CN107516694A - A kind of wet-cleaning thing carrier predrainage method and hoisting mechanism used - Google Patents
A kind of wet-cleaning thing carrier predrainage method and hoisting mechanism used Download PDFInfo
- Publication number
- CN107516694A CN107516694A CN201710639423.1A CN201710639423A CN107516694A CN 107516694 A CN107516694 A CN 107516694A CN 201710639423 A CN201710639423 A CN 201710639423A CN 107516694 A CN107516694 A CN 107516694A
- Authority
- CN
- China
- Prior art keywords
- carrier
- hoisting frame
- hoisting
- cleaning
- predrainage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000004140 cleaning Methods 0.000 title claims abstract description 15
- 239000007788 liquid Substances 0.000 claims abstract description 18
- 239000011538 cleaning material Substances 0.000 claims abstract description 13
- 230000018044 dehydration Effects 0.000 claims abstract description 5
- 238000006297 dehydration reaction Methods 0.000 claims abstract description 5
- 238000009434 installation Methods 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims 1
- 238000001035 drying Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67796—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention relates to a kind of wet-cleaning thing carrier predrainage method and hoisting mechanism used, be loaded with cleaning materials carrier be arranged on hoisting frame after be integrally placed in rinse bath, have steps of：A, hoisting frame one end rises and carrier is in heeling condition；B, the hoisting frame both ends for being loaded with heeling condition carrier are synchronously lifted up, and carrier departs from cleaning liquid level, until dehydration is completed；C, the carrier that hoisting frame one end is dropped on hoisting frame recovers horizontality.Cleaning materials carrier is changed to tilt-lift by the present invention by traditional horizontal lifting, so in lifting process, carrier bottom carrier bar and side plate bottom drop-wise liquid can be removed substantially, so as to reach cleaning materials and the good effect of carrier entirety predrainage, substantial amounts of drying time is saved for rear road baking operation.
Description
Technical field
The present invention relates to a kind of wet-cleaning thing carrier predrainage method and hoisting mechanism used.
Background technology
In wet method equipment industry, especially in solar power silicon tab and slot type wet processing apparatus industry, in order that silicon chip is fast
Speed drying, common practice is that the carrier equipped with silicon chip carried out into predrainage processing at present, its main method be using hoisting mechanism,
Carrier entirety equipped with silicon chip is slowly lifted with horizontal out of liquid tank body, obvious drop-wise liquid is not present on silicon chip to reach
The purpose of body.Only need to dry moisture when entering baking operation by the silicon chip of predrainage, it is not necessary to difficult to drop-wise
Drying liquid is dried, and is substantially shorter drying time.Although current equipment can be by silicon chip using this predrainage mode
Drop-wise liquid is disposed, but loads the drop-wise liquid on the carrier of silicon chip, especially in carrier carrier bar bottom and carrier
Still there are a large amount of drop-wise liquid in side plate bottom, its result becomes really to need to spend more time to go to dry on carrier
Liquid.As requirement of the market to production capacity is constantly lifted, current drying time is also unsatisfactory for require that, therefore generally passes through increasing
If the quantity of baking operation solves the problems, such as drying time, this has resulted in cost increase and energy resource consumption is bigger.
The content of the invention
The technical problem to be solved in the present invention is：In order to overcome deficiency in the prior art, the present invention provides a kind of wet method
Cleaning materials carrier predrainage method and hoisting mechanism used, to realize the good effect of silicon chip or cleaning materials and carrier entirety predrainage
Fruit.
The technical solution adopted for the present invention to solve the technical problems is：A kind of wet-cleaning thing carrier predrainage method,
Be loaded with cleaning materials carrier be arranged on hoisting frame on after be integrally placed in rinse bath, have steps of：
A, hoisting frame one end rises and carrier is in heeling condition；
B, the hoisting frame both ends for being loaded with heeling condition carrier are synchronously lifted up, and carrier departs from cleaning liquid level, until dehydration
Complete；
C, the carrier that hoisting frame one end is dropped on hoisting frame recovers horizontality.
