CN1279327C - Nano laser measuring rule and subdivision method for nano measurement realization - Google Patents
Nano laser measuring rule and subdivision method for nano measurement realization Download PDFInfo
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- CN1279327C CN1279327C CN 200410088819 CN200410088819A CN1279327C CN 1279327 C CN1279327 C CN 1279327C CN 200410088819 CN200410088819 CN 200410088819 CN 200410088819 A CN200410088819 A CN 200410088819A CN 1279327 C CN1279327 C CN 1279327C
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Abstract
The present invention relates to a nanometer laser measuring ruler and a subdivision method for realizing nanometer measurement, which belongs to the technical field of laser precise measurement. The nanometer laser measuring ruler is characterized in that a precise micro-displacement piezoelectric transducer, namely a PZT which is capable of changing the length of a cavity together with an object to be measured is additionally arranged on the present invention on the basis of a displacement self-sensing HeNe laser system with a cat eye as a cavity mirror. After output quadrature polarized light is split by a polarization spectroscope, the output quadrature polarized light is projected onto two photodetectors, and a displacement measuring result is obtained from the treatment of the calculation of large numbers and the measurement of decimals by a subsequent circuit, and is output. Before the present invention carries out measurement, errors of a start pulse in the prior art are eliminated by a method of outputting isocandela electricity. The number of cycles of power tuning curves is counted in the process of the displacement measurement in a large range. The micro-displacement piezoelectric transducer is finally used for measuring the last uncorrected cycle, namely that decimals are measured. Consequently, the present invention reaches higher precision and higher resolution.
Description
Technical field:
The invention belongs to precise measurement technique field based on laser.
Background technology
Chinese patent " displacement self-sensing HeNe Optical Maser System and its implementation " (ZL 199103514.3) is by several laser physics phenomenons of comprehensive utilization, as laser frequency division phenomenon, mode of laser warfare, the tuning phenomenon of laser power etc., with a laser longitudinal module at interval, be divided into (the o light district, bright dipping zone that 4 width equate and have different polarization states, o light e light coexistence, e light district, no light zone), thus making a common HeNe laser instrument become does not a kind ofly utilize interference but has the simple relatively again displacement sensing instrument of self calibrating function.This method has the displacement measurement resolution (for wavelength is the HeNe laser instrument of 0.6328 μ m, and λ/8 are 79nm) of λ/8.
The Chinese invention patent application " is made the displacement self-sensing HeNe Optical Maser System of chamber mirror " with opal (application number: 200310115540.6) use " opal " to replace a catoptron in " displacement self-sensing HeNe Optical Maser System ", overcome in the last patent laser cavity imbalance that causes because of the swing of chamber mirror fully, the measurement range of system has been brought up to tens millimeters (resolution still is 79nm) and instrumentation.According to theoretical analysis and experimental verification, the measurement range that all can enough make system that uses of " opal " reaches 30,40 even 50mm, but still is difficult to satisfy for user's requirements at the higher level (more high resolving power, more high precision).Systematic measurement error is mainly from two aspects: 1, the quantization error of instrument, on " displacement self-sensing HeNe Optical Maser System " principle is to measure by the change of polarization state, change in displacement 79nm is represented in the change of polarization state each time, this will cause in the actual measurement process, have the error (2 * 79nm=158nm) of two pulses end to end at least.2, the unequal error that causes in four districts.Strictly speaking, be difficult to make four in the power tuning curve of " displacement self-sensing HeNe Optical Maser System " to distinguish impartially fully, especially, when measurement range becomes big, longitudinal mode spacing has bigger variation with the long variation in chamber, and the bright dipping bandwidth remains unchanged substantially because of the extremely low imbalance characteristic in " opal chamber ", and the unequal situation in four districts this moment will be very obvious.For example, if the discharge pipe range of half inner chamber HeNe laser instrument is 100mm, and chamber length changes between can be from 110mm to 140mm, and when promptly the measurement range of system was 30mm, then the longitudinal mode spacing of laser instrument changed to 1071MHz from 1364 MHz accordingly.Suppose that four districts wait fully when chamber length is 140mm, then when chamber length equals 110mm, no light zone will be wideer than other three districts; The bright dipping bandwidth only occupies (3/4 * 1071)/1364 longitudinal mode spacing, so error is 3 λ/8-0.59 λ/2=50.62nm, this also is a relatively large error.
