CN1267721C - Complete optical fiber probe scanning type near-field optical microscope - Google Patents
Complete optical fiber probe scanning type near-field optical microscope Download PDFInfo
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- CN1267721C CN1267721C CN 200410066391 CN200410066391A CN1267721C CN 1267721 C CN1267721 C CN 1267721C CN 200410066391 CN200410066391 CN 200410066391 CN 200410066391 A CN200410066391 A CN 200410066391A CN 1267721 C CN1267721 C CN 1267721C
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 74
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- 238000005286 illumination Methods 0.000 claims abstract description 9
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- 230000005540 biological transmission Effects 0.000 claims description 3
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- 238000013459 approach Methods 0.000 abstract description 2
- 238000012876 topography Methods 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 abstract 1
- 238000002834 transmittance Methods 0.000 abstract 1
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Abstract
A complete optical fiber probe scanning type near-field optical microscope comprises a laser illumination system, a monitoring system, a sample frame, an optical fiber probe scanning mechanism, a three-dimensional coarse adjustment device and a feedback control and data acquisition system, and the basic concept is as follows: and fixing the optical fiber probe on the tuning fork, and driving the optical fiber probe on the tuning fork to scan near the surface of the sample through the three-dimensional scanner. When the fiber optic probe approaches the sample surface, the fiber optic probe is subjected to shear forces from atoms on the sample surface. This force will change the vibration of the tuning fork so that the distance information between the probe and the sample can be demodulated. This information is fed back to the Z-control system to maintain the distance of the fiber optic probe to the sample surface at a constant value. This feedback information reflects the topography of the sample surface. The intensity of the light collected by the fiber optic probe gives the transmittance of the sample. The invention has the advantages of large scanning range, no limitation of sample size, high modularization, convenient combination and transformation and the like.
Description
Technical field
The present invention relates to the near field optic flying-spot microscope, particularly a kind of fully optical fiber probe scan type near-field optical microscope that scans by the moving fiber probe fully.Be applicable to molecular biology (natural nano structure), nano material and nano-device (artificial nanostructures) and high density information optical storage etc.
Technical background
As far back as nineteen twenty-eight Synge prophesy, to use than the littler point source of wavelength enough near apart from the intraoral illumination object or use the point probe littler in enough near distance, to survey the scattering wave of object than wavelength, resolution can break through diffraction limit.Entering after the eighties, is that the microscopy in modern age of representative has also just become reality by imagination with the near-field scanning optical microscope, has not only broken through diffraction limit, but also has opened up as a series of new research fields such as nanocomposite optical, ultrahigh density storage.Common flying-spot microscope, referring to " Scanning near-field optical microscopy with apertureprobes:Fundamentals and applications ", B.Hecht, B.Sick, UP Wild, V.Deckert, R.Zenobi, OJF Martin and DW Pohl, J.Chem.Phys.112 (18) (2000) 7761-7774. adopt the mode of mobile example to scan.The parts that move in this structure relatively disperse, and are less demanding to being rigidly connected between device, help the structure of device.But for the bigger situation of sample, be difficult to scan by mobile example, this structure is also just no longer suitable.Situation in particular for pen recorder and recording medium in the near field of light storage, pen recorder and proving installation lay respectively at the recording medium both sides, because recording medium (normally CD) is very big, and recording process requires the focus of illumination objective lens to be positioned at the recording medium surface, and it is unpractical scanning by movable recording media.
Summary of the invention
The problem to be solved in the present invention has been to overcome the deficiency of above-mentioned technology formerly, a kind of fully optical fiber probe scan type near-field optical microscope is provided, it should have sweep limit and greatly, not be subjected to sample size restriction, high modularization, makes things convenient for combined transformation, adopts advantages such as phase-locked control, can satisfy the near field of light storage demand.
Basic design of the present invention is:
Optical fiber probe is fixed on the tuning fork,, comprises Z, drive tuning fork and near sample surfaces, scan to control system and XY scanner by three-dimensional scanner.When optical fiber probe approached sample surfaces, optical fiber probe was subjected to the effect from sample surfaces atom shearing force.This power will change the vibrations of tuning fork, thereby can demodulate the range information between probe and the sample.Give Z to control system this information feedback, so that optical fiber probe is to distance maintenance one steady state value of sample surfaces.Can obtain the pattern of sample surfaces from this feedback information.The light intensity that optical fiber probe is collected can provide the transmitance of sample.
