CN1567029A - Method of making liquid crystal display - Google Patents
Method of making liquid crystal display Download PDFInfo
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- CN1567029A CN1567029A CN 03142449 CN03142449A CN1567029A CN 1567029 A CN1567029 A CN 1567029A CN 03142449 CN03142449 CN 03142449 CN 03142449 A CN03142449 A CN 03142449A CN 1567029 A CN1567029 A CN 1567029A
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Abstract
This invention relates to a process method of LCD, which are the following: first to form the source layer of a P-shaped low-temperature poly-silicon film transistor and down memory electrode; then to separately form P-shaped source and drain electrodes and inject adulterant into down memory electrode; later to form grating insulation layer, grating electrode, capacity dielectric layer and upper memory electrode; finally to form source electrode wire of the LCD, leak electrode wire and pixel electrode .
Description
Technical field
The present invention relates to a kind of low-temperature polysilicon film transistor LCD (low temperaturepolysilicon thin film transistor liquid crystal display, LTPS TFT-LCD) manufacture method relates in particular to a kind of manufacture method of utilizing seven road gold-tinted operation manufacturings and being made of LCD fully P type low-temperature polysilicon film transistor.
Background technology
In flat-panel screens technology now, LCD (liquid crystal display, LCD) can be described as a wherein ripe technology, for example, in the daily life common mobile phone, digital camera, video camera, notebook computer so that monitor all is the commodity that utilize this technology manufacturing.Yet along with the raising of people for the requirement of display visual experience, add that the new technology application constantly expands, higher picture element, more high definition, more the flat-panel screens of high brightness and tool low price has become the trend of WeiLai Technology development, also is the motive power of new display technique development.And the low-temperature polysilicon film transistor in the flat-panel screens technology is except having the characteristic that meets active driving (actively drive) trend, its technology is important technology breakthrough that can reach above-mentioned target just also, therefore be based upon the various innovative technologies on this framework, constantly arise at the historic moment.
Please refer to Fig. 1 to Fig. 8, Fig. 1 to Fig. 8 is the method synoptic diagram of existing manufacturing one low-temperature polysilicon film transistor LCD 98.Existing low-temperature polysilicon film transistor LCD 98 is manufactured on the insulated substrate 10, insulated substrate 10 must be made of (transparent) material of printing opacity, be generally a glass substrate or a quartz (quartz) substrate, and the surface of insulated substrate 10 comprises a pixel array region (pixel array area) 11 and one periphery circuit region (periphery circuit area) 13.
As shown in Figure 1, at first form an amorphous silicon membrane (amorphoussilicon film on the surface of insulated substrate 10, not shown), then carry out excimer laser annealing (excimer laser annealing, ELA) operation makes amorphous silicon membrane (not shown) crystallization (crystallize) become a polysilicon layer (not shown).Carry out the photoetching first time and etching work procedure subsequently,, and in periphery circuit region 13, form at least one active area 14 simultaneously so that in insulated substrate 10 lip-deep pixel array regions 11, form an active area (active area) 12.Wherein, the surface of active area 12 comprises one source pole zone (source region, not shown), a drain region (drain region, not shown), a passage area (channel region, not shown) and the presumptive area (not shown) of storage electrode (bottom storage electrode) once, and the surface of each active area 14 also comprises one source pole zone (not shown), a drain region (not shown) and a passage area (not shown).
As shown in Figure 2, then carry out the photoetching second time and etching work procedure again, on the surface of insulated substrate 10, form a photoresist layer 16, in order to limit the position (site) of the following storage electrode (bottom storage electrode) 18 that is positioned at pixel array region 11, then carry out one ion injecting process again to inject the N type alloy (dopants) of high concentration in the active area that is exposed 12 in pixel array region 11, finish down the manufacturing of storage electrode 18.
Remove photoresist layer 16 afterwards, as shown in Figure 3, form an insulation course 22 and one first conductive layer (not shown) more in regular turn on the total surface, carry out photoetching for the third time and etching work procedure then, in pixel array region 11, form the gate electrode 24 of a thin film transistor (TFT), and on the following storage electrode 18 in pixel array region 11, form storage electrode 26 on, in periphery circuit region 13, form transistorized gate electrode 28 of a N type metal oxide semiconductor (NMOS) and the transistorized gate electrode 32 of a P-type mos (PMOS) more simultaneously respectively.
Then as shown in Figure 4, utilize gate electrode 24,28,32 and go up storage electrode 26 as etching mask, carry out an etching work procedure, form gate insulator (gate insulating layer) 34,36,38 and capacitance dielectric layer (capacitor dielectric layer) 42, to finish the manufacturing of storage capacitors (storagecap) 44.
