CN1888816A - Extender high-light folding feedback displacement measuring system - Google Patents
Extender high-light folding feedback displacement measuring system Download PDFInfo
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Abstract
An expansion strong light collapsing feedback displacement measuring system belongs to laser measuring technology field. It relates to applied Zeeman double-refraction double-frequency laser, beam of light collimating spread implement, empty pyramid prism, variable attenuator and feedback mirror with strong reflectivity. When object moves each one forth light wave, the intensity of laser will bring seasonal fluctuate. There are four polarization sections in one period, o light section, coexist section of o light and e light, e light and non-light section, and each of them corresponds one sixteenth light wave of object. Detect the number of the polarization section to get the displacement mete of the object. When the motion direction changes, the appearance order of the four polarization sections in each period changes too, and distinguishes the displacement direction of object.
Description
Technical field
The invention belongs to the laser measuring technique field.
Background technology
Along with the high speed development of modern information technologies, be the basis of infotech as the sensing technology of one of modern information technologies three big pillars, its performance has determined the function and the quality of infosystem, it is important that its effect also more shows.Displacement is basic physical amount of occurring in nature, and displacement measurement is more and more wider in the application in fields such as chip manufacturing, auto industry, biomedicine, space flight and aviation.Laser feedback sensing technology and application thereof in recent years caused domestic and international experts and scholars' extensive interest.Laser feedback is meant that in the laser application system after laser instrument output light was reflected by exterior object, wherein a part of light fed back to laser resonant cavity, and feedback light is carrying exterior object information, after interacting with light in the chamber, and the output of modulated laser.By demodulation, obtain the information of outside testee to the laser instrument output intensity.The laser feedback technology self-mixed interference technology that is otherwise known as is compared with traditional two-beam interference technology and to be had the identical phse sensitivity and the degree of depth.But the measuring system that is based on the laser feedback technology only has an optical channel, has simple in structure, compact, easy collimation, cost performance advantages of higher.It can be applied to the measurement of aspects such as displacement, speed, absolute distance, vibration, angle, retrofit piece surface pattern, cell three-dimensional shape, also can be used for reconstruction or the like the aspect of the analysis of mould and flaw detection, 3 d image data, application surface is very wide.
At present, laser feedback Study on Technology and application are mainly concentrated on semiconductor laser, though each scientific and technological power of the world has obtained a large amount of experiments and notional result, but still have thirty branch important problem not to be well solved, seriously limited the commercial Application development of laser feedback technology.The first, can not discern the sense of displacement of testee.Discover that semiconductor laser is operated in weak feedback level and medium feedback level following time, its feedback signal is asymmetrical class sawtooth wave shape, and the vergence direction of sawtooth wave is relevant with the sense of displacement of external reflection thing.Some researchers attempt to solve with this phenomenon the direction decision problem of semiconductor laser feedback Displacement Measurement.The vergence direction of sawtooth wave is judged sense of displacement easily on sense organ, but is not easy to realize on hardware, and under medium feedback level, sluggish phenomenon can appear in feedback signal, brings error to counting, has had a strong impact on the precision and the Linearity of systematic survey.Must make feedback signal be at least a complete cycle when using this method, just can determine the vergence direction of feedback waveform, this makes the resolution of systematic survey be limited to optical wavelength half, can't realize the high precision position shift measurement.Simultaneously, this type systematic requires height, anti-external interference ability to the collimation in feedback chamber.The second, can not segment feedback signal.Some bibliographical information semiconductor lasers are operated in extremely weak feedback level following time, and its feedback signal is a class cosine wave (CW) shape, and some researchists try hard to utilize cosine character, and the phase measurement technology of similar conventional laser interferometer realizes segmentation.But this feedback signal is very unstable, becomes class sawtooth wave shape easily, and the measuring system of feedback simultaneously only can obtain one road light signal, and this makes electronic fine-grained being difficult to realize.The resolution of system is generally optical wavelength half, and system performance is subjected to very big restriction.The 3rd, the collimation of feedback exocoel requires high, anti-external interference ability.The non-collimation of feedback exocoel will bring the influence of two aspects, the one, the influence of multiple feedback, the 2nd, the influence of system's feedback level.Because the off resonance of exocoel feedback mirror, not only can return laser light device resonator cavity by feedback mirror reflection light once and the chamber in light interact, by twice of feedback mirror reflection even the also possible return laser light device resonator cavity of light repeatedly, the output of modulated laser, this moment, the feedback signal of system was complicated, the measuring system cisco unity malfunction.Simultaneously because the off resonance of exocoel feedback mirror, a part of light can not return laser light device resonator cavity, makes system's feedback level descend.Under the different feedback levels, system's feedback signal difference, the feedback signal that measuring system can not obtain expecting, measurement makes a mistake.