Technical solution of the present invention is as follows:
A kind of fully optical fiber probe scan type near-field optical microscope that scans by the moving fiber probe fully, it is characterized in that comprising laser illumination system, surveillance, specimen holder, optical fiber probe scanning mechanism, three-dimensional rack and rinion adjustment, FEEDBACK CONTROL and data acquisition system (DAS)
Described laser illumination system comprises LASER Light Source, focus control and microcobjective, the laser beam and the microcobjective optical axis coincidence of LASER Light Source output, and microcobjective is fixed on the focus control, and this focus control links to each other with computing machine;
Described surveillance comprises white light source, half-reflecting half mirror, spectrum spectroscope and ccd image collector, the laser beam of spectroscopical light splitting surface of this spectrum and LASER Light Source output is at 45, the beam of white light of white light source output and the light splitting surface of half-reflecting half mirror are 45 °, overlapped with described laser beam by spectrum spectroscope reflection back by half-reflecting half mirror reflected white light bundle, be in harmony the position of described ccd image collector can make the light beam imaging thereon that reflects from sample surfaces;
Described optical fiber probe scanning mechanism comprises optical fiber probe, tuning fork, demodulation and drive circuit board, anchor clamps, three-dimensional scanner and connector, optical fiber probe is fixed in the most advanced and sophisticated of tuning fork and gives prominence to outside it, tuning fork is fixed on demodulation and the drive circuit board, anchor clamps are connected as a single entity demodulation and drive circuit board (803) with three-dimensional scanner, connector is connected three-dimensional scanner with the XY two dimension adjustment rack of three-dimensional rack and rinion adjustment;
Described three-dimensional rack and rinion adjustment is made up of to high-precision step motor XY two dimension adjustment rack and Z;
Described FEEDBACK CONTROL and data acquisition system (DAS), comprise photomultiplier, prime amplifier, lock-in amplifier, atomic force microscope control cabinet and computing machine, the input end of photomultiplier is connected to the optical fiber that optical fiber probe is drawn, the input end of its output termination prime amplifier, the output terminal of this prime amplifier connects the signals collecting input port of atomic force microscope control cabinet, modulation is connected the input end of lock-in amplifier with the output terminal of drive circuit board, this lock-in amplifier output connect the Z of atomic force microscope control cabinet to feedback input end, the scanning drive signal input end of optical fiber probe scanning mechanism connects the scan control output terminal of atomic force control cabinet, and atomic force microscope control cabinet is connected to computing machine.
Described specimen holder places between microcobjective and the optical fiber probe scanning mechanism, and this specimen holder is used for clamped sample.
Described LASER Light Source is the adjustable laser instrument of a kind of light intensity of output, or continuous wave laser adds that an acousto-optic modulator realizes.
The focusing system of described focus control and simple microscope is similar, by the computer control automatic focusing.
Described this microcobjective has bigger enlargement factor and numerical aperture, and the conjugate distance of microcobjective can be 195 or infinitely great.
Described spectrum spectroscope is to the laser wave transmission of growing tall, and to the high reflection of white light.
Described half-reflecting half mirror is the certain spectroscope of beam split ratio.
Described photomultiplier and prime amplifier have low noise, high sensitivity, and the input of output and atomic force microscope cabinet feedback is complementary.
Described three-dimensional scanner is the nano-precision flat-bed scanner, or piezoelectric ceramic scanatron.
The aperture size of optical fiber probe is determined according to the factors such as precision of system accuracy demand, optical maser wavelength and three-dimensional scanner.Demodulation and drive circuit board are responsible for driving the feedback information of tuning fork vibrations and demodulation probe, can adopt the shearing force feedback system also can adopt the pattern of rapping, change optical fiber probe into atomic-force microscope needle-tip, just can be used as the atomic force flying-spot microscope, change optical fiber probe into the scanning probe microscopy needle point, saving lock-in amplifier just becomes a scanning probe microscopy.Anchor clamps couple together demodulation and drive circuit board and three-dimensional scanner.
Described three-dimensional rack and rinion adjustment can be a three-dimensional trim holder, also can be the combination of two-dimentional adjustment rack and high-precision step motor etc.Step motor and two-dimentional adjustment rack join, and its step direction is perpendicular to the moving direction of two-dimentional adjustment rack.
