CN1483689A - Low temp cofired low specific inductive capacity glass ceramic material - Google Patents
Low temp cofired low specific inductive capacity glass ceramic material Download PDFInfo
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- CN1483689A CN1483689A CNA021347751A CN02134775A CN1483689A CN 1483689 A CN1483689 A CN 1483689A CN A021347751 A CNA021347751 A CN A021347751A CN 02134775 A CN02134775 A CN 02134775A CN 1483689 A CN1483689 A CN 1483689A
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- 239000006112 glass ceramic composition Substances 0.000 title claims abstract description 13
- 230000001939 inductive effect Effects 0.000 title claims description 13
- 239000005388 borosilicate glass Substances 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims abstract description 25
- 239000000919 ceramic Substances 0.000 claims abstract description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910000272 alkali metal oxide Inorganic materials 0.000 claims abstract description 4
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 claims abstract description 4
- 229910052810 boron oxide Inorganic materials 0.000 claims abstract description 4
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052500 inorganic mineral Inorganic materials 0.000 claims abstract description 4
- 239000011707 mineral Substances 0.000 claims abstract description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 4
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 claims description 25
- 229910052839 forsterite Inorganic materials 0.000 claims description 22
- 238000000498 ball milling Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 abstract description 10
- 239000004332 silver Substances 0.000 abstract description 10
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract description 6
- 239000002002 slurry Substances 0.000 abstract description 6
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical group [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052763 palladium Inorganic materials 0.000 abstract description 3
- 239000011521 glass Substances 0.000 abstract description 2
- 239000002241 glass-ceramic Substances 0.000 abstract description 2
- 229910052878 cordierite Inorganic materials 0.000 abstract 3
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 abstract 1
- 238000005245 sintering Methods 0.000 description 17
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000008602 contraction Effects 0.000 description 3
- 239000000411 inducer Substances 0.000 description 3
- 239000000391 magnesium silicate Substances 0.000 description 3
- 229910052919 magnesium silicate Inorganic materials 0.000 description 3
- 235000019792 magnesium silicate Nutrition 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 2
- 235000011941 Tilia x europaea Nutrition 0.000 description 2
- 239000004110 Zinc silicate Substances 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010433 feldspar Substances 0.000 description 2
- 239000004571 lime Substances 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- XSMMCTCMFDWXIX-UHFFFAOYSA-N zinc silicate Chemical compound [Zn+2].[O-][Si]([O-])=O XSMMCTCMFDWXIX-UHFFFAOYSA-N 0.000 description 2
- 235000019352 zinc silicate Nutrition 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- 238000004154 testing of material Methods 0.000 description 1
- 229910021489 α-quartz Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
- C03C14/004—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of particles or flakes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
Abstract
The present invention relates to a low-temp. cofired low dielectric constant glass ceramic amterial, its glass phase is borosilicate glass, and described ceramic phase is cordierite and/or boltonite. The borosilicate glass content is 40-75 wt%, and the total content of cordierite and/or boltonite is 25-60 wt%. In the borosilicate glass the content of silicon oxide is 75%-85 wt%, the content of boron oxide is 15-25 wt% and the total content of alkali oxide K2O and Na2O and/or alkali earth metal oxide BaO, SrO and CaO is less than 5 wt%. The cordierite is artificially synthesized, and the boltonite can be natural mineral or artificially synthesized. Said invention provides a material which can be cofired with silver or silver/palladium slurry material at 900 deg.C and its low temp. and can be used for making glass ceramic material with low dielectric constant.
Description
Technical field
The present invention relates to a kind of novel glass stupalith, specifically, is a kind of low temp cofired low specific inductive capacity glass ceramic material.
Background technology
In recent years, under the drive of semiconductor technology develop rapidly, electronic devices and components constantly develop to miniaturization, integrated and high frequency direction.Select suitable can be no more than low temperature co-fired pottery under 900 ℃ the temperature with electro-conductive materials such as silver, thereby make sandwich type element or passive device is imbedded in the Mulitilayer circuit board, become the inevitable requirement of above-mentioned trend, therefore LTCC also becomes a kind of new ceramic species.