Summary of the invention
The objective of the invention is on the basis of " making the displacement self-sensing HeNe Optical Maser System of chamber mirror with opal ", utilize system can be traceable to the characteristic and the self calibration ability of optical wavelength, adopt the method for the big number of meter, survey decimal, by increasing the micrometric displacement piezoelectric sensor of a precision, promptly PZT and suitable control circuit segment greatly to the resolution of original system, to realize low cost, high-performance (high resolving power, high precision, surface nanometer-displacement on a large scale).
Nano laser of the present invention is surveyed chi, and it is characterized in that: it contains
Movable measuring staff 6, its end contacts with the object of displacement to be measured;
Full exocoel HeNe laser instrument, contain:
The converse mirror 7 of opal, it links to each other with the other end of movable measuring staff 6;
With the laser cavity of the converse mirror 7 of opal with the optical axis installation, the anti-reflection window 8 and 10 that it contains gain tube 9 and is installed in the gain tube both sides along optical axis direction respectively, wherein the first and second anti-reflection windows 8 or 10 periphery are equipped with afterburning ring, make it become a stress birefringence element, single-frequency laser is become double-frequency laser with two orthogonal polarization orientation;
Concave output mirror 11 is positioned at second anti-reflection window 10 1 sides, exports the crossed polarized light of above-mentioned two frequencies;
Micrometric displacement piezoelectric sensor 12 is adhered to concave output mirror 11 opposite sides, can make concave output mirror 11 do trickle moving along optical axis direction;
Polarization spectroscope 13 is positioned at the outside of quartz ampoule 18 1 ends, separates the pairwise orthogonal polarized light from the common bundle of concave output mirror 11 outputs;
The crossed polarized light of the two bundle different frequencies that two photodetectors 14, reception polarization spectroscope 13 separate;
High-voltage amplifier 16, it and signal processing circuit 15 interconnect;
Nano laser of the present invention is surveyed chi, and its feature also is: it contains movable measuring staff 6, and its end contacts with the object of displacement to be measured, and the other end links to each other with micrometric displacement piezoelectric sensor 12;
Half inner chamber HeNe laser instrument contains:
The converse mirror 7 of opal, it and micrometric displacement piezoelectric sensor 12 adhesion mutually, and can under its effect, do trickle moving;
With the laser tube cavity that the converse mirror 7 of opal is installed with optical axis, it contains gain tube 9 and is installed in the anti-reflection window 8 and the concave output mirror 11 of gain tube 9 both sides respectively along optical axis direction, and wherein anti-reflection window 8 is positioned at a side of the converse mirror 7 of opal;
Crystalline quartz 19, between converse mirror 7 of opal and anti-reflection window 8, it becomes the crossed polarized light with two frequencies to single-frequency laser with the optical axis status, and from concave output mirror 11 outputs;
Flat bracket 20, one sides of upper end open have opening, are slidingly connected with movable measuring staff 6, and opposite side also has opening and links to each other with concave output mirror 11, simultaneously, and the inner bottom surface of flat bracket be connected respectively crystalline quartz 19 and gain tube 9;
Polarization spectroscope 13 is positioned at the bright dipping side of concave output mirror 11, separates the pairwise orthogonal polarized light from the common bundle of concave output mirror 11 outputs;
The crossed polarized light of the two bundle different frequencies that two photodetectors 14, reception polarization spectroscope 13 separate;
High-voltage amplifier 16, it and signal processing circuit 15 interconnect;
Nano laser of the present invention is surveyed chi, signal processing circuit wherein, and it is characterized in that: described signal processing circuit (15) contains:
Current/voltage converter, i.e. I/V converter, its two input ends receive the photo-signal from the output of two photodetectors 14 respectively;
Preposition amplification and wave filter, its two input ends link to each other with two output terminals of I/V converter respectively;
The subtracter of Lian Jieing, zero-crossing comparator and rim detection and shaping circuit successively, wherein, two input ends of subtracter link to each other with o light, the tuning signal output part of e luminous power of preposition amplification and wave filter respectively;
Chuan Jie isolated amplifier, hysteresis loop comparator and direction judgment circuit successively, wherein two of isolated amplifier input ends link to each other with o light, the tuning signal output part of e luminous power of preposition amplification and wave filter respectively, the comparison signal input end of hysteresis loop comparator links to each other with the adjustable voltage output terminal of a resistor voltage divider circuit
With door, its two input ends link to each other with an output terminal of hysteresis loop comparator and the direct impulse output terminal corresponding to high and low isocandela point of rim detection and shaping circuit respectively;
The multidigit decimal add subtract counter, its counting controling signal input end links to each other with the output terminal of direction judgment circuit, its count signal input end with link to each other with the high isocandela point pulse output end of door;
Single-chip microcomputer, its down trigger end INT is oppositely through linking to each other behind the phase inverter with the high isocandela point pulse output end of door, its reset signal output terminal links to each other with the respective input of multidigit decimal plus-minus up-down counter, and its 8 count signal input ends link to each other with the corresponding output end of multidigit decimal add subtract counter; Its 12 bit digital Linear Driving voltage signal output ends link to each other with the driving signal input of high-voltage amplifier after the D/A conversion.The input that its other output terminal shows as number.