Utilize gate electrode 24,28,32 as covert subsequently again, carry out the ion implantation step one, inject the N type ion of low concentration, in the active area 12,14 of gate electrode 24,28,32 both sides, form lightly doped drain zone 46,48,52.Because at the ion implantation step that this carried out is the N type ion that injects low concentration, so can the concentration of dopant of following storage electrode 18 not influenced to some extent.
As shown in Figure 5, and then carry out photoetching and etching work procedure the 4th time, form photoresist layer 54 on the total surface, this photoresist layer 54 has covered gate electrode 24 and the predetermined zone that is used as lightly doped drain 56 in the pixel array region 11, and has covered the periphery circuit region 13 interior predetermined transistorized zones of P-type mos that are used for making simultaneously.Then carry out the ion implantation step one, inject the N type ion of high concentration, so that form the source electrode 62 and the drain electrode 64 of thin film transistor (TFT) 58 in the active area 12 in pixel array region 11, and the source electrode 68 and the drain electrode 72 of formation N type metal oxide semiconductor transistor 66 in the active area 14 in periphery circuit region 13 simultaneously.
Afterwards, remove photoresist layer 54, as shown in Figure 6, carry out photoetching and etching work procedure subsequently again the 5th time, form photoresist layer 74 on the total surface, 74 of this photoresist layers expose the predetermined zone that is used for making P-type mos transistor 76 in the periphery circuit region 13, then carry out one the ion implantation step again, inject the P type ion of high concentration, so that in active area 14, form the source electrode 78 and the drain electrode 82 of P-type mos transistor 76.Because what the ion implantation step that carries out was injected is the P type ion of high concentration herein, thus before 52 (as shown in Figure 5) of formed N type lightly doped drain zone will be compensated (compensate) and be converted into source electrode 78 and drain electrode 82.
Afterwards, remove photoresist layer 74, as shown in Figure 7, form insulation course 84 on the total surface, this insulation course 84 has covered gate electrode 24,28,32 and has gone up storage electrode 26.Then carry out the 6th time photoetching and etching work procedure again, remove partial insulative layer 84, and form first contact hole (contact hole) 85 that can be communicated with source electrode 62,68,78 and drain electrode 72,82 respectively.Second insulation course, 84 surface formation one in pixel array region 11 can be electrically connected to the source electrode lead (source wire) 86 of source electrode 62 then, and second insulation course, 84 surfaces in periphery circuit region 13 form a source electrode lead 88 that can be electrically connected to source electrode 68,78 respectively, and the lead 92 that can be electrically connected N type metal oxide semiconductor transistor 66 and P-type mos transistor 76, finish CMOS (Complementary Metal Oxide Semiconductor) (complementary metal oxide semiconductor, CMOS) transistorized manufacturing.
As shown in Figure 8, then form an insulation course 94 again, make this insulation course 94 cover above-mentioned insulation course 84, source electrode lead 86,88 and lead 92 on the total surface.Carry out photoetching and etching work procedure again the 7th time, remove partial insulative layer 94, and within insulation course 94, form second contact hole 95 that can even reach drain electrode 64.On insulation course 94, form a transparency conducting layer (not shown) subsequently, carry out the 8th photoetching and etching work procedure at last and remove the partially transparent conductive layer, and on insulation course 94, form a pixel electrode (pixel electrode) 96, this pixel electrode 96 is electrically connected to the drain electrode 64 that is positioned at lower floor via second contact hole 95 that is filled with the transparency conducting layer (not shown), to finish the manufacturing of low-temperature polysilicon film transistor LCD 98.
