CN1258854A - Integrated multi-element piezoelectric deformation reflector - Google Patents
Integrated multi-element piezoelectric deformation reflector Download PDFInfo
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- CN1258854A CN1258854A CN 98124036 CN98124036A CN1258854A CN 1258854 A CN1258854 A CN 1258854A CN 98124036 CN98124036 CN 98124036 CN 98124036 A CN98124036 A CN 98124036A CN 1258854 A CN1258854 A CN 1258854A
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- reflector
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- 239000000919 ceramic Substances 0.000 claims abstract description 38
- 239000004020 conductor Substances 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 239000002994 raw material Substances 0.000 abstract 1
- 230000003044 adaptive effect Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001915 proofreading effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
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Abstract
The invention relates to an integrated multi-element piezoelectric deformable reflector, which relates to the technical field of wavefront correctors of self-adaptive optical systems and is characterized in that a piezoelectric driver capable of forming a plurality of action units is fixedly connected between a reflector of a continuous mirror surface and a high-rigidity substrate, the piezoelectric driver is made of a plurality of pieces of piezoelectric ceramics, an addressing electrode and an addressing lead wire which represent each action unit of the driver are arranged at each same position on the positive electrode of each piezoelectric ceramic piece, and the negative electrode is a common electrode. The product has the advantages of integrated structure, small volume, light weight, raw material and workload saving, high response speed, high resolution, wide application and the like.
Description
The present invention is a kind of integrated multielement piezoelectric deforming reflector, relates to the wave-front corrector technical field of ADAPTIVE OPTICS SYSTEMS.
Optical system is widely used in multiple field, but good again optical system, because extraneous dynamic disturbance, will cause its optical wavefront distortion, thereby loss system resolving accuracy, this is to make optics circle perplex the centuries and helpless old problem up to the appearance of adaptive optical technique, has just solved this difficult problem.
The principal feature of adaptive optical technique can be surveyed and the calibrating optical wavefront distortion exactly in real time, thereby makes optical system remain the good optical performance, and the key that plays this effect is exactly a deformation reflection mirror.The most practical present polynary discrete piezoelectric deforming reflection mirror, its structure adopts between the mirror back surface of a continuous mirror surface and a high rigidity substrate and is fixed with the piezoelectric actuator that several constitute some action cells.When the both positive and negative polarity to piezoelectric ceramic piece applied external voltage, driver produced distortion, deflection δ along polarised direction
∑=nd
33V (n: piezoelectric ceramic piece number; d
33: the piezoelectric constant of piezoelectric ceramics; V: external voltage), make the continuous mirror surface of catoptron produce distortion, thereby play the effect of proofreading and correct wavefront distortion, this high speed, high-precision polynary discrete piezoelectric deforming reflection mirror, its weak point is: a plurality of discrete piezoelectric actuator between continuous mirror surface catoptron and the fixing base, each piezoelectric actuator is represented an action cell, each piezoelectric ceramic actuator is formed by the bonding curing that superposes of some piezoelectric ceramics, one side is drawn for positive pole and another side negative pole are arranged on each piezoelectric ceramic piece, if will make the piezoelectric deforming reflection mirror of Unit 19, will bonding piezoelectric actuator more than 25, thereby selecting 19 qualified piezoelectric actuators uses, its complex manufacturing technology, technical difficulty is big, and workload is big, the expense of taking a lot of work starting material, the cost height, small product size is big, thereby has limited the application in many aspects of adaptive optics new technology greatly, and can only be confined to the application in great optical system such as country is high-grade, precision and advanced.
Also has a kind of integrated piezoelectric deformation reflection mirror, between continuous mirror surface catoptron and fixing base a plurality of piezoelectric actuators of making by a monoblock piezoelectric ceramics, several addressing electrodes are arranged on its positive pole, negative pole is a public pole, though this structure volume is less, but its deflection is very little, can not satisfy request for utilization far away.
The objective of the invention is to avoid above-mentioned the deficiencies in the prior art and the simple manufacturing technology of a kind of technology is provided and also small product size little, cost is low, and high speed, the high precision integrated multielement piezoelectric deforming reflector of enough deflections are arranged.
