CN101037180A - Stack crane and driving control method thereof - Google Patents
Stack crane and driving control method thereof Download PDFInfo
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- CN101037180A CN101037180A CNA2007100868495A CN200710086849A CN101037180A CN 101037180 A CN101037180 A CN 101037180A CN A2007100868495 A CNA2007100868495 A CN A2007100868495A CN 200710086849 A CN200710086849 A CN 200710086849A CN 101037180 A CN101037180 A CN 101037180A
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- actuating device
- main body
- side rails
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- stakcer crane
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/10—Storage devices mechanical with relatively movable racks to facilitate insertion or removal of articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
- B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
- B66F9/07—Floor-to-roof stacking devices, e.g. "stacker cranes", "retrievers"
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Structural Engineering (AREA)
- Civil Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Warehouses Or Storage Devices (AREA)
- Control And Safety Of Cranes (AREA)
- Forklifts And Lifting Vehicles (AREA)
Abstract
The invention provides a stack chain block and a driving and controlling method thereof. The stack chain block is capable of moving along an upper side guide track and a lower side guide track. An upper portion of a main body is clamped with the upper side guide track and can move relatively to the upper side guide track. A lower portion of a main body is clamped with the lower side guide track and can move relatively to the lower side guide track. A column is extended and provided along a vertical direction, and connects the upper portion and the lower portion of the main body. A lifting body can be moved along the column up and down. An upper side driving device is arranged at the upper portion of the main body, limits the upper portion of the main body relatively to the upper side guide track, and makes the upper portion of the main body move along the upper side guide track. A lower side driving device is arranged at the lower portion of the main body, and makes the lower portion of the main body move along the lower side guide track. A controlling portion inputs a first signal representing a target speed or a target position into the upper side driving device and a lower side driving device, so that moving speeds of the upper portion and the lower portion of the main body are equal, the controlling portion inputs a second signal to the upper portion driving device after movement of the upper portion of the main body is finished and during stopping the lifting body, the second signal releases limitation of the upper driving device on the upper side guide track.
Description
Technical field
The present invention relates to stakcer crane, in the fabrication shop of quartz conductor manufacturing, LCD panel etc., this stakcer crane is arranged in the piler of the freak oil in the manufacturing process being taken care of temporarily, being taken in because of activity time adjustment etc.Wherein, relate in particular to the high-rise stakcer crane that is arranged in the high-rise piler.
Background technology
In the layout of representative type semiconductor factory dust-free workshop, the inter process track that can lay a plurality of in-process annular orbits and connect these a plurality of in-process annular orbits, with this in-process annular orbit and inter process track in abutting connection with disposing the piler that substrates such as wafer are carried out the semiconductor processing device of a series of processings (forming film, photolithography, cleaning, etching, inspection etc.), the substrate in the course of processing etc. is taken care of temporarily.Generally, with substrate receptions such as wafers wafer transfer box) etc. in FOUP (Front Opening Unified Pod: can protect in its special-purpose accommodating container of avoiding contamination by dust, thereby between semiconductor processing device, piler, carry.
In addition, the treatment process of substrates such as wafer is managed by the cable terminal of being installed on the FOUP that takes in this substrate, the indication that the controller of unified control operation is recognized substrate, sent processed according to cable terminal information.
FOUP avoids contamination by dust for protective substrate, thereby a plurality of substrates are inserted the container of taking in keeping in the slit; For protective substrate is avoided contamination by dust, in course of conveying, to keep airtight conditions.In addition, open when only handle in each semiconductor device at the Qianmen of FOUP, by the substrate transfer mechanism substrate is taken out one by one, be accommodated in the FOUP by the substrate transfer mechanism once again after through necessary the processing, the Qianmen is closed.
Wherein, OHT (the OverheadHoist Transport: overhead lifting transmission) conveying carrier, unmanned waggon, roller path delivery system etc. that adopt in the FOUP conveying mechanism in the dust-free workshop more.
Yet, in a series of semiconductor fabrication process, but can different because of the treatment types for the treatment of stations that accept to handle also be had nothing in common with each other in the processing time that is accommodated in the substrate among the FOUP.Therefore, the FOUP that takes in the substrate of accepting certain processing often can not be by in the processing equipment of sending into next step immediately and in time be for further processing.Promptly mean in this case to produce the wait time of FOUP before in supplying to the processing equipment of subsequent processing take in the substrate of accepting certain processing, more mean to need the Custodian that this FOUP that waits for operation is taken care of temporarily.Usually, so purpose and the FOUP Custodian that is provided with is a piler.
