CN1278390C - Method and apparatus for wafer drying - Google Patents
Method and apparatus for wafer drying Download PDFInfo
- Publication number
- CN1278390C CN1278390C CN 03115530 CN03115530A CN1278390C CN 1278390 C CN1278390 C CN 1278390C CN 03115530 CN03115530 CN 03115530 CN 03115530 A CN03115530 A CN 03115530A CN 1278390 C CN1278390 C CN 1278390C
- Authority
- CN
- China
- Prior art keywords
- wafer
- wafers
- inclination angle
- bearing portion
- crystal chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 03115530 CN1278390C (en) | 2003-02-26 | 2003-02-26 | Method and apparatus for wafer drying |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 03115530 CN1278390C (en) | 2003-02-26 | 2003-02-26 | Method and apparatus for wafer drying |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1525535A CN1525535A (en) | 2004-09-01 |
CN1278390C true CN1278390C (en) | 2006-10-04 |
Family
ID=34284326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 03115530 Expired - Fee Related CN1278390C (en) | 2003-02-26 | 2003-02-26 | Method and apparatus for wafer drying |
Country Status (1)
Country | Link |
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CN (1) | CN1278390C (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100383912C (en) * | 2005-01-11 | 2008-04-23 | 中芯国际集成电路制造(上海)有限公司 | High temperature wafer test oven |
CN101210769B (en) * | 2006-12-25 | 2010-04-07 | 中芯国际集成电路制造(上海)有限公司 | Method and device for drying wafer |
CN101245968B (en) * | 2007-02-13 | 2010-05-26 | 中芯国际集成电路制造(上海)有限公司 | Method for removing water in quartz sheath equipped with thermocouple |
WO2009001379A1 (en) * | 2007-06-26 | 2008-12-31 | Afco C.V. | Drying apparatus and method for silicon-based electronic circuits |
CN101957124B (en) * | 2009-07-16 | 2012-08-08 | 中芯国际集成电路制造(上海)有限公司 | Method for drying wafer |
CN101879756B (en) * | 2010-04-01 | 2012-08-22 | 浙江硅宏电子科技有限公司 | Silicon wafer stripping machine |
CN102569024A (en) * | 2010-12-29 | 2012-07-11 | 中芯国际集成电路制造(上海)有限公司 | Drying method and drying equipment after grinding and cleaning TSV (Temperature Safety Valve) through hole |
CN103575075B (en) * | 2012-07-25 | 2015-08-26 | 中国科学院微电子研究所 | Silicon wafer spin-drying system |
CN107516694A (en) * | 2017-07-31 | 2017-12-26 | 常州市杰洋精密机械有限公司 | A kind of wet-cleaning thing carrier predrainage method and hoisting mechanism used |
-
2003
- 2003-02-26 CN CN 03115530 patent/CN1278390C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1525535A (en) | 2004-09-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20111129 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20111129 Address after: 201203 No. 18 Zhangjiang Road, Shanghai Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20061004 Termination date: 20190226 |