CN106646858A - Single piezoelectric sheet actuator array driven distorting lens - Google Patents
Single piezoelectric sheet actuator array driven distorting lens Download PDFInfo
- Publication number
- CN106646858A CN106646858A CN201610885659.9A CN201610885659A CN106646858A CN 106646858 A CN106646858 A CN 106646858A CN 201610885659 A CN201610885659 A CN 201610885659A CN 106646858 A CN106646858 A CN 106646858A
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- China
- Prior art keywords
- piezoelectric patches
- layer
- actuator array
- single piezoelectric
- distorting lens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
Abstract
A single piezoelectric sheet actuator array driven distorting lens is disclosed and comprises a single piezoelectric sheet actuator array and a mirror surface arranged above the single piezoelectric sheet actuator array, wherein the single piezoelectric sheet actuator array comprises a plurality of single piezoelectric sheet performers fixed on a substrate having via holes, each single piezoelectric sheet performer is connected with a connection column used for supporting the mirror surface, each single piezoelectric sheet performer comprises an elastic layer and a piezoelectric layer, and two faces of the piezoelectric layer are covered with electrode layers which are slightly smaller than the piezoelectric layer in size. The single piezoelectric sheet actuators disclosed in the invention are advantaged by large stroke and low cost, generated displacement is transmitted to the mirror surface via each connection column, and the whole distorting lens is enabled to be advantaged by large stroke and low cost.
Description
Technical field
The invention belongs to optics field, is related to the distorting lens that a kind of single piezoelectric patches actuator array drives, used in certainly
Adaptive optics system is used as wave-front corrector.
Technical background
Distorting lens as the wave-front corrector in ADAPTIVE OPTICS SYSTEMS, by controlling its minute surface pattern to light path in it is abnormal
Become wavefront to be corrected, make system reach diffraction limit.The performance of distorting lens has been largely fixed ADAPTIVE OPTICS SYSTEMS
Wavefront correction ability.Scientific research institution of various countries puts into substantial amounts of manpower and materials and develops high performance distorting lens, mainly has at present quiet
The distorting lens of the different driving forms such as driven by power, electromagnetic force driving, thermal deformation driving, Piezoelectric Driving.Wherein Piezoelectric Driving
Distorting lens has the advantages that frequency response height, stable performance.
Traditional piezoelectric deforming mirror promotes surface deformation using piezo-stack type actuator, with big stroke, high frequency sound, property
Can be stable, but piezoelectric stack actuator is expensive, limits its application.Chinese patent application 200710171222.X is disclosed
A kind of deformable mirror of Piezoelectric Driving, including 4 PZT piezoelectric actuators of submounts, in 4 PZT piezoelectric actuators
The Si mirror face with 4 support columns has been bonded above.Its piezoelectric actuator is the ceramic block cut by slicer,
It is difficult to produce very big displacement stroke.Chinese patent Shen 200610167153.0 discloses the Light deformation that a kind of piezoelectric thick drives
Mirror, including the micro-actuator array and minute surface of actuating unit composition, wherein actuating unit is by silicon substrate, the pressure with upper/lower electrode
Electroceramics film and link boss composition, at the silicon substrate back side hole corresponding with piezoelectric ceramic film is provided with.The thickness of piezoelectric ceramic film
Degree 10-50 microns, minute surface thickness is the monocrystalline silicon diaphragm of 20-50 microns.The micro deformable mirror is prepared using micro-processing method, work
Skill is complicated, it is difficult to realize the preparation of high performance device.
The content of the invention
It is an object of the present invention to overcome deficiency of the prior art, there is provided one kind has big stroke, low cost, is easy to
The distorting lens that single piezoelectric patches actuator array of making drives.
The distorting lens that a kind of single piezoelectric patches actuator array drives, it is characterised in that：Including single piezoelectric patches actuator array,
The minute surface being arranged on above single piezoelectric patches actuator array, single piezoelectric patches actuator array is fixed on the base with through hole including multiple
Single piezoelectric patches actuator on seat, is respectively connected with the connecting pole for supporting minute surface on each single piezoelectric patches actuator, each is singly pressed
Electric piece actuator includes elastic layer and piezoelectric layer, and the two sides of piezoelectric layer is all covered with being dimensioned slightly smaller than the electrode of piezoelectric layer size
Layer.Single piezoelectric patches actuator of the present invention has the advantages that stroke is big, low cost, and the connecting pole that is displaced through of generation passes to mirror
Face, makes whole deformation mirror have the advantages that stroke is big, inexpensive.
