CN1409379A - 铟镓砷光电探测器制造的开管锌扩散方法 - Google Patents
铟镓砷光电探测器制造的开管锌扩散方法 Download PDFInfo
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- CN1409379A CN1409379A CN02130720A CN02130720A CN1409379A CN 1409379 A CN1409379 A CN 1409379A CN 02130720 A CN02130720 A CN 02130720A CN 02130720 A CN02130720 A CN 02130720A CN 1409379 A CN1409379 A CN 1409379A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB021307202A CN1186800C (zh) | 2002-09-18 | 2002-09-18 | 铟镓砷光电探测器制造的开管锌扩散方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CNB021307202A CN1186800C (zh) | 2002-09-18 | 2002-09-18 | 铟镓砷光电探测器制造的开管锌扩散方法 |
Publications (2)
Publication Number | Publication Date |
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CN1409379A true CN1409379A (zh) | 2003-04-09 |
CN1186800C CN1186800C (zh) | 2005-01-26 |
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CNB021307202A Expired - Lifetime CN1186800C (zh) | 2002-09-18 | 2002-09-18 | 铟镓砷光电探测器制造的开管锌扩散方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100472719C (zh) * | 2004-10-25 | 2009-03-25 | 厦门市三安光电科技有限公司 | 铟镓砷光电探测器芯片制作的箱式锌扩散方法 |
CN103151248A (zh) * | 2013-03-07 | 2013-06-12 | 武汉电信器件有限公司 | 一种光电探测器制作中锌的扩散装置及其扩散方法 |
CN104716027A (zh) * | 2013-12-13 | 2015-06-17 | 山东华光光电子有限公司 | 一种半导体激光器Zn杂质源扩散的装置及其应用 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100389483C (zh) * | 2005-12-16 | 2008-05-21 | 厦门大学 | 一种开管锌扩散方法 |
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2002
- 2002-09-18 CN CNB021307202A patent/CN1186800C/zh not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100472719C (zh) * | 2004-10-25 | 2009-03-25 | 厦门市三安光电科技有限公司 | 铟镓砷光电探测器芯片制作的箱式锌扩散方法 |
CN103151248A (zh) * | 2013-03-07 | 2013-06-12 | 武汉电信器件有限公司 | 一种光电探测器制作中锌的扩散装置及其扩散方法 |
CN104716027A (zh) * | 2013-12-13 | 2015-06-17 | 山东华光光电子有限公司 | 一种半导体激光器Zn杂质源扩散的装置及其应用 |
CN104716027B (zh) * | 2013-12-13 | 2017-08-01 | 山东华光光电子股份有限公司 | 一种半导体激光器Zn杂质源扩散的装置及其应用 |
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CN1186800C (zh) | 2005-01-26 |
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GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Shijiazhuang Development Zone microelectronics technology development application Corp. Assignor: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY Group Corp. Contract fulfillment period: 2005.5.20 to 2011.5.20 Contract record no.: 2008130000003 Denomination of invention: Open tube zinc diffusing method for producing indium-gallium-arsenic photoelectric detector Granted publication date: 20050126 License type: Exclusive license Record date: 20081008 |
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EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Shijiazhuang Development Zone microelectronics technology development application Corp. Assignor: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY Group Corp. Contract fulfillment period: 2005.5.20 to 2011.5.20 Contract record no.: 2008130000003 Denomination of invention: Open tube zinc diffusing method for producing indium-gallium-arsenic photoelectric detector Granted publication date: 20050126 License type: Exclusive license Record date: 20081008 |
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Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2005.5.20 TO 2011.5.20; CHANGE OF CONTRACT Name of requester: SHIJIAZHUANG DEVELOPMENT ZONE MAITEDAWEI ELECTRONI Effective date: 20081008 |
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CX01 | Expiry of patent term |
Granted publication date: 20050126 |