CN104445954B - A kind of borosilicate glass base low-temperature cofired ceramic material and preparation method thereof - Google Patents
A kind of borosilicate glass base low-temperature cofired ceramic material and preparation method thereof Download PDFInfo
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- CN104445954B CN104445954B CN201410676447.0A CN201410676447A CN104445954B CN 104445954 B CN104445954 B CN 104445954B CN 201410676447 A CN201410676447 A CN 201410676447A CN 104445954 B CN104445954 B CN 104445954B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2214/00—Nature of the non-vitreous component
- C03C2214/20—Glass-ceramics matrix
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2214/00—Nature of the non-vitreous component
- C03C2214/30—Methods of making the composites
Abstract
The invention provides a kind of borosilicate glass base low-temperature cofired ceramic material and preparation method thereof, this material consists of the following composition: the borosilicate glass of 35～75 weight portions；The carborundum of 2～5 weight portions；The forsterite of 1～3 weight portions；The CNT of 1～3 weight portions.Compared with prior art, the present invention, by adding carborundum, forsterite and CNT in borosilicate glass, utilizes synergism each other, improves the thermal conductivity of the low-temperature co-burning ceramic material of preparation, and reduce borosilicate glass fusing point.Test result indicate that, the thermal coefficient of expansion of low-temperature co-burning ceramic material prepared by the present invention is 4.1 × 10‑6K‑1, dielectric constant is 5.8 (1MHz), and thermal conductivity is 36W/mK.
Description
Technical field
The present invention relates to LTCC Technology field, particularly relate to a kind of borosilicate glass
Base low-temperature cofired ceramic material and preparation method thereof.
Background technology
Electric substrate is the carrier of semiconductor die package, carries the support of electronic devices and components, structure
Become the basal disc of electronic circuit.Tradition inorganic substrate is with Al2O3, AlN and SiC etc. be base material,
In terms of thermal conductivity and bending strength, there is premium properties.But, its sintering of conventional substrate
Temperature is more than 1500 DEG C, according to burning method the most altogether, conductor material can only select high-melting-point with
High-resistance metal such as Mo, W etc. so that cost is greatly improved.
LTCC (LTCC) technology, is that low-temperature sintered ceramics powder is made thickness is accurate
And the green band of densification, as circuit base material, green band utilizes laser boring,
The techniques such as micropore slip casting, accurate conductor paste printing make required circuitous pattern, and will be many
Individual passive element is imbedded wherein, then overlaps together, and at 900 DEG C of sintering, makes three-dimensional electricity
The passive integration assembly of road network.But, the thermal conductivity of ltcc substrate material is on the low side, limits
Its application in greater power, higher packaging density, thus improve ltcc substrate material
One of the thermal conductivity emphasis and the difficult point that become low temperature co-fired area research.
Low-temperature co-burning ceramic material and preparation method thereof has been carried out reporting widely by prior art,
Such as, the Chinese patent literature of Application No. 200610022007.9 reports a kind of low temperature co-fired
Aluminium nitride ceramics and cordierite-base glass composite material, burn by powder adds hot pressing in mould
Knot, obtains thermal conductivity and is up to the composite of 7.5W/mK.U.S. J.H.Enloe et al. reports
The road baseplate material of a kind of environmental protection, at 900～1400 DEG C, sintering obtains AlN-borosilicate
Glass substrate material, its thermal conductivity is up to 7W/mK.But, the stock of above-mentioned report
Preparation method all use that aluminium nitride and glass material are compound improves material thermal conductivity, prepare
Material thermal conductivity relatively low, and be unfavorable for large-scale industrial production.
Summary of the invention
Present invention solves the technical problem that and be to provide a kind of borosilicate glass base low-temperature cofired
Ceramic material and preparation method thereof, the base low-temperature cofired pottery of borosilicate glass prepared by the method
The thermal conductivity of material is higher.
In view of this, the invention provides a kind of borosilicate glass base low-temperature cofired pottery material
Material, is made up of following component:
Preferably, described borosilicate glass is (40～50) by weight ratio: (10～15): (2～5):
(1～5): (0.5～3): the SiO of (0.5～2)2、B2O3, BaO, Alborex M 12, K2O and TiO2
Composition.
