CN1307033C - Thin film sticking method and device thereof - Google Patents
Thin film sticking method and device thereof Download PDFInfo
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- CN1307033C CN1307033C CNB031466583A CN03146658A CN1307033C CN 1307033 C CN1307033 C CN 1307033C CN B031466583 A CNB031466583 A CN B031466583A CN 03146658 A CN03146658 A CN 03146658A CN 1307033 C CN1307033 C CN 1307033C
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- film
- crimping roller
- substrate
- type shape
- adhesive type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/06—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
- B32B37/1207—Heat-activated adhesive
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B38/1875—Tensioning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
- B32B2037/1063—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure using an electrostatic force
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
- B32B37/1207—Heat-activated adhesive
- B32B2037/1215—Hot-melt adhesive
- B32B2037/1223—Hot-melt adhesive film-shaped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/021—Treatment by energy or chemical effects using electrical effects
- B32B2310/025—Electrostatic charges
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Abstract
This invention relates to a film adhering method and device wherein a thin film to be adhered and having a two-layer structure comprising an adhesive film and a base film is depressed by rolls that are located along the conveying path of the baseplate from the base film side of the thin film so as to adhere to the adhesive film side adhered to the baseplate. According to this invention, electronic charges are applied to the front portion of a thin film, where the electrostatic forces acted between to the front end and the rolling faces serve to maintain the front portion and the rolling of rolls serve to convey the thin film to the baseplate, such that front portion is consistently adhered to the surface of the baseplate starting from the start position of the baseplate. Electronic charges are also applied to the rear end of the thin film such that the thin film may be adhered to the baseplate by the rolling of the rolls from the front end of the rear end of the thin film. The rolling rolls are maintained at the upstream of the rolls for the front and rear ends to remove electricity.
Description
Technical field
The present invention relates to method for adhesion of film and device thereof, particularly relate to from basis film layer one side, utilization is arranged in the crimping roller of the transport path of substrate, to the film pressurization of adhesive type shape, adhered thin film layer one side sticked on substrate surface method of attaching and device thereof on this substrate with adhered thin film layer and basis film layer double-layer structure.
Background technology
So far, film is taken out from film roll, broad ways is cut off continuous films, make the single film (hereinafter to be referred as film) that is the adhesive type shape, when utilizing a pair of crimping roller to stick on film on the substrate surface, as described in the fair 3-16906 communique of spy, utilize front end retaining member such as evacuated panel to keep the leading section of film, stick on the substrate, after the front end retaining member is kept out of the way, with two crimping rollers film and substrate are clamped, by the rotation of two crimping rollers, on one side substrate is transported on the conveying road surface that is made of a plurality of conveying rollers, carry out the stickup of film on the substrate on one side, paste when finishing, attract member terminal retaining members such as (vacuum rods) directly the rearward end of film to be sticked on the substrate with film.
If adopt above-mentioned existing technology, then under the situation about the leading section of film or rearward end being sticked on the substrate and under the pars intermedia with the leading section of film and rearward end sticks on situation on the substrate, because the member difference of pasting, so on exerting pressure, produce difference easily, therefore on the leading section of the film of pasting or rearward end, step is arranged, the processing of after this substrate is brought obstacle.
For example, if film is the resist film, when then exposing on step light quantity change, exist to produce the problem of striped.
In addition, the retaining member of film rearward end does not enter the space between substrate and the crimping roller, freely discharges with regard to the maintenance that stops rearward end before pasting end position, so the stickup injustice of film rearward end is easy to generate wrinkle or bubble.
Summary of the invention
Therefore the object of the present invention is to provide and a kind ofly can not produce step from leading section to the rearward end of film and flatly stick on method for adhesion of film and device thereof on the substrate.
In addition, another object of the present invention is to provide a kind of can not produce wrinkle or bubble and stick on method for adhesion of film and device thereof on the substrate from leading section to the rearward end of film.
To achieve these goals, the invention provides a kind of method for adhesion of film, from basis film layer one side, utilize crimping roller, film pressurization to adhesive type shape with adhered thin film layer and basis film layer double-layer structure, adhered thin film layer one side sticked on the substrate, this method for adhesion of film is characterised in that: the leading section of electric charge being supplied with the film of adhesive type shape, the electrostatic force that utilization is worked between the two at the outer peripheral face of this leading section and this crimping roller, this leading section is remained on the outer peripheral face of this crimping roller, rotation by this crimping roller, the film of this adhesive type shape is transported on the substrate, make this leading section consistent with the stickup starting position of substrate, film with this adhesive type shape sticks on the surface of substrate simultaneously, electric charge is also supplied with the rearward end of the film of this adhesive type shape, the electrostatic force that utilization is worked between the two at the outer peripheral face of this rearward end and this crimping roller, this rearward end is remained on the outer peripheral face of this crimping roller, utilize the rotation of this crimping roller, the film paste List of this adhesive type shape that will be from this leading section to this rearward end is on substrate, when this crimping roller rotation, the upstream position of this crimping roller on the outer peripheral face that this leading section and rearward end is remained on this crimping roller removes this crimping roller.