Of the present inventionly survey chi and the divided method of the realization nano measurement that proposes based on nano laser, it is characterized in that: it contains successively and has the following steps:
The 1st step:
Zero clearing, the linear driven micrometric displacement piezoelectric sensor 12 of signal processing circuit 15 outputs, the chamber that changes laser instrument is long, is in high isocandela state up to two polarized lights; At this moment, make counter, display zero clearing, and write down the current magnitude of voltage U1 that is added on the micrometric displacement piezoelectric sensor 12;
The 2nd step:
The big number of meter, at this moment, single-chip microcomputer constantly reads the number of the high isocandela point pulse of writing down in the multidigit decimal add subtract counter, multiply by λ/2 again and obtains big numerical value, and λ is an optical wavelength;
The 3rd step:
Single-chip microcomputer judges whether to be in the isocandela dotted state:
If then finish to measure:
If not, then change the output valve of D/A converter, enter and survey the decimal stage, occur until isocandela point, and write down the current magnitude of voltage U2 that is added on the micrometric displacement piezoelectric sensor 12;
The 4th step:
It is superimposed that the above-mentioned decimal shift value that is obtained by voltage change amount U2-U1 on the micrometric displacement piezoelectric sensor is counted the big numerical value that obtains greatly with meter, obtains the final mean annual increment movement measurement result
This method on the basis of " making the displacement self-sensing HeNe Optical Maser System of chamber mirror with opal ", the micrometric displacement piezoelectric sensor of increase, it is long that promptly PZT and object under test change the chamber jointly.The orthogonal polarized light beam of output projects on two photodetectors after the polarization spectroscope beam split then, and is counted big number, surveyed the decimal processing by subsequent conditioning circuit, obtains displacement measurement and output.Before the measurement, it is long that PZT changes earlier the chamber, makes system be in the initial state (exporting high isocandela point) of power tuning curve, eliminated the error (79nm) of initial the 1st pulse in the former patent.Then in the displacement measurement on a large scale, to the power tuning curve the periodicity counting (counting several greatly) of process, survey last cycle that is not calibrated (survey decimal) with PZT at last, thereby can reach more high precision, high resolving power (10～20nm) more.
Description of drawings:
When Fig. 1, same gain tube, the power tuning curve contrast that different cavity is long.
Fig. 2, make " nano laser survey chi " realize the embodiment one of the divided method of surface nanometer-displacement (full outer-cavity structure)
Fig. 3, make " nano laser survey chi " realize the embodiment two (half inner-cavity structure) of the divided method of surface nanometer-displacement
Fig. 4, make " nano laser survey chi " realize the circuit block diagram that adopts in the divided method of surface nanometer-displacement.
Fig. 5, make " nano laser survey chi " realize measuring process process flow diagram in the divided method of surface nanometer-displacement.