Summary of the invention
The present invention proposes a kind of high resolving power wide range, can discern the sense of displacement of testee, have the folding displacement measuring system of high light of the expansion bundle of very strong preventing mismatching and external interference ability simultaneously, can solve above-mentioned three problems effectively.
The invention is characterized in that it contains:
Expand the folding feedback device of high light of bundle, comprising:
The Zeeman birefringence double-frequency laser, the output frequency difference is less than the pairwise orthogonal linear polarization frequency of 40MHz, and this laser instrument contains:
Laser gain pipe, in be filled with helium, neon mixed gas;
The quartz crystal wedge is fixed in a side of above-mentioned laser gain pipe; This quartz crystal wedge two sides all is coated with anti-reflection film;
Laser resonant cavity comprises main beam outgoing mirror and tail light beam outgoing mirror; The main beam outgoing mirror is fixed on the opposite side of above-mentioned laser gain pipe, and this main beam outgoing mirror inside surface is coated with the strong reflection film, and the top of outside surface also is coated with the strong reflection film, and the lower part of outside surface is coated with anti-reflection film; Tail light beam outgoing mirror is positioned at the outside of above-mentioned quartz crystal wedge, and this outgoing mirror inside surface is coated with the strong reflection film;
The transverse magnetic field generator is made of two blocks of permanent magnets that are parallel to described laser gain pipe axis up and down, and whole gain tube is in the magnetic field, the polarization direction of magnetic direction any one linearly polarized light parallel or that produce perpendicular to above-mentioned laser instrument;
The laser feedback exocoel is made of the top of the outside surface of the inside surface of above-mentioned main beam outgoing mirror and above-mentioned main beam outgoing mirror, and this main beam outgoing mirror is not only done the laser endoscope but also make exocoel feedback mirror;
Feedback exocoel folders, it is a hollow prism of corner cube, constitute by three blocks of mutually perpendicular glass plates that are coated with the strong reflection film, place the feedback light path of above-mentioned laser feedback exocoel, the feedback light of laser instrument master output terminal output is successively by behind described three blocks of glass plates, by the top reflected back laser feedback exocoel of the outside surface of described main beam outgoing mirror;
The beam collimation extender is made up of one group of lens that are parallel to each other perpendicular to the feedback light of laser instrument master output terminal output, places the main output terminal of above-mentioned laser feedback light path, and the feedback light that laser instrument master output terminal is exported collimates and expands bundle;
The laser feedback horizontal controller is an absorptive-type adjustable attenuator, places a side of above-mentioned beam collimation extender, makes system works under strong feedback level;
Acquisition of signal and processing section comprise:
Polarization spectroscope is positioned at the outside of above-mentioned tail light beam outgoing mirror, is used for the light of two frequencies of the polarization state quadrature of tail light beam outgoing mirror output is spatially separated;
Photodetector, totally two, all be positioned at the outside of above-mentioned polarization spectroscope, be used for surveying respectively the light intensity of two frequencies of light of tail light beam outgoing mirror output;
Amplify and filtering circuit, input end links to each other with the output terminal of above-mentioned two photodetectors respectively, and the signal that above-mentioned photodetector is detected amplifies and filtering;
Logic declare to and counting circuit, successively by two voltage comparators, two monostable triggers, forwards with oppositely totally two rejection gates and a up-down counter series connection constitute; Two voltage comparator input ends link to each other with the output terminal of above-mentioned amplification and filtering circuit respectively, two monostable trigger input ends link to each other with the output terminal of above-mentioned two voltage comparators respectively, the saltus step of the every output primary voltage of voltage comparator, monostable trigger just generates a pulse signal, is input in two rejection gate elements; When system's forward moves, forward rejection gate output direct impulse, oppositely rejection gate no-output; When system reverse moved, oppositely rejection gate was exported reverse impulse, forward rejection gate no-output; Forward and reverse impulse signal draw the size and Orientation of ohject displacement by the positive and negative plus-minus end of being delivered to up-down counter respectively;
Display circuit, its input end is declared to linking to each other with the output terminal of counting circuit with above-mentioned logic, and numeral shows the displacement size and Orientation of testee along the laser axis direction;
Base portion contains fixed support, is fixedly linked with above-mentioned laser gain pipe, transverse magnetic field generator, beam collimation extender, laser feedback horizontal controller, laser instrument tail light beam outgoing mirror and polarization spectroscope respectively;
Feature of the present invention also is, the quartz crystal wedge of narrating is above replaced by glass window and a quartz crystal that a slice two sides all is coated with anti-reflection film, this glass window is fixed on the end of laser gain pipe near tail light beam outgoing mirror, this quartz crystal is fixed on the base, and places between glass window and the laser instrument tail light beam outgoing mirror; The quartz crystal wedge of perhaps narrating above answers forcer to replace by the glass window that all is coated with anti-reflection film by a slice two sides with one that is clipped on this window, and this glass window is fixed on the end of laser gain pipe near tail light beam outgoing mirror.