To achieve these goals, the present invention also provides a kind of apparatus for film adhesion, from basis film layer one side, utilization is arranged in the crimping roller of the transport path of substrate, film pressurization to adhesive type shape with adhered thin film layer and basis film layer double-layer structure, adhered thin film layer one side sticked on this substrate, and this apparatus for film adhesion is characterised in that: comprising: have the crimping roller that keeps the function of this film that is the adhesive type shape with electrostatic force; Keep this leading section that is the film of adhesive type shape, this leading section is given the film front end retaining member of the outer peripheral face of this crimping roller; Keep this rearward end that is the film of adhesive type shape, this rearward end is given the film rear end retaining member of the outer peripheral face of this crimping roller; Electric charge is supplied with the leading section of this film that is the adhesive type shape and the unit of rearward end; And when this crimping roller rotation, the upstream position of this crimping roller on the outer peripheral face that this leading section and rearward end is remained on this crimping roller, this crimping roller is removed the unit of electricity, this crimping roller with electrostatic force with this leading section remain on remove electricity its outer peripheral face on, rotation by this crimping roller, this film that is the adhesive type shape is transported on the substrate, make this leading section consistent with the stickup starting position of substrate, the film that simultaneously this is the adhesive type shape sticks on the surface of substrate, on the outer peripheral face of this crimping roller that this rearward end has also been utilized electrostatic force to remain on to remove electricity, by the rotation of this crimping roller, this film paste List that is the adhesive type shape that will be from this leading section to this rearward end is on substrate.
If employing the present invention then owing to only stick on the substrate with the film of crimping roller with the adhesive type shape, and is not switched the crimping member, flatly do not stick on the substrate so can step not take place.
In addition, because being carried out, removes crimping roller, even so electric charge is supplied with film, with with the similar electric charge of electric charge of supplying with film, can not make crimping roller charged, electrostatic repulsion does not take place between crimping roller and the film, can keep whole films of this adhesive type shape from film leading section to rearward end with crimping roller, stick on the substrate, wrinkle and bubble can not take place.
Description of drawings
Fig. 1 is the summary section of the apparatus for film adhesion of an expression example of the present invention,
Fig. 2 is the film rear end maintaining part in the key diagram 1, the figure of front end maintaining part,
Fig. 3 is the figure of the working procedure of the apparatus for film adhesion in the key diagram 1,
Fig. 4 is the summary section of the apparatus for film adhesion of expression another example of the present invention.
The specific embodiment
Fig. 1 is the summary section of the apparatus for film adhesion of an expression example of the present invention.
In Fig. 1, the 1st, be the film roll of the film 2A of three-decker, these three layers are: cover layer (below, omit " layer ") 2a; Resist thin layer (be the adhered thin film layer, below, omit " the layer ") 2b that cementability is arranged; And the basis film layer (below, omit " layer ") 2c, film 2A begins from the inboard to be wrapped on the film roll 1 according to the order of cover film 2a, resist film 2b, basis film 2c.The 3rd, the takers-in that the cover film 2a that peels off from film 2A with separation bar 4 is reclaimed.In the drive unit (for example motor) of film roll 1 and takers-in 3, be provided with surplus according to the film 2A on the film roll 1, carry out the function of the torque adjustment of motor, make the tension force of film 2A certain, carry.
The 5th, the step roller is provided with position regulating function in the step roller 5, is used for carrying out the adjustment of the tension force (back tension) of the film 2b that resist film 2b after cover film 2a peels off and basis film 2c be double-layer structure.
The 6th, the film transfer member, it makes the cylinder 10 of rear end retaining member 9 move left and right when having the front end retaining member 7 of film 2B, the rear end retaining member 9 that makes cylinder 8 that front end retaining member 7 moves up and down, film 2B and front end retaining member 7 to move up and down, film transfer member 6 moves up and down by the rotation with servomotor 11 direct-connected spiral shell rods 12.
As shown in Figure 2, the vacuum chamber of several separation is arranged in the inside of front end retaining member 7, above (among Fig. 1 left side face) adsorption hole is arranged, this vacuum chamber is communicated with vavuum pump by intermediate valve, thus the front end of film 2B can be adsorbed on front end retaining member 7 above.In addition, be provided with the pressure sensor that monitors vacuum state, causing the absorption position skew of film 2B, film not to be positioned under the situation above the adsorption hole for a certain reason, vacuum pressure descends, so can monitor the adsorbed state of film.
Rear end retaining member 9 is identical with front end retaining member 7, also there is vacuum chamber inside, above (among Fig. 1 left side face) adsorption hole is arranged, be provided with the pressure sensor that monitors vacuum state, causing the absorption position skew of film 2B for a certain reason, film 2B is not arranged under the situation of (face in Fig. 1 left side) above the adsorption hole, and vacuum pressure descends, and can monitor the adsorbed state of film 2B.Adsorption hole disposes orthogonally with respect to the film throughput direction, the direction of the described from behind crimping roller 14 1 lateral step rollers 5 of the size of adsorption hole slowly diminishes, when the rear end of film 2B is carried on rear end retaining member 9 sleekly, by switching vacuum at leisure, can both be adsorbed maintenance until the rear end of film 2B.In addition, along being provided with groove, as using with the cutter bearing of cutter 13 (with reference to Fig. 1) when width cuts off film 2B with the width of the throughput direction quadrature of the film 2B direction of paper (among the Fig. 1 perpendicular to).