Embodiment:
The present invention is based on longitudinal mode spacing of the every variation of laser frequency, the chamber is long to be changed on λ/2 principles, by utilizing the self-alignment characteristic of system, to reach the purpose of big number, survey decimal, the displacement that is an integer λ/2 is by step-by-step counting, the displacement of not enough half wavelength utilizes the micrometric displacement piezoelectric sensor, and promptly PZT measures.Its ultimate principle is:
In standing-wave laser, as described in patent ZL 199103514.3, the long change in the frequency change of laser and chamber satisfied:
V is a laser frequency in the formula, and L is that the chamber is long.By frequency splitting and mode competition, make that any longitudinal mode spacing (Δ) scope is divided into 4 equal portions in the power tuning curve, so can realize the declaring of λ/8 resolution to displacement measurement.But there is following reality in system: along with the long change amount aggravation in chamber, longitudinal mode spacing (Δ=c/2L) will thereupon change, because of the bright dipping bandwidth remains unchanged substantially, must occur as among Fig. 1 a) and b) two kinds of multi-form power tuning curves.Because HeNe laser is the two-frequency laser (birefringence element in the chamber) of a cross polarization in fact in the system, so 1 and 2 just be respectively the power tuning curve that o light and e light form among the figure.There are high isocandela point 3 and low isocandela point 4 between can finding 1 and 2 by figure, and are unequal, will bring error to measurement result by four districts that level threshold 5 is told.
But we can find, no matter evenly whether four districts between any adjacent a pair of high isocandela point, are a longitudinal mode spacing in the curve, the chamber length of correspondence is changed to
C is the light velocity in the formula.I.e. " a frequency longitudinal mode spacing of every change (cycle), long λ/2 that change, chamber ", this point is permanent establishment the, the also basic principle of just segmenting for us.Do not need frequency stabilization in addition in the system, what adopt in above-mentioned two formulas is the notion of mean wavelength.
The invention is characterized in: " the nano laser survey chi " of realizing above-mentioned divided method, by one and half inner chambers or full exocoel HeNe laser instrument, the birefringence element that is used for frequency splitting in the chamber, the micrometric displacement piezoelectric sensor of mirror position, trickle change chamber, be PZT, polarization splitting prism outside the chamber, the formations such as high-voltage amplifier of two photodetectors and corresponding metering circuits and driving PZT.It is characterized in that: one or two chamber mirror of the laser instrument of described half inner chamber or full exocoel all can move along laser axis, and the chamber is long also to be changed thereupon.For the resolution and the precision of nearly step raising systematic survey, different with the front patent is: one of above-mentioned movable chamber mirror and PZT adhesion, because of voltage changes, can in the scope of 1～2 μ m, move, and with the long change of the common control chamber of the displacement of object under test.
Described common control chamber long for object under test by a measuring staff or directly contact the chamber mirror, change its position on a large scale, the whenever mobile λ of this chamber mirror/2, system just produces a count pulse, realizes the big number of meter.PZT then adds to λ/2 with the displacement of last not enough λ/2, according to the voltage that applies, realizes accurate measurement.
Described micrometric displacement piezoelectric sensor, i.e. PZT exports a driven linearity and that amplify through high-voltage amplifier by D/A converter, can linear extendible in the certain voltage scope or can produce a linear displacement after the compensation of machine program as calculated.This PZT has high-resolution bearing accuracy in addition.
Above-mentioned high-voltage amplifier has high stable output (long-time stable and extremely low temperature drift), the fabulous voltage accuracy and the splendid linearity.It can export a stable static direct current output voltage in addition, the change of exporting simultaneously along with D/A, the output of amplifier is the center at one with above-mentioned static direct current output voltage the voltage range internal linear changes that in this voltage range, PZT has favorable linearity.
Embodiment 1:(Fig. 2)
The converse mirror 7 of opal on the movable measuring staff 6 (with the object under test contact, because of displacement is moved) constitutes the HeNe laser instrument of a full exocoel by anti-reflection window 8 and 10 with gain tube 9 and concave output mirror 11.Reinforcing ring on the anti-reflection window 8 makes it become a stress birefringence element, single-frequency laser is become crossed polarized light with two frequencies and from 11 outputs.Concave output mirror 11 sticks in a micrometric displacement piezoelectric sensor, promptly on the PZT 12, can do trickle moving.Crossed polarized light is through projecting respectively on two photodetectors 14 after polarization spectroscope 13 beam split.In circuit 15, light signal changes into electric signal and processed.15 can send the one scan signal through high-voltage amplifier 16 driving PZT 12 in measuring process, simultaneously measurement result are sent 17 to show output.Dividing circuit 15, outside high-voltage amplifier 16 and the display device 17, other parts all are packaged in the quartz ampoule 18.