Inducer and containing in the compound or integrated device of inducer, the determining by following formula of inducer from humorous frequency (SRF):
Wherein L is the inductance value of device, and C is the summation of various stray electrical capacity.Although stray capacity is caused by different modes, all be directly proportional with relative permittivity (hereinafter to be referred as specific inductivity) the ε r of material.On the other hand, in ceramic substrate and ceramic packing class device, be directly proportional with the specific inductivity of material the time of lag of signal, and the impedance of cross-talk and specific inductivity are inversely proportional between line, and promptly two main electrical parameters of this two classes device are all closely related with the specific inductivity of material.Therefore, the specific inductivity of reduction material becomes main research topic of LTCC.
The material that specific inductivity is lower mainly contains three classes: borosilicate glass series, silica glass series and magnesium silicate ceramics series (as forsterite, trichroite etc.).The borosilicate glass softening temperature is low, and is suitable low temperature co-fired, but the strength of materials is low, can not satisfy the particularly making requirement of large-size device of device, need to wherein adding some weighting agents, form ceramic phase to improve intensity, this often can improve the specific inductivity of institute's prepared material again.Softening or the sintering temperature of silica glass and magnesium silicate ceramics series is too high, is unsuitable for directly as LTCC.Become the important subject that receives much concern so make the low temp cofired low specific pottery that intensity meets the demands.
In order to make the low temp cofired low specific pottery that intensity meets the demands, people have carried out number of research projects.As: U.S. Pat 6008151 is to add alpha-quartz and zinc silicate weighting agent in borosilicate glass; In the U.S. Pat 5506058, then be in borosilicate glass, to add aluminum oxide and lime feldspar.The specific inductivity major part of the material that makes thus is at 5 to 6, and effect is still undesirable.
Summary of the invention
Purpose of the present invention is intended to overcome the above-mentioned deficiency of prior art, make intensity can satisfy the electronic devices and components requirement, can with silver or glass ceramic material that silver/the palladium slurry is low temperature co-fired, specific inductivity is lower.
Realize the technical scheme of above-mentioned purpose:
A kind of low temp cofired low specific inductive capacity glass ceramic material comprises glassy phase and ceramic phase, and described glassy phase is borosilicate glass, and described ceramic phase is trichroite and/or forsterite.
The content of described borosilicate glass is 40～75wt%, and the total content of described trichroite and/or forsterite is 25～60wt%.
In the described borosilicate glass: the content of silicon oxide is 75%～85wt%, and the content of boron oxide is 15～25wt%, alkalimetal oxide K
2O, Na
2The total content of O and/or alkaline earth metal oxide BaO, SrO, CaO is no more than 5wt%.
Trichroite is artificial synthetic, and forsterite both can be a natural mineral, also can adopt synthetic, and when in the prescription these two kinds of materials being arranged simultaneously, the ratio of the two can be regulated arbitrarily.
Described borosilicate glass, trichroite and/or forsterite are behind ball milling, and particle size range is between 0.5～5.0 μ m.
Adopt technique scheme, the technical progress that the present invention gives prominence to is: 1, utilize the forsterite in borosilicate glass and the magnesium silicate or/and trichroite all has these characteristics of low-k, two kinds of material-mix are used.2, with the glassy phase of borosilicate glass as the reduction sintering temperature, with forsterite and/or trichroite as the disperse ceramic phase that improves the strength of materials, the glass-ceramic of gained both can be low temperature co-fired with silver or silver/palladium slurry under 900 ℃ and following temperature thus, also has enough intensity, simultaneously two kinds of lower specific inductivity of material have guaranteed that final material still has very low specific inductivity, have avoided the raising to material dielectric constant of zinc silicate, lime feldspar.3, in borosilicate glass, the content of silicon oxide is 75%～85%, the content of boron oxide is 15%～25%, in this formula range, borosilicate glass have lower softening temperature, thereby make institute's prepared material can be low temperature co-fired, also have lower specific inductivity and higher folding strength simultaneously with metal paste.4, in borosilicate glass, contain the alkalimetal oxide K that total amount is no more than 5wt%
2O, Na
2O and/or alkaline earth metal oxide BaO, SrO, CaO etc., by mix BaO, SrO, CaO can effectively stop B
2O
3Precipitation is to element surface, by mixing K when sintering
2O and Na
2O is acceleration of sintering effectively.5, with described borosilicate glass, trichroite and/or forsterite behind ball milling, particle size is limited in 0.5～5.0 mu m range, can guarantee to mate with the sintering contraction phase of silver slurry when the porcelain body sintering shrinks, can not cause slice, thin piece distortion even cracking, can form thin casting films again, the use range of material is wide.