Top ((among Fig. 1 left side face) 6 of rear end retaining member 9 becomes the contact plane to the outer peripheral face part in the left side of crimping roller 14 in Fig. 1, when front end retaining member 7 moves up and down, utilize cylinder 10 interference-free in Fig. 1 to move along left and right directions.In addition, in front end retaining member 7, also can utilize cylinder 8 to carry out moving of above-below direction, be provided with barrier structure, so that can adjust and the described contact position that is the crimping roller 14 of open state in back.
Like this, film transfer member 6 utilizes servomotor 11, to be transported near the crimping roller 14 (Fig. 1 from top to bottom) with the tangent plane of the periphery of crimping roller 14 abreast from the film 2B that film roll 1 is supplied with through step roller 5 exactly, and in course of conveying, utilize cutter 13 broad ways that film 2B is cut off.
Each paired crimping roller 14 can be configured in movably the transport path that constitutes by a plurality of conveying rollers 15 about so that from above-below direction clamping conveying roller 15 substrate conveying PB from left to right in the drawings.
The above-below direction that is carried out each crimping roller 14 by not shown cylinder moves (switching).Though not shown, the sensor that will detect the front end of the substrate P B in carrying is arranged between the conveying roller 15 in close crimping roller 14 entrance sides (left side among Fig. 1).Conveying roller 15 can be from detect conveying the position of front end of substrate P B carry to the position arbitrarily under the crimping roller 14 and stop.
Neutralizer 19 is configured in the right side of the crimping roller 14 of dust cover 18 inside.From electrode 16 electric charge (for example negative electrical charge) is supplied with film 2B, if successively film 2B is sticked on repeatedly on a plurality of substrate P B on the transport path with crimping roller 14, just then on the silastic surface of crimping roller 14 with the identical high pressure of charge polarity of having gone up and supplied with film 2B from electrode 16.So supplied with between the electric charge that the silastic surface of the electric charge of front-end and back-end of film 2B and crimping roller 14 is detained the repulsion effect takes place, the front-end and back-end of film 2B can not closely contact on crimping roller 14 (silicon rubber) surface.
Therefore, as neutralizer 19, sharply the descend self-discharge type of usefulness of the voltage make on the crimping roller 14 is set removes brush.In addition, both can remove brush and use electro-dissociator, also electro-dissociator can only be set with the self-discharge type.These electro-dissociators produce that (that is) electric charge, with the opposite polarity of being detained on the silastic surface of crimping roller 14 is so can remove effectively low electrified voltage with the opposite polarity of the front-end and back-end of supplying with film 2B.When using electro-dissociator, dry when emitting ion, can on a large scale, remove.With regard to the direction of rotation of crimping roller 14, the upstream side position of the outer peripheral face of the crimping roller 14 by neutralizer 19 being arranged on the leading section that keeps film 2B and rearward end, can often keep identical crimping roller surface state, film 2B is stably carried out Electrostatic Absorption.
The 20th, film keeps rod, keeps the rearward end of cut film 2B by absorption, until the electrode 16 of the left that utilizes crimping roller 14 film 2B is closely contacted till on the outer peripheral face of crimping roller 14, keeps the film rear end always.Film keeps the periphery configuration of rod 20 near crimping roller 14, can be tangent plane (face of the tangential direction of film 2B and the crimping roller 14) parallel in shape with crimping roller 14, near the space that does not need to begin the upstream side with the substrate throughput direction from the point of contact of crimping roller periphery and substrate conveyor surface roughly be similar shape.In addition, film keep rod 20 for fear of with the interference of front end retaining member 7, when the front end of handing-over film 2B, keep out of the way the upside of crimping roller 14.
The 21st, surface temperature is maintained second crimping roller with the temperature of the surface temperature same degree of crimping roller 14, be used for as required, from the pressurization of basis film 2c one side, improve the tight exposure level of resist film 2b and substrate P B.In addition, reach in the surface temperature that makes second crimping roller 21 under the situation more than the surface temperature of crimping roller 14, resist film 2b maintains the temperature that heat fusing does not take place, polluted second crimping roller 21 of resist film 2b that the surface is melted can not take place with follow-up substrate contamination, perhaps, make that the photoetching treatment in the follow-up operation is not easy to carry out because the thickness of resist film 2b reduces.
The 23rd, the control device of control apparatus for film adhesion, inside is equipped with data such as the bonding length of memory films 2B and device is driven the memory (RAM) of motor constant etc. of usefulness and the memory (ROM) of the software program that storage is pasted about film, subsidiaryly shows the data such as bonding length of film 2B, device is driven the monitor picture 24 of the motor constant etc. of usefulness; And the keyboard 25 used of the memory of input control device 23 (RAM) data.
In addition, the software program of pasting about film is to carry out program that the job step of this device uses and the operation screen program that setting data is used on monitor picture 24 etc.
In addition, though not shown, before substrate P B arrives crimping roller 14, under the state that is heated in advance with the temperature of the surface temperature same degree of crimping roller 14, carry by conveying roller 15.
As this pre-heating mean, adopt the radiation heating that produces by infrared heater and the conduction heating that produces by the roller heater etc.
Below, according to the work of process description apparatus for film adhesion shown in Figure 3.