Embodiment 2:(Fig. 3)
With example 1, the converse mirror 7 of the opal on the movable measuring staff 6 is by the HeNe laser instrument of anti-reflection window 8 and gain tube 9 and concave output mirror 11 formations one and half inner chambers.The frequency splitting of different with Fig. 2 is laser is not by stress birefrin but is caused by crystalline quartz 19.PZT 12 does not link to each other with concave output mirror 11 but is adhered between measuring staff 6 and the opal 7.Laser beam projects on the photodetector 14 after polarizing beam splitter 13 beam splitting equally.Circuit 15 is handled light signal, calculates measurement result and is sent 17 to show output.High-voltage amplifier 16 is subjected to 15 controls, to drive PZT 12.Outside the dividing circuit part, each parts of system are installed on the flat bracket 20.
Concrete block diagram for circuit 15 can be referring to Fig. 4, and system flowchart is referring to Fig. 5.Adopt above-mentioned two kinds of enforcement structures to estimate that resolution can reach 10nm, measurement range is 50mm.
Fig. 4: the circuit block diagram of system.Light signal after I/V conversion, amplification and filtering in 1. locating to form o light, the power tuning curve of e light, after both subtract each other through zero balancing, in the square-wave signal of 2. locating to form saltus step, through rim detection and shaping, each high and low isocandela point just can be in 3. locating to form a direct impulse again.Simultaneously power tuning curve and the comparative level 4. located relatively form high-low level, its can send on the one hand 5. locate by with door, as the gating signal of high isocandela point, declare to signal in the plus-minus counting of 6. locating control counter through direction judgment circuit generation one on the other hand.Through with the door gating after high isocandela point pulse can be used as the count pulse of counter first, also can be at the external interrupt signal of 7. locating to become Single Chip Microcomputer (SCM) system, in zero clearing stage and survey decimal stage, this signal can be used as the basis for estimation that high isocandela point arrives, otherwise change the output of D/A always, voltage after 8. locating to export amplification is to drive PZT, till 7. locating look-at-me to occur.
Method of the present invention contains following steps successively:
1. selection comparative level.Computer control PZT, the autoscan chamber is long, and the intensity of high and low isocandela point (1 light intensity point also is to hang down the isocandela point) in the power tuning curve everywhere in the whole measurement range of real time record.Between the level of all high and low isocandela points, choose an intermediate level value on the boundary, as the comparative level of metering circuit.Like this, the same with " displacement self-sensing HeNe Optical Maser System ", the power tuning curve is divided into 4 districts with different polarization state, with realize systematic survey declare to.
2. system's zeroing.After the start thermal equilibrium, trigger reset button, it is long to change the chamber that system exports a linear voltage (amplifying through high-voltage amplifier) driving PZT by D/A, makes the laser output power tuning curve be positioned at a high isocandela and stop constantly.Counter O reset, digital demonstration zero clearing is measured and is prepared to finish.
3. meter is big counts.Object under test is long because of change in displacement promotion measuring staff changes the chamber, high isocandela point of the every output of laser instrument, and circuit produces a pulse.The order that occurs according to four districts is sent this pulse into up-down counter and is realized adding 1 or subtract 1 operation.
4. survey decimal.When displacement stops to change, judge whether two polarized lights of laser instrument output are in high isocandela point.Otherwise PZT goes up voltage according to the linear plus-minus of sense of displacement, slight push chamber mirror, and it is long to change the chamber, up to the isocandela point occurring, the change amount of recording voltage.By the linear compensation of computing machine, just can obtain the accurate measurement displacement of last not enough half wavelength.
5. result's output.To count big number and survey decimal two parts result stack, net result will be exported.