A kind of hoisting mechanism of above-mentioned predrainage method, there is the hoisting frame of installation carrier, clean the cleaning materials finished and put
In on carrier, described hoisting frame both ends have been movably connected with the lifting of promotion hoisting frame and have realized carrier tilt-lift to depart from
Clean the lifting member of liquid level.
Preferably, described lifting member is to be hinged on the first lift arm of hoisting frame left end, be hinged on hoisting frame right-hand member
Second lift arm.
It is also possible that described lifting member is to be hinged on the first lift arm of hoisting frame left end, be connected to hoisting frame right-hand member
Pull rope.
Can also, described lifting member is to be hinged on the first lift arm, piston rod end and the hoisting frame of hoisting frame left end
The be hinged cylinder of right-hand member.
The beneficial effects of the invention are as follows：The horizontal lifting of traditional carrier is changed to tilt-lift by the present invention, in lifting process
In so that the carrier bar of carrier and the liquid of side plate bottom can depart from the water surface along inclined direction, will not be in water because of carrier
Level state and can nowhere walk, be pulled off in disengaging level, formed drop-wise, it is integrally pre- so as to reach silicon chip or cleaning materials and carrier
Good effect is dehydrated, substantial amounts of drying time is saved for rear road baking operation.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the view of lifting process of the present invention.
Fig. 2 is the first structural representation of lifting member of the present invention.
Fig. 3 is second of structural representation of lifting member of the present invention
Fig. 4 is the third structural representation of lifting member of the present invention
In figure：1. the pull rope 7. of 2. carrier of hoisting frame, 3. rinse bath, 4. first 5. second lift arm of lift arm 6. pushes up
Rise the rotary joint of cylinder 8.
Embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.These accompanying drawings are simplified schematic diagram, only with
Illustration illustrates the basic structure of the present invention, therefore it only shows the composition relevant with the present invention.
As shown in figure 1, a kind of wet-cleaning thing carrier predrainage method, the carrier 2 for being loaded with cleaning materials is arranged on hoisting frame 1
It is integrally placed in rinse bath 3, has steps of after upper：
A, the one end of hoisting frame 1 rises and carrier 2 is in heeling condition；
B, the both ends of hoisting frame 1 for being loaded with heeling condition carrier 2 are synchronously lifted up, and carrier 2 departs from the cleaning in rinse bath 3
Liquid level, until dehydration is completed；
C, the carrier 2 that the one end of hoisting frame 1 is dropped on hoisting frame 1 recovers horizontality.
Hoisting mechanism used in a kind of above-mentioned predrainage method, there is the hoisting frame 1 for placing carrier 2, clean the cleaning finished
Thing is placed on carrier 2, and the described both ends of hoisting frame 1, which have been movably connected with, to promote hoisting frame 1 to lift and realize that carrier 2 tilts and carry
Rise to depart from the lifting member of cleaning liquid level.
The first structure of described lifting member is：As shown in Fig. 2 it is hinged on the of the left end of hoisting frame 1 by rotary joint 8
One lift arm 4, the second lift arm 5 of the right-hand member of hoisting frame 1, the first described lift arm 4 and second are hinged on by rotary joint 8
Lift arm 5 remains vertical state in lifting process, and first, the second lift arm 5 rises, and pulls the right-hand member of hoisting frame 1 to rise,
The carrier 2 on hoisting frame 1 is set to be in heeling condition；Then, the first lift arm 4 and the synchronous rising of the second lift arm 5, make to be placed on
Carrier 2 on hoisting frame 1 is lifted up with heeling condition, departs from the cleaning liquid level in rinse bath 3, until completing dehydration；
Finally, the first lift arm 4, which declines, drives hoisting frame 1 and carrier 2 to return to horizontality.Above-mentioned first lift arm 4, second is lifted
The power of arm 5 provides by the corresponding haulage gear on the first lift arm 4, the second lift arm 5, and the haulage gear is optional
Lifted with motor driven screw rod transmission, or the lifting of motor driven toothed belt transmission or motor elevator tightrope class carry
Rise and the direct-connected mode of cylinder, electric cylinders is lifted.