During the work beginning, carry out the film stickup work shown in the step (following note is simply made " S ") 100 and prepare.Prepare S100 as film stickup work,, give separation bar 4, step roller 5, peel off cover film 2a by manually pulling out film 2B from film roll 1.The cover film 2a of being stripped from is wrapped on the winding roller 3.
As shown in Figure 1, peeling off becomes the front end that two-layer film 2B was drawn out and arrived front end retaining member 7 and is arranged in the rear end retaining member 9 of top position behind the cover film 2a, and vacuum suction is on the upper surface of front end retaining member 7 and rear end retaining member 9.Step roller 5 moves to upper side position shown in Figure 1, and not shown motor makes film roll 1 and winding roller 3 rotations, makes the tension force of film 2A certain.
By the slot part of rear end retaining member 9, Yi Bian cutter 8 is moved along the width of film 2B, broad ways is cut off film 2B to cutter 8 on one side.Stopped adsorbing the vacuum suction of the rear end retaining member 9 of film 2B, the cut end of the film 2B on the rear end retaining member 9 is discarded.At this moment, film 2B from the front end of front end retaining member 7 to the back-end retaining member 9 stretch out under the state about 10mm by vacuum suction on front end retaining member 7.So far film stickup work is prepared S100 and is finished, and secondly, enters the film handing-over and handles S200.
Handle among the S200 in the film handing-over, as shown in Figure 2, utilize the vapour 10 that is arranged on the film transfer member 6 to drive, rear end retaining member 9 is kept out of the way to the right.In addition, also make film keep rod 20 to keep out of the way the upside of crimping roller 14.Then, utilize servomotor 11 to make 12 rotations of spiral shell rod, the tangent plane that makes film transfer member 6 be parallel to the periphery of crimping roller 14 moves (moving along the vertical direction) in Fig. 1.At this moment, a pair of crimping roller 14 separately becomes with inner heater and carries out heated state.
Then, front end retaining member 7 is moved, so that the front end of film 2B becomes the position, point of contact (front position of the film 2B when film 2B becomes the tangential direction of crimping roller 14) of the crimping roller 14 of upside with cylinder 8.Here, from electrostatic generator 17 high pressure is added on the electrode 16, between electrode 16 and crimping roller 14, the fore-end of the film 2B about the 10mm that stretches out from front end retaining member 7 is charged.
If crimping roller 14 Electrostatic Absorption that the fore-end of film 2B is grounded then stop to apply high pressure from electrostatic generator 17 to electrode 16, stop the vacuum attraction of front end retaining member 7, with the absorption maintenance release of film 2B.In the case, by with the tangent plane (film 2B becomes the face of the tangential direction of crimping roller 14) of crimping roller 14 front end of handle thin films 2B abreast, can not give crimping roller 14 with uniform Electrostatic Absorption power with having wrinkle.
After the handing-over of film 2B, crimping roller 14 beginnings are transported to downside along the transport path direction rotation of the substrate P B that is made of conveying roller 15 with the film 2B that adsorbs.In the time of with the conveying beginning, the motor torque power of the drive unit of film roll 1 and winding roller 3 weakens, and in addition, makes step roller 5 move to downside.By with the synchronously mobile step roller 5 of film transporting velocity, the back tension of film 2B (tension force) weakens, the conveying of auxiliary 14 couples of film 2B of crimping roller.
In general, the Electrostatic Absorption power of the film 2B that crimping roller 14 produces with voltage be directly proportional, with voltage be directly proportional with the adsorption area of crimping roller 14 and film 2B.The leading section of 14 adsorbent thin film 2B of crimping roller, so be weak with voltage, i.e. weak Electrostatic Absorption power, after film was given crimping roller 14, the film conveying was labile state, weaken the back tension of film 2B, utilize the rotation of crimping roller 14 to carry out film 2B easily and carry to substrate P B one side.
Otherwise the angle of batching along with 14 pairs of films of crimping roller increases, the adsorption area of crimping roller 14 and film B increases, and Electrostatic Absorption power strengthens, and the maintenance of film 2B is stable.Step roller 5 is the membrane tension adjustment units that can weaken the back tension of film 2B, can utilize (not shown)s such as transmission mechanism to move up and down.
When sticking on film 2B on the substrate surface, step roller 5 is positioned at upside, when being transported to film 2B under the crimping roller 14 with crimping roller 14, makes step roller 5 move to downside.At this moment, synchronously move, weaken the back tension of film 2B, can assist the conveying of the film 2B that crimping roller 14 carries out by making step roller 5 and the transporting velocity of film 2B.
In addition, when replacing step roller 5, utilize drive unit (for example, motor) to make film roll 1 and winding roller 4, weaken the back tension of film 2B, also can assist the conveying of the film 2B that crimping roller 14 carries out along the winding direction rotation with irremovable fixing guide roller.
According to umber of pulse, confirm because the rotation of crimping roller 14, whether the front end of film 2B arrives the following central authorities of the crimping roller 14 of upside, stops the rotation of crimping roller 14 in the time of confirming from the encoder (not shown) that main shaft had of crimping roller 14.
