CN104445954A - Borosilicate-glass-based low-temperature co-fired ceramic material and preparation method thereof - Google Patents

Borosilicate-glass-based low-temperature co-fired ceramic material and preparation method thereof Download PDF

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CN104445954A
CN104445954A CN201410676447.0A CN201410676447A CN104445954A CN 104445954 A CN104445954 A CN 104445954A CN 201410676447 A CN201410676447 A CN 201410676447A CN 104445954 A CN104445954 A CN 104445954A
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borosilicate glass
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CN104445954B (en
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陈帆
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Chongqing Wenrun Technology Co ltd
Guangdong Gaohang Intellectual Property Operation Co ltd
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LIUZHOU CHUANGYU TECHNOLOGY Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00—Nature of the non-vitreous component
    • C03C2214/20—Glass-ceramics matrix
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00—Nature of the non-vitreous component
    • C03C2214/30—Methods of making the composites

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  • Ceramic Engineering (AREA)
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  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Insulating Materials (AREA)
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Abstract

The invention provides a borosilicate-glass-based low-temperature co-fired ceramic material and a preparation method thereof. The material is composed of the following components in parts by weight: 35-75 parts of borosilicate glass, 2-5 parts of silicon carbide, 1-3 parts of forsterite and 1-3 parts of carbon nanotubes. Compared with the prior art, the borosilicate-glass-based low-temperature co-fired ceramic material has the advantages that since silicon carbide, forsterite and the carbon nanotubes are added in the borosilicate glass, and by using the mutual synergistic effect, the thermal conductivity of the prepared low-temperature co-fired ceramic material is improved, and the melting point of the borosilicate glass is reduced. Experimental results show that the heat expansion coefficient of the prepared low-temperature co-fired ceramic material is 4.1*10<-6>K<-1>, the dielectric constant is 5.8 (1MHz) and the thermal conductivity is 36 W/mK.

Description

A kind of borosilicate glass base low-temperature cofired ceramic material and preparation method thereof
Technical field
The present invention relates to LTCC Technology field, particularly relate to a kind of borosilicate glass base low-temperature cofired ceramic material and preparation method thereof.
Background technology
Electric substrate is the carrier of semiconductor die package, carries the support of electronic devices and components, forms the basal disc of electronic circuit.Conventional inorganic substrate is with Al 2o 3, AlN and SiC etc. be base material, in thermal conductivity and bending strength, have premium properties.But its sintering temperature of conventional substrate is more than 1500 DEG C, and according to burning method altogether simultaneously, conductor material can only select high-melting-point and high-resistance metal as Mo, W etc., makes cost greatly improve.
LTCC (LTCC) technology, low-temperature sintered ceramics powder is made the accurate and fine and close green band of thickness, as circuit base material, green band utilize the techniques such as laser boring, micropore slip casting, accurate conductor paste printing make required circuitous pattern, and multiple passive element is imbedded wherein, then overlap together, at 900 DEG C of sintering, make the passive integration assembly of three-dimensional circuit network.But the thermal conductivity of ltcc substrate material is on the low side, limit its application in more high-power, higher packaging density, thus the thermal conductivity improving ltcc substrate material becomes one of Focal point and difficult point of low temperature co-fired area research.
Prior art has carried out reporting widely to low-temperature co-burning ceramic material and preparation method thereof, such as, application number be 200610022007.9 Chinese patent literature report a kind of low temperature co-fired aluminium nitride ceramics and iolite-base glass composite material, by powder is added mould for hot pressed sintering, obtain the matrix material that thermal conductivity is up to 7.5W/mK.The people such as U.S. J.H.Enloe report a kind of baseplate material of environmental protection, and at 900 ~ 1400 DEG C, sintering obtains AlN-borosilicate glass substrate material, and its thermal conductivity is up to 7W/mK.But the preparation method of the basic material of above-mentioned report all adopts aluminium nitride and glass material compound to improve material thermal conductivity, and the material thermal conductivity prepared is lower, and is unfavorable for large-scale industrial production.
Summary of the invention
The technical problem that the present invention solves is to provide a kind of borosilicate glass base low-temperature cofired ceramic material and preparation method thereof, and the thermal conductivity of borosilicate glass base low-temperature cofired ceramic material prepared by the method is higher.
