CN1329766C - Space aligning method of ultra-precision rotary shaft and direct writing optical axis of laser direct writing apparatus - Google Patents
Space aligning method of ultra-precision rotary shaft and direct writing optical axis of laser direct writing apparatus Download PDFInfo
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Abstract
The present invention discloses a direct writing optical axis space alignment method for superprecision rotary shafts and laser direct writers. The method realizes the alignment of a rotary shaft and direct writing optical axis by utilizing a differential action astigmatism out-of-focus detection device, a focusing servosystem, a precision positioning mechanism and phase gratings of a polar coordinate direct writer system. The method comprises the following steps: dividing measuring range into a precision measurement area and a positioning measurement area and leading resolution limiting value of the positioning measurement area to be smaller than the range of the precision measurement area; controlling light spots to be in an alignment focus state by using a function of detecting focus of the differential action astigmatism out-of-focus detection device; generating shaft aligning deviation amount measurement signals by generating out-of-focus light spots; leading the direct writing optical axis to enter the positioning measurement area according to the aligning deviation amount measurement signals; measuring the aligning deviation amount and leading the optical axis to move to the precision measurement area by using a function of precision positioning of the precision positioning mechanism of the direct writer system; measuring the aligning deviation amount once again and finally aligning by using the function of precision positioning of the precision positioning mechanism of the direct writer system.
Description
Technical field
The invention belongs to the revolving shaft and the direct writing optical axis of laser direct writing apparatus ultraprecise spacial alignment method of exact instrument manufacturing and field of measuring technique, particularly a kind of laser direct-writing machine alignment methods based on the quick out of focus principle of conjugate image.
Background technology
Laser direct-writing is one of important technical of making diffractive micro-optical element (binary optical elements), also is the extensively technical approach of approval of present countries in the world.
When adopting the laser direct-writing mode to make diffraction optical element, the principal element that influences the element fabricating quality is: etching alignment error, element depth ratio error, structure live width width, depth error.So-called alignment error is meant, makes error by laser direct-writing optical axis and the not coaxial caused diffraction optical element of the element rotary table centre of gyration.This error causes the diffraction element micro relief profile to lose symmetry, therefore directly writes the important errors that alignment error is considered to influence diffraction optical element etching quality.
At present, the technology of optical axis and revolving shaft alignment issues mainly contains following several in the solution laser direct-writing machine:
First kind is that China Changchun optical precision optical machinery research institute takes grating chi rotation centering technology.This technology is that the grating chi is placed on the rotary table, with system's light beam direct illumination.When worktable rotates, if optical axis does not overlap with the centre of gyration, then the observer will see that striped inwardly or outwards gushes out; If optical axis overlaps with revolving shaft, then the observer can't see striped and moves.This method is simple to operate, and accuracy of detection is higher, and alignment error is less than 0.5 μ m.Shortcoming is further to improve measuring accuracy by electronic fine-grained method.
Second kind is that Zhejiang University adopts the optical grating reflection technique of alignment.This technology also is that grating is placed on the rotary table, receives the focal beam spot of optical grating reflection by CCD.When optical axis does not overlap with the centre of gyration, if rotating grating, hot spot will scan circular trace thereon, and produce bright dark variation simultaneously on CCD, get final product calculation deviation by the record change frequency; When diaxon overlaps, CCD is last will not to have bright dark variation.This method has principle simple, practicality, and the advantage that cost is low, alignment error is less than 0.5 μ m.Shortcoming is low to the Signal-to-Noise through optical grating reflection, and precision is difficult to improve.
The third is that Russian Academy Of Sciences robotization and electrical measurement research institute propose to utilize the optoelectronic scanning microscope to aim at optical axis and turning axle, and error is less than 0.1 μ m.Shortcoming is the equipment requirements height, complicated operation, cost height.
The 4th kind is that Massachusetts Institute Technology Lincoln laboratory adopts 10 degree wedge shape reflective substrate to aim at turning axle and optical axis center, and alignment error is less than 0.2 μ m.It is bigger that shortcoming is that accuracy of detection is influenced by wedge shape reflective substrate face shape, and make very difficulty of high-precision wedge shape reflective substrate.
