CN1138990C - High-speed small piezoelectric tilt reflector - Google Patents
High-speed small piezoelectric tilt reflector Download PDFInfo
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- CN1138990C CN1138990C CNB99115049XA CN99115049A CN1138990C CN 1138990 C CN1138990 C CN 1138990C CN B99115049X A CNB99115049X A CN B99115049XA CN 99115049 A CN99115049 A CN 99115049A CN 1138990 C CN1138990 C CN 1138990C
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Abstract
The present invention provides a small high-speed piezoelectric inclination reflector which belongs to the technical field of optical wave front correction which is controlled by light beam. The present invention is characterized in that even drive units (1) and (2) which are respectively used as an X direction and a y direction are integrated on a piezoelectric ceramics sheet (4). One surface of the drive units is a positive pole, and the other surface of the drive units is a negative pole. A plurality of piezoelectric ceramics sheets (4) with the even drive units which are used as the x direction and the y direction are correspondingly superimposed, bonded and connected in parallel according to all the drive units to form a piezoelectric driver (17) with an integrated multipoint integral structure. The front of the piezoelectric driver (17) is connected with a reflector (19), and the back of the piezoelectric driver is fixedly connected to a reflector seat base plate (18). The reflector has the advantages of small volume, light weight, low cost, good performance, wide application range, etc.
Description
The present invention is a kind of high-speed small piezoelectric tilt reflector, belongs to optical wavefront alignment technique field in the Beam Control technology, particularly the design and manufacturing technology field of analysis of fast piezo steering catoptron.
The analysis of fast piezo steering catoptron with its at a high speed (response time≤1ms), high precision (the active controllable characteristics of resolution 0.1 "); be applied in the Beam Control of multiple optical system; can finish correct for tilt errors, follow the tracks of, the light beam stable light-beam aims at or light beam scans, the multiple function of optical communication or the like by precision optics.
Bidimensional (or one dimension) analysis of fast piezo steering catoptron, normally adopt two or three piezoelectric actuators to be fixed between microscope base base plate and the catoptron, one of them center piezoelectric actuator is a fixed pivot, and two other piezoelectric actuator is respectively and promotes the moving fulcrum of catoptron around x or the rotation of y direction.Its weak point is:
1, each piezoelectric actuator all adopts bonding being formed in parallel of multi-disc piezoelectric ceramics stack, and the making workload of three drivers is big, and the cycle is long, the cost height.
2, because tilting mirror will guarantee the rigidity and the displacement of piezoelectric actuator, the size of driver can not be done too for a short time, so whole tilting mirror size is bigger, volume, weight are big, usable range is limited, especially can't satisfy the application in spationautics field, particularly moonlet.
The objective of the invention is to avoid above-mentioned the deficiencies in the prior art and provide that a kind of volume is little, in light weight, cost is low, fabrication cycle is short, the better broad-spectrum microminiature analysis of fast piezo steering catoptron of performance.
Purpose of the present invention can reach by following measure: high-speed small piezoelectric tilt reflector, and the piezoelectric actuator between microscope base base plate and the catoptron is bonding the forming of multi-disc piezoelectric ceramics stack, and is integral with microscope base base plate and catoptron rigid attachment; The center of each piezoelectric ceramic piece is bonding to be fixed pivot; Be integrated with on each piezoelectric ceramic piece even number be subjected to that the high-voltage amplifier signal drives, respectively as the driver element of x direction and the driver element of y direction, the one side of driver element be a positive pole, another side is a negative pole; Each piezoelectric ceramic piece is by the bonding integrated form multi-point integral structure piezoelectric actuator that constitutes in parallel of the corresponding stack of each driver element, and the front of driver connects catoptron, and the back side is fixedly connected on the microscope base base plate.
Purpose of the present invention can also reach by following measure: be integrated with two on each piezoelectric ceramic piece and comprise the driver element of x direction and the driver element of y direction, and with the distribution triangular in shape of center fixation fulcrum; Be integrated with four on each sheet piezoelectric ceramic piece and comprise the driver element of two x directions and the driver element of two y directions, and with the center fixation fulcrum arranged distribution that is centrosymmetric; The positive and negative electrode of the driver element of the positive and negative electrode of the driver element of the x direction on each sheet piezoelectric ceramic piece lead-in wire and y direction goes between and is drawn by the side, and positive and negative electrode goes between after the parallel connection separately, is connected with separately high-voltage amplifier respectively; The positive and negative lead wires of the driver element of the x direction on every piezoelectric ceramic piece and the positive and negative lead wires of y direction driver element are all drawn from the side, and corresponding one by one in parallel.
Description of drawings:
Fig. 1 is embodiment 1 piezoelectric ceramic piece Facad structure figure
Fig. 2 is embodiment 1 piezoelectric ceramic piece structure figure
Fig. 3 is embodiment 2 piezoelectric ceramic piece Facad structure figure
Fig. 4 is embodiment 2 piezoelectric ceramic piece structure figure
Fig. 5 is a structural drawing of the present invention
The present invention is further detailed in conjunction with the accompanying drawings below:
As shown in Figure 1, be integrated with two on each sheet piezoelectric ceramic piece 4 as the driver element 2 of x direction and the driver element 1 of y direction, and with 3 distributions triangular in shape of center fixation fulcrum, the front is anodal, the back side is negative pole (as shown in Figure 2).The positive wire 5,6 of each driver element, negative wire 7,8 are drawn by the side.