Displacement measurement system based on the folding feedback effect of high light that expands bundle in the Zeeman birefringence double-frequency laser provided by the invention, resolution can reach ten sixth optical wavelength, He-Ne laser instrument for 632.8nm, systemic resolution is 39.55nm, and experimental result shows that this measurement device scope can reach more than the 20mm.This displacement measurement system can be easy to realize that the direction to the testee displacement discerns, and has resolution height, measurement range is big, antijamming capability is strong, cost performance is high characteristics.
Description of drawings
Fig. 1: one of high light displacement measuring system embodiment of the present invention.
Fig. 2: main beam outgoing mirror structural representation of the present invention.
Fig. 3: hollow prism of corner cube structural representation of the present invention.
Fig. 4: quartz crystal wedge structural representation of the present invention.
Fig. 5: logic of the present invention declare to the counting circuit block diagram.
Fig. 6: two of high light displacement measuring system embodiment of the present invention.
Fig. 7: three of high light displacement measuring system embodiment of the present invention.
Fig. 8: the feedback light intensity curve figure of pairwise orthogonal polarized light in the regeneration processes that experiment obtains.
Fig. 9: the feedback light intensity curve figure of pairwise orthogonal polarized light in the regeneration processes that numerical simulation obtains.
Figure 10: the synoptic diagram of system identification testee sense of displacement.
Figure 11: the feedback light intensity curve figure of system when testee produces different displacement.(a) displacement is 10mm; (b) displacement is 20mm.
Embodiment
The invention provides a kind of high resolving power, measurement range is big, can discern the testee moving direction, and antijamming capability is strong, the displacement measurement system that cost performance is high.This device is used inside surface and is coated with highly reflecting films, the top of outside surface is coated with highly reflecting films, the lower part is coated with the main beam outgoing mirror of anti-reflection film, and a hollow prism of corner cube constitutes the laser feedback folding system, make when testee during along whenever mobile 1/4th the optical wavelength displacements of laser axis, the light intensity of laser instrument changes a striped, systemic resolution doubles, simultaneously owing in the feedback chamber, add the beam collimation expanding unit, make external interference influence very little to the feedback level of feedback system and the collimation in feedback chamber, the antijamming capability of system is very strong, for system realizes that large-range measuring provides the foundation; Add adjustable attenuator in the feedback exocoel, control system is operated under the strong feedback level, because high light feedback effect, when testee when the laser axis whenever moves 1/4th optical wavelength, the fluctuation of laser intensity generating period, and o light district four polarization state areas appears: in the one-period, o light and e light coexistence, e light district and no light zone, each zone corresponding object ten sixth optical wavelength displacements, systemic resolution has improved octuple than traditional feedback measuring system, simultaneously when the testee moving direction changes, four polarization state areas in each cycle occur occurs in sequence change, can realize the differentiation of ohject displacement direction thus easily.