Atomic force microscope control cabinet has three output channels and is used for XYZ and approaches scan control, and the electrical resistivity survey that two input channels are used for Z electric signal after light that feedback and optical fiber probe are collected is through photomultiplier and prime amplifier is surveyed collection.
Described specimen holder places microcobjective between the optical fiber probe scanning mechanism, can realize bidimensional when scanning measured zone with mobile example.
The course of work of the present invention:
In use, the light beam that LASER Light Source is sent is focused on sample surfaces by microcobjective, produce the evanescent wave that carries less than the surface topography information of wavelength at sample surfaces, optical fiber probe is collected the evanescent wave of sample surfaces and is converted the conduction light wave to, propagates into then on the photomultiplier, converts light signal to electric signal, being input to prime amplifier amplifies, import atomic force microscope control cabinet then, collect at last in the computing machine, obtain the transmitance information of sample after machine is handled as calculated.In the optical fiber probe scanning process, because optical fiber probe is subjected to the effect from the shearing force of sample surfaces atom, thereby change the vibrations of tuning fork, by demodulator circuit and lock-in amplifier, can obtain the range information between optical fiber probe and sample surfaces, i.e. the pattern of sample surfaces.With this information feedback to the Z of atomic force microscope control cabinet to control system so that optical fiber probe remains on steady state value to the distance of sample surfaces.
Compare with technology formerly, the present invention has following advantage:
1, adopt sample motionless and modes by whole moving fiber probes scan, sweep limit is big, and sample can be big or small arbitrarily.
2, because the optical fiber probe scanister has been realized whole scan functions, can realize high modularization, make things convenient for combined transformation to satisfy other demand.Such as adopting the shearing force feedback system also can adopt the pattern of rapping, change optical fiber probe into atomic-force microscope needle-tip, just can be used as the atomic force flying-spot microscope, change optical fiber probe into the scanning probe microscopy needle point, saving lock-in amplifier just becomes a scanning probe microscopy.
Can satisfy the specific demand of writing down and testing in the near field of light storage.
Total system adopts phase-locked control, can eliminate the influence of external interference.
Description of drawings:
Fig. 1 is a specific embodiment synoptic diagram of the present invention.
Fig. 2 is an optical fiber probe scanning mechanism synoptic diagram of the present invention.
1-LASER Light Source 2-speculum 3-spectrum spectroscope 4-speculum 5-focus control 6-microcobjective 7-sample 8-optical fiber probe sweep mechanism 801-optical fiber probe 802-tuning fork 803-demodulation and drive circuit board 804-anchor clamps 805-piezoelectric ceramic tube 806-connector 9-XY adjustment rack 10-Z are to stepper motor 11-photomultiplier 12-lock-in amplifier 13-preamplifier 14-AFM control cabinet 15-computer 16-half-reflecting half mirror 17-CCD image acquisition device 18-white light source among the figure
Embodiment
The invention will be further described below by specific embodiment, but should not limit protection scope of the present invention with this.
See also Fig. 1 and Fig. 2 earlier, the structural representation of a specific embodiment of the present invention during Fig. 1, as seen from the figure, a kind of fully optical fiber probe scan type near-field optical microscope, comprise laser illumination system, surveillance, specimen holder, optical fiber probe scanning mechanism, three-dimensional rack and rinion adjustment, FEEDBACK CONTROL and data acquisition system (DAS), it is characterized in that
Described laser illumination system comprises LASER Light Source 1, focus control 5 and microcobjective 6, the laser beam of LASER Light Source 1 output is through first catoptron 2, spectrum spectroscope 3, second catoptron 4 and microcobjective 6 optical axis coincidences, microcobjective 6 is fixed on the focus control 5, and this focus control 5 links to each other with computing machine 15;
Described surveillance comprises white light source 18, half-reflecting half mirror 16, spectrum spectroscope 3 and ccd image collector 17, the laser beam of the light splitting surface of this spectrum spectroscope 3 and LASER Light Source 1 output is at 45, the beam of white light of white light source 18 outputs and the light splitting surface of half-reflecting half mirror 16 are 45 °, overlapped with described laser beam by spectrum spectroscope 3 reflection backs by half-reflecting half mirror 16 reflected white light bundles, be in harmony the position of described ccd image collector 17 can make the light beam imaging thereon that reflects from sample surfaces 7;