In addition, before the conveying of the film 2B that the crimping roller 14 by upside carries out begins, stop the absorption of the film 2B to be undertaken by front end retaining member 7, after in the conveying of the film 2B that the crimping roller 14 by upside carries out, front end retaining member 7 being returned in the upward direction with cylinder 8, rear end retaining member 9 is moved to the left returns original state, rear end retaining member 9 and the front end retaining member of keeping out of the way 7 returns the transfer position of film 2B side by side.After this, with servomotor 11 film transfer member 6 is moved to the off-position of film 2B.
Handle among the S200 in the film handing-over, carry out substrate orientation treatment S 300 simultaneously.
In substrate orientation treatment S 300, substrate P B is preheating to the temperature with the surface temperature same degree of crimping roller 14, moves from left to right in Fig. 1 with conveying roller 15.In the case, detect amount of movement, when the front end of film 2B central below the film of the leading section on the substrate P B is pasted being positioned on starting position and the upside crimping roller 14 is consistent, temporarily stop the mobile of substrate P B with not shown sensor.
After this, carry out film and paste processing S400.
Paste among the processing S400 at film, crimping roller 14 is moving up and down along the direction of substrate P B up and down, with two crimping rollers, 14 clamping substrate P B, the front end hot pressing of film 2B is received on the substrate P B.In addition, make step roller 5 return original state (upside among Fig. 1), prevent 14 that from step roller 5 to crimping roller film 2B is lax.At this moment, also the temporary transient back tension of enhanced film roller 1 prevents that film 2B is lax.
Secondly, make film keep rod 20 to move to become between the electrode 16 and crimping roller 14 to the film rear end delivery position of crimping roller 14, behind the mobile end, keep 20 pairs of rods to be positioned at film with film and keep the film 2B in excellent 20 left sides to carry out weak vacuum suction.After this, substrate P B rotation in two crimping roller 14 clampings, to right-hand conveying, makes film 2B keep slip on the rod 20 at film on one side, Yi Bian the film 2B hot pressing on the crimping roller 14 is received on the substrate P B substrate P B.
For film 2B is slided easily, keep the surface of rod 20 to carry out surface treatment with PTFE (polytetrafluoroethylene (PTFE)) to film, perhaps also can use engineering plastics (MC nylon) to form the surface.Because substrate P B is preheated, so resist film 2b can not seize heat when contacting with substrate P B, keep the state that has softened a little, pressurizeing by the heating of crimping roller 14 is secured on the upper surface of substrate P B.
In addition, the film transfer member 6 in film stickup processing S400 is carried out film and is cut off processing S500 in crimping roller 14 1 side shifting processes.
Cut off among the processing S500 at film, film transfer member 6 begins to move to crimping roller 14 directions, with the synchronization of crimping roller 14 before passing through on the cut-out groove of the position of the rear end that becomes film 2B at rear end retaining member 9 at leisure.The film portion that connects the rear end that becomes predefined film stickup amount in (stickup) process at film hot-pressing on the cut-out groove of rear end retaining member 9 by the time, keep film 2B by front end retaining member 7,9 absorption of rear end retaining member.Whether the position of rear end that becomes film 2B from cutting off the judgement that groove has passed through, and confirmed according to the umber of pulse of the encoder that is had from the main shaft of film roll 1 or crimping roller 14 etc.
The cut-out of film is carried out like this: arrive in the moving process of film front end delivery position at film transfer member 6, cutter 13 broad ways are moved, cut off film 2B.The width of film 2B (2A) is consistent with the width of wanting to stick on the substrate P B, is the form that sticks on the substrate surface.
After film 2B cuts off, the rearward end that is keeping film 2B of adsorbing rear end retaining member 9 moves to the right keeps out of the way, but because film 2B is transported to substrate P B one side with crimping roller 14, separate on one side so on rear end retaining member 9, slide on one side, only utilize film to keep rod 20 to carry out weak vacuum suction and keep.
Separation is slided in the rear end of film 2B on film maintenance rod 20 before, high pressure is added on the electrode 16 once more by electrostatic generator 17, electric charge is supplied with the rear end that film keeps the film 2B on the rod 20, the rear end of film 2B keeps rod 20 to leave from film, from the place of moving to crimping roller 14 successively by Electrostatic Absorption to crimping roller 14.
Passed through the moment of electrode 16 in the rear end of film 2B, stopped applying high pressure from electrostatic generator 17 to electrode 16, film keeps rod 20 to keep out of the way the upside of crimping roller 14.
Therefore, the rear end of film 2B is kept to the final, can give crimping roller 14, the rear end of film 2B does not hang down on the substrate P B, can be on one side applies certain tensile force to the rear end from the front end of film 2B, Yi Bian stick on the substrate P B.
Here, illustrate that the film 2B that undertaken by crimping roller 14 is to the stickup of substrate P B and the relation of the surface temperature on the crimping roller 14.
The surface temperature of crimping roller 14 maintains resist film 2b and begins in the temperature range of softening degree, if from basis film 2c one side film 2B is being pressurizeed on substrate P B with crimping roller 14 under this temperature, then resist film 2b is heated from crimping roller 14, soften a little and the raising cementability, closely sticked on the substrate P B.