Purpose of the present invention can reach by following measure: be fixed with a piezoelectric actuator that can constitute some action cells between continuous mirror surface catoptron and the high rigidity substrate, piezoelectric actuator is by some bonding the forming of piezoelectric ceramic piece stack, on the positive pole of each sheet piezoelectric ceramic piece, at each corresponding same position place addressing electrode and the address conductors of representing each action cell of driver arranged, correspondence is in parallel separately one by one by address conductors for each addressing electrode, the public pole at each piezoelectric ceramic piece back side is also all in parallel, and the sheet number of piezoelectric ceramic piece is directly proportional with the deflection of driver.
Purpose of the present invention can also reach by following measure: on the positive pole of each sheet piezoelectric ceramic piece of piezoelectric actuator, the addressing electrode and the address conductors of corresponding identical shaped each action cell of representative driver are arranged at the same position place of each sheet correspondence, and the end of each address conductors all places the edge of piezoelectric ceramic piece.
Description of drawings:
Fig. 1 is one-piece construction figure of the present invention
Fig. 2 is the anodal structural drawing of each sheet piezoelectric ceramic piece in the 9 unit piezoelectric actuators
Fig. 3 is the anodal structural drawing of each sheet piezoelectric ceramic piece in the 19 unit piezoelectric actuators
Fig. 4 is the anodal structural drawing of each sheet piezoelectric ceramic piece in the 37 unit piezoelectric actuators
Fig. 5 is the structural drawing of piezoelectric ceramic piece negative pole
The present invention is further detailed in conjunction with the accompanying drawings below:
As shown in Figure 1: be fixedly connected with a piezoelectric actuator (2) that can constitute some action cells between the back side of a continuous mirror surface catoptron (1) and the high rigidity substrate (3), piezoelectric actuator (2) is formed by the bonding curing that superposes of some piezoelectric ceramic pieces, and the sheet number of piezoelectric ceramic piece is directly proportional with requiring the driver deflection.
As shown in Figure 2: the piezoelectric actuator (2) that can constitute 9 action cells, on the positive pole of its each sheet piezoelectric ceramic piece, be evenly equipped with 9 addressing electrode (4) and address conductors (5) that shape is identical, the end of every address conductors (5) places the edge of piezoelectric ceramic piece, is convenient to connect amplifier anode.
As shown in Figure 3: the piezoelectric actuator (2) that can constitute 19 action cells, on the positive pole of its each sheet piezoelectric ceramic piece, be evenly equipped with 9 addressing electrode (7) and address conductors (8) that shape is identical, the end of every address conductors (8) places the edge of piezoelectric ceramic piece, is convenient to connect amplifier anode.
As shown in Figure 4: the piezoelectric actuator (2) that can constitute 37 action cells, on the positive pole of its each sheet piezoelectric ceramic piece, be evenly equipped with 37 addressing electrode (9) and address conductors (10) that shape is identical, the end of every address conductors (10) places the edge of piezoelectric ceramic piece, is convenient to connect the high-voltage amplifier positive pole.
As shown in Figure 5: the back side of piezoelectric ceramic piece is negative pole (6), is public pole.
Addressing electrode and address conductors on each sheet piezoelectric ceramic piece, all at the same position place of correspondence, corresponding one by one bonding curing when each sheet splices.The addressing electrode of each action cell is in parallel with public negative pole on the piezoelectric actuator, is connected with each the road amplifier that applies external voltage.
During use, when respectively to each unit application point of piezoelectric actuator, be that addressing electrode on the positive pole and address conductors and public negative pole are when applying external voltage, each action cell can produce the plus or minus distortion on the driver, thereby the catoptron that drives on it produces distortion, this distorting lens is put in the ADAPTIVE OPTICS SYSTEMS, just can plays the effect of proofreading and correct wavefront distortion.
The present invention compares prior art and has following advantage:
1, adopt one can consist of the sticking by the stack of multi-disc piezoelectric ceramic piece of a plurality of action cells
Connect and solidify the piezoelectric actuator that forms, piezoelectric ceramic piece becomes with the deflection of driver
Direct ratio, all a plurality of addressing electrodes on the piezoelectric ceramic piece positive pole and address conductors reach
Public negative pole focuses on the piezoelectric actuator, this integrated structure characteristics
Polynary deformation reflection mirror, the size of its product have dwindled more than three times at least, save
Starting material, its deflection increases greatly, satisfies request for utilization.
2, no matter need what action cells, only need a bonding driver, significantly reduce
Several times to tens times of workloads.
