Below its bearing of trend is called Y-axis.On this rail portion 110A, 110B, be assembled with Y- axis driving mechanism 120A, 120B respectively, so that can move along rail portion 110A, 110B.Y- axis driving mechanism 120A, 120B are realized by linear motor.That is, dispose the fixed magnet part (yoke part) of linear motor, dispose the moving coil part of linear motor among Y-axis driving mechanism 120A, the 120B along rail portion 110A, 110B.
Also be provided with the Z axle driving mechanism 130A, the 130B that extend upward from it on Y-axis driving mechanism 120A, the 120B.Z axle driving mechanism 130A, 130B are to Z-direction, the i.e. drive source of direction up and down, are to be used for being located at along the Z-direction bogie mechanism of the spray nozzle part 140 between them.
That is, spray nozzle part 140 utilizes Y- axis driving mechanism 120A, 120B to move along Y direction with Z axle driving mechanism 130A, 130B, can also utilize Z axle driving mechanism 130A, 130B to move along Z-direction.
The length of the spray nozzle part of assembling in this table device 140 as shown in Figure 6, bigger than the width that carries the processed substrate (not having expression among the figure) on substrate platform 100, the small otch of size that forms along its length from its foot sprays or the coating material that drips.
Fig. 7 represents an example of Z axle driving mechanism.In Fig. 7,2 ways 132 that extend along the vertical direction that Z axle driving mechanism 130A comprises framework 131, install on it, with the assembled table top 133 of mode that can be movable along ways 132, be subjected to the rolling guide 134 of ways 132 guiding.Table top 133 is driven by ball screw framework, this ball screw framework has the AC servomotor 137 of ball-screw rotation usefulness by constituting with the ball-screw 135 of ways 132 equidirectional installations with the nut 136 of its threaded engagement in the top of framework 131 fixed configurations.Nut 136 is fixed on the back side one side of table top 133.
In order to alleviate the load of AC servomotor 137, Z axle driving mechanism 130A also has the cylinder mechanism 138 of (カ ウ Application バ ラ Application ス) usefulness that contends with.The axle of cylinder mechanism 138 is installed on nut 136 or the movable position, and the body of cylinder mechanism 138 and AC servomotor 137 are fixed on the top of framework 131 side by side.Z axle driving mechanism 130B also is almost same structure.In addition, spray nozzle part 140 is erected between 2 table tops 133 on Z axle driving mechanism 130A, the 130B.
The moving part integral body that will comprise Y- axis driving mechanism 120A, 120B, Z axle driving mechanism 130A, 130B and spray nozzle part 140 below is called sliding part and partly describes.
Action during the coating of the sliding part part that is driven by above-mentioned working table device for table type applicator is as follows:
(a) make spray nozzle part 140 be moved down into the coating height, in front of processed substrate, temporarily stop.
(b) begin to quicken and coating simultaneously from halted state, until arriving certain speed.At this moment, discard the irregular substrate for film deposition of coating occurring.
(c) the coating in terminal one side shifting of constant speed to processed substrate.Do not apply irregular substrate for film deposition and partly become effective scope of application.
When (d) applying, in front of the terminal of processed substrate, slow down, stop.At this moment, partly discarded with the irregular substrate for film deposition of coating occurring.
(e) stop after, with spray nozzle part 140 certain altitude that only rises, get back to the coating starting position.
Time-speed characteristics that Fig. 8 moves when representing the coating of above-mentioned sliding part part.In Fig. 8, time T is represented the acceleration adjustment time in the following narration.
In the action, time T (or distance) is adjusted in the sliding part acceleration partly that requires to shorten the discarded part that causes substrate for film deposition when above-mentioned coating.With respect to such requirement, in the structure of above-mentioned table device, heavy weight member is dispersed in the top of Z driving mechanism 130A, 130B, and the focus point position of sliding part part integral body is higher.Promptly, because highly high Z driving mechanism 130A, 130B carry on Y driving mechanism 120A, 120B, therefore the whole focus point position of sliding part part uprises, become focus point with as the Y-axis driving mechanism 120A of the drive point of Y direction, the position relation that 120B is separated.One example of focus point position and drive point position is shown among Fig. 5.