Summary of the invention
The present invention is intended to overcome weak point of the prior art, and a kind of existing device of directly writing machine that utilizes is provided, and does not have the alignment error of installation, and can keep the ultra-precision rotary shaft and the direct writing optical axis of laser direct writing apparatus spacial alignment method of high alignment precision.
For achieving the above object, ultra-precision rotary shaft of the present invention and direct writing optical axis of laser direct writing apparatus spacial alignment method, directly write the differential astigmatism out of focus pick-up unit of machine system by utilizing polar coordinates, the focusing servo-drive system, precision positioning mechanism and phase grating, realize ultra-precision rotary shaft and directly write aiming at of direct writing apparatus optical axis, wherein, described phase grating is fixed on as out of focus detection signal generator can cover revolving shaft center and the zone of directly writing optical axis on the worktable, and the phase grating step width of phase grating and phase grating groove width are all greater than the focusing test spot diameter, and the phase grating groove depth is greater than directly writing the object lens depth of focus; Said method comprising the steps of:
(a). according to directly writing the relation of optical axis with revolution shaft alignement bias and Measurement Resolution, measurement range is divided into accurate measurement zone and location survey district, and the resolution pole limit value that makes the location survey district is less than the accurate scope of measurement zone, wherein, described accurate measurement zone, scope at ten times of phase grating constants between the 0.2mm, described location survey district, scope at 0.2mm between the 4mm;
(b). by the focusing test function of differential astigmatism out of focus pick-up unit, make the focusing test hot spot be in accurate burnt state;
(c). the rotation phase grating produces axle and aims at the bias measuring-signal;
(d). according to aiming at the bias measuring-signal, locate, make and directly write optical axis and enter described location survey district with described precision positioning mechanism;
(e). according to formula
Calculate and aim at bias, wherein, spot diameter is directly write in the D representative, unit is a micron, and f represents the worktable rotational frequency, and unit is a hertz, t represented the duty time of aiming at square-wave signal after the shaping, unit is a microsecond, and the deviation distance of optical axis O and revolving shaft O ' is directly write in the L representative, and unit is a micron, T is represented as the phase grating constant, unit is a micron, and departs from value according to this aligning, makes optical axis move to described accurate measurement zone by the precision positioning function of directly writing machine system precision positioning mechanism;
(f). measure according to above-mentioned formula once more and aim at bias, depart from value, realize final alignment by the precision positioning function of directly writing machine system precision positioning mechanism according to this aligning.
A good result of the present invention is that it utilizes existing focusing test device, precision positioning device in the polar coordinates straight-writing system, again by a phase grating, just can realize aiming at, and need not additionally to increase in straight-writing system mechanisms such as ccd detector; Another effect of the present invention is that with phase grating be quick defocus signal generating device, places this device during measurement, need not to aim at revolving shaft, does not introduce the installation alignment error.Out of focus helps signal shaping fast, and is simple to operate; The 3rd effect of the present invention is that measuring accuracy is relevant with range ability, can realize that 1/10th micron orders accurately aim at.
Description of drawings
Fig. 1 is the differential astigmatism out of focus pick-up unit and the light path synoptic diagram thereof of the method for the invention.
Embodiment
With reference to Fig. 1, the differential astigmatism out of focus pick-up unit that ultra-precision rotary shaft of the present invention and direct writing optical axis of laser direct writing apparatus spacial alignment method are used comprises laser instrument 1, beam expanding lens 2, polarization spectroscope 3, λ/4 wave plates 4, lithographic objective 5, worktable 6, cylindrical mirror 7, spectroscope 8, A 4 quadrant detector 9, B 4 quadrant detector 10.
In the present embodiment, the dutycycle of phase grating 11 is 1/2, and its grating constant is 10 μ m, and by vacuum suction on worktable 6.