In order to satisfy resist film 2b and the desired function of basis film 2c, it is low that the softening beginning temperature that constitutes the resist film 2b of film 2B in general begins temperature than the distortion of basis film 2c, in order to improve the tight contact of resist film 2b to substrate P B, if making the surface temperature of crimping roller 14 is to make basis film 2c begin the temperature of deformation extent, then crimping roller 14 is when the front end of front end retaining member 7 handing-over film 2B carries out Electrostatic Absorption, distortion such as flexible and fluctuating take place in the front end of film 2B because of being heated, reduce with the contact area of crimping roller 14, can not keep sufficient Electrostatic Absorption power in the conveying.Make the operation of step roller 5 to crimping roller 14 1 side shiftings, even relax back tension, the front end of film 2B also may be peeled off from crimping roller 14.
Because such situation, the surface temperature of crimping roller 14 should the needed resist film 2b that makes begins in the temperature range of softening degree on the substrate P B in that resist film 2b is sticked on, do not cause basis film 2c distortion, therefore crimping roller 14 adsorb the front end and the conveying that keep film 2B reliably and sticks on the substrate P B, can make crimping roller 14 play desired original effect.
In crimping roller 14 sticks on film 2B heating pressure process on the substrate P B because resist film 2b is softening a little, so even on the surface of substrate P B owing to there be some concavo-convex that printed wiring film etc. produces, can residual bubble and can closely contact yet.
The substrate 14 that the film of the lip-deep shape of desiring to stick on the PB substrate is carried out thermo-compressed is transported to the downstream along with the rotation of conveying roller 15, but in its way, second crimping roller 21 is arranged, this second crimping roller 21 maintains temperature with the surface temperature same degree of crimping roller 14 with surface temperature, again to agent film 2b heating pressurization against corrosion, improve tight exposure level by basis film 2c with substrate P B.
Though basis film 2c heats with crimping roller 21, resist film 2b can not melt out, and flatness is kept on the surface of basis film 2c, even carry out photoetching treatment in follow-up operation, can not cause that refraction waits the optics obstacle yet.
According to the specification of employed film 2A (2B), if the heating that elementary crimping roller 14 carries out pressurization fully, then crimping roller 21 stops heating, and is open dormant state, as required, also can make crimping roller 21 work.
Then, among the judgment processing S600 that finishes whether, judged whether to transport next new substrate P B,, then returned the film handing-over and handle S200, carried out the work of treatment of above explanation repeatedly if next substrate P B is arranged.
As mentioned above, basis film 2c can not cause distortion, with crimping roller 14 leading section and the rearward end of adsorbent thin film reliably, to desire with crimping roller 14 paste shape film leading section to the rearward end paste List on the surface of substrate P B, so do not have step etc. on the film of pasting, process smoothly.In addition, stick in the leading section of the film on the substrate P B and the rearward end and wrinkle and bubble can not take place.
Apparatus for film adhesion is in the rotary course of crimping roller 14, utilization is positioned at the neutralizer 19 of upstream side with respect to electrode 16, silastic surface to crimping roller 14 removes electricity, and crimping roller 14 keeps the identical surface state of current potential, the front-end and back-end of energy Electrostatic Absorption film 2B.In addition, if electricity is removed on the surface that utilizes 19 pairs of neutralizers to paste the substrate P B of film simultaneously, even it is also passable not remove electric treatment then.Neutralizer 19 also can keep rod 20 to remove to film when film maintenance rod 20 is positioned at the upside of crimping roller 14.
Can not carry continuously at substrate P B, and when the substrate wait state takes place, make crimping roller 14 rotations, often silastic surface be removed electricity and also can.
In the example of above explanation, although understand film sticked on mechanism and the method for using on the upper surface of substrate P B, but under the situation on the lower surface that film is sticked on substrate P B, as shown in Figure 4, by being configured in the downside of transport path, can carry out the stickup on the base lower surface with mechanism's identical mechanism that upper surface is pasted usefulness.
In addition, in Fig. 4, the element that has same function with element shown in Figure 1 is represented with identical Reference numeral.
In the example of Fig. 4, make crimping roller 21 near crimping rollers 14, the surface temperature of substrate P B do not descend during in, with crimping roller 21 heating, seek power saving.
In Fig. 1 or example shown in Figure 4, also can omit film and keep rod 20, use rear end retaining member 9 to carry out of the handing-over of the rear end of film 2B to crimping roller 14 near crimping roller 14.In the case,, come the influence of the electric charge supply of self-electrode 16 hardly, so also do not have no relations even do not remove electricity because rear end retaining member 9 is positioned at the outside of dust cover 18.
In addition, in Fig. 1 or example shown in Figure 4, the sensor that detects the surface potential of crimping roller 14 is arranged on the crimping roller 14,, then makes neutralizer 19 work, can seek power saving if reached more than the desirable current potential.
In addition, can when only give crimping roller 14, film not carried out Electrostatic Absorption, and make film all surfaces static electrification yet, crimping roller is adsorbed the front end of film and rear end.
In addition,, also can make the film static electrification, adsorb maintenance with front end retaining member 7 and rear end retaining member 9 with identical with the method for crimping roller 14 adsorbent thin film.
If adopt the present invention of above explanation, then step ground can not taken place leading section to the rearward end of film and flatly stick on the substrate.
In addition, if adopt the present invention, wrinkle and bubble then can not take place and leading section to the rearward end of film is sticked on the substrate.