Piler has shelf and the stakcer crane that is the setting of chessboard trellis on whole short transverse, and stakcer crane and each shelf contraposition that is configured on the whole short transverse carry out FOUP is sent into, sends the shipment action of shelf.With FOUP sending in piler, be that disposing, waiting in the wait time before the semiconductor processing device that enters subsequent processing in certain semiconductor-fabricating device carried out; With FOUP sending in the piler, then be semiconductor-fabricating device send to the FOUP of keeping in piler handle require the time carry out.
This stakcer crane has: main body, and it is accepted along the control of the track travel of laying in the horizontal direction; Lifting body, it accepts mobile control along the vertical direction on as the column of this main body main portion, and above-mentioned lifting body is provided with manipulator, FOUP is sent into above-mentioned shelf or is sent from above-mentioned shelf by this manipulator.
Yet corresponding to the shelf number of plies in the piler, being used for the stakcer crane that the goods to above-mentioned piler loads and unloads also will increase necessary height, runs through multilayer and the high-rise piler that is provided with usually can be very high.When using high-rise piler, the bending of column during walking, want will become problem stabilization time of vibration of the upper end of stabilizer column when stopping.That is, the bending meeting of column produces considerable influence to the aligning accuracy of stakcer crane, in addition since stakcer crane must after vibration damping, send into and send operation, so can produce considerable influence the stabilization time of vibration to operating efficiency.As the method that addresses these problems, habitual technology is exactly to improve the method for column rigidity, but this conventional techniques can cause the maximization of column, and power required when causing the column walking increases, so the suitable leeway of this conventional techniques is limited.
By solving the above-mentioned conventional techniques purpose that is beyond one's reach, seek to improve the problems referred to above, following prior art is disclosed at Japanese Patent open communique 2005-212919 number (JP2005-212919A), flat 6-100109 number (JP6-100109A).
Disclosed technology is the technology about stakcer crane among the JP2005-212919A, and based on following structure: be respectively arranged with top travel driving unit and lower running actuating device in top, bottom, stakcer crane carried out travel controls, position control by the lower running actuating device as the column of this stakcer crane main portion structure.And this technical characterictic is: the speed signal (can be regarded as and comprise that speed is 0 speed-slackening signal) according to above-mentioned lower running actuating device, and the top travel driving unit is driven and brakes, suppress the vibration of column by this top travel driving unit.
Disclosed technology is the extra high stakcer crane of a kind of body among the JP6-100109A, the vibration that its structure produces when stopping seeking to suppress to walk and accurately orientate main purpose as in this stakcer crane upper end.And this technical characterictic is: will be fixed in put on the shelf the pushing roller of end of stakcer crane and push to the ceiling guide rail along the top direction of travel configuration of stakcer crane pillar, to seek the stabilized walking of stakcer crane.
In addition, when stakcer crane stops at assigned position, when lifting body starts, will detect side-play amount between the stakcer crane upper and lower end parts by the top pulse coder, be correction offset, transmit upper motor power, drive above-mentioned pushing roller thus by magnetic clutch.Come to prevent effectively stakcer crane thus in the predetermined stop position run-off the straight, and when stopping, suppressing the vibration on column top.
As mentioned above, to the rapid increase of semiconductor element demand, the quantity that the FOUP in the piler places with shelf also trends towards increasing always, and then the number of plies of shelf also has the trend of growth along with in recent years.Thereupon, the height of stakcer crane of FOUP being sent into the shelf of regulation in the piler or FOUP being sent the shelf of regulation is also increasing.Therefore, if the only driving bottom stakcer crane, then for suppress to end in the process of walking because of be subjected to the stress run-off the straight or when stopping the top producing vibration, just need the rigidity of the column of increase stakcer crane, and then cause maximization, the weight increaseization of stakcer crane.Walk so will under the situation of the rigidity that can not increase above-mentioned column like this, make on the prescribed path of stakcer crane in piler, just have only and constantly reduce the speed of travel, therefore can't reach desired transport efficiency.