Further, specular surface is coated with optical reflecting layer, for being corrected to light beam.
Further, single piezoelectric patches actuator is circular configuration, and the diameter of piezoelectric layer is slightly less than elastic layer diameter.
Further, piezoelectric layer is arranged on the top of elastic layer, or elastic layer is arranged on the top of piezoelectric layer.
Further, the electrode layer for contacting with elastic layer is connected with elastic layer, and is connected on same electric wire.
Further, connecting pole is located at the center of single piezoelectric patches actuator.
Further, single piezoelectric patches actuator is honeycomb arrangement or matrix arrangement.
Further, a through hole is corresponded to below each single piezoelectric patches actuator and is arranged concentrically, it is solid by elastic layer
On pedestal, the diameter of elastic layer is slightly larger than through-hole diameter.
The operation principle of the present invention：When single piezoelectric patches actuator array applied voltage, single piezoelectric patches actuator produce from
Face displacement, is displaced through and is fixed on the support column at single piezoelectric patches actuator center and is delivered to minute surface, is deformed minute surface, when many
During individual single piezoelectric patches actuator collective effect, minute surface can be made to produce the shape with distorted wavefront phase conjugate, be realized to wavefront distortion
Correction.
It is an advantage of the current invention that：
1. single piezoelectric patches actuator has stroke big, the advantage of low cost, make whole deformation mirror have big stroke, low cost it is excellent
Point.
2. simple structure, it is easy to make.
Description of the drawings
Fig. 1 is the first structural representation of the present invention.
Fig. 2 is the three dimensional structure diagram of list piezoelectric patches actuator of the invention.
Fig. 3 is the three dimensional structure diagram of pedestal of the present invention.
Fig. 4 is second structural representation of the present invention.
Fig. 5 is the schematic three dimensional views of second structure of the present invention.
Specific embodiment
Referring to the drawings, the present invention is further illustrated：
Perform referring to the distorting lens that Fig. 1, single piezo actuator array that the present embodiment is provided drive, including minute surface 1, single piezoelectric patches
Device array, connecting pole 3 and pedestal 4；Single piezo actuator array is fixed on the pedestal 4 with through hole 41, and by connection
Post 3 supports minute surface 1.Described single piezoelectric patches actuator array is made up of multiple single piezoelectric patches actuators 2.Each single piezoelectric patches is held
Row device 2 is a circular configuration, including elastic layer 22 and piezoelectric layer 21, and piezoelectric layer 21 is located under elastic layer 22, piezoelectric layer 21
Diameter is slightly less than the diameter of elastic layer 22, and the diameter of elastic layer 22 is slightly larger than the diameter of through hole 41, and elastic layer 22 is led to by periphery with pedestal 4
Cross epoxy glue to be adhesively fixed.Piezoelectric layer 21 is coated with upper electrode layer 23 and lower electrode layer 24, and electrode layer 23,24 is slightly smaller in size than
Piezoelectric layer 21.Lower electrode layer 24 is connected with elastic layer 22, and each electrode can be connected together, same with an electric wire.Top electrode
Layer 23 can be drawn by the through hole 41 of pedestal 4, and each electrode is controlled respectively.The center of each single piezo actuator 2 has one
Connecting pole 3, for connecting minute surface 1 and single piezoelectric patches actuator 2.Connecting pole 3 is 1 millimeter of diameter, long 10 millimeters ceramics pole.Mirror
The surface of face 1 covers optical reflecting layer 12 to be used to be corrected light beam.In the present embodiment, minute surface 1 adopts 75 millimeters of diameter, thickness
Polished silicon slice or quartz silicon wafer 11 for 200 microns.