Claims (11)
1. method for adhesion of film, from basis film layer one side, utilize crimping roller, to the film pressurization of adhesive type shape with adhered thin film layer and basis film layer double-layer structure, adhered thin film layer one side sticked on the substrate, and this method for adhesion of film is characterised in that:
Electric charge is supplied with the leading section of the film of adhesive type shape, the electrostatic force that utilization is worked between the two at the outer peripheral face of this leading section and this crimping roller, this leading section is remained on the outer peripheral face of this crimping roller, rotation by this crimping roller, the film of this adhesive type shape is transported on the substrate, make this leading section consistent with the stickup starting position of substrate, film with this adhesive type shape sticks on the surface of substrate simultaneously, electric charge is also supplied with the rearward end of the film of this adhesive type shape, the electrostatic force that utilization is worked between the two at the outer peripheral face of this rearward end and this crimping roller, this rearward end is remained on the outer peripheral face of this crimping roller, utilize the rotation of this crimping roller, the film paste List of this adhesive type shape that will be from this leading section to this rearward end is on substrate, when this crimping roller rotation, the upstream position of this crimping roller on the outer peripheral face that this leading section and rearward end is remained on this crimping roller removes this crimping roller.
2. method for adhesion of film according to claim 1, it is characterized in that: the leading section of the film of adhesive type shape is remained on the outer peripheral face of this crimping roller, in the rotation that utilizes this crimping roller and with the film of this adhesive type shape be transported on the substrate during, weaken the tension force on the film that is added in the adhesive type shape.
3. method for adhesion of film according to claim 1 is characterized in that: this crimping roller maintains this adhered thin film layer with surface temperature to begin in the temperature range of softening degree.
4. method for adhesion of film according to claim 1 is characterized in that: the surface temperature of this crimping roller maintains below the temperature that makes this basis film layer distortion.
5. method for adhesion of film according to claim 1, it is characterized in that: by the rotation of this crimping roller, with the film paste List of this adhesive type shape after on the substrate, use second crimping roller that is heated to its surface temperature more than the temperature with the surface temperature same degree of this crimping roller and maintains the temperature that this adhered thin film layer can not melt out again, to this substrate pressurization, improve the tight exposure level of this adhered thin film layer and this substrate from this basis film layer one side.
6. method for adhesion of film according to claim 1, it is characterized in that: on this substrate that has been heated in advance with the temperature of the surface temperature same degree of this crimping roller, rotation by this crimping roller, make this leading section of film of this adhesive type shape consistent with the stickup starting position on the substrate, the film with this adhesive type shape sticks on the surface of this substrate simultaneously.
7. apparatus for film adhesion, from basis film layer one side, utilization is arranged in the crimping roller of the transport path of substrate, film pressurization to adhesive type shape with adhered thin film layer and basis film layer double-layer structure, adhered thin film layer one side sticked on this substrate, and this apparatus for film adhesion is characterised in that:
Comprise: have the crimping roller that keeps the function of this film that is the adhesive type shape with electrostatic force; Keep this leading section that is the film of adhesive type shape, this leading section is given the film front end retaining member of the outer peripheral face of this crimping roller; Keep this rearward end that is the film of adhesive type shape, this rearward end is given the film rear end retaining member of the outer peripheral face of this crimping roller; Electric charge is supplied with the leading section of this film that is the adhesive type shape and the unit of rearward end; And when the rotation of this crimping roller, the upstream position of this crimping roller on the outer peripheral face that this leading section and rearward end is remained on this crimping roller removes electric unit to this crimping roller,
This crimping roller with electrostatic force with this leading section remain on remove electricity its outer peripheral face on, rotation by this crimping roller, this film that is the adhesive type shape is transported on the substrate, make this leading section consistent with the stickup starting position of substrate, the film that simultaneously this is the adhesive type shape sticks on the surface of substrate, on the outer peripheral face of this crimping roller that this rearward end has also been utilized electrostatic force to remain on to remove electricity, by the rotation of this crimping roller, this film paste List that is the adhesive type shape that will be from this leading section to this rearward end is on substrate.
8. apparatus for film adhesion according to claim 7 is characterized in that: the above-mentioned electric unit that removes is to remove at least a in brush and the electro-dissociator.
9. apparatus for film adhesion according to claim 7 is characterized in that: this crimping roller maintains this adhered thin film layer with surface temperature to begin in the temperature range of softening degree.
10. apparatus for film adhesion according to claim 7 is characterized in that: the surface temperature of this crimping roller maintains below the temperature that makes this basis film layer distortion.
