CN1477716A - 场电极金属半导体场效应晶体管 - Google Patents
场电极金属半导体场效应晶体管 Download PDFInfo
- Publication number
- CN1477716A CN1477716A CNA031330169A CN03133016A CN1477716A CN 1477716 A CN1477716 A CN 1477716A CN A031330169 A CNA031330169 A CN A031330169A CN 03133016 A CN03133016 A CN 03133016A CN 1477716 A CN1477716 A CN 1477716A
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- China
- Prior art keywords
- channel region
- drain electrode
- source
- grid conductor
- transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 18
- 230000005669 field effect Effects 0.000 title description 5
- 239000002184 metal Substances 0.000 title description 4
- 229910052751 metal Inorganic materials 0.000 title description 4
- 239000004020 conductor Substances 0.000 claims abstract description 72
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 9
- 239000010931 gold Substances 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- 238000009413 insulation Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 4
- 230000014509 gene expression Effects 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910002065 alloy metal Inorganic materials 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0605—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (17)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/127,187 | 2002-04-22 | ||
US10/127,187 US6559513B1 (en) | 2002-04-22 | 2002-04-22 | Field-plate MESFET |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1477716A true CN1477716A (zh) | 2004-02-25 |
CN100361313C CN100361313C (zh) | 2008-01-09 |
Family
ID=22428756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031330169A Expired - Fee Related CN100361313C (zh) | 2002-04-22 | 2003-04-22 | 场电极金属半导体场效应晶体管 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6559513B1 (zh) |
EP (1) | EP1357604A3 (zh) |
JP (1) | JP2003332357A (zh) |
KR (1) | KR20030084657A (zh) |
CN (1) | CN100361313C (zh) |
TW (1) | TWI293510B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100428494C (zh) * | 2004-08-26 | 2008-10-22 | 精工爱普生株式会社 | 半导体装置及半导体装置的制造方法 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7501669B2 (en) * | 2003-09-09 | 2009-03-10 | Cree, Inc. | Wide bandgap transistor devices with field plates |
TWI430341B (zh) * | 2003-09-09 | 2014-03-11 | Univ California | 單一或多重閘極場平板之製造 |
US7573078B2 (en) * | 2004-05-11 | 2009-08-11 | Cree, Inc. | Wide bandgap transistors with multiple field plates |
US7550783B2 (en) * | 2004-05-11 | 2009-06-23 | Cree, Inc. | Wide bandgap HEMTs with source connected field plates |
US9773877B2 (en) * | 2004-05-13 | 2017-09-26 | Cree, Inc. | Wide bandgap field effect transistors with source connected field plates |
US11791385B2 (en) * | 2005-03-11 | 2023-10-17 | Wolfspeed, Inc. | Wide bandgap transistors with gate-source field plates |
US20070138515A1 (en) * | 2005-12-19 | 2007-06-21 | M/A-Com, Inc. | Dual field plate MESFET |
US7485514B2 (en) * | 2006-01-05 | 2009-02-03 | Winslow Thomas A | Method for fabricating a MESFET |
US7592211B2 (en) | 2006-01-17 | 2009-09-22 | Cree, Inc. | Methods of fabricating transistors including supported gate electrodes |
US7709269B2 (en) | 2006-01-17 | 2010-05-04 | Cree, Inc. | Methods of fabricating transistors including dielectrically-supported gate electrodes |
US8823057B2 (en) | 2006-11-06 | 2014-09-02 | Cree, Inc. | Semiconductor devices including implanted regions for providing low-resistance contact to buried layers and related devices |
US7662698B2 (en) * | 2006-11-07 | 2010-02-16 | Raytheon Company | Transistor having field plate |