Described second of structure of lifting member be：As shown in figure 3, the described left end of hoisting frame 1 is be hinged using rotary joint 8
There is the first lift arm 4, the right-hand member of hoisting frame 1 is connected with pull rope 6, wherein the first lift arm 4 keeps vertical direction to move up and down,
Pull rope 6 any angle can set lead on the horizontal plane of hoisting frame 1, and lifting process is the same as the first embodiment.
The third structure of described lifting member is：As shown in figure 4, the described left end of hoisting frame 1 is be hinged using rotary joint 8
There is the first lift arm 4, the right-hand member of hoisting frame 1 is hinged with jacking cylinder 7, and the piston rod of jacking cylinder 7 is hinged with the right-hand member of hoisting frame 1, carried
The process of liter is the same as the first embodiment.
The carrier 2 of cleaning materials is changed to tilt-lift by the present invention by traditional horizontal lifting, can so in lifting process
Drop-wise liquid on the bottom carrier bar of carrier 2 and side plate bottom is removed substantially, it is overall pre- de- so as to reach cleaning materials and carrier 2
The good effect of water, substantial amounts of drying time is saved for rear road baking operation.
It is complete by above-mentioned description, relevant staff using the above-mentioned desirable embodiment according to the present invention as enlightenment
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property scope is not limited to the content on specification, it is necessary to determines its technical scope according to right.
Claims (5)
1. a kind of wet-cleaning thing carrier predrainage method, be loaded with cleaning materials carrier be arranged on hoisting frame after be integrally placed at it is clear
In washing trough, it is characterized in that：Have steps of：
A, hoisting frame one end rises and carrier is in heeling condition；
B, the hoisting frame both ends for being loaded with heeling condition carrier are synchronously lifted up, and carrier departs from cleaning liquid level, until dehydration is completed；
C, the carrier that hoisting frame one end is dropped on hoisting frame recovers horizontality.
2. a kind of hoisting mechanism for predrainage method described in claim 1, has the hoisting frame of installation carrier, cleaning finishes
Cleaning materials be placed on carrier, it is characterized in that：Described hoisting frame both ends, which have been movably connected with, promotes hoisting frame to lift and reality
Existing carrier tilt-lift cleans the lifting member of liquid level to depart from.
3. hoisting mechanism as claimed in claim 2, it is characterized in that：Described lifting member is be hinged on hoisting frame left end first
Lift arm, the second lift arm for being hinged on hoisting frame right-hand member.
4. hoisting mechanism as claimed in claim 2, it is characterized in that：Described lifting member is be hinged on hoisting frame left end first
Lift arm, the pull rope for being connected to hoisting frame right-hand member.
5. hoisting mechanism as claimed in claim 2, it is characterized in that：Described lifting member is be hinged on hoisting frame left end first
The be hinged cylinder of lift arm, piston rod end and hoisting frame right-hand member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710639423.1A CN107516694A (en) | 2017-07-31 | 2017-07-31 | A kind of wet-cleaning thing carrier predrainage method and hoisting mechanism used |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710639423.1A CN107516694A (en) | 2017-07-31 | 2017-07-31 | A kind of wet-cleaning thing carrier predrainage method and hoisting mechanism used |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107516694A true CN107516694A (en) | 2017-12-26 |
Family