Experimental provision of the present invention (example one) as shown in Figure 1.Among Fig. 1,4 is the main beam outgoing mirror of laser instrument, and its inside surface is coated with highly reflecting films, and reflectivity is 99.0%, and the top of outside surface is coated with highly reflecting films, and reflectivity is 99.0%, and the lower part is coated with anti-reflection film, as shown in Figure 2; 5 is laser gain pipe, in be filled with helium, neon mixed gas, helium adopts He
3Isotope, neon adopts Ne
20And Ne
22Isotope, the intrinsic standoff ratio He of the body of inflating
3: Ne
20: Ne
22=7: 0.5: 0.5; 7 is the quartz crystal wedge, and its two sides all is coated with anti-reflection film, as shown in Figure 4; 8 is concave mirror, is the tail light beam outgoing mirror of laser instrument; 6 is two blocks of permanent magnets, applies the even transverse magnetic field of the polarization direction of direction any one polarized light parallel or that produce perpendicular to above-mentioned laser instrument for whole gain tube; 4 inside surface and 8 constitutes laser resonant cavity, 4,5,6,7 and 8 common formation Zeeman birefringence double-frequency lasers; 1 is hollow prism of corner cube, mutually perpendicularly is coated with the glass plate that reflectivity is about 99.0% highly reflecting films and constitutes by three, as shown in Figure 3; 2 is absorptive-type adjustable attenuator; 3 are the beam collimation expanding unit, are made up of one group of lens; 4 outside surface top and 1 and 4 inside surface constitute the feedback folded cavity jointly; 1,2, the 3 and 4 common high light feedback folded cavitys that constitute collimation; 9 is polarization splitting prism; 10 and 11 is two photodetectors; 9,10 and 11 constitute the signal receiving device, its signal that detects is input in amplification and the filtering circuit 12, to signal amplify with filtering after be input to logic declare to counting circuit 13 in, the process signal Processing obtains the size and Orientation of testee moving displacement, shows by display device 15; The 14th, system's base; The 16th, cloche reduces the interference of external environment condition; The 17th, extraneous testee.
Principle of the present invention is as follows:
Single mode He-Ne laser instrument is under light feedback situation, and the change in gain amount Δ g in the unit length is:
In the formula, g is the interior linear gain of unit length when the light feedback is arranged, g
0Linear gain in the unit length during for unglazed feedback, α=t
2r
3ξ/r
2, r wherein
2, t
2Be respectively the reflection coefficient and the projection coefficient of laser instrument master outgoing mirror inside surface, r
2Be the reflection coefficient on surface, laser instrument master outgoing mirror outside surface top, ξ is the attenuation coefficient of adjustable attenuator, and v is a laser frequency, and c is the light velocity in the vacuum, and L is that built in laser cavity is long, and l is the long variation in laser feedback chamber.δ is that light differs at the fixed bit that the exocoel feedback causes.
For the He-Ne two-frequency laser, the pairwise orthogonal polarization mode is shared same gain in the laser cavity, because the mode competition effect between two moulds, the linear gain variable quantity that can obtain in the two mould unit lengths is respectively:
Δ g
oWith Δ g
eBe respectively the linear gain variable quantity in o light and the e light unit length.
Because the used two-frequency laser of system is the Zeeman birefringence double-frequency laser, its frequency difference is far smaller than the HOMOGENEOUS BROADENING (about 200MHz) of laser medium spectrum, and the phase difference φ between o, the e light is determined that by mode competition the experiment gained is a Δ φ ≈ pi/2.
Because the variation of laser intensity is proportional to the variation of linear gain during feedback, promptly
I＝I
0-kΔg， (3)
In the formula, I
0Initial light intensity when not having feedback, k is a constant.
Then exist under the condition of light feedback, the light intensity of laser instrument pairwise orthogonal polarization mode is:
I
o＝I
0o+αK/2L·cos(4πvl/c+δ)
I
e＝I
0e-αK/2L·cos(4πvl/c?+δ+Δφ)，(4)
In the formula, I
oAnd I
eThe light intensity of o light and e light during for the light feedback, I
0oAnd I
0eThe initial light intensity of o light and e light when not having the light feedback.
For folding feedback system, establishing the testee change in displacement is Δ l, and then this moment, feedback chamber length was changed to l=2 Δ l.Then the phase change that causes of the displacement of exterior object is:
Δδ＝4πvl/c＝2π·2Δl/(λ/2)＝2π·Δl/(λ/4)。(5)
By formula (5) as can be known, the displacement of 1/4th wavelength of the every change of object, laser intensity fluctuation one-period.