11. apparatus for film adhesion according to claim 7, it is characterized in that: the downstream of this crimping roller in the transport path of this substrate, has second crimping roller that is heated to its surface temperature more than the temperature with the surface temperature same degree of this crimping roller and maintains the temperature that this adhered thin film layer can not melt out, this substrate is pressurizeed from this basis film layer one side with this second crimping roller, improve the tight exposure level of this adhered thin film layer and this substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP030264/2003 | 2003-02-07 | ||
| JP2003030264A JP3774701B2 (en) | 2003-02-07 | 2003-02-07 | Film sticking method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1519095A CN1519095A (en) | 2004-08-11 |
| CN1307033C true CN1307033C (en) | 2007-03-28 |
Family
ID=32957200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031466583A Expired - Fee Related CN1307033C (en) | 2003-02-07 | 2003-07-10 | Thin film sticking method and device thereof |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3774701B2 (en) |
| KR (1) | KR100550649B1 (en) |
| CN (1) | CN1307033C (en) |
| TW (1) | TWI236965B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101518949A (en) * | 2008-02-29 | 2009-09-02 | 日东电工株式会社 | Adhesive film position detector and adhesive film joining apparatus |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4780559B2 (en) * | 2005-12-14 | 2011-09-28 | 株式会社日立プラントテクノロジー | Film sticking method and apparatus |
| JP2007245438A (en) * | 2006-03-15 | 2007-09-27 | Hitachi Plant Technologies Ltd | Film pasting-up method and film pasting-up apparatus |
| KR100749152B1 (en) * | 2006-05-09 | 2007-08-14 | (주)화백엔지니어링 | Device for rewinding film |
| KR100743398B1 (en) * | 2006-06-13 | 2007-08-02 | (주)두일알에스 | Apparatus for laminating panel and method for the same |
| CN103426805B (en) * | 2012-05-15 | 2017-09-19 | 芝浦机械电子株式会社 | Tape member feedway, adhesive tape joining apparatus and tape member supply method |
| US9067374B2 (en) * | 2012-11-30 | 2015-06-30 | The Boeing Company | Method and apparatus for applying film material to elongate members |
| CN104210693A (en) * | 2014-08-26 | 2014-12-17 | 浙江万江木业有限公司 | Special film pasting device for veneer |
| JP5885813B1 (en) * | 2014-12-03 | 2016-03-16 | 日東電工株式会社 | Manufacturing method and manufacturing apparatus for optical display device |
| CN107949180B (en) * | 2017-12-18 | 2020-03-24 | 厦门市铂联科技股份有限公司 | FPC (Flexible printed Circuit) cover film method and device |
| JP7020189B2 (en) * | 2018-03-02 | 2022-02-16 | トヨタ自動車株式会社 | Film transfer device, film transfer method, and film pasting device |
| CN108556333B (en) * | 2018-06-15 | 2024-03-26 | 嘉兴市品鼎电器有限公司 | Tectorial membrane device of LED lamp light guide plate |
| CN111438927A (en) * | 2020-04-21 | 2020-07-24 | 徐州优元防静电设备有限公司 | Static electricity removing type film sticking machine |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4518886A (en) * | 1982-01-27 | 1985-05-21 | Mitsubishi Denki Kabushiki Kaisha | Charging generator having waterproof cover |
| US5207562A (en) * | 1992-04-30 | 1993-05-04 | The Marley Company | Submersible pump with handle providing electrical connection and oil port |
| US5345124A (en) * | 1992-01-21 | 1994-09-06 | Robert Bosch Gmbh | Connecting cover for electric fuel pump |
| JPH1074560A (en) * | 1996-08-29 | 1998-03-17 | Tokai Kogyo Kk | Case integrated connector and its forming method |
| US20010009059A1 (en) * | 2000-01-21 | 2001-07-26 | Kazuhiro Chiku | Method and device for manufacturing pressure detecting apparatus |
-
2003
- 2003-02-07 JP JP2003030264A patent/JP3774701B2/en not_active Expired - Fee Related
- 2003-05-30 TW TW092114756A patent/TWI236965B/en not_active IP Right Cessation
- 2003-07-10 CN CNB031466583A patent/CN1307033C/en not_active Expired - Fee Related
- 2003-07-30 KR KR1020030052640A patent/KR100550649B1/en not_active IP Right Cessation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4518886A (en) * | 1982-01-27 | 1985-05-21 | Mitsubishi Denki Kabushiki Kaisha | Charging generator having waterproof cover |
| US5345124A (en) * | 1992-01-21 | 1994-09-06 | Robert Bosch Gmbh | Connecting cover for electric fuel pump |
| US5207562A (en) * | 1992-04-30 | 1993-05-04 | The Marley Company | Submersible pump with handle providing electrical connection and oil port |
| JPH1074560A (en) * | 1996-08-29 | 1998-03-17 | Tokai Kogyo Kk | Case integrated connector and its forming method |
| US20010009059A1 (en) * | 2000-01-21 | 2001-07-26 | Kazuhiro Chiku | Method and device for manufacturing pressure detecting apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101518949A (en) * | 2008-02-29 | 2009-09-02 | 日东电工株式会社 | Adhesive film position detector and adhesive film joining apparatus |
| CN101518949B (en) * | 2008-02-29 | 2013-01-23 | 日东电工株式会社 | Adhesive film position detector and adhesive film joining apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100550649B1 (en) | 2006-02-08 |
| KR20040073934A (en) | 2004-08-21 |
| CN1519095A (en) | 2004-08-11 |
| TW200415003A (en) | 2004-08-16 |
| TWI236965B (en) | 2005-08-01 |
| JP3774701B2 (en) | 2006-05-17 |
| JP2004237636A (en) | 2004-08-26 |
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Owner name: HITACHI,LTD. Free format text: FORMER OWNER: HITACHI PLANT TECHNOLOGIES LTD. Effective date: 20140310 Owner name: HITACHI PLANT TECHNOLOGIES LTD. Free format text: FORMER OWNER: HITACHI SANGYO CORP. Effective date: 20140310 |
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