In view of this, the invention provides a kind of borosilicate glass base low-temperature cofired ceramic material, consist of the following composition:
Preferably, described borosilicate glass is (40 ~ 50) by weight ratio: (10 ~ 15): (2 ~ 5): (1 ~ 5): (0.5 ~ 3): the SiO of (0.5 ~ 2) 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2composition.
Accordingly, the present invention also provides a kind of preparation method of borosilicate glass base low-temperature cofired ceramic material, comprises the following steps:
Add ethanol, ball-milling processing post-drying after 35 ~ 75 weight part borosilicate glass powder, 2 ~ 5 weight part silicon carbide, 1 ~ 3 weight part forsterite and 1 ~ 3 parts by weight of carbon nanotubes being mixed, obtain low-temperature co-fired ceramic powder material;
In described low-temperature co-fired ceramic powder material, add solvent, binding agent, softening agent, dispersion agent and wetting agent, mix rear flow casting molding, after drying, sintering, obtains low-temperature co-burning ceramic material.
Preferably, described borosilicate glass is prepared as follows:
Step a1) by SiO 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2weight ratio be (40 ~ 50): (10 ~ 15): (2 ~ 5): (1 ~ 5): (0.5 ~ 3): the proportioning of (0.5 ~ 2) is by SiO 2, H 3bO 3, BaCO 3, aluminum borate, K 2cO 3, TiO 2mix with ethanol, ball-milling processing post-drying;
Step a2) by described step a1) powder that obtains calcines shrend after 1 ~ 3 hour at 1450 DEG C ~ 1500 DEG C, obtains chopped glass;
Step a3) described chopped glass is mixed with deionized water, ball-milling processing post-drying, obtain borosilicate glass powder.
Preferably, described step a1) the ball-milling processing time be 1 ~ 6 hour.
Preferably, described step a3) the ball-milling processing time be 2 ~ 5 hours.
Preferably, the particle diameter of described borosilicate glass powder is 1 ~ 3 μm.
Preferably, described sintering step is specially:
Be warming up to 450 ~ 500 DEG C of insulations 5 ~ 8 hours, be then warming up to 650 ~ 700 DEG C of insulations 1 ~ 3 hour.
The invention provides a kind of borosilicate glass base low-temperature cofired ceramic material and preparation method thereof, this material consists of the following composition: the borosilicate glass of 35 ~ 75 weight parts; The silicon carbide of 2 ~ 5 weight parts; The forsterite of 1 ~ 3 weight part; The carbon nanotube of 1 ~ 3 weight part.Wherein, silicon carbide ceramics has that oxidation-resistance is strong, wear resisting property good, Heat stability is good, hot strength are large, thermal expansivity is little, thermal conductivity is high and the good characteristic such as anti-thermal shock resistance to chemical attack mutually.Using forsterite as disperse ceramic phase, the thermal conductivity of stupalith can be improved to a certain extent.Further, the present invention adds the carbon nanotube with high thermal conductivity, connects silicon carbide and the forsterite with high thermal conductivity, forms the network-like conductive structure of 3 D stereo, strengthens the heat conductivility of stupalith further.Compared with prior art, the present invention, by adding silicon carbide, forsterite and carbon nanotube in borosilicate glass, utilizes synergy each other, improves the thermal conductivity of the low-temperature co-burning ceramic material of preparation, and reduce borosilicate glass fusing point.Experimental result shows, the thermal expansivity of low-temperature co-burning ceramic material prepared by the present invention is 4.1 × 10 -6k -1, specific inductivity is 5.8 (1MHz), and thermal conductivity is 36W/mK.
Embodiment
In order to understand the present invention further, below in conjunction with embodiment, the preferred embodiment of the invention is described, but should be appreciated that these describe just for further illustrating the features and advantages of the present invention, instead of limiting to the claimed invention.