Native system works under the strong feedback level, and ξ is bigger, thereby α is bigger, and the depth of modulation M of laser intensity is also bigger, and M can be expressed as:
M＝αK/2L。(6)
Consider that laser intensity does not have negative value, o, e light light intensity expression are in the high light feedback folding system of collimation:
When the frequency difference Δ v of laser instrument is 8.86MHz, the long L of inner chamber is 190mm, the long l in external feedback chamber is 380mm, the total feedback level of system is 84.8% o'clock, along with testee when the laser axis moves, the folding feedback effect of high light that expands bundle make the pairwise orthogonal polarized light light intensity curve as shown in Figure 8.The line of wherein punctuating is an o light feedback light intensity curve, and the real point line is an e light feedback light intensity curve, and triangular wave is the driving voltage curve of Piezoelectric Ceramic testee.
We can see by Fig. 8, o, the cyclical variation of e light light intensity, and the intensity modulation degree of depth is very big, and when object moved to opposite both direction, o, e light intensity modulation curve were symmetrical.O, e light alternate oscillation in each cycle, and no light zone is all arranged, it is almost equal to go out optical width and no optical width, there is the phasic difference of about pi/2 between o, the e light, all have four kinds of states like this in each cycle: one for having only the e light generation, and o light extinguishes at this moment, is referred to as e light district; Two is o light and e light coexistence, and o light and e light can both vibrate; Three is o light district, has only the o light generation, and e light extinguishes at this moment; Four is no light zone, and o, e light is nonoscillatory all.The one-period correspondence of o, e intensity modulation curve testee 1/4th optical wavelength displacements, then each district corresponding testee ten sixth optical wavelength displacements, for the He-Ne laser instrument of 632.8nm, systemic resolution is 39.55nm, is the octuple of common feedback system resolution.
Carry out simulation analysis according to formula (7), numerical simulation obtains the feedback light intensity curve of pairwise orthogonal polarized light in the regeneration processes, as shown in Figure 9.The experimental result of Fig. 8 and the numerical simulation result of Fig. 9 match.
Figure 10 is the synoptic diagram of system identification testee sense of displacement.In the one-period, o, e light feedback curve are divided into four parts, and AB is a no light zone, and BC is e light district, and CD is o, e light coexistence, and DE is o light district, and EF is again a no light zone, and FG is e light district.When piezoelectric ceramics voltage increases, when promptly the direction that reduces to feedback chamber length of testee moved, the orders that four districts occur were no light zone, e light district, o, e light coexistence, o light district, no light zone; When piezoelectric ceramics voltage reduces, promptly testee is when the long direction that increases in feedback chamber moves, and the orders that four districts occur are no light zone, o light district, o, e light coexistence, e light district, no light zone; The testee sense of displacement is distinguished the order differences that occur, can easily be realized the identification of ohject displacement direction by signal Processing for four not simultaneously.
The feedback light intensity curve figure of system when Figure 11 produces different displacement for testee, the feedback light intensity curve figure when wherein (a) is displacement 10mm, the curve map when (b) being displacement 20mm.Can be seen that by Figure 11 when object was mobile, o, e light light intensity curve were almost constant on a large scale, the one-period inner curve still can be divided into four districts, realizes the identification of testee sense of displacement and the raising of resolution.The He-Ne laser instrument has good coherence, and the maximum displacement scope of the designed displacement measurement system institute energy measurement of the present invention is half of laser instrument coherent length on the principle, and experiment shows that the measurement range of this displacement measurement system is at least 20mm.This device has the high-resolution very large measurement range that also has simultaneously.
The theory structure synoptic diagram of example two of the present invention as shown in Figure 6.Fig. 6 and structure shown in Figure 1 are basic identical, 1 to 17 totally ten seven elements except that 7 with Fig. 1 in all identical, no longer repeat to introduce herein.7 is a window, and the two sides all is coated with anti-reflection film, is fixed on a side of gain tube; 18 is quartz crystal, places between window 7 and the tail light beam outgoing mirror 8, is used for producing frequency splitting.4,5,6,7,8 and 18 common formation Zeeman birefringence double-frequency lasers.Systemic resolution remains ten sixth optical wavelength, can discern the testee sense of displacement, has big range and very strong antijamming capability.
