CN1277268A - 一种半导体电热膜的工艺配方及加工方法 - Google Patents
一种半导体电热膜的工艺配方及加工方法 Download PDFInfo
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- CN1277268A CN1277268A CN 99107995 CN99107995A CN1277268A CN 1277268 A CN1277268 A CN 1277268A CN 99107995 CN99107995 CN 99107995 CN 99107995 A CN99107995 A CN 99107995A CN 1277268 A CN1277268 A CN 1277268A
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- solution
- saturated solution
- stain
- tetrachloride
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- 238000000034 method Methods 0.000 title claims description 21
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 239000000203 mixture Substances 0.000 title description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical class CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 claims abstract description 10
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 claims abstract description 8
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 claims abstract description 7
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000004327 boric acid Substances 0.000 claims abstract description 7
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 claims abstract description 7
- 238000005245 sintering Methods 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 15
- 239000012047 saturated solution Substances 0.000 claims description 15
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 12
- 239000000243 solution Substances 0.000 claims description 12
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 9
- -1 nickelous chlorides Chemical class 0.000 claims description 9
- FAPDDOBMIUGHIN-UHFFFAOYSA-K antimony trichloride Chemical compound Cl[Sb](Cl)Cl FAPDDOBMIUGHIN-UHFFFAOYSA-K 0.000 claims description 6
- 239000013049 sediment Substances 0.000 claims description 6
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229910052793 cadmium Inorganic materials 0.000 claims description 3
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 3
- 230000009514 concussion Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000004070 electrodeposition Methods 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- BQRPKHOZMDAQPG-UHFFFAOYSA-J Cl[Ni](Cl)(Cl)Cl Chemical compound Cl[Ni](Cl)(Cl)Cl BQRPKHOZMDAQPG-UHFFFAOYSA-J 0.000 abstract 1
- KSPZJKUQFCVIGT-UHFFFAOYSA-N acetaldehyde hydrofluoride Chemical compound F.C(C)=O KSPZJKUQFCVIGT-UHFFFAOYSA-N 0.000 abstract 1
- DAMJCWMGELCIMI-UHFFFAOYSA-N benzyl n-(2-oxopyrrolidin-3-yl)carbamate Chemical compound C=1C=CC=CC=1COC(=O)NC1CCNC1=O DAMJCWMGELCIMI-UHFFFAOYSA-N 0.000 abstract 1
- 238000013329 compounding Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 235000011164 potassium chloride Nutrition 0.000 abstract 1
- 239000001103 potassium chloride Substances 0.000 abstract 1
- 238000005485 electric heating Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002305 electric material Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000002498 deadly effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB991079957A CN1153845C (zh) | 1999-06-10 | 1999-06-10 | 一种用于制备半导体电热膜的饱和溶液 |