Yet there is a quite serious problem in the method for existing manufacturing low-temperature polysilicon film transistor LCD.I.e. low-temperature polysilicon film transistor LCD of coming out with above-mentioned manufacture method manufacturing, under forming, when storage electrode, source electrode, drain electrode and lightly doped drain, need to form the different photoresist layer in three roads and carry out four road ion injecting process.So Duo manufacturing step makes manufacturing process become very complicated, simultaneously each time when forming photoresist layer, all need to carry out the gold-tinted operation one time, and the gold-tinted operation all has the risk of misalignment (mis-aligned) in fact each time, after through so complicated and multiple gold-tinted operation, prepared element is difficult to not occur defective (defect).Especially lightly doped drain part, usually because the alignment error of the alignment error when making gate electrode when adding the source electrode of making thin film transistor (TFT) in the pixel array region and drain electrode, and the situation of asymmetric on the generation width (asymmetry) causes element breakdown ahead of time.In addition, the manufacture method of integrated complementary formula metal oxide semiconductor transistor in the prior art, though be a kind of common manufacture method of continuing to use integrated circuit industry, but both comprising N type metal oxide semiconductor transistor, comprise again in the transistorized circuit manufacture method of P-type mos, really be impossible the number of times of gold-tinted operation and ion injecting process obviously to be reduced, leakage current (leakage current) size of N type low-temperature polysilicon film transistor itself is not easy Be Controlled simultaneously, often causes video picture quality (image quality) not high in the pixel region so be applied in.Therefore, how to develop a kind of method of new manufacturing low-temperature polysilicon film transistor LCD, reduce the complexity of manufacturing process as far as possible, the number of times that reduces the gold-tinted operation is to reduce the probability that misalignment takes place, and then the defective of minimizing product element, improve product percent of pass (yield) and video picture quality, just become crucial problem.
Summary of the invention
The technical problem to be solved in the present invention is: a kind of method of making the low-temperature polysilicon film transistor LCD is provided, a kind of manufacture method of utilizing seven road gold-tinted operation manufacturings and being made of LCD fully P type low-temperature polysilicon film transistor especially is provided, and it has good alignment accuracy (precise alignment) and fiduciary level (reliability).
In preferred implementation of the present invention, one insulated substrate is provided earlier, form at least onely again on the surface of this insulated substrate respectively, and comprise one source pole zone, a drain region and a passage area among each active layer by the active layer of the P type low-temperature polysilicon film transistor that polysilicon constituted and the following storage electrode of at least one storage capacitors.Carry out one second gold-tinted and etching work procedure and a P type ion injecting process again,, and within each time storage electrode, inject alloy simultaneously so that within each source region and each drain region, form one source pole electrode and at least one drain electrode at least respectively.Then on the surface of above-mentioned insulated substrate, form a metal level, make this metal level cover above-mentioned each active layer and each time storage electrode, carry out one the 3rd gold-tinted and etching work procedure then, to remove the part metals layer, on each passage area, form the gate electrode of each low-temperature polysilicon film transistor, thereby finish the manufacturing of each P type low-temperature polysilicon film transistor, and form on each time storage electrode each storage capacitors on storage electrode, to finish the manufacturing of each storage capacitors.On the surface of above-mentioned insulated substrate, form one first insulation course subsequently, make first insulation course cover each gate electrode and storage electrode on each, carry out one the 4th gold-tinted and etching work procedure again, so that remove part first insulation course, within this first insulation course, form at least one sensible each source electrode respectively, first contact hole of each drain electrode and each gate electrode, then on the surface of above-mentioned first insulation course, form a conductive layer, and this conductive layer fills up each first contact hole, carry out one the 5th gold-tinted and etching work procedure then, to remove the above-mentioned conductive layer of part, on the surface of first insulation course, form one source pole lead and at least one drain conductors at least, make each source electrode lead and each drain conductors be electrically connected to each source electrode and each drain electrode via each first contact hole respectively.On the surface of above-mentioned insulated substrate, form one second insulation course subsequently, make this second insulation course cover above-mentioned first insulation course, each source electrode lead and each drain conductors.
Because the present invention utilizes seven road gold-tinted operation manufacturings and constitutes LCD by P type low-temperature polysilicon film transistor fully, therefore can reduce the sum of gold-tinted and ion injecting process step significantly, reach the purpose of simplifying technological process, and can effectively avoid the risk and the probability of misalignment, improve the situation that occurs defective on the product element, and then improved the confidence level of product.In addition, because the leakage current of P type low-temperature polysilicon film transistor is low than the leakage current of N type low-temperature polysilicon film transistor, and the leakage current of P type low-temperature polysilicon film transistor itself also is easier to Be Controlled, therefore the present invention utilizes P type low-temperature polysilicon film transistor to make the method for LCD, can more effectively improve the electric property of product, help the raising of LCD video picture quality greatly.
Description of drawings
Fig. 1 to Fig. 8 is the method synoptic diagram of existing manufacturing one low-temperature polysilicon film transistor LCD;
Fig. 9 to Figure 13 is a method synoptic diagram of making a low-temperature polysilicon film transistor LCD in the first embodiment of the invention;
Figure 14 to Figure 19 is a method synoptic diagram of making a low-temperature polysilicon film transistor LCD in the second embodiment of the invention.