The theory structure synoptic diagram of example two of the present invention as shown in Figure 7.Fig. 7 and structure shown in Figure 1 are basic identical, 1 to 17 totally ten seven elements except that 7 with Fig. 1 in all identical, no longer repeat to introduce herein.7 is a window, and the two sides all is coated with anti-reflection film, is fixed on a side of gain tube; 18 is the stress bringing device, and it applies a stress along the axis direction of vertical laser gain tube to window 7, because the birefringence effect of window, a frequency can be divided into two frequencies.4,5,6,7,8 and 18 common formation Zeeman birefringence double-frequency lasers.
The present invention has designed a kind of displacement measurement system based on the folding feedback effect of the high light that expands bundle in the Zeeman birefringence double-frequency laser, and the feedback mirror that this device is used Zeeman birefringence double-frequency laser, beam collimation extender, hollow prism of corner cube, adjustable attenuator and had a high reflectance constitutes the high light that expands bundle and folds feedback system.Hollow prism of corner cube is fixed on the testee, when testee when the laser axis whenever moves 1/4th optical wavelength, the fluctuation of laser intensity generating period, and four polarization state areas are arranged in the one-period: o light district, o light and e light coexistence, e light district and no light zone, each zone corresponding object ten sixth optical wavelength be the displacement of 39.55nm, detecting polarization attitude number of regions can obtain the displacement of testee; When the testee moving direction changed, four polarization state areas in each cycle occur occurred in sequence change, can differentiate the ohject displacement direction thus.This device has precision height, range and greatly, easily declares to, antijamming capability is strong, cost performance is high characteristics.
Claims (3)
1, expand the folding displacement measuring system of high light of bundle, it is characterized in that described system contains: expand the folding feedback device of high light of bundle, comprising:
The Zeeman birefringence double-frequency laser, the output frequency difference is less than the pairwise orthogonal linear polarization frequency of 40MHz, and this laser instrument contains:
Laser gain pipe, in be filled with helium, neon mixed gas;
The quartz crystal wedge is fixed in a side of above-mentioned laser gain pipe; This quartz crystal wedge two sides all is coated with anti-reflection film;
Laser resonant cavity comprises main beam outgoing mirror and tail light beam outgoing mirror; The main beam outgoing mirror is fixed on the opposite side of above-mentioned laser gain pipe, and this main beam outgoing mirror inside surface is coated with the strong reflection film, and the top of outside surface also is coated with the strong reflection film, and the lower part of outside surface is coated with anti-reflection film; Tail light beam outgoing mirror is positioned at the outside of above-mentioned quartz crystal wedge, and this outgoing mirror inside surface is coated with the strong reflection film;
The transverse magnetic field generator is made of two blocks of permanent magnets that are parallel to described laser gain pipe axis up and down, and whole gain tube is in the magnetic field, the polarization direction of magnetic direction any one linearly polarized light parallel or that produce perpendicular to above-mentioned laser instrument;
The laser feedback exocoel is made of the top of the outside surface of the inside surface of above-mentioned main beam outgoing mirror and above-mentioned main beam outgoing mirror, and this main beam outgoing mirror is not only done the laser endoscope but also make exocoel feedback mirror;
Feedback exocoel folders, it is a hollow prism of corner cube, constitute by three blocks of mutually perpendicular glass plates that are coated with the strong reflection film, place the feedback light path of above-mentioned laser feedback exocoel, the feedback light of laser instrument master output terminal output is successively by behind described three blocks of glass plates, by the top reflected back laser feedback exocoel of the outside surface of described main beam outgoing mirror;
The beam collimation extender is made up of one group of lens that are parallel to each other perpendicular to the feedback light of laser instrument master output terminal output, places the main output terminal of above-mentioned laser feedback light path, and the feedback light that laser instrument master output terminal is exported collimates and expands bundle;
The laser feedback horizontal controller is an absorptive-type adjustable attenuator, places a side of above-mentioned beam collimation extender, makes system works under strong feedback level; Acquisition of signal and processing section comprise:
Polarization spectroscope is positioned at the outside of above-mentioned tail light beam outgoing mirror, is used for the light of two frequencies of the polarization state quadrature of tail light beam outgoing mirror output is spatially separated;
Photodetector, totally two, all be positioned at the outside of above-mentioned polarization spectroscope, be used for surveying respectively the light intensity of two frequencies of light of tail light beam outgoing mirror output;
Amplify and filtering circuit, input end links to each other with the output terminal of above-mentioned two photodetectors respectively, and the signal that above-mentioned photodetector is detected amplifies and filtering;
Logic declare to and counting circuit, successively by two voltage comparators, two monostable triggers, forwards with oppositely totally two rejection gates and a up-down counter series connection constitute; Two voltage comparator input ends link to each other with the output terminal of above-mentioned amplification and filtering circuit respectively, two monostable trigger input ends link to each other with the output terminal of above-mentioned two voltage comparators respectively, the saltus step of the every output primary voltage of voltage comparator, monostable trigger just generates a pulse signal, is input in two rejection gate elements; When system's forward moves, forward rejection gate output direct impulse, oppositely rejection gate no-output; When system reverse moved, oppositely rejection gate was exported reverse impulse, forward rejection gate no-output; Forward and reverse impulse signal draw the size and Orientation of ohject displacement by the positive and negative plus-minus end of being delivered to up-down counter respectively;
Display circuit, its input end is declared to linking to each other with the output terminal of counting circuit with above-mentioned logic, and numeral shows the displacement size and Orientation of testee along the laser axis direction;
Base portion contains fixed support, is fixedly linked with above-mentioned laser gain pipe, transverse magnetic field generator, beam collimation extender, laser feedback horizontal controller, laser instrument tail light beam outgoing mirror and polarization spectroscope respectively;
2, the quartz crystal wedge narrated of claim 1 is replaced by glass window and a quartz crystal that a slice two sides all is coated with anti-reflection film, this glass window is fixed on the end of laser gain pipe near tail light beam outgoing mirror, this quartz crystal is fixed on the base, and places between glass window and the laser instrument tail light beam outgoing mirror;
3, the quartz crystal wedge narrated of claim 1 is by all being coated with the glass window of anti-reflection film and of being clipped on this window answers forcer to replace by a slice two sides, and this glass window is fixed on the end of laser gain pipe near tail light beam outgoing mirror.
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| CN1166914C (en) * | 2002-05-31 | 2004-09-15 | 清华大学 | Frequency-dividing self-mixing feedback-type non-contact He-Ne laser micrometer |
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2006
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| CN102288103A (en) * | 2011-06-27 | 2011-12-21 | 清华大学 | Folding-fabry-perot-cavity-based absolute distance measurement method and device |
| CN102288103B (en) * | 2011-06-27 | 2013-07-03 | 清华大学 | Folding-fabry-perot-cavity-based cavity length measurement method and device |
| CN103543511A (en) * | 2013-10-16 | 2014-01-29 | 中国科学院等离子体物理研究所 | Pyramid prism for plasma optical diagnostics of steady-state Tokamak |
| CN103543511B (en) * | 2013-10-16 | 2016-07-06 | 中国科学院等离子体物理研究所 | Prism of corner cube for the diagnosis of steady-state tokamak device plasma optics |
| CN108398104A (en) * | 2018-02-01 | 2018-08-14 | 中国科学院国家天文台南京天文光学技术研究所 | The photoelectricity dynamic angle measuring devices and its method of random error can be reduced |
| CN109444004A (en) * | 2018-12-14 | 2019-03-08 | 西安理工大学 | Yb:YAG solid state laser self-mixed interference nano particle size sensor |
| CN109444004B (en) * | 2018-12-14 | 2021-05-18 | 西安理工大学 | Yb-YAG solid laser self-mixing interference nano-grain size sensor |
| CN110764732A (en) * | 2019-10-09 | 2020-02-07 | 中国航空工业集团公司洛阳电光设备研究所 | Logic design method for addition and subtraction signal generator in read-only memory look-up table subdivision circuit |
| CN113607062A (en) * | 2021-08-02 | 2021-11-05 | 山东大学 | Micro-actuator displacement and inclination angle measuring device and method |
| CN115372313A (en) * | 2022-10-21 | 2022-11-22 | 合肥金星智控科技股份有限公司 | Detection light path and detection system based on TDLAS technology |
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