For disclosed technology among the JP2005-212919A that addresses this is that is the top travel driving unit to be set respectively and the lower running actuating device suppresses to make column to produce the power of distortion by top, bottom at the column of stakcer crane, thereby need not painstakingly to improve the rigidity of column, can avoid the maximization and the weight increaseization of column.In addition, also simultaneously to top travel driving unit and the effect of lower running actuating device brake activation, thereby prevent the vibration on column top.
Yet the drive wheel of top travel driving unit can because of wearing and tearing or other reasons cause external diameter to change, even this moment, it moved under the driving signal of lower running actuating device, also can between top travel distance and lower running distance, produce dislocation, when stakcer crane stopped, the column of stakcer crane might not be kept plumbness.Therefore, may cause because of the tilt condition of this column can't normally being located with respect to the regulation shelf along the lifting body of this column above-below direction guiding.
On the other hand, the advantage of disclosed technology is among the JP-100109A: according to said mechanism, when stakcer crane stopped on the assigned position, principal post can be restricted to and be in erectility all the time.Yet, till make roller as the drg action, only drive when stakcer crane starts always, therefore especially when stakcer crane starts, have greatly effect of inertia on principal post by lower motor by the magnetic clutch energising, acceleration/accel can be restricted, and then can cause starting rate to reduce.In addition, be used for regulating the vertical structure of its principal post and control is more loaded down with trivial details when stakcer crane stops, cost is tending towards raising.
Summary of the invention
Therefore, the objective of the invention is to, a kind of driving control device of stakcer crane is provided, it is not limited to the height of stakcer crane, need not improve the rigidity of stakcer crane, can not produce bending when this stakcer crane walking, and the vibration damping time of stakcer crane upper end significantly shortens when stopping, after stakcer crane stops, can lingeringly not making the above-below direction walking of lifting body along the column of stakcer crane, make the manipulator that is arranged on this lifting body begin to start.
For addressing the above problem, the present invention is a kind of stakcer crane, and side rails moved under it can reach along last side rails, and wherein, it has: main body top, and it engages with the above-mentioned side rails of going up, and can move relative to it; Lower body part, it engages with above-mentioned side rails down, and can move relative to it; Column, it vertically extends setting, and aforementioned body top and aforementioned body bottom are coupled together; Lifting body, it can move up and down along above-mentioned column; The upside actuating device, it is arranged at aforementioned body top, and the above-mentioned relatively side rails of going up limits this main body top, and it was moved along going up side rails; The downside actuating device, it is arranged at the aforementioned body bottom, and this lower body part is moved along above-mentioned side rails down; And control part, it will represent that the 1st signal of target velocity or target location is input to above-mentioned upside actuating device and above-mentioned downside actuating device, so that the moving velocity of aforementioned body top and aforementioned body bottom equates; And behind the mobile end of aforementioned body top, above-mentioned lifting body stopping period, import the 2nd signal to above-mentioned upside actuating device, this upside actuating device of the 2nd signal relief is to above-mentioned restriction of going up side rails.
Adopt said structure, even the height of column increases, also needn't painstakingly strengthen its rigidity, stakcer crane single-piece weight is inhibited thus, has reduced power required when walking.Therefore, when stakcer crane is walked assigned position from specific stop position, can improve positive and negative acceleration/accel, thereby can seek the raising of stakcer crane starting rate.
In addition, because control downside actuating device and upside actuating device are same speed, so the column that produces during walking is crooked very little, when stakcer crane stops at assigned position, the misplace inclination of caused column of the lower body part that is produced before the restriction cancellation of upside actuating device and the travel distance on main body top is also very small, because of the tilt vibration on the column top produce of column also is suppressed to Min., promptly disappear in the short time at the utmost point, therefore can not hamper along the normal lifting action of the lifting body of column lifting.
In addition, along with the restriction cancellation behind the mobile end, can by the column self rigidity eliminate before releasing to be produced because of the misplace inclination of caused column of bottom and top travel distance, thereby accurately contraposition is to the target shelf location.
Also can be that above-mentioned upside actuating device has: drive source, be crimped on above-mentioned wheel and the magnetic clutch of going up on the side rails, this magnetic clutch can move, thereby will pass to above-mentioned wheel by this drive source power supplied; Above-mentioned the 2nd signal is used to block the transmission of above-mentioned magnetic clutch to above-mentioned power.