The drawing reference numeral explanation
10 insulated substrates, 11 pixel array regions
12 active areas, 13 periphery circuit regions
14 active areas, 16 photoresist layers
18 times storage electrode 22 insulation courses
Storage electrode on 24 gate electrodes 26
28 gate electrodes, 32 gate electrodes
34 gate insulators, 36 gate insulators
38 gate insulators, 42 capacitance dielectric layers
44 storage capacitors, 46 lightly doped drain zones
52 lightly doped drain zones, 48 lightly doped drains zone
54 photoresist layers, 56 lightly doped drains
58 thin film transistor (TFT)s, 62 source electrodes
64 drain electrode 66NMOS transistors
68 source electrodes, 72 drain electrodes
78 source electrodes, 82 drain electrodes
84 insulation courses, 85 first contact holes
86 source electrode leads, 88 source electrode leads
92 leads, 94 insulation courses
96 pixel electrodes, 98 low-temperature polysilicon film transistors
100,200 insulated substrates, 101,201 pixel array regions
102,202 active layers, 103,203 periphery circuit regions
104,204 active layers, 105,205 source regions
106 first masks, 107,207 drain regions
108 times storage electrode 109,209 source regions
111,211 drain regions, 112,222 source electrodes
114,214 drain electrodes, 116,216 source electrodes
118,218 drain electrodes, 123,223 passage area
124,224 gate insulators, 125,225 passage area
126,226 gate electrodes, 128,228 P type low-temperature polysilicon film transistors
132, storage electrode on 232 capacitance dielectric layers 134,234
136,236 storage capacitors, 137,237 passage area
138,238 gate insulators, 142,242 gate electrodes
144,244 gate insulators, 146,246 gate electrodes
148A, 148B, 248A, 248B PMOS transistor
152,252 second insulation courses
154,254 first contact holes, 156,256 source electrode leads
158,258 drain conductors, 162,262 source electrode leads
164,264 drain conductors, 166,266 the 3rd insulation courses
168,268 second contact holes, 172,272 pixel electrodes
174,274 low-temperature polysilicon film transistor LCD
206 first insulation courses, 208 first masks
210 times storage electrodes
Embodiment
Please refer to Fig. 9 to Figure 13, Fig. 9 to Figure 13 is a method synoptic diagram of making a low-temperature polysilicon film transistor LCD 174 in the first embodiment of the invention.As shown in Figure 9, low-temperature polysilicon film transistor LCD of the present invention is manufactured on the insulated substrate 100, insulated substrate 100 must be made of light transmissive material, be generally a glass substrate or a quartz base plate, and the surface of insulated substrate 100 comprises a pixel array region 101 and a periphery circuit region 103.
The present invention utilizes sputtering process or other operations to form an amorphous silicon membrane (not shown) on the surface of insulated substrate 100 earlier, then carries out the quasi-molecule laser annealing operation, makes the crystallization again of amorphous silicon membrane (not shown), is converted into the polysilicon layer (not shown).Then, carry out the photoetching first time and etching work procedure, remove part polysilicon layer (not shown), in insulated substrate 100 lip-deep pixel array regions 101, form an active area 102, and in periphery circuit region 103, form at least one active area 104 simultaneously.Wherein, the surface of active area 102 comprises one source pole zone (not shown), a drain region (not shown), a passage area (not shown) and the presumptive area (not shown) of storage electrode once, and the surface of each active area 104 comprises one source pole zone (not shown), a drain region (not shown) and a passage area (not shown).What deserves to be mentioned is that above-mentioned quasi-molecule laser annealing operation also can be carried out after the photoetching first time and etching work procedure.
Then as shown in figure 10, carry out the photoetching second time and etching work procedure again, form one first mask 106 on the surface of insulated substrate 100, this first mask 106 exposes the source region in the active area 102 105 and drain region 107 and following storage electrode 108 in the pixel array region 101, and exposes source region 109 and the drain region 111 in the active areas 104 in the periphery circuit region 103 simultaneously.Wherein, for the needs of element integrated (integration), in preferred implementation of the present invention, storage electrode 108 is linked to each other with drain region 107.Then utilize first mask 106 as covert, carry out the ion implantation step one, inject the P type ion of high concentration, to form the source electrode 112 and the drain electrode 114 of P type low-temperature polysilicon film transistor (not shown) at the active area 102 that is arranged in pixel array region 101, and down injecting P type alloy within the storage electrode 108, and the also source electrode 116 and the drain electrode 118 of formation P type low-temperature polysilicon film transistor (not shown) in the active area in periphery circuit region 103 104 simultaneously.