The schematic diagram of the mono- piezo actuators of Fig. 2, by 15 millimeters of diameter, thick 100 microns copper sheet elastic layer 22 and diameter 10
Millimeter, the bonding of piezoelectric layer 21 of 80 microns of thickness are formed.The two sides of piezoelectric layer 21 covers circular electrode layer, and electrode layer 23,24 is
9 millimeters of diameter, thick 5 microns silver electrode.
Fig. 3 show pedestal 4, is made using aluminium alloy or quartz glass, 5 millimeters of 75 mm of thickness of diameter, middle uniform
Distribution manhole 41,13 millimeters of 41 diameter of through hole, the arrangement mode of through hole 41 can be alternatively rectangular arranged for honeycomb arrangement.
Elastic layer 22 and the upper-lower position interchangeable of piezoelectric layer 21 in single piezoelectric patches actuator 2, Fig. 4 is piezoelectric layer 21 upper
Scheme of the elastic layer 22 under, now the upper electrode layer of piezoelectric layer 21 draw between minute surface 1 and pedestal 4.With piezoelectric layer 21 under
Elastic layer 22 is in upper project plan comparison, and it is a little that electrode draws relative difficulty.
Fig. 5 is the graphics of the distorting lens that the list piezoelectric patches of Unit 19 actuator array of the present invention drives.When single piezoelectricity
During piece actuator array applied voltage, single piezoelectric patches actuator 2 produces acoplanarity displacement, is displaced through and is fixed on single piezoelectric patches execution
The support column 3 at the center of device 2 is delivered to minute surface, is deformed distorting lens, when multiple single 2 collective effects of piezoelectric patches actuator,
But minute surface 1 produces the shape with distorted wavefront phase conjugate, the correction to wavefront distortion is realized.
Content described in this specification embodiment is only enumerating to the way of realization of inventive concept, the protection of the present invention
Scope is not construed as being only limitted to the concrete form that embodiment is stated, protection scope of the present invention is also and in art technology
Personnel according to present inventive concept it is conceivable that equivalent technologies mean.
Claims (8)
1. the distorting lens that single piezoelectric patches actuator array drives, it is characterised in that：Including single piezoelectric patches actuator array, it is arranged on
Minute surface above single piezoelectric patches actuator array, single piezoelectric patches actuator array includes multiple being fixed on the pedestal with through hole
Single piezoelectric patches actuator, is respectively connected with the connecting pole for supporting minute surface on each single piezoelectric patches actuator, each single piezoelectric patches is held
Row device includes elastic layer and piezoelectric layer, and the two sides of piezoelectric layer is all covered with being dimensioned slightly smaller than the electrode layer of piezoelectric layer size.
2. the distorting lens that list piezoelectric patches actuator array as claimed in claim 1 drives, it is characterised in that：Specular surface is covered
There is optical reflecting layer.
3. the distorting lens that list piezoelectric patches actuator array as claimed in claim 1 drives, it is characterised in that：Single piezoelectric patches is performed
Device is circular configuration, and the diameter of piezoelectric layer is slightly less than elastic layer diameter.
4. the distorting lens that the single piezoelectric patches actuator array as described in one of claim 1 ~ 3 drives, it is characterised in that：Piezoelectric layer
The top of elastic layer is arranged on, or elastic layer is arranged on the top of piezoelectric layer.
5. the distorting lens that list piezoelectric patches actuator array as claimed in claim 4 drives, it is characterised in that：Contact with elastic layer
Electrode layer connect with elastic layer, and be connected on same electric wire.
6. the distorting lens that list piezoelectric patches actuator array as claimed in claim 5 drives, it is characterised in that：Connecting pole is located at single
The center of piezoelectric patches actuator.
7. the distorting lens that list piezoelectric patches actuator array as claimed in claim 6 drives, it is characterised in that：Single piezoelectric patches is performed
Device is honeycomb arrangement or matrix arrangement.