Also can be that above-mentioned upside actuating device has: servomotor and the wheel that is crimped on the above-mentioned guide rail, above-mentioned the 2nd signal be used to close the excitation of above-mentioned servomotor.
Adopt said structure, almost between instantaneous, can carry out the power releasing action of above-mentioned travel driving unit, and not have time delay.
Above-mentioned control part also can be input to this upside actuating device with the 2nd signal when the mobile end of aforementioned body top, to remove above-mentioned upside actuating device to above-mentioned restriction of going up side rails.
In this case, can remove action at the power that carries out the upside actuating device opportune moment of the column top vibration that suppresses stakcer crane.
Also can be that above-mentioned downside actuating device has servomotor as drive source; Above-mentioned upside actuating device has and is crimped on the above-mentioned wheel of going up on the side rails of being made by rubber elastomer.
By using the drive source of servomotor as the downside actuating device, can realize the high precision movement of stakcer crane from regulation conveying original place to regulation conveying destination, the upside actuating device then can be selected the not high wheel of being made by rubber elastomers such as poly-urethane rubbers of accuracy requirement for use, and cost is lower.
Stakcer crane can also have detector that detects the vibration of aforementioned body top and the lifting body actuating device that drives above-mentioned lifting body, behind above-mentioned the 2nd signal of input, when the detected above-mentioned vibration of above-mentioned detector during smaller or equal to specified value, above-mentioned control part is to the 3rd signal of the above-mentioned lifting body of above-mentioned lifting body actuating device input drive controlling.
According to the present invention, a kind of drive controlling method of stakcer crane is provided, this stakcer crane has: main body top, it engages with the above-mentioned side rails of going up, and can move relative to it; Lower body part, it engages with above-mentioned side rails down, and can move relative to it; Column, it vertically extends setting, and aforementioned body top and aforementioned body bottom are coupled together; Lifting body, it can move up and down along above-mentioned column; The upside actuating device, it is arranged at aforementioned body top, and the above-mentioned relatively side rails of going up limits this main body top, and it was moved along going up side rails; And the downside actuating device, it is arranged at the aforementioned body bottom, and this lower body part is moved along above-mentioned side rails down; This drive controlling method comprises: the 1st signal that will represent target velocity or target location is input to above-mentioned upside actuating device and above-mentioned downside actuating device, so that the step that the moving velocity of aforementioned body top and aforementioned body bottom equates; And behind the mobile end of aforementioned body top, import the 2nd signal to above-mentioned upside actuating device, to remove this upper drive mechanism to the above-mentioned step that goes up the restriction of side rails.
Also can when the mobile end of aforementioned body top, above-mentioned the 2nd signal be input to this upside actuating device, to remove above-mentioned upside actuating device to above-mentioned restriction of going up side rails.
Also can have behind above-mentioned the 2nd signal of input, detect the step of aforementioned body top vibration; And when detecting above-mentioned vibration, import the step of the 3rd signal of this lifting body of drive controlling to the lifting body actuating device that drives above-mentioned lifting body smaller or equal to specified value.
Description of drawings
Fig. 1 is the front view of the stakcer crane of one embodiment of the invention.
Fig. 2 is the main portion enlarged drawing of above-mentioned stakcer crane.
Fig. 3 is the diagram of circuit that is used to illustrate above-mentioned stakcer crane action.
Fig. 4 is the characteristic map of the vibrational state of the above-mentioned stakcer crane of expression when stopping.
The specific embodiment
Following with reference to accompanying drawing, embodiments of the invention are elaborated.
In Fig. 1, the 1st, guide rail use in stakcer crane walking, and the 2nd, stakcer crane upper frame guiding guide rail, they are the prescribed path laying in the piler respectively, is arranged with the FOUP that is taking in substrates such as wafer in this piler in length and breadth and uses shelf certainly.The 3rd, stakcer crane, its main body comprises: along the vertical direction the column 3a of Yan Shening, be arranged at this column 3a up and down the upper frame 3b and the lower frame 3c at two ends respectively.