The embodiment of the invention discloses a kind of borosilicate glass base low-temperature cofired ceramic material, consist of the following composition:
Wherein, described borosilicate glass is (40 ~ 50) by weight ratio: (10 ~ 15): (2 ~ 5): (1 ~ 5): (0.5 ~ 3): the SiO of (0.5 ~ 2) 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2composition.Preferably, described borosilicate glass is (42 ~ 48) by weight ratio: (12 ~ 15): (2 ~ 3): (3 ~ 5): (1 ~ 2): the SiO of (1 ~ 2) 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2composition.In mentioned component, adding of aluminum borate reduces borosilicate glass precipitation quartz and cristobalite phase, suppresses the dielectric properties of low-temperature co-burning ceramic material and the deterioration of thermomechanical property; In addition, this borosilicate glass is with ZrO 2and/or TiO 2for nucleator.
According to the present invention, take silicon carbide as ceramic phase, this silicon carbide has that oxidation-resistance is strong, wear resisting property good, Heat stability is good, hot strength are large, thermal expansivity is little, thermal conductivity is high and the good characteristic such as anti-thermal shock resistance to chemical attack.The present invention by adding the SiC material of high heat conductance in borosilicate glass, both improve ltcc substrate material thermal conductivity, and reduce borosilicate glass fusing point, thus achieve the low temperature dense sintering of SiC material, improve the thermal conductivity of the low-temperature co-burning ceramic material of preparation.
Further, the present invention, also using forsterite as disperse ceramic phase, can improve the thermal conductivity of stupalith to a certain extent, and have lower specific inductivity.Described forsterite can be natural, and can be also synthetic, to this present invention, there is no particular restriction.
In addition, the present invention adds the carbon nanotube with high thermal conductivity, connects silicon carbide and the forsterite with high thermal conductivity, forms the network-like conductive structure of 3 D stereo, strengthens the heat conductivility of stupalith further.
Compared with prior art, the present invention, by adding silicon carbide, forsterite and carbon nanotube in borosilicate glass, utilizes synergy each other, improves the thermal conductivity of the low-temperature co-burning ceramic material of preparation, and reduce borosilicate glass fusing point.
Accordingly, the present invention also provides a kind of preparation method of borosilicate glass base low-temperature cofired ceramic material, comprise the following steps: after 35 ~ 75 weight part borosilicate glass powder, 2 ~ 5 weight part silicon carbide, 1 ~ 3 weight part forsterite and 1 ~ 3 parts by weight of carbon nanotubes being mixed, add ethanol, ball-milling processing post-drying, obtains low-temperature co-fired ceramic powder material; In described low-temperature co-fired ceramic powder material, add solvent, binding agent, softening agent, dispersion agent and wetting agent, mix rear flow casting molding, after drying, sintering, obtains low-temperature co-burning ceramic material.
Wherein, described borosilicate glass is prepared as follows: step a1) by SiO 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2weight ratio be (40 ~ 50): (10 ~ 15): (2 ~ 5): (1 ~ 5): (0.5 ~ 3): the proportioning of (0.5 ~ 2) is by SiO 2, H 3bO 3, BaCO 3, aluminum borate, K 2cO 3, TiO 2mix with ethanol, ball-milling processing post-drying; Step a2) by described step a1) powder that obtains calcines shrend after 1 ~ 3 hour at 1450 DEG C ~ 1500 DEG C, obtains chopped glass; Step a3) described chopped glass is mixed with deionized water, ball-milling processing post-drying, obtain borosilicate glass powder.
The present invention is by regulating SiO 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2weight ratio, ensure that this high/low temperature is burnt material altogether and had lower sintering temperature.
In the preparation process of borosilicate glass, described step a1) the ball-milling processing time be preferably 1 ~ 6 hour, be more preferably 2 ~ 5 hours.Above-mentioned steps a2) calcining temperature be one of key factor affecting borosilicate glass, be too high or too low for temperaturely all unfavorable for obtaining that there is certain crystal formation, be evenly distributed and glass powder that particle is less.Step a2) in sintering temperature be preferably 1480 ~ 1500 DEG C, sintering time is preferably 2 ~ 3 hours.Described step a3) the ball-milling processing time be preferably 2 ~ 5 hours, be more preferably 2 ~ 4 hours.The particle diameter of described borosilicate glass powder is preferably 1 ~ 3 μm, is more preferably 2 ~ 3 μm.