3, several times to tens times of starting material have been saved.
4, owing to the size decreases of distorting lens, improved the difficulty of processing of distorting lens greatly, carry
High stability and resonance frequency make the ADAPTIVE OPTICS SYSTEMS whole dimension become
Little, reduced the cost of whole ADAPTIVE OPTICS SYSTEMS.
5, since distorting lens integrated after, rigidity increases greatly, tens times of ground of resonance frequency increase
Add, operating rate is faster, application wider.
6, since distorting lens integrated after, intensity increases, and can be used in space flight, light laser processing
Etc. a plurality of fields.
7, since distorting lens integrated after, weight saving, be convenient to the transportation, the mailing, more help
As commodity selling.
8, the range of size of this distorting lens can be dwindled, also can be amplified, and action cell also can
Increase or reduce, decide according to system requirements.
Claims (3)
1, integrated multielement piezoelectric deforming reflector, be fixed with the piezoelectric actuator that driven by the amplifier electric signal between continuous mirror surface catoptron and the high rigidity flat board, it is characterized in that between continuous mirror surface catoptron (1) and the high rigidity flat board (3) that fixing is a piezoelectric actuator (2) that can constitute some action cells, piezoelectric actuator (2) is by some bonding the forming of piezoelectric ceramic piece stack, on the positive pole of a slice piezoelectric ceramic piece, addressing electrode (4) and the address conductors (5) of representing each action cell of driver arranged at each corresponding same position place, the addressing electrode of each action cell (4) is corresponding in parallel by address conductors (5), the public negative pole (6) at each piezoelectric ceramic piece back side is also in parallel, and the sheet number of piezoelectric ceramic piece is directly proportional with the deflection that driver requires.
2, integrated multielement piezoelectric deforming reflector as claimed in claim 1, it is characterized in that on the positive pole of each sheet piezoelectric ceramic piece of driver (1) that the addressing electrode (4) and the address conductors (5) of corresponding identical shaped each action cell of representative driver arranged at each corresponding same position place.
3, small-sized integrated multielement piezoelectric deforming reflector as claimed in claim 1 or 2, the end that it is characterized in that each address conductors (5) all places the edge of piezoelectric ceramic piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98124036 CN1258854A (en) | 1998-12-30 | 1998-12-30 | Integrated multi-element piezoelectric deformation reflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98124036 CN1258854A (en) | 1998-12-30 | 1998-12-30 | Integrated multi-element piezoelectric deformation reflector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1258854A true CN1258854A (en) | 2000-07-05 |
Family
ID=5228480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 98124036 Pending CN1258854A (en) | 1998-12-30 | 1998-12-30 | Integrated multi-element piezoelectric deformation reflector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1258854A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100429555C (en) * | 2004-09-20 | 2008-10-29 | 阿尔卡特公司 | Locally deformable mirror comprising electroactive material whose thickness can be varied by means of electrical effects |
| CN101630063A (en) * | 2008-07-16 | 2010-01-20 | 船井电机株式会社 | Vibrating mirror element |
| CN101571627B (en) * | 2009-06-12 | 2011-05-18 | 中国科学院上海光学精密机械研究所 | Method for calibrating wavefront by self-adaptive optical loop |
| CN104793333A (en) * | 2015-04-29 | 2015-07-22 | 中国科学院光电技术研究所 | Large-stroke high-speed multistage driving tilting mirror |
-
1998
- 1998-12-30 CN CN 98124036 patent/CN1258854A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100429555C (en) * | 2004-09-20 | 2008-10-29 | 阿尔卡特公司 | Locally deformable mirror comprising electroactive material whose thickness can be varied by means of electrical effects |
| CN101630063A (en) * | 2008-07-16 | 2010-01-20 | 船井电机株式会社 | Vibrating mirror element |
| CN101630063B (en) * | 2008-07-16 | 2013-06-19 | 船井电机株式会社 | Vibrating mirror element |
| CN101571627B (en) * | 2009-06-12 | 2011-05-18 | 中国科学院上海光学精密机械研究所 | Method for calibrating wavefront by self-adaptive optical loop |
| CN104793333A (en) * | 2015-04-29 | 2015-07-22 | 中国科学院光电技术研究所 | Large-stroke high-speed multistage driving tilting mirror |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
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