Such structure sliding part part when quickening causes pitch vibration easily, and vibration is not easy decay.So-called pitch vibration is exactly the vibration shown in Fig. 6 arrow.If the sliding part partial vibration, it is also just elongated then quicken to adjust time T (distance), so it is just elongated to apply irregular part (the discarded part of substrate for film deposition).
And if lower the center of gravity for head it off, Z axle driving mechanism 130A, 130B for example are set in the side of Y- axis driving mechanism 120A, 120B, then not only the width dimensions of table device integral body can become greatly, thereby increase the space is set, but also the related increase that cost of transportation etc. is arranged.
Patent documentation 1 Japan Patent spy opens the 2000-167463 communique
Summary of the invention
Therefore, purpose of the present invention is exactly to make pitch vibration (ピ Star チ Application グ shake Move) be difficult for taking place by the center of gravity that reduces the sliding part part, quickens the adjustment time (distance) thereby shorten, and is reduced to Min. with occurring applying irregular zone.
According to the present invention, a kind of working table device for table type applicator can be provided, this working table device for table type applicator comprises the 1st sliding part that can move to a direction of principal axis along the substrate table top that is equipped with processed substrate and can be assembled on the 1st sliding part with the mode that the 1st sliding part moves along an above-mentioned direction of principal axis, be used for driving along the vertical direction the 2nd sliding part of spray nozzle part, it is characterized in that, constitute driving mechanism in above-mentioned the 2nd sliding part with sliding wedge mechanism.
In addition, above-mentioned the 1st sliding part in this table device is made of 2 driving mechanisms that can constitute along the linear motor of 2 rail portion walking, these 2 rail portion be with corresponding position, the both sides of aforesaid substrate platform on the mode of extension parallel to each other be provided with; Above-mentioned the 2nd sliding part also constitutes by being assembled into the above-mentioned sliding wedge of on above-mentioned 2 driving mechanisms 2 mechanism; Said nozzle portion has been set up in moving up and down in these 2 sliding wedge mechanisms between the portion.
And, above-mentioned sliding wedge mechanism in this table device comprises by electric motor driven ball screw framework, have the 1st inclined-plane, utilize above-mentioned ball screw framework along the driven portion that moves horizontally of direction that parallels with table top, have the 2nd inclined-plane that fastens with above-mentioned the 1st inclined-plane, utilize the above-mentioned horizontal movement that moves horizontally portion and the portion that moves up and down of motion along the vertical direction, be used for the above-mentioned portion of moving horizontally is paid the cylinder mechanism of predetermined horizontal direction driving force.
In this table device, the aforesaid substrate platform is set on the platform, and 2 driving mechanisms that are made of above-mentioned 2 rail portion and above-mentioned linear motor also are set on the above-mentioned platform.
The invention effect
If adopt table device of the present invention, reduce by the center of gravity that realizes the sliding part part, can shorten the acceleration of the sliding part part when being applicable to table type applicator and adjust time T (distance), therefore can narrow down to Min. the irregular zone of coating occurring.
And, by used sliding wedge mechanism in order to lower the center of gravity, the horizontal direction component that bevel angle determined by sliding wedge mechanism that needs only in the load of bearing spray nozzle part in contending with cylinder mechanism is just passable, therefore can lighten the load, can dwindle the size (weight reduction) of cylinder mechanism.
Description of drawings
Fig. 1 is the side view that is used for illustrating the structure of the Z axle driving mechanism in the working table device for table type applicator of the present invention.
Fig. 2 is used for illustrating that the major part of Z axle driving mechanism shown in Figure 1 is the figure of the structure of sliding wedge mechanism.