Afterwards, remove first mask 106, as shown in figure 11, form the first insulation course (not shown) and a metal level (not shown) in regular turn on the total surface, and above-mentioned first insulation course and metal level all are coated with source region 102,104 and storage electrode 108 down.Wherein, the first insulation course (not shown) can be single layer structure layer or composite construction layer, and the material that constitutes this first insulation course can be to be the monox (TEOS-SiO of reacting gas with the tetraethylorthosilicise
2), monox or silicon nitride (silicon nitride) etc., and the material that constitutes metal level can be tungsten (W) or chromium (Cr).In addition, before forming first insulation course, the present invention also can comprise a cleaning step, utilize ozone solution to clean active area 102,104 and following storage electrode 108 surfaces, fundamental purpose is to remove native oxide (the native oxide layer on active area 102,104 and following storage electrode 108 surfaces, not shown), and the surface of active area of passivation (passive) simultaneously 102,104 and following storage electrode 108, preventing before forming polysilicon first insulation course, and then guarantee that passage area is not contaminated by further oxidation.
Carry out photoetching for the third time and etching work procedure subsequently, remove part first insulation course and metal level, so that in pixel array region, form the gate insulator 124 and the gate electrode 126 of low-temperature polysilicon film transistor on 101 the passage area 123, finish the manufacturing of P type low-temperature polysilicon film transistor 128; And on following storage electrode 108, form storage capacitors capacitance dielectric layer 132 and on storage electrode 134, finish the manufacturing of storage capacitors 136; On the passage area 137 of periphery circuit region 103, form simultaneously the gate insulator 138,144 and the gate electrode 142,146 of P type low-temperature polysilicon film transistor more respectively, finish the manufacturing of P type low-temperature polysilicon film transistor 148A, 148B.
It should be noted that when carrying out photoetching for the third time and etching work procedure no matter first insulation course is single layer structure or composite construction layer, all can reserve part thickness not etched, it be not etched fully to keep full depth even.No matter be that a kind of situation, all be to be arranged on gate electrode 126,142,146 and to go up first insulation course under the storage electrode 134, in illustrative embodiments of the present invention, to have removed first insulation course fully as gate insulator 124,138,144 and capacitance dielectric layer 132.In addition, the thickness of gate insulator is all less than the thickness of gate electrode.
As shown in figure 12, form second insulation course 152 on the total surface again, make these second insulation course, 152 cover gate electrodes 126,142,146 and go up storage electrode 134.The material that forms this second insulation course 152 can be monox, silicon nitride or silicon oxynitride.Carry out the 4th photoetching and etching work procedure again and remove part second insulation course 152, and in second insulation course 152, form first contact hole 154 that can be communicated with source electrode 112,116 and drain electrode 114,118 respectively.
Form a conductive layer (not shown) subsequently on the surface of second insulation course 152, this conductive layer fills up first contact hole 154, then carry out photoetching and etching work procedure the 5th time, remove the partially conductive layer, so that 101 second insulation course, 152 surface formation one can be electrically connected to the source electrode lead 156 of source electrode 112 in pixel array region, be used as the data line of low-temperature polysilicon film transistor LCD, and a drain conductors 158 that can be electrically connected to drain electrode 114.The also visual actual needs of the present invention, second insulation course, 152 surfaces in periphery circuit region 103 form the source electrode lead 162 that can be electrically connected to source electrode 116 separately respectively, and the drain conductors 164 that respectively is electrically connected to drain electrode.It should be noted that on the gate electrode and can also form contact hole and lead.
As shown in figure 13, on the surface of insulated substrate 100, form the 3rd insulation course 166 again, make this 3rd insulation course 166 cover aforementioned dielectric layer 152, source electrode lead 156,162 and drain conductors 158,164, and as the usefulness of flatness layer, wherein the material of this 3rd insulation course 166 can be monox, silicon nitride or be the monox that reacting gas generated with the tetraethylorthosilicise.Carry out the 6th photoetching and etching work procedure then removing part the 3rd insulation course 166, and formation one can be communicated with second contact hole 168 of drain conductors 158 the 3rd insulation course 166 in.On the 3rd insulation course 166, form a transparency conducting layer (not shown) subsequently, this transparency conducting layer (not shown) by tin indium oxide (indium tin oxide, ITO) or indium zinc oxide (indium zinc oxide IZO) constitutes.Carry out the 7th gold-tinted and etching work procedure at last to remove the partially transparent conductive layer, and on the 3rd insulation course 166, form pixel electrode 172, this pixel electrode 172 is electrically connected to drain conductors 158 and drain electrode 114 via second contact hole 168 that is filled with transparency conducting layer, to finish the manufacturing of low-temperature polysilicon film transistor LCD 174.