ID=60721805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710639423.1A Pending CN107516694A (en) | 2017-07-31 | 2017-07-31 | A kind of wet-cleaning thing carrier predrainage method and hoisting mechanism used |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107516694A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109775362A (en) * | 2019-01-14 | 2019-05-21 | 上海釜川自动化设备有限公司 | A kind of predrying structure and its implementation method |
| CN110010534A (en) * | 2019-04-18 | 2019-07-12 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer film magazine hand basket |
| CN110752263A (en) * | 2019-11-19 | 2020-02-04 | 晶海洋半导体材料（东海）有限公司 | Pulling method and device for single crystal texturing |
| WO2023280270A1 (en) * | 2021-07-07 | 2023-01-12 | 禄丰隆基硅材料有限公司 | Lifting device and silicon wafer cleaning system |
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| JPH04306833A (en) * | 1991-04-03 | 1992-10-29 | Hitachi Ltd | Cleaning jig and lifting up method thereof |
| JPH06314677A (en) * | 1993-04-30 | 1994-11-08 | Sony Corp | Cleaning apparatus |
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| JPH11204470A (en) * | 1998-01-14 | 1999-07-30 | Speedfam Co Ltd | Inclined work dipping method and device |
| CN1525535A (en) * | 2003-02-26 | 2004-09-01 | 中芯国际集成电路制造（上海）有限公 | Method and apparatus for wafer drying |
| CN202127034U (en) * | 2011-07-11 | 2012-01-25 | 苏州赤诚洗净科技有限公司 | Pre-cleaning device for silicon chip of solar battery |
| JP2012039030A (en) * | 2010-08-11 | 2012-02-23 | Tokyo Seimitsu Co Ltd | Wafer storing device, wafer storing method and wafer polishing device |
| CN102637579A (en) * | 2012-03-26 | 2012-08-15 | 北京吉阳技术股份有限公司 | Cleaning process for removing flower basket imprints on solar battery |
| CN102637770A (en) * | 2012-03-26 | 2012-08-15 | 北京吉阳技术股份有限公司 | Placement structure and placement method of small flower basket |
| CN203491239U (en) * | 2013-10-12 | 2014-03-19 | 英利能源（中国）有限公司 | Device for transferring silicon chips between chip boxes |
| CN104813438A (en) * | 2012-11-28 | 2015-07-29 | 盛美半导体设备（上海）有限公司 | Method and apparatus for cleaning semiconductor wafer |
| CN106531670A (en) * | 2016-12-30 | 2017-03-22 | 浙江晶科能源有限公司 | Texturing and cleaning basket of solar cell |
-
2017
- 2017-07-31 CN CN201710639423.1A patent/CN107516694A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04306833A (en) * | 1991-04-03 | 1992-10-29 | Hitachi Ltd | Cleaning jig and lifting up method thereof |
| JPH06314677A (en) * | 1993-04-30 | 1994-11-08 | Sony Corp | Cleaning apparatus |
| JPH07263390A (en) * | 1994-03-22 | 1995-10-13 | Dainippon Screen Mfg Co Ltd | Method and device for cleaning and drying substrate |
| JPH11204470A (en) * | 1998-01-14 | 1999-07-30 | Speedfam Co Ltd | Inclined work dipping method and device |
| CN1525535A (en) * | 2003-02-26 | 2004-09-01 | 中芯国际集成电路制造（上海）有限公 | Method and apparatus for wafer drying |
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| CN102637579A (en) * | 2012-03-26 | 2012-08-15 | 北京吉阳技术股份有限公司 | Cleaning process for removing flower basket imprints on solar battery |
| CN102637770A (en) * | 2012-03-26 | 2012-08-15 | 北京吉阳技术股份有限公司 | Placement structure and placement method of small flower basket |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109775362A (en) * | 2019-01-14 | 2019-05-21 | 上海釜川自动化设备有限公司 | A kind of predrying structure and its implementation method |
| CN110010534A (en) * | 2019-04-18 | 2019-07-12 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer film magazine hand basket |
| CN110010534B (en) * | 2019-04-18 | 2021-06-22 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer box lifting basket |
| CN110752263A (en) * | 2019-11-19 | 2020-02-04 | 晶海洋半导体材料（东海）有限公司 | Pulling method and device for single crystal texturing |
| CN110752263B (en) * | 2019-11-19 | 2021-08-13 | 晶海洋半导体材料（东海）有限公司 | Pulling method and device for single crystal texturing |
| WO2023280270A1 (en) * | 2021-07-07 | 2023-01-12 | 禄丰隆基硅材料有限公司 | Lifting device and silicon wafer cleaning system |
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