Silicon carbide ceramics has that oxidation-resistance is strong, wear resisting property good, Heat stability is good, hot strength are large, thermal expansivity is little, thermal conductivity is high and the good characteristic such as anti-thermal shock resistance to chemical attack mutually.The present invention by adding the SiC material of high heat conductance in borosilicate glass powder, both improve ltcc substrate material thermal conductivity, and reduce borosilicate glass powder fusing point, thus achieve the low temperature dense sintering of SiC material, improve the thermal conductivity of the low-temperature co-burning ceramic material of preparation.The SiC that the present invention adopts is preferably black SiC, content more than 95%.
Further, the present invention, also using forsterite as disperse ceramic phase, can improve the thermal conductivity of stupalith to a certain extent, and have lower specific inductivity.Described forsterite can be natural, and can be also synthetic, to this present invention, there is no particular restriction.
In addition, the present invention adds the carbon nanotube with high thermal conductivity, connects silicon carbide and the forsterite with high thermal conductivity, forms the network-like conductive structure of 3 D stereo, strengthens the heat conductivility of stupalith further.
The described ball-milling processing time obtaining low-temperature co-burning ceramic material is preferably 5 ~ 10 hours, is more preferably 6 hours, is conducive to obtaining homodisperse slurry, and then carries out flow casting molding and sintering processes.
In the step obtaining low-temperature co-burning ceramic material, described sintering step is specially: be warming up to 450 ~ 500 DEG C of insulations 5 ~ 8 hours, is then warming up to 650 ~ 700 DEG C of insulations 1 ~ 3 hour.Wherein, the heat-up rate being warming up to 450 ~ 500 DEG C is preferably 4 DEG C/min; The heat-up rate being warming up to 650 ~ 700 DEG C is preferably 3 DEG C/min.
In above-mentioned sintering step, the sintering process that the present invention preferably adopts the two-stage to heat up, that is: first 450 ~ 500 DEG C of insulations, make glass metal phase sintering, ensure its densified sintering product, the temperature of 450 ~ 500 DEG C is one of key factor affecting the low-temperature co-burning ceramic material obtained, and insulating process promotes organic discharge in material, is conducive to the dense sintering controlling sintering shrinkage and be conducive to material.Then be warming up to 650 ~ 700 DEG C, while the further sintering densification of material, slow crystallize out reduces glassy phase, ensures the performance of this low-temperature co-burning ceramic material.
For the solvent adopted, there is no particular restriction in the present invention, can adopt solvent well known to those skilled in the art, be preferably trieline; For the binding agent adopted, there is no particular restriction in the present invention, can adopt binding agent well known to those skilled in the art, be preferably polyvinyl butyral solution; For the softening agent adopted, there is no particular restriction in the present invention, can adopt softening agent well known to those skilled in the art, be preferably dibutyl phthalate; For the dispersion agent adopted, there is no particular restriction in the present invention, can adopt dispersion agent well known to those skilled in the art, be preferably triolein; For the wetting agent adopted, there is no particular restriction in the present invention, can adopt wetting agent well known to those skilled in the art, be preferably polyoxyethylene ester.
The present invention, by adding silicon carbide, forsterite and carbon nanotube in borosilicate glass, utilizes synergy each other, improves the thermal conductivity of the low-temperature co-burning ceramic material of preparation, and reduce borosilicate glass fusing point.Secondly, by controlling the composition in borosilicate glass, ensure that this low temperature co-fired material has lower sintering temperature.
In order to understand the present invention further, be described in detail to technical scheme provided by the invention below in conjunction with embodiment, protection scope of the present invention is not limited by the following examples.
The chemical reagent that the embodiment of the present invention adopts is commercial.
Embodiment 1
Step (1) prepares glass powder;
By SiO 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2weight ratio be that the proportioning of 45:10:2:2:3:2 takes SiO 2, H 3bO 3, BaCO 3, aluminum borate, K 2cO 3, TiO 2, above-mentioned raw materials mixed and add ethanol, drying at 120 DEG C mix 4 hours with the speed ball milling of 300r/min in ball mill after;
Oven dry gained powder is placed in corundum crucible be warmed up to 1480 DEG C with the speed of 5 DEG C/min and be incubated 2 hours, then the liquid glass obtained is placed in deionized water and carries out shrend, obtain chopped glass;
Described chopped glass is pulverized and then adds appropriate amount of deionized water then with 300r/min ball milling 5 hours, 120 DEG C dry after obtain borosilicate glass powder.