Please refer to Figure 14 to Figure 19, Figure 14 to Figure 19 is a method synoptic diagram of making a low-temperature polysilicon film transistor LCD 274 in the second embodiment of the invention.As shown in figure 14, low-temperature polysilicon film transistor LCD of the present invention is to be manufactured on the insulated substrate 200, insulated substrate 200 must be made of light transmissive material, be generally a glass substrate or a quartz base plate, and comprise a pixel array region 201 and a periphery circuit region 203 on the surface of insulated substrate 200.
At first utilize sputtering process or other operations on insulated substrate 200 surfaces, to form an amorphous silicon membrane (not shown), then carry out an excimer laser annealing operation, the amorphous silicon membrane (not shown) is recrystallized into be the polysilicon layer (not shown).Carry out the photoetching first time and etching work procedure then, remove the part polysilicon layer,, and in periphery circuit region 203, form at least one active area 204 simultaneously so that in insulated substrate 200 lip-deep pixel array regions 201, form an active area 202.Wherein, the surface of active area 202 comprises one source pole zone (not shown), a drain region (not shown), a passage area (not shown) and the presumptive area (not shown) of storage electrode once.The surface of each active area 204 comprises one source pole zone (not shown), a drain region (not shown) and a passage area (not shown).What deserves to be mentioned is, also can after the photoetching first time and etching work procedure, carry out the quasi-molecule laser annealing operation.
Then as shown in figure 15, on the surface of insulated substrate 200, form one first insulation course 206, make this first insulation course 206 cover active area 202,204.Wherein, first insulation course 206 can be single layer structure layer or composite construction layer, and the material that constitutes this first insulation course 206 can be to be monox, monox or the silicon nitride that reacting gas was generated with tetraethylorthosilicise (TEOS).In addition, form before first insulation course 206, the present invention also can comprise a cleaning step, utilize ozone solution to clean the surface of above-mentioned active area 202,204, to remove the native oxide (not shown) on active area 202,204 surfaces, and the surface of passivation (passive) active area 202,204, preventing before forming polysilicon layer first insulation course 206, and then guarantee that the passage area (not shown) is not contaminated by further oxidations.
Then carry out the photoetching second time and etching work procedure again, form one first mask 208 on the surface of insulated substrate 200, this first mask 208 exposes the source region in the active area 202 205 and drain region 207 and following storage electrode 210 in the pixel array region 201, and exposes source region 209 and the drain region 211 in the active areas 204 in the periphery circuit region 203 simultaneously.Wherein, for the integrated needs of element, in preferred implementation of the present invention, following storage electrode 210 links to each other with drain region 207.Then utilize first mask 208 to carry out the P type ion implantation step of one high concentration as covert again, so that form the source electrode 212 and the drain electrode 214 of P type low-temperature polysilicon film transistor (not shown) in the active area 202 in pixel array region 201, and injecting alloy within the storage electrode 210 down, and form the source electrode 216 and the drain electrode 218 of P type low-temperature polysilicon film transistor (not shown) in the active area 204 of while in periphery circuit region 203.
Remove after first mask 208, as shown in figure 16, form a metal level (not shown) on the surface of insulated substrate 200, make this metal level cover first insulation course 206, active area 202,204 and following storage electrode 210, the material that constitutes this metal level can be tungsten (W) or chromium (Cr).As shown in figure 17, carry out photoetching for the third time and etching work procedure subsequently, remove part first insulation course 206 and part metals layer, so that form the gate insulator 224 and the gate electrode 226 of low-temperature polysilicon film transistor on the passage area 223 in pixel array region in 201, finish the manufacturing of P type low-temperature polysilicon film transistor 228; And on following storage electrode 210, form storage capacitors capacitance dielectric layer 232 and on storage electrode 234, to finish the manufacturing of storage capacitors 236; Simultaneously, form the gate insulator 238,244 and the gate electrode 242,246 of P type low-temperature polysilicon film transistor on the passage area 237 in periphery circuit region 203 respectively, finish the manufacturing of P type low-temperature polysilicon film transistor 248A, 248B.
It should be noted that carrying out in photoetching for the third time and the etching work procedure no matter first insulation course 206 is single layer structure or composite structure, all can reserve part thickness not etched, it be not etched fully to keep whole thickness even.No matter that a kind of situation, all be with first insulation course 206 that is arranged on gate electrode 226,242,246 and goes up storage electrode 234 belows as gate insulator 224,238,244 and capacitance dielectric layer 232, in the diagram of present embodiment, removed first insulation course 206 fully.In addition, the thickness of gate insulator is all less than the thickness of gate electrode.