Below by embodiment, the present invention is further illustrated:
Embodiment
Embodiment one: a kind of low temp cofired low specific inductive capacity glass ceramic material, comprise glassy phase and ceramic phase, and glassy phase is borosilicate glass, ceramic phase is trichroite and forsterite.Wherein: the composition of borosilicate glass is: SiO
2: 81%; B
2O
3: 15%; K
2O:3.5%; BaO:0.5%.Borosilicate glass, trichroite and forsterite are according to the batching of prescription shown in the table 1.
Trichroite and forsterite all are synthetic, and the technical process of synthesis of dichroite or forsterite is:
Calcining synthetic temperature is advisable with 1250 ℃ to 1300 ℃.
The particle size of three kinds of materials is behind the ball milling: borosilicate glass: 1.0 μ m; Trichroite: 3.8 μ m; Forsterite: 4.0 μ m.
After the ball milling drying, be pressed into test piece sintering in box-type furnace, grind to form test specific inductivity and the required standard size of folding strength by diamond wheel.Measure specific inductivity by HP4284A LCR multi-frequency tester, test frequency is 1MHz; Measure folding strength by the universal material testing instrument.Sintering temperature, specific inductivity and the folding strength of each group are summarised in table 1.
By table 1 as seen, No. 1 prescription can not sintering, and certain water-absorbent is arranged, and No. 10 prescription is out of shape because of burning seriously.So, work as SiO
2Content is 81%, B
2O
3Content is 15%, and the borosilicate glass total content is 40%～75% o'clock, the sintering temperature of gained stupalith≤900 ℃, and specific inductivity is 4.2～3.8, and folding strength 〉=150MPa had both had lower specific inductivity, had higher folding strength again.
The prescription of table 1: embodiment one and result
| Numbering | Form (wt%) | Sintering temperature (℃) | Specific inductivity | Folding strength MPa | Remarks | ||
| Borosilicate glass | Trichroite | Forsterite | |||||
| ????1 | ????35 | ????0 | ????65 | ????900 | ????4.0 | ????85 | Can not sintering |
| ????2 | ????40 | ????30 | ????30 | ????900 | ????4.2 | ????208 | |
| ????3 | ????40 | ????10 | ????50 | ????900 | ????4.2 | ????215 | |
| ????4 | ????50 | ????30 | ????20 | ????880 | ????4.2 | ????188 | |
| ????5 | ????50 | ????18 | ????42 | ????880 | ????4.0 | ????192 | |
| ????6 | ????60 | ????40 | ????0 | ????870 | ????4.0 | ????180 | |
| ????7 | ????65 | ????15 | ????20 | ????870 | ????3.9 | ????185 | |
| ????8 | ????70 | ????0 | ????30 | ????860 | ????3.8 | ????175 | |
| ????9 | ????75 | ????10 | ????15 | ????860 | ????3.8 | ????162 | |
| ????10 | ????80 | ????20 | ????0 | ????850 | ????3.8 | ????124 | Distortion is serious |
Embodiment two: another kind of low temp cofired low specific inductive capacity glass ceramic material, comprise glassy phase and ceramic phase, and glassy phase is borosilicate glass, ceramic phase is trichroite and forsterite.Borosilicate glass, trichroite and forsterite are according to the batching of prescription shown in the table 2.Wherein borosilicate glass A, B group is respectively:
A organizes each component content, is by weight percentage: SiO
2: 83%; B
2O
3: 15%; Na
2O:1%'s; BaO:1%.
B organizes each component content, is by weight percentage: SiO
2: 75%; B
2O
3: 20%; K
2O:2%; Na
2O:1.8%; CaO:1.2%.
Trichroite is a synthetic, and synthetic method is with embodiment one, and forsterite is a natural mineral.Particle size, experiment and testing method are with embodiment 1, and the sintering temperature of stupalith, specific inductivity and folding strength are summarised in table 2.