Described optical fiber probe scanning mechanism 8 as shown in Figure 2, comprise optical fiber probe 801, tuning fork 802, demodulation and drive circuit board 803, anchor clamps 804, three-dimensional scanner 805 and connector 806, optical fiber probe 801 is fixed in the most advanced and sophisticated of tuning fork 802 and gives prominence to outside it, tuning fork 802 is fixed on demodulation and the drive circuit board 803, anchor clamps 804 are connected as a single entity demodulation and drive circuit board 803 with three-dimensional scanner 805, connector 806 is connected three-dimensional scanner 805 with the XY two dimension adjustment rack 9 of three-dimensional rack and rinion adjustment;
Described three-dimensional rack and rinion adjustment is made up of to high-precision step motor 10 XY two dimension adjustment rack 9 and Z;
Described FEEDBACK CONTROL and data acquisition system (DAS), comprise photomultiplier 11, prime amplifier 13, lock-in amplifier 12, atomic force microscope control cabinet 14 and computing machine 15, the input end of photomultiplier 11 is connected to the optical fiber that optical fiber probe 801 is drawn, the input end of its output termination prime amplifier 13, the output terminal of this prime amplifier 13 connects the signals collecting input port of atomic force microscope control cabinet 14, modulation is connected the input end of lock-in amplifier 12 with the output terminal of drive circuit board 803,12 output of this lock-in amplifier connects the Z of atomic force microscope control cabinet 14 to feedback input end, the scanning drive signal input end of optical fiber probe scanning mechanism 8 connects the scan control output terminal of atomic force control cabinet, and atomic force microscope control cabinet 14 is connected to computing machine 15.
Described specimen holder places between microcobjective 6 and the optical fiber probe scanning mechanism 8, this specimen holder) be used for clamped sample 7.
The adjustable laser instrument of light intensity that described LASER Light Source 1 is a kind of output.
Described focus control 5 is similar with the focusing system of simple microscope, by computing machine 15 control automatic focusings.
This microcobjective 6 of stating has bigger enlargement factor and numerical aperture, and the conjugate distance of microcobjective can be 195 or infinitely great.
The transmission of growing tall of 3 pairs of laser waves of described spectrum spectroscope, and to the high reflection of white light.
Described photomultiplier 11 and prime amplifier 13 have low noise, high sensitivity, and the input of output and atomic force microscope cabinet feedback is complementary.
Described three-dimensional scanner 805 is piezoelectric ceramic scanatrons.
(wavelength is 405nm to the continuous monochromatic collimated beam bundle of laser instrument 1 emission, with blue light optical storage consistent wavelength) on the direction of advancing, be equipped with catoptron 2, the reflecting surface of catoptron 2 becomes 135 ° with the output light path of laser instrument 1, on the direction that reflected light advances, be equipped with spectrum spectroscope 3, the light splitting surface and the light beam of spectrum spectroscope 3 are at 45, laser beam sees through after the spectrum spectroscope 3, shine catoptron 4, the reflecting surface of catoptron 4 with incide its surperficial laser beam and become 135 °, light beam is reflected to microcobjective 6 then, and the optical axis of microcobjective 6 and beam optical axis overlap and pass through the control of focusing system 5, make light beam focus on sample 7 surfaces.Near sample 7 opposite side surfaces, be equipped with optical fiber probe scanner mechanism 8, optical fiber probe scanner mechanism 8 is perpendicular to sample 7 surfaces, and XY adjustment rack 9 is fixed in optical fiber probe scanner mechanism 8, and XY adjustment rack 9 joins to step motor 10 with Z.Optical fiber probe scanner mechanism 8 respectively with photomultiplier 11, lock-in amplifier 12 links to each other with prime amplifier 13, photomultiplier 11 then, and lock-in amplifier 12 and prime amplifier 13 are connected to atomic force microscope control cabinet 14, and atomic force microscope control cabinet 14 is connected to computing machine 15.In this embodiment in order to make system architecture compacter, and catoptron 2 and catoptron 4 have been added.
The light beam working direction of white light source 18 outputs that surveillance is used is equipped with half-reflecting half mirror 16, the light splitting surface of half-reflecting half mirror 16 becomes 135 ° with white light beam on inciding it, and its position can make the reflected white light light beam be overlapped with the laser beam of incident by spectrum spectroscope 3 reflection backs.After being reflected by anti-semi-permeable mirror 16, the light beam of white light source 18 outputs is equipped with ccd image collector 17 on the opposite direction of light beams.