The 31st, road wheel, it comprises drive wheel 31a and idle pulley 31b, it is supported by above-mentioned lower frame 3c, can be in the stakcer crane walking with walking on the guide rail 1.32 is the 1st driver trains, have motor, speed reduction gearing and drg, known Poewr transmission mechanism such as be connected with chain to drive wheel 31a transferring power by sprocket wheel, make stakcer crane 3 along continuous straight runs move to the conveying destination of regulation from the conveying original place of regulation.In addition, be provided with not shown tooth bar along guide rail, relative therewith, the stakcer crane main body is provided with miniature gears.
The 33rd, the bottom guiding roller, the above-mentioned walking of clamping is provided with pair of rolls with the both sides of guide rail 1, is limiting road wheel 31, breaks away from guide rail 1 from walking fully to prevent it.The 34th, lifting body, its guiding parts 34a that can be free to slide supporting along the above-below direction of column 3a, thus can keep horizontality.35 is the 2nd driver trains, has motor, speed reduction gearing, drg, spool, is used for reeling, emitting metal wool 35a.
And the metal wool 35a that is reeled, emits by above-mentioned the 2nd driver train 35 is behind fixed pulley 35b conversion direction, and the end of this metal wool 35a is fixed on the above-mentioned guiding parts 34a.Come lifting body 34 is carried out the following control that moves up and down by this structure: when metal wool 35a was emitted by the 2nd driver train 35, lifting body 34 descended; When metal wool 35a was reeled by the 2nd driver train 35, lifting body 34 rose.
36 is the 3rd driver trains.37, the 38th, upper roll is crimped on the both sides of the upper frame guiding of stakcer crane 3 with guide rail 2.And the roller 37 of a side is driven by above-mentioned the 3rd driver train 36.
As shown in Figure 2, the 3rd driver train 36 comprises motor 36a, speed reduction gearing 36b, magnetic clutch 36c, and is fixed on the end on the direction of travel of upper frame 3b of stakcer crane 3.And the input shaft 36cy of magnetic clutch 36c is connected with the outgoing side of speed reduction gearing 36b; Output shaft 36cx is connected with above-mentioned roller 37.
Wherein, be fixed with end face 36cu on the inner of the input shaft 36cy of above-mentioned magnetic clutch 36c, be provided with armature 36cv by the spline connection on the inner end of output shaft 36cx.
And, for example in the non-excitation actuating type magnetic clutch, this armature 36cv is not when not shown coil carries out excitation, this armature 36cv is crimped on the above-mentioned end face 36cu by the restoring force of not shown spring, respect to one another the mutual crimping of above-mentioned end face 36cu and above-mentioned armature 36cv, then magnetic clutch 36c from input shaft 36cy to output shaft 36cx transferring power.
On the other hand, to not shown coil magnetization the time, electromagnetic force overcomes the restoring force of not shown spring, so armature 36cv moves to position shown in the dotted line, so magnetic clutch 36c removes to the transmission of power of output shaft 36cx from input shaft 36cy.
39 (with reference to Fig. 1) are pulse coders, whenever the travel distance of stakcer crane 3 increases when a certain amount of just counting, count to calculate from regulation according to this and carry the original place to carry the distance of destination to regulation.
Above-mentioned upper roll 37,38 adopts poly-urethane rubber to make the tyre element that joins with above-mentioned guiding rail 2, and therefore the effect aspect cost, durability is good.
The action of said structure is described with reference to the flow process of Fig. 3.
The 1st step (S1):
Each motor that is had to the 1st, the 3rd actuating device 32,36 sends roughly synchronous control signal, drives each motor.
The 2nd step (S2):
Be accompanied by the action of the 1st, the 3rd actuating device 32,36, upper and lower each framework 3b, 3c of stakcer crane 3 are activated power, thus the conveying destination that makes this stakcer crane 3 walk to and stipulate from the conveying original place of regulation.At this moment, when destination (pulse coder 39 does not reach the regulation count value) is carried in stakcer crane 3 no shows, make 32,36 actions of above-mentioned the 1st, the 3rd actuating device, stakcer crane 3 is walked forward; When stakcer crane 3 arrives conveying destination (pulse coder 39 reaches the regulation count value), make above-mentioned the 1st, the 3rd actuating device 32,36 stop action.