By the differential astigmatism out of focus pick-up unit of forming by device 1 to 10, and the focusing servo-drive system, realize accurate burnt the adjusting at phase grating 11 suprabasil non-grating regions, and make focusing test hot spot and aim detecting signal set up initial image conjugate relation; It is as follows that differential astigmatism out of focus detects light path: the focusing test laser beam that laser instrument 1 sends focuses on phase grating 11 surfaces through beam expanding lens 2, polarization spectroscope 3, λ/4 wave plates 4, lithographic objective 5, reflected light focuses on A 4 quadrant detector 9 and the B 4 quadrant detector 10 through cylindrical mirror 7, spectroscope 8 through lithographic objective 5, λ/4 wave plates 4, polarization spectroscope 3 again, is gathered by A 4 quadrant detector 9 and B 4 quadrant detector 10.
The method of adjustment of present embodiment be divided into following steps:
The first step is for dividing accurate measurement zone and location survey district, and in the present embodiment, getting 0.2mm is separation, is accurate measurement zone less than 0.2mm and greater than the zone of ten times of light grating constants, is the location survey district greater than 0.2mm less than the zone of 4mm.
Whether the checking sub-region is divided feasible:
Optical axis deviating amount is calculated by following formula:
Influence diaxon bias O ' O
1The factor of measuring accuracy mainly contains speed error, grating etching error, several of light spot shape sum of errors time measurement errors.In directly writing the machine system, light spot shape sum of errors grating etching error is very little, so its influence can be ignored.It is speed error and time measurement error that system remains main error, adopts the brushless dc torque motor closed-loop control in the system, and frequency stability can reach 0.1%; The time measurement error is made up of two parts, and a part is to comprise factor such as the explorer response limit in interior measuring repeatability error, and another part is the time measurement error of subsequent conditioning circuit part.
Know through error analysis, increase, should not make rotating speed too high during therefore concrete enforcement, to be advisable below the 1Hz in of the raising of measurement dead band external pelivimetry error with rotating speed.Measuring error increases with the increase of tested bias, therefore will measure and further be divided into zone location measurement zone and accurate measurement zone outside the dead band; Zone location measurement zone scope 0.2mm is between the 4mm, and accurately ten times of grating constant T of measurement zone scope are between the 0.2mm.
The limiting error of analysis in accurate measurement zone distributes.
Spot diameter D=0.5 μ m, rotational frequency f=0.1Hz, ten times of grating constant T of measurement range be between 0.2mm the time, analyzes the limiting error of representing with expanded uncertainty of diaxon bias L.
Wherein:
U---measure total expanded uncertainty of diaxon bias L, approximate Normal Distribution;
U
f---the expanded uncertainty of the error correspondence of survey frequency f, approximate Normal Distribution;
U
t---the expanded uncertainty of the error correspondence of measurement time t, approximate Normal Distribution;
a
f---expanded uncertainty U
fCorresponding propagation of error coefficient;
a
t---expanded uncertainty U
tCorresponding propagation of error coefficient;
K---the confidence factor of expanded uncertainty U correspondence, K=3;
K
f---expanded uncertainty U
fCorresponding confidence factor, K
f=3;
K
t---expanded uncertainty U
tCorresponding confidence factor, K
t=3;
The differential method is asked every propagation of error coefficient:
Adopt the brushless dc torque motor closed-loop control in the system, frequency stability can reach 0.1%.
U
f＝0.1％×0.1Hz＝1×10
-4；
The time measurement error is made up of two parts, and a part is to comprise factor such as the explorer response limit in interior measuring repeatability error, and another part is the time measurement error of subsequent conditioning circuit part.The all approximate Normal Distribution of these two errors
Wherein:
U
t---total expanded uncertainty of the error correspondence of measurement time t;
U
T1---the expanded uncertainty of measuring repeatability error correspondence;
U
T2---the expanded uncertainty of the time measurement error correspondence of subsequent conditioning circuit part;
The limiting error of consideration under previously described measuring condition, promptly every worst case of all getting, the error of time measurement is as follows:
U
t1＝2×10
-6；
U
t2＝4×10
-6；
U then
t=4.5 * 10
-6
Under previously described measuring condition, every propagation of error coefficient is all got maximal value:
a
f＝0.002；
a
t＝0.0063；
Total expanded uncertainty of then measuring diaxon bias L is U=0.24 * 10
-6, promptly at T=10 μ m, D=0.5 μ m, measuring error can be greater than 0.24 μ m under the measuring condition between the 0.2mm for f=0.1Hz, measurement range 10T.