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CNB991079957A CN1153845C (zh) | 1999-06-10 | 1999-06-10 | 一种用于制备半导体电热膜的饱和溶液 |
Publications (2)
Publication Number | Publication Date |
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CN1277268A true CN1277268A (zh) | 2000-12-20 |
CN1153845C CN1153845C (zh) | 2004-06-16 |
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CNB991079957A Expired - Lifetime CN1153845C (zh) | 1999-06-10 | 1999-06-10 | 一种用于制备半导体电热膜的饱和溶液 |
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CN (1) | CN1153845C (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100441056C (zh) * | 2005-01-05 | 2008-12-03 | 林正平 | 半导体电热膜制造方法 |
CN100466865C (zh) * | 2005-03-21 | 2009-03-04 | 冷同桂 | 一种复合金属电热膜溶胶及其制备方法 |
CN101232749B (zh) * | 2008-02-25 | 2011-02-16 | 栾松 | 矩阵布线式金属电热膜 |
CN102065589A (zh) * | 2010-12-27 | 2011-05-18 | 宁波高新区健坤电热技术有限公司 | 一种耐高温透明电热膜的制作方法 |
CN102685943A (zh) * | 2012-06-01 | 2012-09-19 | 佛山市顺德区新信德节能科技有限公司 | 一种高效节能新型纳米材料电热膜 |
CN104486849A (zh) * | 2014-12-10 | 2015-04-01 | 罗敏 | 一种用于制备半导体电热膜的饱和溶液 |
CN105722257A (zh) * | 2016-02-16 | 2016-06-29 | 顾伟 | 一种用于制备半导体电热膜的组合物、电热膜及制备方法 |
CN105992401A (zh) * | 2015-02-11 | 2016-10-05 | 佛山市顺德区美的电热电器制造有限公司 | 红外加热装置和电加热器具 |
CN105992409A (zh) * | 2015-02-11 | 2016-10-05 | 佛山市顺德区美的电热电器制造有限公司 | 电热膜层的制造方法、电热膜层、电加热盘和烹饪器具 |
CN105992411A (zh) * | 2015-02-11 | 2016-10-05 | 佛山市顺德区美的电热电器制造有限公司 | 电热膜层的制造方法、电热膜层、电加热盘和烹饪器具 |
CN106851875A (zh) * | 2017-01-20 | 2017-06-13 | 江苏森电采暖科技有限公司 | 高热能效率电热元件及其制备方法 |
-
1999
- 1999-06-10 CN CNB991079957A patent/CN1153845C/zh not_active Expired - Lifetime
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100441056C (zh) * | 2005-01-05 | 2008-12-03 | 林正平 | 半导体电热膜制造方法 |
CN100466865C (zh) * | 2005-03-21 | 2009-03-04 | 冷同桂 | 一种复合金属电热膜溶胶及其制备方法 |
CN101232749B (zh) * | 2008-02-25 | 2011-02-16 | 栾松 | 矩阵布线式金属电热膜 |
CN102065589B (zh) * | 2010-12-27 | 2012-12-26 | 宁波高新区健坤电热技术有限公司 | 一种耐高温透明电热膜的制作方法 |
CN102065589A (zh) * | 2010-12-27 | 2011-05-18 | 宁波高新区健坤电热技术有限公司 | 一种耐高温透明电热膜的制作方法 |
CN102685943B (zh) * | 2012-06-01 | 2014-05-14 | 佛山市顺德区新信德节能科技有限公司 | 一种纳米材料电热膜 |
CN102685943A (zh) * | 2012-06-01 | 2012-09-19 | 佛山市顺德区新信德节能科技有限公司 | 一种高效节能新型纳米材料电热膜 |
CN104486849A (zh) * | 2014-12-10 | 2015-04-01 | 罗敏 | 一种用于制备半导体电热膜的饱和溶液 |
CN105992401A (zh) * | 2015-02-11 | 2016-10-05 | 佛山市顺德区美的电热电器制造有限公司 | 红外加热装置和电加热器具 |
CN105992409A (zh) * | 2015-02-11 | 2016-10-05 | 佛山市顺德区美的电热电器制造有限公司 | 电热膜层的制造方法、电热膜层、电加热盘和烹饪器具 |
CN105992411A (zh) * | 2015-02-11 | 2016-10-05 | 佛山市顺德区美的电热电器制造有限公司 | 电热膜层的制造方法、电热膜层、电加热盘和烹饪器具 |
CN105992401B (zh) * | 2015-02-11 | 2019-10-29 | 佛山市顺德区美的电热电器制造有限公司 | 红外加热装置和电加热器具 |
CN105992411B (zh) * | 2015-02-11 | 2020-02-07 | 佛山市顺德区美的电热电器制造有限公司 | 电热膜层的制造方法、电热膜层、电加热盘和烹饪器具 |
CN105722257A (zh) * | 2016-02-16 | 2016-06-29 | 顾伟 | 一种用于制备半导体电热膜的组合物、电热膜及制备方法 |
CN106851875A (zh) * | 2017-01-20 | 2017-06-13 | 江苏森电采暖科技有限公司 | 高热能效率电热元件及其制备方法 |
Also Published As
Publication number | Publication date |
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CN1153845C (zh) | 2004-06-16 |
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