Fig. 3 is the general perspective of Z axle driving mechanism shown in Figure 1.
Fig. 4 is a side view of handling the working table device for table type applicator of using and being suggested as large substrate.
Fig. 5 is the front view of the table device of Fig. 4.
Fig. 6 is the perspective view that is used for illustrating the spray nozzle part in the table type applicator.
Fig. 7 is used for the side view and the front view of the Z axle driving mechanism in the table device of key diagram 4.
Fig. 8 has represented to be used for the acceleration of the sliding part part in the table device of key diagram 4 to adjust the figure of an example of time-speed characteristics of time.
The specific embodiment
The embodiment of working table device for table type applicator of the present invention is described below with reference to Fig. 1～Fig. 3.Table device of the present invention is characterised in that has improved the Z axle driving mechanism that illustrated with Fig. 7.Therefore, in Fig. 1～Fig. 3, only represented this Z axle driving mechanism, only described below with regard to this Z axle driving mechanism.That is, can think beyond the Z axle driving mechanism structure with illustrated in usefulness Fig. 4, Fig. 5, illustrated identical.
As illustrating with Fig. 4, Fig. 5, be provided with rail portion 110A, the 110B of 2 extensions parallel to each other in both sides, dispose Y-axis driving mechanism (the 1st slide mechanism) 120A, the 120B that constitutes by linear motor in the mode that can move along these rail portion 110A, 110B with the corresponding stone platform 160 in the both sides of substrate platform 100.
In the present embodiment, Z axle driving mechanism (the 2nd slide mechanism) constitutes with sliding wedge mechanism (ス ラ イ De ウ エ ツ ジ Machine Agencies) 10.That is, on 2 Y- axis driving mechanism 120A, 120B, be assembled with sliding wedge mechanism 10 respectively.And, between the vertical shift block 11 of these 2 sliding wedge mechanisms 10, set up spray nozzle part 140 (with reference to Fig. 5).
Sliding wedge mechanism 10 comprises the ball screw framework that is driven by AC servomotor 12 rotation, be made of ball-screw 13 and nut 14, above a side the 1st inclined-plane is arranged and by above-mentioned ball screw framework along direction driven the move horizontally piece 15 parallel with table top, below a side the 2nd inclined-plane that fastens with above-mentioned the 1st inclined-plane is arranged, the horizontal movement that moved horizontally the piece 15 and vertical shift block 11 of motion along the vertical direction is used for paying the cylinder mechanism 16 of the usefulness of contending with of predetermined horizontal direction driving force to moving horizontally piece 15.
If describe in detail, sliding wedge mechanism 10 has 20,2 of gripper shoes that are fixed on the Y-axis driving mechanism 120A (or 120B) and separates the frame plate 21 that certain interval is installed on the gripper shoe 20, extends along the vertical direction.The above-below direction rolling guide 22 of accepting the guiding of direction up and down is installed on the vertical shift block 11 that can move along the vertical direction and on the 2nd inclined-plane, accepts the incline direction rolling guide 23 of the guiding of adipping.Above-below direction rolling guide 22 is installed in guide part 32 guiding on each of 2 frame plates 21 respectively by the mode of extending along the vertical direction.Incline direction rolling guide 23 is by guide part 33 guiding that are installed on the 1st inclined-plane that moves horizontally piece 15.
The rolling guide 35 that the guiding of accepting horizontal direction is installed to branch 2 row devices spaced apart below the piece 15 that moves horizontally that can along continuous straight runs moving.Rolling guide 35 is guided along the guide part 36 that the moving direction that moves horizontally piece 15 is provided on the gripper shoe 20 by 2 devices spaced apart ground.A side below moving horizontally piece 15, also ball-screw 13 extends along moving direction between 2 row rolling guides 35, is screwed into to be installed in the following nut 14 that moves horizontally piece 15.
AC servomotor 12, cylinder mechanism 16 accumbency are in the lower position of short transverse, promptly on the gripper shoe 20, and are fixed and are configured on the position respect to one another of the both sides that move horizontally piece 15.