Accordingly, the present invention also provides for a kind of borosilicate glass base low-temperature cofired ceramic material
Preparation method, comprises the following steps:
By 35～75 weight portion borosilicate glass powder, 2～5 weight portion carborundums, 1～3 weight
Addition ethanol after part forsterite and the mixing of 1～3 parts by weight of carbon nanotubes, ball-milling treatment post-drying,
Obtain low-temperature co-fired ceramic powder material；
Solvent, binding agent, plasticizer, dispersant is added in described low-temperature co-fired ceramic powder material
And wetting agent, flow casting molding after mix homogeneously, sinter after drying, obtain LTCC material
Material.
Preferably, described borosilicate glass powder is prepared as follows:
Step a1) press SiO2、B2O3, BaO, Alborex M 12, K2O and TiO2Weight ratio be
(40～50): (10～15): (2～5): (1～5): (0.5～3): the proportioning of (0.5～2) is by SiO2、
H3BO3、BaCO3, Alborex M 12, K2CO3、TiO2Mix with ethanol, ball-milling treatment post-drying；
Step a2) by described step a1) powder that obtains calcines 1～3 at 1450 DEG C～1500 DEG C
Shrend after hour, obtains chopped glass；
Step a3) described chopped glass is mixed with deionized water, ball-milling treatment post-drying,
To borosilicate glass powder.
Preferably, described step a1) the ball-milling treatment time be 1～6 hour.
Preferably, described step a3) the ball-milling treatment time be 2～5 hours.
Preferably, the particle diameter of described borosilicate glass powder is 1～3 μm.
Preferably, described sintering step particularly as follows:
It is warming up to 450～500 DEG C and is incubated 5～8 hours, then heat to 650～700 DEG C of insulations 1～3
Hour.
The invention provides a kind of borosilicate glass base low-temperature cofired ceramic material and preparation thereof
Method, this material consists of the following composition: the borosilicate glass of 35～75 weight portions；2～5
The carborundum of weight portion；The forsterite of 1～3 weight portions；The CNT of 1～3 weight portions.
Wherein, silicon carbide ceramics has that non-oxidizability is strong, anti-wear performance good, Heat stability is good, height mutually
Intensity is big, thermal coefficient of expansion is little, thermal conductivity is high and the excellent spy such as anti-thermal shock resistance to chemical attack for temperature
Property.Using forsterite as disperse ceramic phase, leading of ceramic material can be improved to a certain extent
Heating rate.Further, the present invention adds the CNT with high thermal conductivity, connects and has high heat conduction
The carborundum of rate and forsterite, form the network-like conductive structure of 3 D stereo, further
Strengthen the heat conductivility of ceramic material.Compared with prior art, the present invention is by borosilicate
Glass adds carborundum, forsterite and CNT, utilizes synergism each other,
Improve the thermal conductivity of the low-temperature co-burning ceramic material of preparation, and it is molten to reduce borosilicate glass
Point.Test result indicate that, the thermal coefficient of expansion of low-temperature co-burning ceramic material prepared by the present invention is
4.1×10-6K-1, dielectric constant is 5.8 (1MHz), and thermal conductivity is 36W/mK.
Detailed description of the invention
In order to be further appreciated by the present invention, below in conjunction with embodiment to the preferred embodiment of the invention
It is described, but it is to be understood that these describe simply as further illustrating inventive feature
With advantage rather than limiting to the claimed invention.
The embodiment of the invention discloses a kind of borosilicate glass base low-temperature cofired ceramic material, by
Following component is made:
Wherein, described borosilicate glass is (40～50) by weight ratio: (10～15): (2～5):
(1～5): (0.5～3): the SiO of (0.5～2)2、B2O3, BaO, Alborex M 12, K2O and TiO2
Composition.Preferably, described borosilicate glass is (42～48) by weight ratio:
(12～15): (2～3): (3～5): (1～2): the SiO of (1～2)2、B2O3, BaO, boron
Acid aluminum, K2O and TiO2Composition.In mentioned component, the addition of Alborex M 12 reduces borosilicate
Glass separates out quartz and cristobalite phase, the dielectric properties of suppression low-temperature co-burning ceramic material and heating power
Learn the deterioration of performance；It addition, this borosilicate glass is with ZrO2And/or TiO2For nucleator.