Fig. 5: nano laser is surveyed measuring process process flow diagram in the chi displacement measurement divided method.Measuring process is divided into three subprocess in fact: zero clearing, big number of meter and survey decimal.A) during zero clearing program output line driven PZT to change the chamber long, system is in exports high isocandela dotted state.Counter O reset this moment, the display zero clearing, and the current PZT of meter record goes up magnitude of voltage U1.The number of the high isocandela point pulse of b) constantly reading in the counter during the big number of meter to be write down multiply by λ/2 and obtains several greatly results.C) the big number of meter finishes, and judges whether to be in high isocandela dotted state, and in this way, then measurement finishes, and carries out the survey decimal otherwise change D/A output, occurs until isocandela point, and writes down current magnitude of voltage U2.With two step result stacks, obtain the final mean annual increment movement result at last.
Claims (4)
1. nano laser is surveyed chi, it is characterized in that, this nano laser is surveyed chi and contained
Movable measuring staff (6), an end of this bar contacts with the object of displacement to be measured;
Full exocoel HeNe laser instrument, contain:
The converse mirror of opal (7), this mirror links to each other with the other end of movable measuring staff (6);
With the laser cavity of the converse mirror of opal (7) with the optical axis installation, anti-reflection window (8) and anti-reflection window (10) that this cavity contains gain tube (9) and is installed in the gain tube both sides along optical axis direction respectively, wherein the periphery of the first anti-reflection window (8) and the second anti-reflection window (10) is equipped with afterburning ring, make it become a stress birefringence element, single-frequency laser is become double-frequency laser with two orthogonal polarization orientation;
Concave output mirror (11) is positioned at second anti-reflection window (10) one sides, exports the crossed polarized light of above-mentioned two frequencies;
The micrometric displacement piezoelectric sensor, promptly PZT (12) is adhered to concave output mirror (11) opposite side, can make concave output mirror (11) do trickle moving along optical axis direction;
Quartz ampoule (18), a side has opening, for movable measuring staff (6) slippage, the opening of opposite side then with micrometric displacement piezoelectric sensor, i.e. PZT (12) adhesion;
Polarization spectroscope (13) is positioned at the outside of quartz ampoule (18) one ends, separately from the pairwise orthogonal polarized light of the common bundle of concave output mirror (11) output;
The crossed polarized light of the two bundle different frequencies that two photodetectors (14), reception polarization spectroscope (13) separate;
Signal processing circuit (15), two input ends of this circuit link to each other with the signal output of two photodetectors (14) respectively;
High-voltage amplifier (16), this amplifier and signal processing circuit (15) interconnection;
Display device (17), this equipment links to each other with signal processing circuit (15).
2. nano laser is surveyed chi, it is characterized in that, this nano laser is surveyed chi and contained
Movable measuring staff (6), an end of this bar contacts with the object of displacement to be measured, and the other end is with the micrometric displacement piezoelectric sensor, and promptly PZT (12) links to each other;
Half inner chamber HeNe laser instrument contains:
The converse mirror of opal (7), this mirror and micrometric displacement piezoelectric sensor, i.e. PZT (12) phase adhesion, and can under its effect, do trickle moving;
With the laser tube cavity of the converse mirror of opal (7) with the optical axis installation, this cavity contains gain tube (9) and is installed in the anti-reflection window (8) and the concave output mirror (11) of gain tube (9) both sides respectively along optical axis direction, and wherein anti-reflection window (8) is positioned at a side of the converse mirror of opal (7);
Crystalline quartz (19), between converse mirror of opal (7) and anti-reflection window (8), this crystalline quartz becomes the crossed polarized light with two frequencies to single-frequency laser with the optical axis status, and exports from concave output mirror (11);
The flat bracket of upper end open (20), a side has opening, is slidingly connected with movable measuring staff (6), and opposite side also has opening and links to each other with concave output mirror (11), simultaneously, the inner bottom surface of flat bracket be connected respectively crystalline quartz (19) and gain tube (9);
Polarization spectroscope (13) is positioned at the bright dipping side of concave output mirror (11), separates the pairwise orthogonal polarized light from the common bundle of concave output mirror (11) output;
The crossed polarized light of the two bundle different frequencies that two photodetectors (14), reception polarization spectroscope (13) separate;
Signal processing circuit (15), two input ends of this circuit link to each other with the signal output of two photodetectors (14) respectively;
High-voltage amplifier (16), this amplifier and signal processing circuit (15) interconnection;
Display device (17), this equipment links to each other with signal processing circuit (15).