As shown in figure 18, on the surface of insulated substrate 200, form one second insulation course 252, make second insulation course, 252 cover grid electrodes 226,242,246 and go up storage electrode 234.This second insulation course 252 can be silicon oxide layer, silicon nitride layer or silicon oxynitride layer.Carry out photoetching and etching work procedure again the 4th time, removing part second insulation course 252, and in second insulation course 252, form first contact hole 254 of can lead to source electrode 212,216 and drain electrode 214,218 respectively.
On the surface of second insulation course 252, form a conductive layer (not shown) subsequently, in order to fill up first contact hole 254, then carry out photoetching and etching work procedure the 5th time, to remove the partially conductive layer, so that 201 second insulation course, 252 surface formation one are electrically connected to the source electrode lead 256 of source electrode 212 in pixel array region, be used as the data line of low-temperature polysilicon film transistor LCD, and a drain conductors 258 that is electrically connected to drain electrode 214.The also visual actual needs of the present invention, second insulation course, 252 surfaces in periphery circuit region 203 form the source electrode lead 262 that respectively is electrically connected to source electrode 216 respectively, and the drain conductors 264 that respectively is electrically connected to drain electrode 218.It should be noted that on gate electrode and also can form contact hole and lead.
As shown in figure 19, on the surface of insulated substrate 200, form one the 3rd insulation course 266 again, make this 3rd insulation course 266 cover second insulation course 252, source electrode lead 256,262 and drain conductors 258,264, and as the usefulness of flatness layer, this 3rd insulation course 266 can be silicon oxide layer, silicon nitride layer or be the silicon oxide layer that reacting gas was generated with tetraethylorthosilicise (TEOS).Carry out photoetching and etching work procedure then the 6th time, removing part the 3rd insulation course 266, and within the 3rd insulation course 266, form second contact hole 268 that to lead to drain conductors 258.Form a transparency conducting layer (not shown) subsequently on the 3rd insulation course 266, this transparency conducting layer is made of tin indium oxide (ITO) or indium zinc oxide (IZO).Carry out photoetching and etching work procedure at last the 7th time, to remove the partially transparent conductive layer, and on the 3rd insulation course 266, form pixel electrode 272, this pixel electrode 272 is electrically connected to drain conductors 258 and drain electrode 214 via second contact hole 268 that is filled up by transparency conducting layer, to finish the manufacturing of low-temperature polysilicon film transistor LCD 274.
Because the method for manufacturing low-temperature polysilicon film transistor LCD of the present invention is to utilize the P type ion injecting process of a mask and a heavy dopant concentration to form the source electrode of P type thin film transistor (TFT) in the pixel array region and the source electrode and the drain electrode of drain electrode and the interior P type low-temperature polysilicon film transistor of periphery circuit region respectively earlier, and simultaneously capacitor lower electrode is mixed, carry out the manufacturing of gate electrode again.Therefore can reduce the sum of gold-tinted and ion injecting process significantly, reach the purpose that operation is simplified, and can effectively avoid the risk and the probability of misalignment, improve the situation that occurs defective on the product element, and then improved the confidence level of product.And the present invention is when making each source electrode and drain electrode, simultaneously storage electrode down carried out high-concentration dopant, thus can guarantee that the resistance of storage electrode reaches expectation value down, this help meeting high confidence level test in the standard of burn-in test.In addition, the leakage current of P type low-temperature polysilicon film transistor is low than the leakage current of N type low-temperature polysilicon film transistor, and the leakage current of P type low-temperature polysilicon film transistor itself is easier to Be Controlled, so be fit to very much be applied to pixel region.And the product of actual production has the advantage of superior electrical performance, high confidence level and high video picture quality.
Compare with the method for existing manufacturing low-temperature polysilicon film transistor LCD, a kind of manufacture method of utilizing seven road gold-tinted operation manufacturings and constituting LCD fully by P type low-temperature polysilicon film transistor that the present invention discloses, not only reduced the sum of gold-tinted and ion injecting process significantly, reach the purpose that operation is simplified, and can effectively suppress the risk of misalignment and the problem of probability and product element defective, thereby improved the confidence level of product.In addition, because the leakage current of P type low-temperature polysilicon film transistor is low than the leakage current of N type low-temperature polysilicon film transistor, and the leakage current of P type low-temperature polysilicon film transistor itself also is easier to Be Controlled, therefore the P of utilization type low-temperature polysilicon film transistor of the present invention is made the method for LCD, can more effectively improve the electric property of product, help the raising of LCD video picture quality greatly.