The top hook of the driving shaft of cylinder mechanism 16 or be fixed on and move horizontally on the piece 15 component of the horizontal direction that the load of the spray nozzle part 140 of negative function on vertical shift block 11 brings.
In addition, spray nozzle part 140 Jie are mounted by the installing plate 38 of the side that is installed in vertical shift block 11.
By said structure,, move horizontally piece 15 and vertical shift block 11 is moved up and down by ways 32,33 when moving horizontally piece 15 when utilizing the ball screw framework along continuous straight runs to move.In that Y- axis driving mechanism 120A, 120B, 2 sliding wedge mechanisms 10 and spray nozzle part 140 integral body during as the sliding part part, can be realized that by sliding wedge mechanism 10 center of gravity of sliding part part reduces, can reduce the pitch vibration when quickening.
Promptly, because sliding wedge mechanism 10 is little a lot of with the size that the Z axle driving mechanism 130A that illustrated with Fig. 4, Fig. 5,130B compare above-below direction, the weight thing is configured on the lower position, and therefore becoming the whole focus point of sliding part part is the nearer position relation of Y- axis driving mechanism 120A, 120B from the drive point of Y direction.Its result, the pitch vibration when sliding part partly is difficult to produce acceleration can shorten the acceleration of table type applicator and adjust time T (distance), can narrow down to Min. with the irregular zone of coating occurring.
In addition, in aforesaid way, using ball screw framework is because reduce the probability of damage of expensive spray nozzle part 140 as much as possible as the reason of the drive source that moves horizontally piece 15 in the sliding wedge mechanism 10.That is, spray nozzle part 140 must stop the position in the gap from about the tens μ m of the surface of processed substrate when it moves down, because the braking of ball screw framework is easy, so can realize easily.If do not consider this point, also can replace ball screw framework with for example cylinder mechanism.And, also can use ceramic material as stone platform 160 and rail portion.
In industrial utilizability
Table device of the present invention can fully be applicable to and be included on the horizontal plane along one The 1st sliding part that the direction of axle moves and be assembled on the 1st sliding part can be with the 1st sliding That moving part moves along the direction of an axle together, be used for only driving along the vertical direction with small amount The table device of the 2nd sliding part of driven section.
Claims (4)
1. working table device for table type applicator, comprise the 1st sliding part that can move to a direction of principal axis along the substrate table top that is equipped with processed substrate and can be assembled on the 1st sliding part with the mode that the 1st sliding part moves along an above-mentioned direction of principal axis, be used for driving along the vertical direction the 2nd sliding part of spray nozzle part, it is characterized in that, constitute driving mechanism in above-mentioned the 2nd sliding part with sliding wedge mechanism.
2. working table device for table type applicator as claimed in claim 1, it is characterized in that, above-mentioned the 1st sliding part is made of 2 driving mechanisms that can constitute along the linear motor of 2 rail portion walking, these 2 rail portion be with corresponding position, the both sides of aforesaid substrate platform on the mode of extension parallel to each other be provided with; Above-mentioned the 2nd sliding part also constitutes by being assembled into the above-mentioned sliding wedge of on above-mentioned 2 driving mechanisms 2 mechanism; Said nozzle portion has been set up in moving up and down in these 2 sliding wedge mechanisms between the portion.
3. working table device for table type applicator as claimed in claim 1 or 2, it is characterized in that, above-mentioned sliding wedge mechanism comprises by electric motor driven ball screw framework, have the 1st inclined-plane, utilize above-mentioned ball screw framework along the driven portion that moves horizontally of direction that parallels with table top, have the 2nd inclined-plane that fastens with above-mentioned the 1st inclined-plane, utilize the above-mentioned horizontal movement that moves horizontally portion and the portion that moves up and down of motion along the vertical direction, be used for the above-mentioned portion of moving horizontally is paid the cylinder mechanism of predetermined horizontal direction driving force.