Step (2) takes 50g borosilicate glass powder, 4g SiC powder, 2g forsterite and 1g carbon nanotube, mixing, add and go ethanol to be placed in planetary ball mill grinding jar in right amount to mix 3 hours with 300r/min ball milling, then 120 DEG C of oven dry, low-temperature co-burning ceramic material powder is obtained.
Step (3) adds organic mass percent in described low-temperature co-burning ceramic material powder: the solution of trieline 76%, polyvinyl butyral acetal 14%, dibutyl phthalate 3%, triglycerin acid glyceride 4.8% and polyoxyethylene ester 2.2%, curtain coating is carried out after Homogeneous phase mixing, deaeration, dry, be warming up to 450 DEG C of insulations 6 hours, then be warming up to 700 DEG C of insulations 2 hours, obtain borosilicate glass base low-temperature cofired ceramic material.
Borosilicate glass base low-temperature cofired ceramic material prepared by the present embodiment is measured.After tested, the thermal conductivity of this low-temperature co-burning ceramic material is 35W/mK, and specific inductivity is 5.8 (1MHz), and thermal expansivity is 4.1 × 10 -6k -1.
Embodiment 2
Step (1) prepares glass powder;
By SiO 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2weight ratio be that the proportioning of 45:10:2:2:3:2 takes SiO 2, H 3bO 3, BaCO 3, aluminum borate, K 2cO 3, TiO 2, above-mentioned raw materials mixed and add ethanol, drying at 120 DEG C mix 4 hours with the speed ball milling of 300r/min in ball mill after;
Oven dry gained powder is placed in corundum crucible be warmed up to 1480 DEG C with the speed of 5 DEG C/min and be incubated 2 hours, then the liquid glass obtained is placed in deionized water and carries out shrend, obtain chopped glass;
Described chopped glass is pulverized and then adds appropriate amount of deionized water then with 300r/min ball milling 5 hours, 120 DEG C dry after obtain borosilicate glass powder.
Step (2) takes 70g borosilicate glass powder, 2g SiC powder, 3g forsterite and 1g carbon nanotube, mixing, add and go ethanol to be placed in planetary ball mill grinding jar in right amount to mix 3 hours with 300r/min ball milling, then 120 DEG C of oven dry, low-temperature co-burning ceramic material powder is obtained.
Step (3) adds organic mass percent in described low-temperature co-burning ceramic material powder: the solution of trieline 76%, polyvinyl butyral acetal 14%, dibutyl phthalate 3%, triglycerin acid glyceride 4.8% and polyoxyethylene ester 2.2%, curtain coating is carried out after Homogeneous phase mixing, deaeration, dry, be warming up to 450 DEG C of insulations 6 hours, then be warming up to 700 DEG C of insulations 2 hours, obtain borosilicate glass base low-temperature cofired ceramic material.
Borosilicate glass base low-temperature cofired ceramic material prepared by the present embodiment is measured.After tested, the thermal conductivity of this low-temperature co-burning ceramic material is 36W/mK, and specific inductivity is 5.5 (1MHz), and thermal expansivity is 4.4 × 10 -6k -1.
Embodiment 3
Step (1) prepares glass powder;
By SiO 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2weight ratio be that the proportioning of 40:14:5:2:3:2 takes SiO 2, H 3bO 3, BaCO 3, aluminum borate, K 2cO 3, TiO 2, above-mentioned raw materials mixed and add ethanol, drying at 120 DEG C mix 4 hours with the speed ball milling of 300r/min in ball mill after;
Oven dry gained powder is placed in corundum crucible be warmed up to 1480 DEG C with the speed of 5 DEG C/min and be incubated 2 hours, then the liquid glass obtained is placed in deionized water and carries out shrend, obtain chopped glass;
Described chopped glass is pulverized and then adds appropriate amount of deionized water then with 300r/min ball milling 5 hours, 120 DEG C dry after obtain borosilicate glass powder.