The limiting error of in like manner analyzing in the zone location measurement zone distributes.
At grating constant T=10 μ m, spot diameter D=0.5 μ m, rotational frequency f=0.1Hz, measurement range 0.2mm be between 4mm the time, analyzes the limiting error of representing with expanded uncertainty of diaxon bias L.Analytic process and measurement range are similar when ten times of grating constant T are between 0.2mm, and the implication of each amount does not all become in the following formula.
U
fDo not change U
f=0.1% * 0.1Hz=1 * 10
-4
U
tExpansion with measurement range has produced variation;
U wherein
T1The variation with measurement range does not change, but U
T2Variation with measurement range changes;
U
t1＝2×10
-6；
U
t2＝6×10
-6；
U then
t=6.2 * 10
-6
a
f, a
tUltimate value become big with the expansion of measurement range;
a
f＝0.04；
a
t＝2.5；
Total expanded uncertainty of then measuring diaxon bias L is U=25 * 10
-6, promptly at T=10 μ m, D=0.5 μ m, measuring error can be greater than 25 μ m under the measuring condition between the 4mm for f=0.1Hz, measurement range 0.2mm.
This shows,, directly write spot diameter D and equal 0.5 μ m that when rotational frequency f equaled 0.1Hz, the limiting error of measuring when bias drops in the zone location measurement zone was 25 μ m when getting; The limiting error of measuring when bias drops in the accurate measurement zone is 0.25 μ m.Therefore can think that under above-mentioned measuring condition measuring accuracy can reach 25 μ m in the zone location measurement zone; Measurement Resolution can reach 0.3 μ m in accurate measurement zone.And accurately the scope of measurement zone is 100 μ m, and measuring accuracy can reach 25 μ m in the zone location measurement zone, can be in accurate measurement zone thereby guaranteed from accurate in locating in the zone location measurement zone, and then it is feasible to draw this region partitioning method.
Second step was directly write mechanism for adjusting makes laser focusing on phase grating 11 surfaces, and mobile then optical axis is measured 4 quadrant detector 9,10 output frequencies simultaneously and changed, and carries out coarse alignment diaxon bias is reduced, to enter the location survey district;
Because when phase grating cycle and one timing of work table rotation rotating speed, the registration signal change frequency is a fixed value, therefore can pre-determine an empirical value and change the judgment basis whether density degree reaches the coarse alignment requirement, the foundation whether conduct just enters the location survey district as pulse signal.In the present embodiment, during f=0.1Hz, when the pulse signal change frequency during less than 0.3kHz diaxon bias think that less than 4mm coarse alignment finishes.After coarse alignment is finished, show that system enters the location survey district.
, can accurately, clearly differentiate out-of-focus appearance and accurate burnt state in order to make the focusing test device here, phase grating should have step width and groove width greater than the focusing test spot diameter, and groove depth is greater than the feature of directly writing the object lens depth of focus.Possess this feature, can reduce the aligning bias measuring error of system's pulse signal shaping, quantizing process introducing.
The 3rd step was location survey.The simulating signal that focusing test hot spot conjugate image is produced on 4 quadrant detector 9,10 quantizes with the subsequent conditioning circuit collection, 4/5ths of the number of winning the confidence maximum amplitude is a threshold value, it is shaped as square-wave signal, measure the short pulse duty time in the one-period, and be defined as signal duty time t, aim at bias according to following formula (1) reference axis.