As shown in Figure 3, it is corresponding in twos two driver elements 2 of x direction and two driver elements 1 of y direction to be integrated with four difference on each sheet piezoelectric ceramic piece 4, and with center fixation fulcrum 3 arranged distribution that is centrosymmetric, its front is anodal, the back side is negative pole (as shown in Figure 4).The positive wire 9,10,11,12 of each driver element and negative wire 13,14,15,16 are drawn by the side.
As shown in Figure 5, with multi-disc have as above-mentioned Fig. 1,2 or Fig. 3,4 x, y direction driver element arranged piezoelectric ceramic piece 4 by the bonding integrated form multiple spot piezoelectric actuator 17 that constitutes in parallel of the corresponding stack of each driver element, the positive bonding catoptron 19 of driver 17, its reverse side fixed bonding is on microscope base base plate 18.The positive and negative lead wires of each driver element is drawn corresponding separately parallel connection by the side and is connected with high-voltage amplifier respectively.
During work, high-voltage amplifier imposes on the positive and negative external voltage of each driver element on the integrated form Multipoint Drive device 17 respectively, and positive and negative distortion takes place for the driver element 2 of x direction and the driver element of y direction 1, promptly promotes catoptron and does positive and negative inclination around x, y direction respectively.
The present invention compares prior art and has following advantage:
Adopt multi-disc with respectively as the piezoelectric ceramic piece of the driver element of x, y direction, press The bonding integrated form multi-point integral structure Piezoelectric Driving that consists of in parallel of the corresponding stack of each driver element Device, an end is fixed in the microscope base base plate, and the structure of other end stationary mirror has greatly been dwindled and has been inclined The size of oblique mirror, the same tilting mirror caliber size that produces ± 1 ' tilt quantity can be contracted to φ 10, Than original little 4～5 times, weight reduces 6～9 times. Resonant frequency can improve several times, reaches More than the 1000Hz. Because make the raw material of driver and reducing of workload, cost at least Reduce more than one times. Because volume reduces, the little and high-performance of weight has enlarged range of application, Except the various application on ground, mainly be to be applied in the space industry to go, such as spatial light Communication, moonlet etc.
Claims (5)
1, high-speed small piezoelectric tilt reflector, piezoelectric actuator (17) between microscope base base plate (18) and the catoptron (19) is bonding the forming of multi-disc piezoelectric ceramics stack, and be integral with microscope base base plate (18) and catoptron (19) rigid attachment, it is characterized in that: the center of each piezoelectric ceramic piece (4) is bonding to be fixed pivot (3); Be integrated with on each piezoelectric ceramic piece (4) even number be subjected to that the high-voltage amplifier signal drives, respectively as the driver element (2) of x direction and the driver element (1) of y direction, the one side of driver element is a positive pole, another side is a negative pole; Each piezoelectric ceramic piece (4) is by the bonding integrated form multi-point integral structure piezoelectric actuator (17) that constitutes in parallel of the corresponding stack of each driver element, and the front of driver (17) connects catoptron (19), and the back side is fixedly connected on microscope base base plate (18).
2, high-speed small piezoelectric tilt reflector as claimed in claim 1, it is characterized in that being integrated with on each piezoelectric ceramic piece (4) two and comprise the driver element (2) of x direction and the driver element (1) of y direction, and with center fixation fulcrum (3) distribution triangular in shape.
3, high-speed small piezoelectric tilt reflector as claimed in claim 1, it is characterized in that being integrated with on each sheet piezoelectric ceramic piece (4) four and comprise the driver element (2) of two x directions and the driver element (1) of two y directions, and with center fixation fulcrum (3) arranged distribution that is centrosymmetric.
4, high-speed small piezoelectric tilt reflector as claimed in claim 1 or 2, go between (5), (7) of the positive and negative electrode of driver element (1) of positive and negative electrode lead-in wire (6), (8) and y direction that it is characterized in that the driver element (2) of the x direction on each sheet piezoelectric ceramic piece (4) are drawn by the side, positive and negative electrode lead-in wire (7), (8) are separately after the parallel connection, are connected with separately high-voltage amplifier respectively.
5, as claim 1 and 3 described high-speed small piezoelectric tilt reflectors, all draw from the side the positive and negative lead wires (9), (10), (13), (15) that it is characterized in that positive and negative lead wires (11), (12), (14), (16) and the y direction driver element (1) of the driver element (2) of the x direction on the every piezoelectric ceramic piece (4), and corresponding one by one in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB99115049XA CN1138990C (en) | 1999-07-30 | 1999-07-30 | High-speed small piezoelectric tilt reflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB99115049XA CN1138990C (en) | 1999-07-30 | 1999-07-30 | High-speed small piezoelectric tilt reflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1282878A CN1282878A (en) | 2001-02-07 |
| CN1138990C true CN1138990C (en) | 2004-02-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB99115049XA Expired - Fee Related CN1138990C (en) | 1999-07-30 | 1999-07-30 | High-speed small piezoelectric tilt reflector |
Country Status (1)
| Country | Link |
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| CN (1) | CN1138990C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101455385B (en) * | 2008-11-27 | 2012-03-21 | 成都润馨堂药业有限公司 | Nutrient food capable of stimulating the appetite and invigorating the spleen |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009069746A1 (en) * | 2007-11-28 | 2009-06-04 | Kyocera Corporation | Laminated piezoelectric element, and injection device and fuel injection system having the element |
-
1999
- 1999-07-30 CN CNB99115049XA patent/CN1138990C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101455385B (en) * | 2008-11-27 | 2012-03-21 | 成都润馨堂药业有限公司 | Nutrient food capable of stimulating the appetite and invigorating the spleen |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1282878A (en) | 2001-02-07 |
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