Step (2) takes 40g borosilicate glass powder, 5g SiC powder, 3g forsterite and 3g carbon nanotube, mixing, add and go ethanol to be placed in planetary ball mill grinding jar in right amount to mix 3 hours with 300r/min ball milling, then 120 DEG C of oven dry, low-temperature co-burning ceramic material powder is obtained.
Step (3) adds organic mass percent in described low-temperature co-burning ceramic material powder: the solution of trieline 76%, polyvinyl butyral acetal 14%, dibutyl phthalate 3%, triglycerin acid glyceride 4.8% and polyoxyethylene ester 2.2%, curtain coating is carried out after Homogeneous phase mixing, deaeration, dry, be warming up to 450 DEG C of insulations 6 hours, then be warming up to 700 DEG C of insulations 2 hours, obtain borosilicate glass base low-temperature cofired ceramic material.
Borosilicate glass base low-temperature cofired ceramic material prepared by the present embodiment is measured.After tested, the thermal conductivity of this low-temperature co-burning ceramic material is 34W/mK, and specific inductivity is 5.4 (1MHz), and thermal expansivity is 4.6 × 10 -6k -1.
The explanation of above embodiment just understands method of the present invention and core concept thereof for helping.It should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention, can also carry out some improvement and modification to the present invention, these improve and modify and also fall in the protection domain of the claims in the present invention.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.

Claims (8)

1. a borosilicate glass base low-temperature cofired ceramic material, is characterized in that, consists of the following composition:
2. low-temperature co-burning ceramic material according to claim 1, it is characterized in that, described borosilicate glass is (40 ~ 50) by weight ratio: (10 ~ 15): (2 ~ 5): (1 ~ 5): (0.5 ~ 3): the SiO of (0.5 ~ 2) 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2composition.
3. a preparation method for borosilicate glass base low-temperature cofired ceramic material, is characterized in that, comprises the following steps:
Add ethanol, ball-milling processing post-drying after 35 ~ 75 weight part borosilicate glass powder, 2 ~ 5 weight part silicon carbide, 1 ~ 3 weight part forsterite and 1 ~ 3 parts by weight of carbon nanotubes being mixed, obtain low-temperature co-fired ceramic powder material;
In described low-temperature co-fired ceramic powder material, add solvent, binding agent, softening agent, dispersion agent and wetting agent, mix rear flow casting molding, after drying, sintering, obtains low-temperature co-burning ceramic material.
4. preparation method according to claim 3, is characterized in that, described borosilicate glass is prepared as follows:
Step a1) by SiO 2, B 2o 3, BaO, aluminum borate, K 2o and TiO 2weight ratio be (40 ~ 50): (10 ~ 15): ((2 ~ 5): (1 ~ 5): (0.5 ~ 3): the proportioning of (0.5 ~ 2) is by SiO 2, H 3bO 3, BaCO 3, aluminum borate, K 2cO 3, TiO 2mix with ethanol, ball-milling processing post-drying;
Step a2) by described step a1) powder that obtains calcines shrend after 1 ~ 3 hour at 1450 DEG C ~ 1500 DEG C, obtains chopped glass;
Step a3) described chopped glass is mixed with deionized water, ball-milling processing post-drying, obtain borosilicate glass powder.
5. preparation method according to claim 4, is characterized in that, described step a1) the ball-milling processing time be 1 ~ 6 hour.
6. preparation method according to claim 4, is characterized in that, described step a3) the ball-milling processing time be 2 ~ 5 hours.
7. preparation method according to claim 3, is characterized in that, the particle diameter of described borosilicate glass powder is 1 ~ 3 μm.
8. preparation method according to claim 3, is characterized in that, described sintering step is specially:
Be warming up to 450 ~ 500 DEG C of insulations 5 ~ 8 hours, be then warming up to 650 ~ 700 DEG C of insulations 1 ~ 3 hour.
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CN114804832A (en) * 2021-06-04 2022-07-29 安米微纳新材料(广州)有限公司 Inorganic nonmetal low-temperature sintered ceramic powder and preparation method thereof
CN115925439A (en) * 2022-12-06 2023-04-07 凯龙蓝烽新材料科技有限公司 Silicon carbide particle trap and preparation method thereof

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