In this concrete enforcement, when aiming at bias, aim at the bias computing method and satisfy following approximate treatment relation greater than ten times of phase grating constants:
Wherein: D-directly writes spot diameter, μ m
F-worktable rotational frequency, Hz
T-is through aiming at the duty time of square-wave signal, μ s after the shaping
L-directly writes the deviation distance of optical axis O and revolving shaft O ', μ m
T-phase grating constant, μ m
By following formula as can be known, T, D, f is known quantity, can measure the deviation distance L that directly writes optical axis and revolving shaft indirectly by aligning square-wave signal duty time t after measuring shaping.
The 4th step was second positioning: by the precision positioning function of directly writing machine system precision positioning mechanism optical axis is moved to and can more accurate measurement aim at the accurate measurement zone of bias;
The 5th goes on foot accurately measurement: measurement, the computing method used in above-mentioned the 3rd step remeasure the bias of axle aligning, obtain more high-precision measured value L, and for final alignment provides displacement data, this interval measure resolution is 0.3 μ m;
The 6th step was final alignment: the bias L according to system records, move optical axis by the precision positioning driving mechanism, and provide the displacement that displacement is L, realize the accurate aligning of final stage, alignment precision depends on measuring accuracy and mechanism's bearing accuracy.
Carry out the 3rd step location survey and the 4th step when accurately measuring need with worktable in each gyration period the minimum pulse duty time as measuring pulse width.This be because, in order satisfy to measure the precondition that mathematical model is set up, need make focusing test hot spot and grating be approximately the relation of just cutting, this moment, the measuring principle error of introducing can be ignored.(the minimum pulse duty time determines that method does not belong to necessary technology of the present invention.)
Principle of the present invention is as follows:
After focusing test hot spot and aim detecting signal were set up initial image conjugate relation, mobile focusing test hot spot made and directly writes optical axis O and enter grating region, and driven in rotation worktable 6.In worktable 6 rotary courses, when the deviation distance of directly writing optical axis O and revolving shaft O ' during greater than the grating groove width, focusing test hot spot cutting grating phenomenon can take place with worktable 6 rotations in phase grating 11, and the groove fluctuations on phase grating 11 surfaces, then can cause focusing test hot spot out of focus, the numerical aperture of directly writing machine lithographic objective 5 is big, depth of focus is little, the rapid disperse of hot spot meeting during out of focus, the initial conjugate relation of destruction focusing test hot spot and laser image spot; The simulating signal that focusing test hot spot conjugate image is produced on 4 quadrant detector 9,10 quantizes with the subsequent conditioning circuit collection, and 4/5ths of the number of winning the confidence maximum amplitude is a threshold value, and it is shaped as square-wave signal, and aims at the bias measuring-signal with this as axle.
After this according to aiming at the pulse signal frequency situation of change, promptly the density degree of pulse signal moves and directly writes optical axis, carries out coarse alignment.The coarse alignment purpose is that diaxon bias is reduced in the scope of application of this measuring method, to satisfy accuracy requirement.Before coarse alignment, at first determine that according to formula (1) a frequency empirical value f=0.1Hz (method of determining does not belong to necessary technology of the present invention) is as judging whether directly write optical axis has entered the foundation of aiming at the measurement range ability.If satisfy this according to then continuing step fine alignment step down, directly write optical axis otherwise continue to move, enter to aim at up to optical axis and measure range ability.
Next system alignment bias measurement range is divided into two parts, and first is the zone location measurement zone, has bigger aligning bias measuring error in this zone.Its effect is after coarse alignment is finished, and enters this zone, and first the measurement aimed at bias, by the precision positioning function of directly writing machine system precision positioning mechanism optical axis is moved to then and can more accurate measurement aim at the accurate measurement zone of bias.