According to the present invention, with carborundum as ceramic phase, it is strong, resistance to that this carborundum has non-oxidizability
Mill performance is good, Heat stability is good, elevated temperature strength are big, thermal coefficient of expansion is little, thermal conductivity is high and
The good characteristics such as anti-thermal shock resistance to chemical attack.The present invention is by adding height in borosilicate glass
The SiC material of thermal conductivity, had both improve ltcc substrate material thermal conductivity, and had reduced borosilicate
Silicate glass fusing point, it is achieved thereby that the low temperature dense sintering of SiC material, improves preparation
The thermal conductivity of low-temperature co-burning ceramic material.
Further, the present invention, also using forsterite as disperse ceramic phase, can carry to a certain extent
The thermal conductivity of high ceramic material, and there is relatively low dielectric constant.Described forsterite is permissible
It is natural, it is also possible to for synthetic, to this present invention, there is no particular restriction.
Additionally, the present invention adds the CNT with high thermal conductivity, connect and there is high thermal conductivity
Carborundum and forsterite, formed 3 D stereo network-like conductive structure, increase further
The heat conductivility of strong ceramic material.
Compared with prior art, the present invention is by adding carborundum, magnesium in borosilicate glass
Olivine and CNT, utilize synergism each other, improves the low temperature of preparation altogether
The thermal conductivity of burning ceramic material, and reduce borosilicate glass fusing point.
Accordingly, the present invention also provides for a kind of borosilicate glass base low-temperature cofired ceramic material
Preparation method, comprises the following steps: by 35～75 weight portion borosilicate glass powder, 2～5 weights
Amount part carborundum, 1～3 weight portion forsterite and 1～3 parts by weight of carbon nanotubes mixing after add
Ethanol, ball-milling treatment post-drying, obtain low-temperature co-fired ceramic powder material；To described low temperature co-fired pottery
Ceramic powder adds solvent, binding agent, plasticizer, dispersant and wetting agent, after mix homogeneously
Flow casting molding, sinters after drying, obtains low-temperature co-burning ceramic material.
Wherein, described borosilicate glass powder is prepared as follows: step a1) by SiO2、
B2O3, BaO, Alborex M 12, K2O and TiO2Weight ratio be (40～50): (10～15): (2～5):
(1～5): (0.5～3): the proportioning of (0.5～2) is by SiO2、H3BO3、BaCO3, Alborex M 12,
K2CO3、TiO2Mix with ethanol, ball-milling treatment post-drying；Step a2) by described step a1)
The powder obtained calcine 1～3 hour at 1450 DEG C～1500 DEG C after shrend, obtain chopped glass；
Step a3) described chopped glass is mixed with deionized water, ball-milling treatment post-drying, obtain boron
Silicate glass powder.
The present invention is by regulation SiO2、B2O3, BaO, Alborex M 12, K2O and TiO2Weight
Ratio, it is ensured that this high/low temperature is burnt material altogether and had relatively low sintering temperature.
In the preparation process of borosilicate glass, described step a1) the ball-milling treatment time excellent
Elect 1～6 hour as, more preferably 2～5 hours.Above-mentioned steps a2) calcining heat be impact
One of key factor of borosilicate glass, too high or too low for temperature being all unfavorable for obtains having one
Determine crystal formation, be evenly distributed and glass powder that granule is less.Step a2) in sintering temperature excellent
Electing 1480～1500 DEG C as, sintering time is preferably 2～3 hours.Described step a3) ball milling
The process time is preferably 2～5 hours, more preferably 2～4 hours.Described borosilicate glass powder
Particle diameter be preferably 1～3 μm, more preferably 2～3 μm.
Silicon carbide ceramics has that non-oxidizability is strong, anti-wear performance good, Heat stability is good, high temperature mutually
Intensity is big, thermal coefficient of expansion is little, thermal conductivity is high and the good characteristic such as anti-thermal shock resistance to chemical attack.
The present invention, by adding the SiC material of high heat conductance in borosilicate glass powder, both improve
Ltcc substrate material thermal conductivity, and reduce borosilicate glass powder fusing point, it is achieved thereby that
The low temperature dense sintering of SiC material, improves the thermal conductivity of the low-temperature co-burning ceramic material of preparation.
The SiC that the present invention uses is preferably black SiC, content more than 95%.
Further, the present invention, also using forsterite as disperse ceramic phase, can carry to a certain extent
The thermal conductivity of high ceramic material, and there is relatively low dielectric constant.Described forsterite is permissible
It is natural, it is also possible to for synthetic, to this present invention, there is no particular restriction.