The course of work of embodiments of the invention: the continuous monochromatic collimated beam bundle of laser instrument 1 emission is reflected after mirror 2 reflections, see through spectrum spectroscope 3, shine catoptron 4, light beam is reflected to microcobjective 6 then, by the control of focusing system 5, make light beam focus on sample 7 surfaces, this focusing process is in surveillance, particularly carry out under the supervision of ccd image collector 17, and by computing machine 15 controls.The evanescent wave less than the sample surfaces pattern information of wavelength is carried in generation.At sample 7 surface scans are the optical fiber probes 801 that are fixed on the tuning fork 802, collect the evanescent wave on sample 7 surfaces, and convert thereof into propagable light, pass to photomultiplier 11 through optical fiber, convert light signal to electric signal, be input to prime amplifier 13 again and amplify, import atomic force microscope control cabinet 14 then, collect 15 li in computing machine at last, obtain the transmitance information of sample 7 after machine 15 is handled as calculated.In optical fiber probe scanner mechanism 8 scanning processes, demodulation that piezoelectric ceramic tube 805 drives are fixed thereon and drive circuit board 803 are done the scanning on the XY both direction.In this process, because optical fiber probe 801 is subjected to the effect from the shearing force of sample 7 surface atoms, thereby change the vibrations of tuning fork 802, amplification by demodulation and drive circuit board 803 and lock-in amplifier 12, and obtain range information between optical fiber probe 801 and sample 7 surfaces, i.e. the pattern on sample 7 surfaces.Deliver to computing machine 15 then, obtain the pattern of sample 7 after the processing, and the Z that this information feedback is controlled cabinet 14 to atomic force microscope keeps a steady state value to control system so that optical fiber probe 801 arrives the distance on sample 7 surfaces.
Claims (9)
1, a kind of fully optical fiber probe scan type near-field optical microscope comprises laser illumination system, surveillance, specimen holder, optical fiber probe scanning mechanism, three-dimensional rack and rinion adjustment, FEEDBACK CONTROL and data acquisition system (DAS), it is characterized in that
Described laser illumination system comprises LASER Light Source (1), focus control (5) and microcobjective (6), the laser beam and microcobjective (6) optical axis coincidence of LASER Light Source (1) output, microcobjective (6) is fixed on the focus control (5), and this focus control (5) links to each other with computing machine (15);
Described surveillance comprises white light source (18), half-reflecting half mirror (16), spectrum spectroscope (3) and ccd image collector (17), the laser beam of the light splitting surface of this spectrum spectroscope (3) and LASER Light Source (1) output is at 45,45 ° of the beam of white light of white light source (18) output and the light splitting surfaces of half-reflecting half mirror (16), overlapped with described laser beam by spectrum spectroscope (3) reflection back by half-reflecting half mirror (16) reflected white light bundle, be in harmony the position of described ccd image collector (17) can make the light beam imaging thereon that reflects from sample surfaces (7);
Described optical fiber probe scanning mechanism (8) comprises optical fiber probe (801), tuning fork (802), demodulation and drive circuit board (803), anchor clamps (804), three-dimensional scanner (805) and connector (806), optical fiber probe (801) is fixed in the most advanced and sophisticated of tuning fork (802) and gives prominence to outside it, tuning fork (802) is fixed on demodulation and the drive circuit board (803), anchor clamps (804) are connected as a single entity demodulation and drive circuit board (803) with three-dimensional scanner (805), connector (806) is connected three-dimensional scanner (805) with the XY two dimension adjustment rack (9) of three-dimensional rack and rinion adjustment;
Described three-dimensional rack and rinion adjustment is made up of to high-precision step motor (10) XY two dimension adjustment rack (9) and Z;
Described FEEDBACK CONTROL and data acquisition system (DAS), comprise photomultiplier (11), prime amplifier (13), lock-in amplifier (12), atomic force microscope control cabinet and computing machine (15), the input end of photomultiplier (11) is connected to the optical fiber that optical fiber probe (801) is drawn, the input end of its output termination prime amplifier (13), the output terminal of this prime amplifier (13) connects the signals collecting input port of atomic force microscope control cabinet (14), modulation is connected the input end of lock-in amplifier (12) with the output terminal of drive circuit board (803), the output of (12) of this lock-in amplifier connects the Z of atomic force microscope control cabinet (14) to feedback input end, the scanning drive signal input end of optical fiber probe scanning mechanism (8) connects the scan control output terminal of atomic force control cabinet, and atomic force microscope control cabinet (14) is connected to computing machine (15);
Described specimen holder places between microcobjective (6) and the optical fiber probe scanning mechanism (8), and this specimen holder is used for clamped sample (7).