Second portion is accurate measurement zone, and this zone has very high aligning bias measuring accuracy and enough wide scope, and the assurance system can enter into this zone by preliminary surveying, the location of first.After optical axis has entered into this zone, need remeasure aligning bias, and then realize the final alignment of optical axis and revolving shaft by the precision positioning function of directly writing machine system precision positioning mechanism.This regional measuring accuracy and the bearing accuracy of directly writing machine system precision positioning mechanism have determined the alignment precision of system jointly.Directly write machine system precision positioning mechanism and be that directly to write the machine system prerequisite, have another subsystem separate with alignment system of high precision displacement FEEDBACK CONTROL, its bearing accuracy can reach 10nm.
In the present embodiment, though replaced arc length to introduce original reason error with chord length in the formula (1), The theoretical analysis knows that when grating constant T equaled 10 μ m, max value of error can reach 1 μ m, and increases with T.But this error reduces rapidly with the increase of tested bias, when side-play amount L during greater than ten times of grating constants this error be reduced to 0.3nm, be in a ratio of small quantity with Measurement Resolution, can ignore to the influence of measuring.Directly write the machine system accuracy far above the axle alignment precision, need when bias is very little, not measure, but rely on straight-line displacement to realize last location, for measuring the dead band, in this zone, do not measure when therefore stipulating 0＜L＜10T.
In this measuring principle, influence factors of accuracy and mainly contain speed error, grating etching error, several of light spot shape sum of errors time measurement errors.In directly writing the machine system, light spot shape sum of errors grating etching error is very little, so its influence can be ignored.Adopt the brushless dc torque motor closed-loop control in the system, frequency stability can reach 0.1%.The main error of system is the time measurement error, is made up of two parts, and a part is to comprise factor such as the explorer response limit in interior Acquisition Error, and another part is the time measurement error of subsequent conditioning circuit part.
Know through error analysis, increase, should not make rotating speed too high during therefore concrete enforcement, to be advisable below the 1Hz in of the raising of measurement dead band external pelivimetry error with rotating speed.Measuring error increases with the increase of tested bias, therefore will measure and further be divided into zone location measurement zone and accurate measurement zone outside the dead band; Zone location measurement zone scope 0.2mm is between the 4mm, and accurately ten times of grating constant T of measurement zone scope are between the 0.2mm.
Claims (5)
1. ultra-precision rotary shaft and direct writing optical axis of laser direct writing apparatus spacial alignment method, directly write the differential astigmatism out of focus pick-up unit of machine system by utilizing polar coordinates, the focusing servo-drive system, precision positioning mechanism and phase grating, realize ultra-precision rotary shaft and directly write aiming at of direct writing apparatus optical axis, wherein, described phase grating is fixed on as out of focus detection signal generator can cover revolving shaft center and the zone of directly writing optical axis on the worktable, and the phase grating step width of phase grating and phase grating groove width are all greater than the focusing test spot diameter, and the phase grating groove depth is greater than directly writing the object lens depth of focus; Said method comprising the steps of:
(a). according to directly writing the relation of optical axis with revolution shaft alignement bias and Measurement Resolution, measurement range is divided into accurate measurement zone and location survey district, and the resolution pole limit value that makes the location survey district is less than the accurate scope of measurement zone, wherein, described accurate measurement zone, scope at ten times of phase grating constants between the 0.2mm, described location survey district, scope at 0.2mm between the 4mm;
(b). by the focusing test function of differential astigmatism out of focus pick-up unit, make the focusing test hot spot be in accurate burnt state;
(c). the rotation phase grating produces axle and aims at the bias measuring-signal;
(d). according to aiming at the bias measuring-signal, locate, make and directly write optical axis and enter described location survey district with described precision positioning mechanism;
(e). according to formula
Calculate and aim at bias, wherein, spot diameter is directly write in the D representative, unit is a micron, and f represents the worktable rotational frequency, and unit is a hertz, t represented the duty time of aiming at square-wave signal after the shaping, unit is a microsecond, and the deviation distance of optical axis O and revolving shaft O ' is directly write in the L representative, and unit is a micron, T is represented as the phase grating constant, unit is a micron, and departs from value according to this aligning, makes optical axis move to described accurate measurement zone by the precision positioning function of directly writing machine system precision positioning mechanism;
(f). measure according to above-mentioned formula once more and aim at bias, depart from value, realize final alignment by the precision positioning function of directly writing machine system precision positioning mechanism according to this aligning.