The 3rd step (S3):
The 4th step (S4):
Transmission of power effect as the magnetic clutch 36c of the inscape of the 3rd actuating device 36 is disengaged, and makes driven roller 37,38 be in free state.
The 5th step (S5):
Be about to stop at stakcer crane 3, before the transmission of power effect of above-mentioned magnetic clutch 36c is about to remove, stakcer crane 3 slight inclination.Its reason is: utilize rack-and-pinion to keep exactly to be used for the positional precision of the 1st actuating device 32 that the miles of relative movement to stakcer crane 3 limits, and the travel distance precision of the 3rd actuating device 36 changes with the variation of the contact condition of guide rail, the wearing and tearing of this driven roller 37 etc. with the upper frame guiding because of the driven roller 37 that the 3rd actuating device drove.
Therefore, after stakcer crane 3 stopped, the transmission of power effect of above-mentioned power-transfer clutch 36c it seems that from microcosmic stakcer crane 3 still can leave small vibration after just having removed.
The situation (with reference to the dotted line among Fig. 4) little (with reference to the solid line among Fig. 4) of the 3rd actuating device 36 that this vibration of stakcer crane 3 drives than the upper frame 3b that is not provided for stakcer crane 3, therefore even after stakcer crane 3 has just stopped, also can confirming lifting body 34 be in the liftable state, promptly, can carry out lifting to lifting body 34 for startup.
The 6th step (S6):
In the 5th step, but when the vibration that obtains confirming upper frame was in lifting body 34 actuation ranges, lifting body 34 began action.The vibrational state of this upper frame can be measured by known detector (photoelectric detection system etc.).
Wherein, the transverse axis of Fig. 4, the longitudinal axis are represented respectively to stop the time (t) that constantly begins, the amplitude (w) of stakcer crane 3 vibrations from stakcer crane 3, represent the oscillating region that starts of allowing of lifting body 34 with L1, L2.
More than one embodiment of the invention are illustrated, but the present invention is not limited to the foregoing description, self-evident, it can carry out various multi-form enforcements in the scope of its technological thought.
For example, the 3rd driver train 36 as shown in Figure 1 comprises: motor 36a, speed reduction gearing 36b, magnetic clutch 36c, the transmission of the propulsive effort of motor 36a pair roller 37 and disconnection are implemented by magnetic clutch 36c, but also can realize same effect under the situation of not using magnetic clutch 36c.At this moment, the motor 36c in Fig. 2 can adopt servomotor, and the outgoing side of speed reduction gearing 36b is connected with roller 37.In addition, the releasing of the driving limiting force of roller 37 can be implemented by servo the closing of servomotor.
Above-mentioned pulse coder 39 can position stakcer crane 3 exactly, but also can adopt the drive motor of servomotor as the 1st actuating device 32, replaces above-mentioned pulse coder 39, or together uses with it.
Claims (9)
1. stakcer crane, its can along last side rails and down side rails move, it is characterized in that,
Have: main body top, it engages with the described side rails of going up, and can move relative to it;
Lower body part, it engages with described side rails down, and can move relative to it;
Column, it vertically extends setting, and described main body top and described lower body part are coupled together;
Lifting body, it can move up and down along described column;
The upside actuating device, it is arranged at described main body top, and the described relatively side rails of going up limits this main body top, and it was moved along going up side rails;
The downside actuating device, it is arranged at described lower body part, and this lower body part is moved along described side rails down; And
Control part, it will represent that the 1st signal of target velocity or target location is input to described upside actuating device and described downside actuating device, so that the moving velocity of described main body top and described lower body part equates; And behind the mobile end of described main body top, described lifting body stopping period, import the 2nd signal to described upside actuating device, this upside actuating device of the 2nd signal relief is to described restriction of going up side rails.
2. stakcer crane according to claim 1 is characterized in that,
Described upside actuating device has: drive source, be crimped on described wheel and the magnetic clutch of going up on the side rails, this magnetic clutch can move, thereby will pass to described wheel by this drive source power supplied,
The described magnetic clutch of described the 2nd signal blocker is to the transmission of described power.
3. stakcer crane according to claim 1 is characterized in that,
Described upside actuating device has: servomotor and the wheel that is crimped on the described upward side rails,
The excitation of the described servomotor of described the 2nd signal at stop.