8. the distorting lens that list piezoelectric patches actuator array as claimed in claim 7 drives, it is characterised in that：Each single piezoelectric patches
A through hole is corresponded to below actuator and is arranged concentrically, be fixed on pedestal by elastic layer, the diameter of elastic layer is bigger
In through-hole diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610885659.9A CN106646858B (en) | 2016-10-11 | 2016-10-11 | The distorting lens of single piezoelectric patches actuator array driving |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610885659.9A CN106646858B (en) | 2016-10-11 | 2016-10-11 | The distorting lens of single piezoelectric patches actuator array driving |
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| Publication Number | Publication Date |
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| CN106646858A true CN106646858A (en) | 2017-05-10 |
| CN106646858B CN106646858B (en) | 2019-09-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610885659.9A Active CN106646858B (en) | 2016-10-11 | 2016-10-11 | The distorting lens of single piezoelectric patches actuator array driving |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107783207A (en) * | 2017-11-27 | 2018-03-09 | 成都信息工程大学 | A kind of adjustable focus microlens array |
| CN109725415A (en) * | 2019-03-11 | 2019-05-07 | 中国人民解放军国防科技大学 | Piezoelectric driving deformable mirror for multi-beam incoherent space synthesis and assembling method thereof |
| CN110045481A (en) * | 2018-01-17 | 2019-07-23 | 长沙青波光电科技有限公司 | A kind of reflector apparatus and laser speckle light field generating means |
| CN112817145A (en) * | 2021-01-05 | 2021-05-18 | 宁波大学 | Multilayer actuator array driven deformable mirror |
| CN113281898A (en) * | 2021-05-25 | 2021-08-20 | 中国科学院上海微系统与信息技术研究所 | MEMS micro-mirror unit and MEMS micro-mirror array |
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| CN101021617A (en) * | 2006-12-09 | 2007-08-22 | 中国科学技术大学 | Piezoelectric thick diaphragm driving micro deformable mirror and producing method thereof |
| US20080290757A1 (en) * | 2007-05-25 | 2008-11-27 | Peng Gao | Ultrasonic transducer array and a method for making a transducer array |
| CN102272960A (en) * | 2008-11-11 | 2011-12-07 | 埃普科斯股份有限公司 | Piezoelectric actuator of multilayer design and method for fastening an outer electrode in a piezoelectric actuator |
| CN102650734A (en) * | 2011-02-25 | 2012-08-29 | 中国科学技术大学 | Single-piezoelectric patch deformable mirror and manufacturing method thereof |
| CN206161957U (en) * | 2016-10-11 | 2017-05-10 | 宁波大学 | Single pressure electricity piece executor array driven distorting lens |
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2016
- 2016-10-11 CN CN201610885659.9A patent/CN106646858B/en active Active
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| US20040150871A1 (en) * | 2001-06-12 | 2004-08-05 | Yang Eui Hyeok | Pzt unimrphed based, deformable mirror with continuous membrane |
| WO2004057407A1 (en) * | 2002-12-23 | 2004-07-08 | Bae Systems Plc | Deformable mirror |
| CN101021617A (en) * | 2006-12-09 | 2007-08-22 | 中国科学技术大学 | Piezoelectric thick diaphragm driving micro deformable mirror and producing method thereof |
| US20080290757A1 (en) * | 2007-05-25 | 2008-11-27 | Peng Gao | Ultrasonic transducer array and a method for making a transducer array |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107783207A (en) * | 2017-11-27 | 2018-03-09 | 成都信息工程大学 | A kind of adjustable focus microlens array |
| CN110045481A (en) * | 2018-01-17 | 2019-07-23 | 长沙青波光电科技有限公司 | A kind of reflector apparatus and laser speckle light field generating means |
| CN110045481B (en) * | 2018-01-17 | 2021-05-18 | 长沙青波光电科技有限公司 | Reflector device and laser speckle light field generating device |
| CN109725415A (en) * | 2019-03-11 | 2019-05-07 | 中国人民解放军国防科技大学 | Piezoelectric driving deformable mirror for multi-beam incoherent space synthesis and assembling method thereof |
| CN109725415B (en) * | 2019-03-11 | 2023-07-28 | 中国人民解放军国防科技大学 | Piezoelectric driving deformable mirror for multi-beam incoherent space synthesis and assembly method thereof |
| CN112817145A (en) * | 2021-01-05 | 2021-05-18 | 宁波大学 | Multilayer actuator array driven deformable mirror |
| CN113281898A (en) * | 2021-05-25 | 2021-08-20 | 中国科学院上海微系统与信息技术研究所 | MEMS micro-mirror unit and MEMS micro-mirror array |
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