2. ultra-precision rotary shaft according to claim 1 and direct writing optical axis of laser direct writing apparatus spacial alignment method wherein, are used for differentiating the pulse signal of the signal of degree of registration for the process shaping.
3. ultra-precision rotary shaft according to claim 1 and 2 and direct writing optical axis of laser direct writing apparatus spacial alignment method, wherein, the rotating speed of described phase grating is not more than 1Hz.
4. ultra-precision rotary shaft according to claim 1 and 2 and direct writing optical axis of laser direct writing apparatus spacial alignment method, wherein, described focusing test hot spot and aim detecting signal have initial image conjugate relation.
5. ultra-precision rotary shaft according to claim 1 and direct writing optical axis of laser direct writing apparatus spacial alignment method wherein, also comprise an area dividing verification step between described step (a) and step (b).
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100399194C (en) * | 2006-06-07 | 2008-07-02 | 哈尔滨工业大学 | Polar coordinate directly writing-in method and device based on micro optical array multiple spot exposure |
| CN100381935C (en) * | 2006-11-03 | 2008-04-16 | 哈尔滨工业大学 | Direct write-in method and apparatus of parallel laser based on harmonic resonance method |
| CN102175257B (en) * | 2010-12-30 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | Laser alignment device for theodolite |
| US9105887B2 (en) * | 2011-12-08 | 2015-08-11 | GM Global Technology Operations LLC | Anode injector control algorithm for a low frequency discrete output |
| TWI638131B (en) * | 2013-06-17 | 2018-10-11 | 普雷茨特光電有限公司 | Optical measuring device for acquiring differences in distance and optical measuring method |
| CN107152276B (en) * | 2016-03-02 | 2020-06-02 | 中国石油化工股份有限公司 | Signal processing method and system for measurement of electromagnetic wave resistivity while drilling |
| CN110824722B (en) * | 2018-08-07 | 2021-10-15 | 宁波舜宇光电信息有限公司 | Structured light projection module assembly device and projection module assembly and detection method |
| CN110031189B (en) * | 2019-04-17 | 2020-10-09 | 大族激光科技产业集团股份有限公司 | Optical axis positioning device and method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5109149A (en) * | 1990-03-15 | 1992-04-28 | Albert Leung | Laser, direct-write integrated circuit production system |
| JPH11121351A (en) * | 1997-10-09 | 1999-04-30 | Nikon Corp | Method for adjusting beam in focal position detector |
| CN2352975Y (en) * | 1998-09-03 | 1999-12-08 | 中国科学院光电技术研究所 | Optical grating diffraction coaxial alignment device of submillimeter photoetching machine |
-
2005
- 2005-06-17 CN CNB2005100768271A patent/CN1329766C/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5109149A (en) * | 1990-03-15 | 1992-04-28 | Albert Leung | Laser, direct-write integrated circuit production system |
| JPH11121351A (en) * | 1997-10-09 | 1999-04-30 | Nikon Corp | Method for adjusting beam in focal position detector |
| CN2352975Y (en) * | 1998-09-03 | 1999-12-08 | 中国科学院光电技术研究所 | Optical grating diffraction coaxial alignment device of submillimeter photoetching machine |
Non-Patent Citations (3)
| Title |
|---|
| 极坐标激光直写系统光轴和转轴对准的光栅反射对准法 张涛 杨国光 粱宜勇，光学仪器，第26卷第1期 2004 * |
| 极坐标激光直写系统光轴和转轴对准的光栅反射对准法 张涛 杨国光 粱宜勇，光学仪器，第26卷第1期 2004;极坐标激光直写系统原点定位的实验研究 李凤有 谢永军 卢振武 王肇圻，光子学报，第33卷第10期 2004 * |
| 极坐标激光直写系统原点定位的实验研究 李凤有 谢永军 卢振武 王肇圻，光子学报，第33卷第10期 2004 * |
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