4. stakcer crane according to claim 1 is characterized in that,
Described control part is input to this upside actuating device with described the 2nd signal when the mobile end of described main body top, to remove described upside actuating device to described restriction of going up side rails.
5. stakcer crane according to claim 1 is characterized in that,
Described downside actuating device has servomotor as drive source;
Described upside actuating device has and is crimped on the described wheel of going up on the side rails of being made by rubber elastomer.
6. stakcer crane according to claim 1 is characterized in that,
Also have detector that detects the vibration of described main body top and the lifting body actuating device that drives described lifting body,
Behind described the 2nd signal of input, when the detected described vibration of described detector during smaller or equal to specified value, described control part is used for the 3rd signal of the described lifting body of drive controlling to described lifting body actuating device input.
7. the drive controlling method of a stakcer crane, this stakcer crane has: main body top, it engages with last side rails, and can move relative to it; Lower body part, it engages with following side rails, and can move relative to it; Column, it vertically extends setting, and described main body top and described lower body part are coupled together; Lifting body, it can move up and down along described column; The upside actuating device, it is arranged at described main body top, and the described relatively side rails of going up limits this main body top, and it was moved along going up side rails; And the downside actuating device, it is arranged at described lower body part, and this lower body part is moved along described side rails down, it is characterized in that,
This drive controlling method comprises: the 1st signal that will represent target velocity or target location is input to described upside actuating device and described downside actuating device, so that the step that the moving velocity of described main body top and described lower body part equates; And
Behind the mobile end of described main body top, import the 2nd signal to described upside actuating device, to remove this upside actuating device to the described step that goes up the restriction of side rails.
8. drive controlling method according to claim 7 is characterized in that,
When the mobile end of described main body top, the 2nd signal is input to this upside actuating device, to remove described upside actuating device to described restriction of going up side rails.
9. drive controlling method according to claim 7 is characterized in that having:
Behind described the 2nd signal of input, detect the step of described main body top vibration; And
When detected described vibration during, be used for the step of the 3rd signal of this lifting body of drive controlling to the lifting body actuating device input that drives described lifting body smaller or equal to specified value.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006074122 | 2006-03-17 | ||
| JP2006074122A JP4821389B2 (en) | 2006-03-17 | 2006-03-17 | Drive control device for stacker crane |
| JP2006-074122 | 2006-03-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101037180A true CN101037180A (en) | 2007-09-19 |
| CN101037180B CN101037180B (en) | 2012-12-05 |
Family
ID=38590940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100868495A Active CN101037180B (en) | 2006-03-17 | 2007-03-19 | Stack crane and driving control method thereof |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4821389B2 (en) |
| KR (1) | KR20070094575A (en) |
| CN (1) | CN101037180B (en) |
| TW (1) | TW200740670A (en) |
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| CN101648688B (en) * | 2009-06-25 | 2012-05-23 | 上海精星仓储设备工程有限公司 | Tunnel double-column piler |
| WO2013091324A1 (en) * | 2011-12-20 | 2013-06-27 | 三一集团有限公司 | Descending speed control system of sling and piling crane |
| CN103523537A (en) * | 2013-10-30 | 2014-01-22 | 江苏乐基重工机械有限公司 | Anti-slip driving device for stacker |
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Family Cites Families (5)
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| JP2005255327A (en) * | 2004-03-11 | 2005-09-22 | Hitachi Kiden Kogyo Ltd | Vibration absorbing device for board carrying crane mast |
-
2006
- 2006-03-17 JP JP2006074122A patent/JP4821389B2/en active Active
-
2007
- 2007-03-16 TW TW096109287A patent/TW200740670A/en unknown
- 2007-03-19 KR KR1020070026638A patent/KR20070094575A/en active Search and Examination
- 2007-03-19 CN CN2007100868495A patent/CN101037180B/en active Active
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| WO2013091324A1 (en) * | 2011-12-20 | 2013-06-27 | 三一集团有限公司 | Descending speed control system of sling and piling crane |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP4821389B2 (en) | 2011-11-24 |
| TW200740670A (en) | 2007-11-01 |
| CN101037180B (en) | 2012-12-05 |
| TWI371409B (en) | 2012-09-01 |
| JP2007246248A (en) | 2007-09-27 |
| KR20070094575A (en) | 2007-09-20 |
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