Additionally, the present invention adds the CNT with high thermal conductivity, connect and there is high thermal conductivity
Carborundum and forsterite, formed 3 D stereo network-like conductive structure, increase further
The heat conductivility of strong ceramic material.
The described ball-milling treatment time obtaining low-temperature co-burning ceramic material is preferably 5～10 hours,
More preferably 6 hours, be conducive to obtaining homodisperse slurry, so carry out flow casting molding and
Sintering processes.
In the step obtaining low-temperature co-burning ceramic material, described sintering step is particularly as follows: heat up
It is incubated 5～8 hours to 450～500 DEG C, then heats to 650～700 DEG C and be incubated 1～3 hour.
Wherein, the programming rate being warming up to 450～500 DEG C is preferably 4 DEG C/min；It is warming up to 650～700 DEG C
Programming rate be preferably 3 DEG C/min.
In above-mentioned sintering step, present invention preferably employs the sintering process of two-stage intensification, it may be assumed that
First 450～500 DEG C of insulations, make vitreous humour phase sintering, it is ensured that its densified sintering product, 450～500 DEG C
Temperature be one of key factor of low-temperature co-burning ceramic material of obtaining of impact, insulating process promotees
Enter organic discharge in material, be conducive to controlling the densification of sintering shrinkage and beneficially material
Sintering.Then heat to 650～700 DEG C, slowly analyse while the further sintering densification of material
Go out crystal and reduce glass phase, it is ensured that the performance of this low-temperature co-burning ceramic material.
The present invention for use solvent there is no particular restriction, those skilled in the art can be used
Known to solvent, preferably trichloro ethylene；The present invention there is no limit especially for the binding agent used
System, can use binding agent well known to those skilled in the art, preferably polyvinyl butyral resin
Solution；The present invention for use plasticizer there is no particular restriction, art technology can be used
Plasticizer known to personnel, preferably dibutyl phthalate；The present invention divides for employing
There is no particular restriction for powder, can use dispersant well known to those skilled in the art, is preferably
Glycerol trioleate；There is no particular restriction for the wetting agent that uses for the present invention, can use this
Wetting agent known to skilled person, preferably polyoxyethylene ester.
The present invention is by adding carborundum, forsterite and carbon nanometer in borosilicate glass
Pipe, utilizes synergism each other, improves the heat of the low-temperature co-burning ceramic material of preparation
Conductance, and reduce borosilicate glass fusing point.Secondly, by controlling in borosilicate glass
Composition, it is ensured that this low temperature co-fired material has relatively low sintering temperature.
In order to be further appreciated by the present invention, the technical side present invention provided below in conjunction with embodiment
Case is described in detail, and protection scope of the present invention is not limited by the following examples.
The chemical reagent that the embodiment of the present invention uses is commercial.
Embodiment 1
Step (1) prepares glass powder；
By SiO2、B2O3, BaO, Alborex M 12, K2O and TiO2Weight ratio be 45:10:
The proportioning of 2:2:3:2 weighs SiO2、H3BO3、BaCO3, Alborex M 12, K2CO3、TiO2,
Above-mentioned raw materials is mixed and added into ethanol, and in ball mill, the speed ball milling with 300r/min mixes
Dry at 120 DEG C after 4 hours；
Drying gained powder is placed in corundum crucible and is warmed up to 1480 DEG C with the speed of 5 DEG C/min
And it is incubated 2 hours, then the liquid glass obtained is placed in deionized water and carries out shrend,
To chopped glass；
Described chopped glass is pulverized and is subsequently adding appropriate amount of deionized water then with 300r/min ball milling
5 hours, after 120 DEG C of drying, obtain borosilicate glass powder.
Step (2) weighs 50g borosilicate glass powder, 4g SiC powder, 2g forsterite
With 1g CNT, mixing, add go in right amount ethanol be placed in planetary ball mill grinding jar with
300r/min ball milling mixes 3 hours, then 120 DEG C of drying, obtains LTCC material
Material powder.
Step (3) adds organic quality hundred in described low-temperature co-burning ceramic material powder
Proportion by subtraction is: trichloro ethylene 76%, polyvinyl butyral resin 14%, dibutyl phthalate 3%,
Triglycerin acid glyceride 4.8% and the solution of polyoxyethylene ester 2.2%, uniformly after mixing, deaeration
It is cast, dries, be warming up to 450 DEG C and be incubated 6 hours, then heat to 700 DEG C of insulations 2
Hour, obtain borosilicate glass base low-temperature cofired ceramic material.