4. as claim 2 or 3 described working table device for table type applicator, it is characterized in that the aforesaid substrate platform is set on the platform, 2 driving mechanisms that are made of above-mentioned 2 rail portion and above-mentioned linear motor also are set on the above-mentioned platform.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003276945 | 2003-07-18 | ||
| JP2003276945 | 2003-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1575864A true CN1575864A (en) | 2005-02-09 |
| CN1319653C CN1319653C (en) | 2007-06-06 |
Family
ID=34587141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100696885A Expired - Fee Related CN1319653C (en) | 2003-07-18 | 2004-07-19 | Working table device for table type applicator |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR100659486B1 (en) |
| CN (1) | CN1319653C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101130184B (en) * | 2006-08-22 | 2013-03-20 | 东京应化工业株式会社 | Coating device |
| CN105919227A (en) * | 2016-06-17 | 2016-09-07 | 洛阳新思路电气股份有限公司 | Automatic glue injecting device for automated polyurethane shoemaking production line |
| CN106944286A (en) * | 2017-05-03 | 2017-07-14 | 慈溪市鑫昶工业产品设计有限公司 | A kind of auto parts paint spraying apparatus |
| CN106976165A (en) * | 2017-05-03 | 2017-07-25 | 慈溪市隆诚贸易有限公司 | A kind of glass drilling lathe |
| CN107009252A (en) * | 2017-05-03 | 2017-08-04 | 海宁市锦新轴承有限公司 | A kind of polissoir |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006231201A (en) * | 2005-02-24 | 2006-09-07 | Tokyo Ohka Kogyo Co Ltd | Coating device |
| CN107607199B (en) * | 2017-10-24 | 2024-04-19 | 天航长鹰(江苏)科技有限公司 | Novel Fourier transform infrared spectrometer and moving mirror scanning device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4269140A (en) * | 1979-07-25 | 1981-05-26 | Fife Corporation | Apparatus for positioning a coating thickness control roller in a web coating machine |
| JPH09201558A (en) * | 1996-01-29 | 1997-08-05 | Techno Kapura:Kk | Applicator |
| JP2920114B2 (en) * | 1996-10-24 | 1999-07-19 | 住友重機械工業株式会社 | Ultra high pressure generator |
| JP2904166B2 (en) * | 1996-11-30 | 1999-06-14 | 日本電気株式会社 | Viscous material discharge device |
| JP2000167463A (en) * | 1998-12-08 | 2000-06-20 | Toray Ind Inc | Nozzle and coating liquid applicator and applying method and manufacture of plasma display panel member |
| CN2544826Y (en) * | 2002-05-24 | 2003-04-16 | 黄金富 | Automatic numerically-controlled paint spraying device |
-
2004
- 2004-07-16 KR KR1020040055392A patent/KR100659486B1/en not_active IP Right Cessation
- 2004-07-19 CN CNB2004100696885A patent/CN1319653C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101130184B (en) * | 2006-08-22 | 2013-03-20 | 东京应化工业株式会社 | Coating device |
| CN105919227A (en) * | 2016-06-17 | 2016-09-07 | 洛阳新思路电气股份有限公司 | Automatic glue injecting device for automated polyurethane shoemaking production line |
| CN106944286A (en) * | 2017-05-03 | 2017-07-14 | 慈溪市鑫昶工业产品设计有限公司 | A kind of auto parts paint spraying apparatus |
| CN106976165A (en) * | 2017-05-03 | 2017-07-25 | 慈溪市隆诚贸易有限公司 | A kind of glass drilling lathe |
| CN107009252A (en) * | 2017-05-03 | 2017-08-04 | 海宁市锦新轴承有限公司 | A kind of polissoir |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1319653C (en) | 2007-06-06 |
| KR100659486B1 (en) | 2006-12-20 |
| KR20050009682A (en) | 2005-01-25 |
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