Table 2
| Numbering | The borosilicate glass kind | Form | Sintering humidity (℃) | Specific inductivity | The anti-intensity (Mpa) that presses down | ||
| Borosilicate glass | Trichroite | Forsterite | |||||
| ????11 | ????A | ????40 | ????60 | ????0 | ????900 | ????4.1 | ????212 |
| ????12 | ????A | ????75 | ????10 | ????15 | ????860 | ????3.7 | ????210 |
| ????13 | ????A | ????60 | ????0 | ????40 | ????880 | ????3.9 | ????152 |
| ????14 | ????B | ????50 | ????10 | ????40 | ????870 | ????3.9 | ????195 |
| ????15 | ????B | ????75 | ????15 | ????10 | ????860 | ????3.8 | ????168 |
| ????16 | ????B | ????40 | ????0 | ????60 | ????900 | ????4 | ????220 |
By table 2 as seen, press A, B and form the borosilicate glass that part content is made, and the borosilicate glass total amount is 40%～75% o'clock, the sintering temperature of gained stupalith≤900 ℃, specific inductivity are 4.1～3.7, folding strength 〉=152MPa, both had lower specific inductivity, had higher folding strength again.
When utilizing material of the present invention to make laminated inductive, compound or integrated components and parts, can adopt the various production technique that adopt usually at present.
As: get No. 5 prescriptions among the embodiment one, add the organic admixture and the solvent of suitable kind and content, the ball milling form slurry, with silver is conductor paste, make the 0402-100nH laminated inductive, measure the variation of its inductance value and Q value with HP4291B, as depicted in figs. 1 and 2 with frequency.As seen from Figure 1, improve a lot with the SRF of the made inductance of material of the present invention than the made inductance of existing common material; As seen from Figure 2, improve a lot in the Q value of the Q value under each frequency than existing common material under the same terms with the made inductance of material of the present invention, and frequency is high more, it is big more to improve the spoke degree.
As required, behind borosilicate glass, trichroite and/or three kinds of raw material ball millings of forsterite, its particle size is arranged in 0.5 to 5.0 mu m range, and granularity too young pathbreaker causes the contraction of porcelain body sintering too big, can not mate with the sintering contraction phase of silver slurry, cause slice, thin piece distortion even cracking; Granularity too senior general can't form thin casting films, the use range of limiting material.
Claims (5)
1, a kind of low temp cofired low specific inductive capacity glass ceramic material comprises glassy phase and ceramic phase, it is characterized in that: described glassy phase is borosilicate glass, and described ceramic phase is trichroite and/or forsterite.
2, low temp cofired low specific inductive capacity glass ceramic material according to claim 1 is characterized in that: the content of described borosilicate glass is 40～75wt%, and the total content of described trichroite and/or forsterite is 25～60wt%.
3, low temp cofired low specific inductive capacity glass ceramic material according to claim 2 is characterized in that in the described borosilicate glass: the content of silicon oxide is 75%～85wt%, and the content of boron oxide is 15～25wt%, alkalimetal oxide K
2O, Na
2The total content of O and/or alkaline earth metal oxide BaO, SrO, CaO is no more than 5wt%.
4, according to the described low temp cofired low specific inductive capacity glass ceramic material of claim 1～3, it is characterized in that: raw materials used behind ball milling, particle size range is between 0.5 μ m to 5.0 μ m.
5, low temp cofired low specific inductive capacity glass ceramic material according to claim 4, it is characterized in that: trichroite is artificial synthetic, and forsterite both can be a natural mineral, also can adopt synthetic, when in the prescription these two kinds of materials being arranged simultaneously, the ratio of the two can be regulated arbitrarily.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02134775 CN1197802C (en) | 2002-09-18 | 2002-09-18 | Low temp cofired low specific inductive capacity glass ceramic material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02134775 CN1197802C (en) | 2002-09-18 | 2002-09-18 | Low temp cofired low specific inductive capacity glass ceramic material |
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| Publication Number | Publication Date |
|---|---|
| CN1483689A true CN1483689A (en) | 2004-03-24 |
| CN1197802C CN1197802C (en) | 2005-04-20 |
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|---|---|---|---|
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2002
- 2002-09-18 CN CN 02134775 patent/CN1197802C/en not_active Expired - Fee Related
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