Below only preferred implementation of the present invention is described, obviously, all change that is equal to and modifications of making by the disclosed content of the present patent application file all are encompassed within the scope of protection of present invention.
Claims (10)
1. the manufacture method of a LCD, this LCD comprises at least one P type low-temperature polysilicon film transistor and at least one storage capacitors, this method comprises the following steps: at least
One substrate is provided;
On this substrate, form a polysilicon layer;
Carry out one first photoetching and etching work procedure, remove the above-mentioned polysilicon layer of part, so that limit an active area and storage electrode once on the surface of aforesaid substrate, wherein above-mentioned active area comprises one source pole zone, a drain region and a passage area;
Carry out one second photoetching and etching work procedure, so that form one first mask on aforesaid substrate, wherein this first mask exposes above-mentioned source region, drain region and following storage electrode;
Utilize first mask to carry out a P type ion injecting process,, inject alloy within the storage electrode down above-mentioned simultaneously so that in above-mentioned source region and drain region, form an one source pole electrode and a drain electrode respectively as covert;
Remove above-mentioned first mask;
On aforesaid substrate, form a metal level, in order to cover above-mentioned active area and following storage electrode;
Carry out one the 3rd photoetching and etching work procedure, remove the above-mentioned metal level of part so that on above-mentioned passage area, form the gate electrode of P type low-temperature polysilicon film transistor, and form on the above-mentioned storage electrode down storage capacitors on storage electrode;
On aforesaid substrate, form one first insulation course, in order to cover above-mentioned gate electrode and to go up storage electrode;
Carry out one the 4th photoetching and etching work procedure, remove above-mentioned first insulation course of part, to form at least one first contact hole that is communicated with above-mentioned source electrode, drain electrode and gate electrode;
On above-mentioned first insulation course, form a conductive layer, in order to fill up above-mentioned first contact hole;
Carry out one the 5th photoetching and etching work procedure, remove the above-mentioned conductive layer of part, so that on above-mentioned first insulation course, form an one source pole lead and a drain conductors, and make source electrode lead and drain conductors be electrically connected to source electrode and drain electrode via first contact hole respectively; And
On aforesaid substrate, form one second insulation course, in order to cover above-mentioned first insulation course, source electrode lead and drain conductors.
2. the method for claim 1, the step of wherein above-mentioned formation polysilicon layer comprises following operation:
Carry out a sputtering process, so that form an amorphous silicon layer on the surface of aforesaid substrate; And
Carry out an annealing operation so that above-mentioned amorphous silicon layer again crystallization form above-mentioned polysilicon layer.
3. the method for claim 1, the P type ion implantation step that wherein above-mentioned P type ion implantation step is a high concentration is used for forming the source electrode and the drain electrode of above-mentioned P type low-temperature polysilicon film transistor.
4. the method for claim 1 was wherein carried out comprehensive step that forms one the 3rd insulation course on substrate before carrying out above-mentioned second photoetching and etching work procedure, reached storage electrode down in order to cover above-mentioned active area.
5. method as claimed in claim 4, the material that wherein constitutes above-mentioned the 3rd insulation course comprise with the tetraethylorthosilicise being monox, monox or the silicon nitride that reacting gas generates.
6. the method for claim 1, wherein when carrying out above-mentioned the 3rd photoetching and etching work procedure, on above-mentioned passage area, form a gate insulator of above-mentioned P type low-temperature polysilicon film transistor respectively, and on above-mentioned storage electrode down, form a capacitance dielectric layer of storage capacitors.
7. the method for claim 1 is wherein removed and is carried out a step that comprehensively forms one the 4th insulation course on aforesaid substrate after above-mentioned first mask, in order to cover above-mentioned active area and storage electrode down.
8. method as claimed in claim 7, the material that wherein constitutes above-mentioned the 4th insulation course comprise with the tetraethylorthosilicise being monox, monox or the silicon nitride that reacting gas generates.
9. the method for claim 1, the material that wherein constitutes above-mentioned transparency conducting layer comprises tin indium oxide or indium zinc oxide.
10. the method for claim 1 also comprises the following steps:
Carry out one the 6th photoetching and etching work procedure, remove above-mentioned second insulation course of part, in order to form second contact hole of at least one above-mentioned drain conductors of leading to;
On above-mentioned second insulation course, form a transparency conducting layer; And
Carry out one the 7th photoetching and etching work procedure, remove the partially transparent conductive layer, so that form at least one pixel electrode on above-mentioned second insulation course, and each pixel electrode is electrically connected to each drain conductors via each above-mentioned second contact hole that is filled with transparency conducting layer.
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