2, fully optical fiber probe scan type near-field optical microscope according to claim 1 is characterized in that described LASER Light Source (1) is a kind of adjustable laser instrument of light intensity of output, or continuous wave laser adds that an acousto-optic modulator realizes.
3, fully optical fiber probe scan type near-field optical microscope according to claim 1 is characterized in that described focus control (5) is similar with the focusing system of simple microscope, by computing machine (15) control automatic focusing.
4, fully optical fiber probe scan type near-field optical microscope according to claim 1 is characterized in that described this microcobjective (6) has bigger enlargement factor and numerical aperture, and the conjugate distance of microcobjective can be 195 or infinitely great.
5, fully optical fiber probe scan type near-field optical microscope according to claim 1 is characterized in that described spectrum spectroscope (3) to the laser wave transmission of growing tall, and to the high reflection of white light.
6, fully optical fiber probe scan type near-field optical microscope according to claim 1 is characterized in that described half-reflecting half mirror (16) is the certain spectroscope of beam split ratio.
7, fully optical fiber probe scan type near-field optical microscope according to claim 1, it is characterized in that described photomultiplier (11) and prime amplifier (13) have low noise, high sensitivity, and the input of output and atomic force microscope cabinet feedback is complementary.
8, fully optical fiber probe scan type near-field optical microscope according to claim 1 is characterized in that described three-dimensional rack and rinion adjustment is a three-dimensional trim holder.
9, according to each described fully optical fiber probe scan type near-field optical microscope of claim 1 to 8, it is characterized in that described three-dimensional scanner (805) is the nano-precision flat-bed scanner, or piezoelectric ceramic scanatron.
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| CN 200410066391 CN1267721C (en) | 2004-09-15 | 2004-09-15 | Complete optical fiber probe scanning type near-field optical microscope |
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| CN 200410066391 CN1267721C (en) | 2004-09-15 | 2004-09-15 | Complete optical fiber probe scanning type near-field optical microscope |
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| CN102426270B (en) * | 2011-09-02 | 2013-04-10 | 北京大学 | Optical system for low-temperature scanning near-field optical microscope |
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| CN106199077A (en) * | 2016-07-08 | 2016-12-07 | 深圳大学 | A kind of optical microscope for scanning near field device and novel optical fiber probe structure |
| US20180045937A1 (en) * | 2016-08-10 | 2018-02-15 | Zeta Instruments, Inc. | Automated 3-d measurement |
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| CN106595515B (en) * | 2016-11-25 | 2019-01-22 | 天津大学 | The topography measurement device that a kind of white light interference and laser scanning combine |
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| CN109239404A (en) * | 2018-08-23 | 2019-01-18 | 中国科学院物理研究所 | The holeless near field optic micro imaging method of optical path reflecting interferometer is total to based on all -fiber |
| CN109485013B (en) * | 2018-12-29 | 2020-11-06 | 哈尔滨工业大学 | Nano connecting device |
| CN109917407A (en) * | 2019-03-22 | 2019-06-21 | 中国科学院重庆绿色智能技术研究院 | A kind of near field probe distance measuring method and device based on laser reflection |
| CN110426535B (en) * | 2019-06-21 | 2021-01-26 | 华中科技大学 | Single quantum dot scanning near-field optical microscopic probe and system, detection device and method |
| CN110488043B (en) * | 2019-08-07 | 2021-05-04 | 电子科技大学 | Scanning near-field optical microscope with free electron excitation enhanced near-field signal |
| CN111665374B (en) * | 2020-06-05 | 2023-02-28 | 上海大学 | Optical fiber probe based on quantum dots and detection system thereof |
| CN112379131A (en) * | 2020-11-02 | 2021-02-19 | 中国科学技术大学 | Hybrid waveguide, preparation method of optical microscope probe and optical microscope probe |
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