The borosilicate glass base low-temperature cofired ceramic material preparing the present embodiment is measured.
After tested, the thermal conductivity of this low-temperature co-burning ceramic material is 35W/mK, and dielectric constant is
5.8 (1MHz), thermal coefficient of expansion is 4.1 × 10-6K-1。
Embodiment 2
Step (1) prepares glass powder；
By SiO2、B2O3, BaO, Alborex M 12, K2O and TiO2Weight ratio be 45:10:
The proportioning of 2:2:3:2 weighs SiO2、H3BO3、BaCO3, Alborex M 12, K2CO3、TiO2,
Above-mentioned raw materials is mixed and added into ethanol, and in ball mill, the speed ball milling with 300r/min mixes
Dry at 120 DEG C after 4 hours；
Drying gained powder is placed in corundum crucible and is warmed up to 1480 DEG C with the speed of 5 DEG C/min
And it is incubated 2 hours, then the liquid glass obtained is placed in deionized water and carries out shrend,
To chopped glass；
Described chopped glass is pulverized and is subsequently adding appropriate amount of deionized water then with 300r/min ball milling
5 hours, after 120 DEG C of drying, obtain borosilicate glass powder.
Step (2) weighs 70g borosilicate glass powder, 2g SiC powder, 3g forsterite
With 1g CNT, mixing, add go in right amount ethanol be placed in planetary ball mill grinding jar with
300r/min ball milling mixes 3 hours, then 120 DEG C of drying, obtains LTCC material
Material powder.
Step (3) adds organic quality hundred in described low-temperature co-burning ceramic material powder
Proportion by subtraction is: trichloro ethylene 76%, polyvinyl butyral resin 14%, dibutyl phthalate 3%,
Triglycerin acid glyceride 4.8% and the solution of polyoxyethylene ester 2.2%, uniformly after mixing, deaeration
It is cast, dries, be warming up to 450 DEG C and be incubated 6 hours, then heat to 700 DEG C of insulations 2
Hour, obtain borosilicate glass base low-temperature cofired ceramic material.
The borosilicate glass base low-temperature cofired ceramic material preparing the present embodiment is measured.
After tested, the thermal conductivity of this low-temperature co-burning ceramic material is 36W/mK, and dielectric constant is
5.5 (1MHz), thermal coefficient of expansion is 4.4 × 10-6K-1。
Embodiment 3
Step (1) prepares glass powder；
By SiO2、B2O3, BaO, Alborex M 12, K2O and TiO2Weight ratio be 40:14:
The proportioning of 5:2:3:2 weighs SiO2、H3BO3、BaCO3, Alborex M 12, K2CO3、TiO2,
Above-mentioned raw materials is mixed and added into ethanol, and in ball mill, the speed ball milling with 300r/min mixes
Dry at 120 DEG C after 4 hours；
Drying gained powder is placed in corundum crucible and is warmed up to 1480 DEG C with the speed of 5 DEG C/min
And it is incubated 2 hours, then the liquid glass obtained is placed in deionized water and carries out shrend,
To chopped glass；
Described chopped glass is pulverized and is subsequently adding appropriate amount of deionized water then with 300r/min ball milling
5 hours, after 120 DEG C of drying, obtain borosilicate glass powder.
Step (2) weighs 40g borosilicate glass powder, 5g SiC powder, 3g forsterite
With 3g CNT, mixing, add go in right amount ethanol be placed in planetary ball mill grinding jar with
300r/min ball milling mixes 3 hours, then 120 DEG C of drying, obtains LTCC material
Material powder.
Step (3) adds organic quality hundred in described low-temperature co-burning ceramic material powder
Proportion by subtraction is: trichloro ethylene 76%, polyvinyl butyral resin 14%, dibutyl phthalate 3%,
Triglycerin acid glyceride 4.8% and the solution of polyoxyethylene ester 2.2%, uniformly after mixing, deaeration
It is cast, dries, be warming up to 450 DEG C and be incubated 6 hours, then heat to 700 DEG C of insulations 2
Hour, obtain borosilicate glass base low-temperature cofired ceramic material.