EP1921669B1 (en) | 2006-11-13 | 2015-09-02 | Cree, Inc. | GaN based HEMTs with buried field plates |
US7692263B2 (en) | 2006-11-21 | 2010-04-06 | Cree, Inc. | High voltage GaN transistors |
US8183658B2 (en) * | 2007-05-29 | 2012-05-22 | Cobham Electronic Systems Corporation | Field-effect transistor (FET) with embedded diode |
US8754496B2 (en) * | 2009-04-14 | 2014-06-17 | Triquint Semiconductor, Inc. | Field effect transistor having a plurality of field plates |
US9847411B2 (en) | 2013-06-09 | 2017-12-19 | Cree, Inc. | Recessed field plate transistor structures |
US9679981B2 (en) | 2013-06-09 | 2017-06-13 | Cree, Inc. | Cascode structures for GaN HEMTs |
JP6345126B2 (ja) * | 2015-01-21 | 2018-06-20 | 三菱電機株式会社 | ショットキーバリアダイオード |
US11929408B2 (en) * | 2020-05-14 | 2024-03-12 | Macom Technology Solutions Holdings, Inc. | Layout techniques and optimization for power transistors |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1049247A (en) * | 1964-07-06 | 1966-11-23 | Kadar Ind Company Ltd | Improvements in or relating to tracks for use with toy vehicles |
US4380022A (en) * | 1980-12-09 | 1983-04-12 | The United States Of America As Represented By The Secretary Of The Navy | Monolithic fully integrated class B push-pull microwave GaAs MESFET with differential inputs and outputs with reduced Miller effect |
US5536666A (en) * | 1994-06-03 | 1996-07-16 | Itt Corporation | Method for fabricating a planar ion-implanted GaAs MESFET with improved open-channel burnout characteristics |
DE69522075T2 (de) * | 1994-11-02 | 2002-01-03 | Trw Inc., Redondo Beach | Verfahren zum Herstellen von multifunktionellen, monolithisch-integrierten Schaltungsanordnungen |
US6005267A (en) * | 1995-09-29 | 1999-12-21 | Itt Corporation | MES/MIS FET with split-gate RF input |
US5940697A (en) * | 1997-09-30 | 1999-08-17 | Samsung Electronics Co., Ltd. | T-gate MESFET process using dielectric film lift-off technique |
JP3111985B2 (ja) * | 1998-06-16 | 2000-11-27 | 日本電気株式会社 | 電界効果型トランジスタ |
JP2002118122A (ja) * | 2000-10-06 | 2002-04-19 | Nec Corp | ショットキゲート電界効果トランジスタ |
-
2002
- 2002-04-22 US US10/127,187 patent/US6559513B1/en not_active Expired - Lifetime
-
2003
- 2003-04-22 CN CNB031330169A patent/CN100361313C/zh not_active Expired - Fee Related
- 2003-04-22 EP EP03252529A patent/EP1357604A3/en not_active Withdrawn
- 2003-04-22 JP JP2003117265A patent/JP2003332357A/ja active Pending
- 2003-04-22 KR KR10-2003-0025333A patent/KR20030084657A/ko not_active Application Discontinuation
- 2003-04-22 TW TW092109281A patent/TWI293510B/zh active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100428494C (zh) * | 2004-08-26 | 2008-10-22 | 精工爱普生株式会社 | 半导体装置及半导体装置的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
US6559513B1 (en) | 2003-05-06 |
EP1357604A3 (en) | 2005-06-08 |
EP1357604A2 (en) | 2003-10-29 |
KR20030084657A (ko) | 2003-11-01 |
JP2003332357A (ja) | 2003-11-21 |
CN100361313C (zh) | 2008-01-09 |
TWI293510B (en) | 2008-02-11 |
TW200402882A (en) | 2004-02-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: COBHAM DEFENSE ELECTRONIC SYSTEM CO.,LTD. Free format text: FORMER OWNER: M/ A-COM CO.,LTD. Effective date: 20090508 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20090508 Address after: Massachusetts, USA Patentee after: TYCO ELECTRONICS CORP [US] Address before: Massachusetts, USA Patentee before: Pine Valley Investments, Inc. |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080109 Termination date: 20100422 |