3. any one nano laser in the claim 1 or 2 is surveyed chi, it is characterized in that described signal processing circuit (15) contains:
Current/voltage converter, i.e. I/V converter, two input ends of this converter receive the photo-signal from the output of two photodetectors (14) respectively;
Preposition amplification and wave filter, two input ends of this preposition amplification and wave filter link to each other with two output terminals of I/V converter respectively;
The subtracter of Lian Jieing, zero-crossing comparator and rim detection and shaping circuit successively, wherein, two input ends of subtracter link to each other with o light, the tuning signal output part of e luminous power of preposition amplification and wave filter respectively;
Chuan Jie isolated amplifier, hysteresis loop comparator and direction judgment circuit successively, wherein two of isolated amplifier input ends link to each other with o light, the tuning signal output part of e luminous power of preposition amplification and wave filter respectively, and the comparison signal input end of hysteresis loop comparator links to each other with the adjustable voltage output terminal of a resistor voltage divider circuit;
With door, should link to each other with an output terminal of hysteresis loop comparator and the direct impulse output terminal corresponding to high and low isocandela point of rim detection and shaping circuit respectively with two input ends of door;
The multidigit decimal add subtract counter, the counting controling signal input end of this counter links to each other with the output terminal of direction judgment circuit, the count signal input end of this counter with link to each other with the high isocandela point pulse output end of door;
Single-chip microcomputer, the down trigger end INT of this single-chip microcomputer is oppositely through linking to each other behind the phase inverter with the high isocandela point pulse output end of door, the reset signal output terminal of this single-chip microcomputer links to each other with the respective input of multidigit decimal plus-minus up-down counter, and 8 count signal input ends of this single-chip microcomputer link to each other with the corresponding output end of multidigit decimal add subtract counter; 12 bit digital Linear Driving voltage signal output ends of this single-chip microcomputer link to each other with the driving signal input of high-voltage amplifier after the D/A conversion, the input that the other output terminal of this single-chip microcomputer shows as number.
4. the described nano laser of any one among the claim 1-3 is surveyed chi and the displacement measurement divided method that proposes, it is characterized in that, this displacement measurement divided method contains successively and has the following steps:
The 1st step:
Zero clearing, the linear driven micrometric displacement piezoelectric sensor of signal processing circuit (15) output, i.e. the chamber of PZT (12) change laser instrument is long, is in high isocandela state up to two polarized lights; At this moment, make counter, display zero clearing, and write down the current micrometric displacement piezoelectric sensor that is added on, be i.e. magnitude of voltage U on the PZT (12)
1
The 2nd step:
The big number of meter, at this moment, single-chip microcomputer constantly reads the number of the high isocandela point pulse of writing down in the multidigit decimal add subtract counter, multiply by λ/2 again and obtains big numerical value, and λ is an optical wavelength;
The 3rd step:
Single-chip microcomputer judges whether to be in the isocandela dotted state:
If then finish to measure;
If not, then change the output valve of D/A converter, enter and survey the decimal stage, occur until isocandela point, and write down the current micrometric displacement piezoelectric sensor that is added in, be i.e. magnitude of voltage U on the PZT (12)
2
The 4th step:
By the micrometric displacement piezoelectric sensor, promptly PZT (12) goes up voltage change amount U above-mentioned
2-U
1The decimal shift value that obtains is superimposed with the big numerical value that the big number of meter obtains, and obtains the final mean annual increment movement measurement result.
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| CN101464139B (en) * | 2009-01-09 | 2012-05-23 | 清华大学 | 1152nm wavelength helium neon laser nano-measuring tape |
| CN103115573B (en) * | 2013-01-30 | 2015-08-12 | 清华大学 | Displacement measurement method |
| CN106654839A (en) * | 2016-10-13 | 2017-05-10 | 南通大学 | Displacement self-sensing helium-neon laser system |
| CN108036729B (en) * | 2017-12-19 | 2020-01-31 | 中国科学院光电技术研究所 | correction method for nano displacement measurement |
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