The borosilicate glass base low-temperature cofired ceramic material preparing the present embodiment is measured.
After tested, the thermal conductivity of this low-temperature co-burning ceramic material is 34W/mK, and dielectric constant is
5.4 (1MHz), thermal coefficient of expansion is 4.6 × 10-6K-1。
The explanation of above example is only intended to help to understand that the method for the present invention and core thereof are thought
Think.It should be pointed out that, for those skilled in the art, without departing from this
On the premise of bright principle, it is also possible to the present invention is carried out some improvement and modification, these improve and
Modify in the protection domain also falling into the claims in the present invention.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of
Or the use present invention.Those skilled in the art are come by the multiple amendment to these embodiments
Saying and will be apparent from, generic principles defined herein can be without departing from the present invention's
In the case of spirit or scope, realize in other embodiments.Therefore, the present invention will not be by
It is limited to the embodiments shown herein, and is to fit to and principles disclosed herein and new
The widest scope that grain husk feature is consistent.
Claims (7)
1. a borosilicate glass base low-temperature cofired ceramic material, it is characterised in that by with
Lower composition is made:
Described borosilicate glass is (40～50) by weight ratio: (10～15): (2～5): (1～5):
(0.5～3): the SiO of (0.5～2)2、B2O3, BaO, Alborex M 12, K2O and TiO2Composition.
2. a borosilicate glass according to claim 1 base low-temperature cofired pottery material
The preparation method of material, it is characterised in that comprise the following steps:
By 35～75 weight portion borosilicate glass powder, 2～5 weight portion carborundums, 1～3 weight
Addition ethanol after part forsterite and the mixing of 1～3 parts by weight of carbon nanotubes, ball-milling treatment post-drying,
Obtain low-temperature co-fired ceramic powder material；
Solvent, binding agent, plasticizer, dispersant is added in described low-temperature co-fired ceramic powder material
And wetting agent, flow casting molding after mix homogeneously, sinter after drying, obtain LTCC material
Material.
Preparation method the most according to claim 2, it is characterised in that described borosilicic acid
Salt glass dust is prepared as follows:
Step a1) press SiO2、B2O3, BaO, Alborex M 12, K2O and TiO2Weight ratio be
(40～50): (10～15): ((2～5): (1～5): (0.5～3): the proportioning of (0.5～2) will
SiO2、H3BO3、BaCO3, Alborex M 12, K2CO3、TiO2Mix with ethanol, ball-milling treatment
Post-drying；
Step a2) by described step a1) powder that obtains calcines 1～3 at 1450 DEG C～1500 DEG C
Shrend after hour, obtains chopped glass；
Step a3) described chopped glass is mixed with deionized water, ball-milling treatment post-drying,
To borosilicate glass powder.
Preparation method the most according to claim 3, it is characterised in that described step a1)
The ball-milling treatment time be 1～6 hour.
Preparation method the most according to claim 3, it is characterised in that described step a3)
The ball-milling treatment time be 2～5 hours.
Preparation method the most according to claim 2, it is characterised in that described borosilicate
The particle diameter of glass dust is 1～3 μm.
Preparation method the most according to claim 2, it is characterised in that described sintering walks
Rapid particularly as follows:
It is warming up to 450～500 DEG C and is incubated 5～8 hours, then heat to 650～700 DEG C of insulations 1～3
Hour.
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| CN1483689A (en) * | 2002-09-18 | 2004-03-24 | 深圳南虹电子陶瓷有限公司 | Low temp cofired low specific inductive capacity glass ceramic material |
| CN1935739A (en) * | 2006-09-28 | 2007-03-28 | 桂林电子科技大学 | Low-sintered glass ceramic composite material and its preparing method |
| CN101264518A (en) * | 2007-03-15 | 2008-09-17 | 精工爱普生株式会社 | Sintered body and method for producing the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1483689A (en) * | 2002-09-18 | 2004-03-24 | 深圳南虹电子陶瓷有限公司 | Low temp cofired low specific inductive capacity glass ceramic material |
| CN1935739A (en) * | 2006-09-28 | 2007-03-28 | 桂林电子科技大学 | Low-sintered glass ceramic composite material and its preparing method |
| CN101264518A (en) * | 2007-03-15 | 2008-09-17 | 精工爱普生株式会社 | Sintered body and method for producing the same |
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